CN100582850C - Quick control reflector - Google Patents

Quick control reflector Download PDF

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Publication number
CN100582850C
CN100582850C CN200810197662A CN200810197662A CN100582850C CN 100582850 C CN100582850 C CN 100582850C CN 200810197662 A CN200810197662 A CN 200810197662A CN 200810197662 A CN200810197662 A CN 200810197662A CN 100582850 C CN100582850 C CN 100582850C
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China
Prior art keywords
laser
spectroscope
mirror
support frame
upper support
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Expired - Fee Related
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CN200810197662A
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Chinese (zh)
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CN101419330A (en
Inventor
向思桦
陈四海
吴鑫
郑夏威
肖丁
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Priority to CN200810197662A priority Critical patent/CN100582850C/en
Publication of CN101419330A publication Critical patent/CN101419330A/en
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Publication of CN100582850C publication Critical patent/CN100582850C/en
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  • Optical Communication System (AREA)
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Abstract

The invention discloses a fast steering mirror. An upper support frame is sequentially connected with an auxiliary mirror bracket and a main mirror bracket by an elastic bracing frame, and the main mirror bracket and the auxiliary mirror bracket are respectively fixed with a main mirror and an auxiliary mirror; four linear voice coil motors are symmetrically arranged on the surface of the upper bracing frame, and the center is provided with a through hole; a semiconductor laser, a position sensitive detector and a spectroscope tilting 45 degrees are respectively arranged under the upper bracing frame, wherein, laser emitted from the semiconductor laser passes through the spectroscope and the through hole and reaches the auxiliary mirror, the auxiliary mirror reflects the laser back to the spectroscope, and then the spectroscope reflects the laser to the position sensitive detector. The fast steering mirror has the advantages of compact structure, high angle control precision, no friction loss and high resonance frequency, can be widely used in the fields such as space optical communication, adaptive optical compensation, laser processing, laser radar and the like.

Description

A kind of rapid control reflector
Invention field
The invention belongs to the Beam Control technical field, be specifically related to a kind of rapid control reflector.
Background technology
Space optical communication is a kind of wireless optical communication, does not need cable or optical cable, and communication security is good, and the traffic density height becomes a kind of developing direction of future communications.Rapid control reflector is as a Primary Component of space optical communication, and its performance directly influences the communication quality of space optical communication.The angle control precision of rapid control reflector directly has influence on the channel stability of space optical communication.Traditional rapid control reflector is based on two-dimentional turntable, and response speed is not high, and the resonance frequency of turntable frame is low, causes resonance easily.
The quick scanning reflection mirror of announcing among the U.S. Pat 2003/0197910A1, catoptron is fixed in a universal joint of being made up of inner and outer ring, the inner and outer ring of universal joint all can increase the moment of inertia of system, causes the resonance frequency of system to reduce thus, and control bandwidth also can correspondingly reduce.This inner and outer ring also can limit the size of mirror surface, makes its catoptron area less than normal.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, a kind of rapid control reflector is provided, have compact conformation, angle control precision height, no frictional dissipation, advantage that resonance frequency is high.
A kind of rapid control reflector, the upper surface of upper support frame 5 connects attached mirror holder 14 and main glasses holder 2 successively by flexible supporting frames 13, and main glasses holder 2 and attached mirror holder 14 are fixed with principal reflection mirror 1 and attached catoptron 15 respectively; The upper surface of upper support frame 5 is symmetrically distributed with four linear voice coil motors, and has through hole 16 in the center; The below of upper support frame 5 is respectively equipped with semiconductor laser 12, position sensitive detector 7 and is 45 ° of tilted-putted spectroscopes 9, the laser that semiconductor laser 12 sends is by spectroscope 9, pass through hole 16, arrive attached catoptron 15, attached catoptron 15 returns laser-bounce to spectroscope 9, and spectroscope 9 reflects the laser light to position sensitive detector 7 again.
Technique effect of the present invention is embodied in:
According to the rapid control reflector that the present invention makes, its single order resonance frequency can reach 115Hz, and the closed-loop control bandwidth reaches 300Hz, and the mechanical deflection angle of two-dimensional directional can arrive ± and 5 °.Owing to used elastic support structure, catoptron does not have frictional dissipation in yaw motion, make its mission life longer, need not to lubricate, can be non-maintaining.The angle control precision of system can reach 5urad.
Description of drawings
Fig. 1 is an embodiment of the invention structural representation, and wherein Fig. 1 (a) is the overall appearance synoptic diagram, and Fig. 1 (b) is the concrete structure synoptic diagram;
Fig. 2 is the coil synoptic diagram of the voice coil motor of main glasses holder and X-direction;
Fig. 3 is the side view of Fig. 2;
Fig. 4 is upper support frame and flexible supporting frames synoptic diagram;
Fig. 5 is upper support frame and four voice coil motor magnetic support synoptic diagram;
Fig. 6 is an embodiment of the invention sectional structure chart;
Fig. 7 is an embodiment of the invention principle of work synoptic diagram;
Fig. 8 is a deflection angle closed-loop control frame synoptic diagram of the present invention.
Embodiment
Describe the embodiment of the invention in detail below in conjunction with accompanying drawing.
Fig. 1 (a) is an embodiment of the invention overall appearance synoptic diagram, concrete structure is referring to Fig. 1 (b), and the rapid control reflector of embodiment comprises: principal reflection mirror 1, main glasses holder 2, four linear voice coil motors, flexible supporting frames 13, attached mirror holder 14, attached catoptron 15, upper support frame 5, support shell 6, spectroscope 9, beam split mirror holder 10, position sensitive detector 7, position sensitive detector frame 8, base 11 and semiconductor lasers 12.Linear voice coil motor comprises coil and magnetic support two parts.
Referring to Fig. 2, Fig. 3 and Fig. 4, the bonding principal reflection mirror 1 of main glasses holder 2 end faces, the bottom surface connects attached mirror holder 14, and attached mirror holder 14 is used to support attached catoptron 15; Main glasses holder 2 bottom surfaces also join with the upper end of flexible supporting frames 13, and the lower end of flexible supporting frames 13 connects upper support frame 5.The upper surface of upper support frame 5 four linear voice coil motors that are symmetrically distributed, coil 3A, the 3B of linear voice coil motor, 3C, 3D join by screw and main glasses holder 2 bottom surfaces, and the magnetic support of linear voice coil motor is fixed in four circular grooves on the upper support frame 5.As shown in Figure 5, upper support frame 5 centers have a through hole (16).Fig. 6 is a sectional structure chart of the present invention, the lower surface of upper support frame 5 joins by support shell 6 and base 11, semiconductor laser (LD) 12 is laid at base 11 centers, at base 11 semiconductor-on-insulator laser instruments (LD) 12 other position sensitive detector frame 8 and the beam split mirror holders 10 laid respectively, position sensitive detector frame 8 is used to support position sensitive detector (PSD) 7, be bonded with the spectroscope 9 that an inclination 45 is placed on the beam split mirror holder 10, LD12 is positioned at spectroscope 9 belows, and face the circular hole at beam split mirror holder 10 centers, arrive spectroscope 9 so that the laser that LD12 sends can see through circular hole.
There is deflection angle real-time detection system rapid control reflector inside, can realize the deflection angle closed-loop control.The light path of real-time detection system as shown in Figure 7, the laser that LD12 sends passes the circular hole in the middle of the beam split mirror holder 10, by spectroscope 9, passes through hole 16 and arrives attached catoptron 15, attached catoptron 15 by spectroscope 9 reflections, arrives light reflected back spectroscope 9 in PSD7 again.When main glasses holder 2 deflected, identical deflection can take place with attached catoptron 15 in principal reflection mirror 1, and reflected light will deflect, and the facula position on the PSD7 will be moved.PSD7 has utilized the lateral light electrical effect, can survey the position of hot spot on the PSD surface.
The deflection angle closed-loop control block diagram of rapid control reflector as shown in Figure 8, wherein r (t) is the target deflection angle, θ (t) is the actual deflection angle.Two motor 4A along X-axis, 4D and along two motor 4B of Y-axis, it is a pair of that 4C is respectively, two pairs of motors are independently controlled, do the push-and-pull athletic meeting along two voice coil motors of X-axis line direction and cause that catoptron is center deflection with the Y-axis, do the push-and-pull athletic meeting along two voice coil motors of Y-axis line direction and cause that catoptron is center deflection with the X-axis.The performing step of closed loop control method is: apply reverse electric current for every pair of voice coil motor, can make voice coil motor produce the driving force that rises or descend respectively, thereby main glasses holder 2 is deflected, identical deflection also can take place with attached catoptron 15 in the attached mirror holder 14 that is connected simultaneously under the main glasses holder 2, the facula position that causes thus being mapped to PSD7 is moved, the signal that position sensitive detector is surveyed arrives DSP (digital signal processor) digitial controller through analog to digital conversion (A/D), calculate the distance that hot spot moves, thereby can calculate the angle of mirror deflection by geometric relationship, the angle calculated and the deflection angle of setting are compared, its angular error is carried out digital PID (proportion integration differentiation) control, to control output signal again through digital-to-analog conversion (D/A) and power amplification, be applied on the voice coil motor, can realize the closed-loop control of mirror deflection angle.

Claims (1)

1, a kind of rapid control reflector, it is characterized in that, comprise upper support frame (5), the upper surface of upper support frame (5) connects attached mirror holder (14) and main glasses holder (2) successively by flexible supporting frames (13), and main glasses holder (2) and attached mirror holder (14) are respectively applied for fixedly principal reflection mirror (1) and attached catoptron (15); The upper surface of upper support frame (5) also is symmetrically distributed with four linear voice coil motors, and the center of upper support frame (5) has through hole (16); The below of upper support frame (5) is provided with semiconductor laser (12), position sensitive detector (7) and is 45 ° of tilted-putted spectroscopes (9), the laser that semiconductor laser (12) sends is by spectroscope (9), pass through hole (16), arrive attached catoptron (15), attached catoptron (15) returns laser-bounce to spectroscope (9), and spectroscope (9) reflects the laser light to position sensitive detector (7) again.
CN200810197662A 2008-11-17 2008-11-17 Quick control reflector Expired - Fee Related CN100582850C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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CN100582850C true CN100582850C (en) 2010-01-20

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Families Citing this family (21)

* Cited by examiner, † Cited by third party
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CN101794020B (en) * 2010-01-27 2011-06-15 中国人民解放军国防科学技术大学 Light beam precision pointing device based on resolution multiplied compliant mechanism
CN101840052B (en) * 2010-04-22 2012-02-29 中国科学院长春光学精密机械与物理研究所 Two-dimensional rapid control reflector
CN101840053B (en) * 2010-04-22 2012-02-29 中国科学院长春光学精密机械与物理研究所 Two-dimensional high load-bearing large-caliber rapid control reflector
CN102313966B (en) * 2011-09-06 2013-04-17 中国科学院长春光学精密机械与物理研究所 Rigid load-bearing quick control reflector
CN102368162B (en) * 2011-10-26 2013-04-03 中国科学院光电技术研究所 Tracking system of large-angle fast steering mirror
CN102520517B (en) * 2011-12-16 2013-08-21 中国科学院长春光学精密机械与物理研究所 Flexible anti-rotation mechanism for two-dimensional rapid reflector
CN102981243B (en) * 2012-11-02 2014-10-29 华中科技大学 Two-dimensional quick control reflecting mirror
CN103281018A (en) * 2013-05-27 2013-09-04 中国科学院光电技术研究所 Control system for driving fast steering mirror
EP3037857A1 (en) * 2014-12-22 2016-06-29 HILTI Aktiengesellschaft Optical assembly comprising a cone-shaped mirror
CN104777608A (en) * 2015-03-26 2015-07-15 中国人民解放军国防科学技术大学 Large-diameter precise light beam pointing device
CN105045141A (en) * 2015-05-27 2015-11-11 中国科学院光电技术研究所 Analog control circuit capable of enlarging control bandwidth of fast steering mirror
CN105508829B (en) * 2015-10-13 2018-02-06 长春通视光电技术有限公司 A kind of framework photoelectric platform inside casing frame mechanism of two axle four
CN105462912B (en) * 2016-01-21 2019-10-22 四川百诺吉科技有限公司 Suitable for diploid cell culture without albumen serum free medium and application
CN105929519A (en) * 2016-07-12 2016-09-07 中国科学院光电技术研究所 Serial-connected load carrying type rapid reflector structure
CN106444380A (en) * 2016-10-14 2017-02-22 中国科学院光电技术研究所 Transfer function identification method centering on nonlinear least square method and combining with chicken swarm algorithm for fast steering mirror control system
CN106735865A (en) * 2016-12-26 2017-05-31 西安中科微精光子制造科技有限公司 A kind of ultrafast laser machining system and method based on closed-loop control
CN107942472B (en) * 2017-12-07 2023-05-23 西安工业大学 Light beam phase compensating reflector of sparse aperture imaging system
CN107797272A (en) * 2017-12-08 2018-03-13 中国科学院长春光学精密机械与物理研究所 A kind of mirror deflection system
CN108089323A (en) * 2018-01-23 2018-05-29 北京信息科技大学 Fast steering mirror device and measuring system with novel rotary transition light path
CN109343195B (en) * 2018-11-19 2024-03-15 安徽瑞控信光电技术股份有限公司 Two-dimensional moving-magnet type quick reflector device
CN110955014B (en) * 2019-12-19 2022-03-29 上海无线电设备研究所 High-precision large-caliber quick reflecting mirror system

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