CN102368162B - Large-angle quick reflector tracking system - Google Patents

Large-angle quick reflector tracking system Download PDF

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CN102368162B
CN102368162B CN201110328276.9A CN201110328276A CN102368162B CN 102368162 B CN102368162 B CN 102368162B CN 201110328276 A CN201110328276 A CN 201110328276A CN 102368162 B CN102368162 B CN 102368162B
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angle
resolution
reflector
low
fast
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CN102368162A (en
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唐涛
任戈
扈弘毅
黄永梅
傅承毓
包启亮
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Institute of Optics and Electronics of CAS
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Institute of Optics and Electronics of CAS
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Abstract

The invention discloses a large-angle quick reflector tracking system, which realizes a large-angle high-precision tracking function by utilizing a high-resolution small-angle quick reflector M1 and a low-resolution large-angle quick reflector M2. The control method is to utilize the position information provided by a position detector to realize the closed loop of 2 quick mirrors M1 and M2 in the same optical path, and the deflection of the 2 quick mirrors M1 and M2 is not coupled, and 2 control modes can be adopted: mode 1: m1 is closed directly by using the position deviation provided by the CCD, and the M2 closed-loop signal is the sum of the position deviation and the deflection angle of M1; mode 2: the M2 closed loop signal is the deflection angle of M1. Either scheme can realize high-precision tracking of large angles (namely the maximum rotation angle of M2). The control method of the invention makes the tracking system simple and can improve the beam quality and detection accuracy.

Description

Large-angle quick reflector tracking system
Technical Field
The invention relates to the field of light beam control, in particular to a large-angle quick reflector tracking system which can be used for a high-precision tracking system.
Background
In many precise light beam correction fields, both large-angle deflection and high-precision tracking are required, so that a fast reflector with high closed-loop bandwidth and large-angle deflection is required. This requirement is often difficult to meet with a fast mirror. This is mainly due to the drive mechanism which is limited to the fast mirror: the mirror driven by the piezoelectric ceramics has high response frequency, can realize high bandwidth, but has limited rotation angle; the mirror driven by the voice coil motor has a large rotation angle range, but the response frequency is low, and high bandwidth is difficult to realize.
If the 2 types of mirrors are combined and used in the light path, the current method is to place the mirror driven by piezoelectric ceramics and the detection system thereof in the subsequent light path of the mirror driven by the voice coil motor, 2 independent detection systems are adopted, and the respective closed loops of the 2 mirrors are not influenced by each other. This complicates the system and affects beam quality and detection accuracy.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the defects of the prior art are overcome, the large-angle quick reflector tracking system is provided, the position information provided by one position detector is utilized to realize the closed loop of 2 quick reflectors in the same light path, and the deflection of the 2 quick reflectors M1 and M2 is not coupled with each other, so that the light beam quality and the detection precision are improved.
The technical scheme provided by the invention for solving the technical problems is as follows: a kind of fast reflector tracking system of the large angle, this tracking system is made up of fast reflector M1 of the small angle of high resolution, spectroscope M3, CCD image detection system, fast reflector M2 of the large angle of low resolution, beacon laser, all parts are installed on identity terrace, its optical position relation is: the target light is reflected by a low-resolution large-angle quick reflector M2 and a high-resolution small-angle quick reflector M1 in sequence and then reaches the CCD image detection system through a spectroscope M3; the emitted light of the beacon laser sequentially passes through a spectroscope M3, a low-resolution large-angle quick reflector M2 and a high-resolution small-angle quick reflector M1 to be reflected to a target, wherein the positions of M2 and M1 can be interchanged; the optical axis of the beacon laser and the detection optical axis intersect at the central point of a high-resolution small-angle quick reflector M1; the spectroscope M3 is used for separating the target light from the emitted light of the beacon laser to realize high reflection of the beacon laser and transmission of the target light; wherein,
the control systems of the high-resolution small-angle quick reflector M1 and the low-resolution large-angle quick reflector M2 respectively comprise a power drive, a control board card, a high-precision acquisition unit and a drive power supply; the high-precision acquisition unit comprises an analog circuit preprocessing unit, an analog/digital (A/D) and a digital/analog (D/A); the CCD image detection system is a system for providing optical position deviation and can send the position deviation to the control board card through a serial port; the high-resolution small-angle quick reflector M1 is provided with a strain gauge for measuring the deflection of the angular position, the variable quantity of the strain gauge can be converted into digital quantity through a high-precision acquisition unit, and the digital quantity is sent to the control board card through a serial port; the control of the high-resolution small-angle quick reflector M1 and the low-resolution large-angle quick reflector M2 can be realized by utilizing the position deviation and the variable quantity of the strain gauge; and:
the tracking system has one of the following 2 control modes:
control method 1: the high-resolution small-angle quick reflector M1 directly utilizes the position deviation provided by the CCD image detection system to carry out closed loop, and the low-resolution large-angle quick reflector M2 closed loop signal is the sum of the position deviation and the deflection angle of the high-resolution small-angle quick reflector M1;
control mode 2: the closed loop signal of the fast mirror M2 with low resolution and large angle is the deflection angle of the fast mirror M1 with high resolution and small angle.
Either control method should satisfy the following 2 basic requirements:
1) the closed loop angular resolution of the low-resolution large-angle fast mirror M2 should be much smaller than the maximum deflection angle of the high-resolution small-angle fast mirror M1;
2) the closed-loop bandwidth of the low-resolution large-angle fast reflector M2 is not more than the closed-loop error suppression bandwidth of the high-resolution small-angle fast reflector M1;
namely, the position information provided by a position detector is utilized to realize the closed loop of 2 common-path quick reflectors without mutual coupling deflection, thereby achieving the high-precision and large-angle tracking function.
Furthermore, the deflection range of the high-resolution small-angle fast mirror M1 can be selected to be one to several angular divisions, and the deflection range of the low-resolution large-angle fast mirror M2 can be tens of to hundreds of angular divisions.
Furthermore, the high-resolution small-angle fast reflector M1 can adopt a piezoelectric ceramic driven fast reflector, and the closed-loop precision is less than the mu rad level; the fast reflector M2 with low resolution and large angle can be a fast reflector driven by a voice coil motor, the closed loop precision is several to tens of mu rad, and the closed loop bandwidth of the fast reflector M2 with low resolution and large angle is much smaller than that of the fast reflector M1 with high resolution and small angle.
Further, the CCD image detection system may be other position detectors: a Position Sensitive Detector (PSD) or a four quadrant position detector.
Compared with the prior art, the invention has the advantages that:
the invention can realize high-precision tracking of a large angle (the maximum rotation angle of M2); the tracking accuracy of the method 1 with respect to the positional deviation is the product of the error suppression abilities of M1 and M2. The accuracy of tracking the positional deviation in the mode 2 is the error suppression capability of M1.
Drawings
FIG. 1 is a schematic diagram of the optical path of the optical beam device of the present invention;
FIG. 2 is a control structure of the light beam device according to the present invention.
Detailed Description
The invention is described below in conjunction with the drawings and the detailed description, and those skilled in the art can understand the efficacy and advantages of the invention based on the disclosure of the present specification.
As shown in fig. 1, the tracking system is composed of a high-resolution small-angle fast reflector M1, a spectroscope M3, a CCD image detection system, a low-resolution large-angle fast reflector M2, and a beacon Laser (Laser), all of which are mounted on the same platform. The optical positional relationship is described as follows: the target light is reflected by fast reflectors M2 and M1 in sequence and reaches a CCD image detection system through a spectroscope M3; the emitted light of the beacon laser sequentially passes through the beam splitter M3 and is reflected by the fast mirrors M2 and M1 to reach the target, and the positions of M2 and M1 can be interchanged. The beacon laser optical axis (solid line) intersects the detection optical axis (dashed line) at the center point of the fast mirror M1. The beam splitter M3 is used to separate the target light from the beacon laser emission light, so as to achieve high beacon laser reflection and target light transmission. Wherein, CCD image detection system: providing a position of the target in the CCD; high-resolution small-angle fast mirror M1: high bandwidth fast mirror, transfer function characteristic: g1(ii) a The controller is as follows: c1(ii) a Low resolution large angle fast mirror M2: low bandwidth fast mirror, transfer function characteristic: g2(ii) a The controller is as follows: c2
The control systems of the quick reflectors M1 and M2 respectively comprise a power drive, a control board card, a high-precision acquisition unit (an analog circuit preprocessing unit, an A/D, D/A), a drive power supply and the like. The CCD image detecting system is one system capable of providing optical position deviation and can send the position deviation to the control board via serial port. The quick reflector M1 is provided with a strain gauge for measuring the deflection of the angular position, the variable quantity of the strain gauge can be converted into digital quantity through a high-precision acquisition system, and the digital quantity is sent to the control board card through a serial port. The control of the quick mirrors M1, M2 can be realized by using the positional deviation and the amount of change in the strain gauge.
The essence of obtaining a high-precision large-angle tracking function is that position information provided by a position detector is utilized to realize 2 quick reflecting mirrors in the same optical path to form closed loops, and the closed loops are not coupled to deflect, and the following 2 basic requirements are met:
1) the closed loop angular resolution of the fast mirror M2 should be much less than the maximum deflection angle of the fast mirror M1;
2) the closed loop bandwidth of fast mirror M2 should be no greater than the closed loop error rejection bandwidth of fast mirror M1.
These 2 requirements indicate that: m1 may select the deflection range to be one to several angular divisions and M2 may have a deflection range of tens to hundreds of angular divisions. In general, M1 can be a fast mirror driven by piezoelectric ceramics, and the precision of a closed loop is less than the mu rad level; m2 may employ a voice coil motor driven fast mirror with closed loop accuracy on the order of a few to tens of μ rad. Meanwhile, the closed-loop bandwidth of M2 should be much smaller than that of M1. The following 2 control modes are required:
mode 1: m1 is closed loop directly by using the position deviation provided by CCD, and M2 closed loop signal is the sum of the position deviation and the deflection angle of M1.
Mode 2: the difference from scheme 1 is that the M2 closed loop signal is the deflection angle of M1.
Either way, high-precision tracking of a large angle (the maximum rotation angle of M2) can be realized. The operation mode is that M2 follows M1 action, so that there is no coupling between 2 mirrors.
The effect of mode 1 on the control of target jitter that can be obtained from figure 2 is that,
E Y = 1 ( 1 + G 1 C 1 ) ( 1 + G 2 C 2 ) - - - ( 1 )
the effect of mode 2 on the control of target jitter that can be obtained from figure 2 is that,
E Y = 1 ( 1 + G 1 C 1 ) G 2 C 2 ( 1 + G 2 C 2 ) ≈ 1 ( 1 + G 1 C 1 ) - - - ( 2 )
as can be seen from comparison of equation (1) and equation (2), the tracking accuracy of mode 1 for the positional deviation is the product of the error suppression abilities of M1 and M2. The accuracy of tracking the positional deviation in the mode 2 is the error suppression capability of M1.
Although illustrative embodiments of the present invention have been described above to facilitate the understanding of the present invention by those skilled in the art, it should be understood that the present invention is not limited to the scope of the embodiments, and various changes may be made apparent to those skilled in the art as long as they are within the spirit and scope of the present invention as defined and defined by the appended claims, and all matters of the invention which utilize the inventive concepts are protected.

Claims (4)

1. A large-angle fast mirror tracking system is characterized in that: the tracking system consists of a high-resolution small-angle quick reflector M1, a spectroscope M3, a CCD image detection system, a low-resolution large-angle quick reflector M2 and a beacon laser, wherein all the components are arranged on the same platform, and the optical position relationship is as follows: the target light is reflected by a low-resolution large-angle quick reflector M2 and a high-resolution small-angle quick reflector M1 in sequence and then reaches the CCD image detection system through a spectroscope M3; the emitted light of the beacon laser sequentially passes through a spectroscope M3, a low-resolution large-angle quick reflector M2 and a high-resolution small-angle quick reflector M1 to be reflected to a target, wherein the positions of M2 and M1 can be interchanged; the optical axis of the beacon laser and the detection optical axis intersect at the central point of a high-resolution small-angle quick reflector M1; the spectroscope M3 is used for separating the target light from the emitted light of the beacon laser to realize high reflection of the beacon laser and transmission of the target light; wherein,
the control systems of the high-resolution small-angle quick reflector M1 and the low-resolution large-angle quick reflector M2 respectively comprise a power drive, a control board card, a high-precision acquisition unit and a drive power supply; the high-precision acquisition unit comprises an analog circuit preprocessing unit, an analog/digital (A/D) and a digital/analog (D/A); the CCD image detection system is a system for providing optical position deviation and sends the position deviation to the control board card through a serial port; the high-resolution small-angle quick reflector M1 is provided with a strain gauge for measuring the deflection of the angular position, the variable quantity of the strain gauge can be converted into digital quantity through a high-precision acquisition unit, and the digital quantity is sent to the control board card through a serial port; the control of the high-resolution small-angle quick reflector M1 and the low-resolution large-angle quick reflector M2 can be realized by utilizing the position deviation and the variable quantity of the strain gauge; and:
the tracking system has one of the following 2 control modes:
control method 1: the high-resolution small-angle quick reflector M1 directly utilizes the position deviation provided by the CCD image detection system to carry out closed loop, and the low-resolution large-angle quick reflector M2 closed loop signal is the sum of the position deviation and the deflection angle of the high-resolution small-angle quick reflector M1;
control mode 2: the closed loop signal of the fast reflector M2 with low resolution and large angle is the deflection angle of the fast reflector M1 with high resolution and small angle;
either control method should satisfy the following 2 basic requirements:
1) the closed loop angular resolution of the low-resolution large-angle fast mirror M2 should be much smaller than the maximum deflection angle of the high-resolution small-angle fast mirror M1;
2) the closed-loop bandwidth of the low-resolution large-angle fast reflector M2 is not more than the closed-loop error suppression bandwidth of the high-resolution small-angle fast reflector M1;
namely, the position information provided by a position detector is utilized to realize the closed loop of 2 quick reflectors in the same optical path without coupling deflection, thereby achieving the high-precision and large-angle tracking function.
2. A large angle fast mirror tracking system according to claim 1, wherein: the deflection range of the high-resolution small-angle quick reflector M1 is selected to be one to several angular divisions, and the deflection range of the low-resolution large-angle quick reflector M2 is tens of to hundreds of angular divisions.
3. A large angle fast mirror tracking system according to claim 1, wherein: the high-resolution small-angle quick reflector M1 adopts a piezoelectric ceramic driven quick reflector, and the closed-loop precision is less than the mu rad level; the low-resolution large-angle fast reflector M2 adopts a fast reflector driven by a voice coil motor, the closed loop precision is several to tens of mu rad levels, and meanwhile, the closed loop bandwidth of the low-resolution large-angle fast reflector M2 is far smaller than that of the high-resolution small-angle fast reflector M1.
4. A large angle fast mirror tracking system according to claim 1, wherein: the CCD image detection system is a detector for other positions: a Position Sensitive Detector (PSD) or a four quadrant position detector.
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Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0231407B2 (en) * 1984-07-10 1990-07-13 Sumitomo Heavy Industries ICHIGIMEKIKONOSEIGYOHOSHIKI
JP2003330510A (en) * 2002-05-14 2003-11-21 Yaskawa Electric Corp Synchronous control method of numerical control apparatus
CN100582850C (en) * 2008-11-17 2010-01-20 华中科技大学 Quick control reflector
CN201569787U (en) * 2009-12-18 2010-09-01 华中科技大学 High speed control piezoelectric scanning device
CN101819069B (en) * 2010-04-23 2012-05-23 浙江大学 White light interferometer with fast zero-setting system

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