CN103281018A - Control system for driving fast steering mirror - Google Patents
Control system for driving fast steering mirror Download PDFInfo
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- CN103281018A CN103281018A CN2013102001273A CN201310200127A CN103281018A CN 103281018 A CN103281018 A CN 103281018A CN 2013102001273 A CN2013102001273 A CN 2013102001273A CN 201310200127 A CN201310200127 A CN 201310200127A CN 103281018 A CN103281018 A CN 103281018A
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Abstract
The invention relates to a control system for driving a fast steering mirror. The control system comprises the fast steering mirror, four voice coil motors, two current sensors, an AD acquisition board, a digital controller, two multi-level power amplifiers and four position sensors. In the spatial structure, the four voice coil motors are arrayed on the back surface of the fast steering mirror in a cross shaped; the first voice coil motor is reversely connected with the second voice coil motor in series; the third voice coil motor is reversely connected with the fourth voice coil motor in series; and both the two motors on each axis work in a push-pull mode. The two voice coil motors on each axis feed back armature current signals through the same current sensor to form a current closed loop; both a current closed loop control algorithm and a position closed loop control algorithm are realized through the digital controller; and the multi-level power amplifiers are used for generating multi-level pulse width modulation signals. The control system has the advantages of high control accuracy, large output power, low loss and small harmonic wave.
Description
Technical field
The invention belongs in high precision tracking aiming field and the precision positioning field, relate to the control system of fast driving speculum, particularly the voice coil motor driving control system of high-power, high accuracy speculum.
Background technology
Rapid control reflector (Fast Steering Mirror is hereinafter to be referred as FSM, fast anti-mirror or speculum) is used for light beam is carried out precision positioning and deflection fast in various optical systems.At present, bore and the moment of inertia of most fast anti-mirror are all less both at home and abroad.Their driving mechanism generally adopts piezoelectric ceramic or voice coil motor.Piezoelectric ceramic has higher response frequency, but deflection angle is very little; Voice coil motor has the big advantage of stroke, and the type of drive of voice coil motor generally adopts linear power amplification module or level pulse width modulation mode to drive at present.Along with the raising that clear aperture is required, need more bigbore fast anti-mirror badly and carry out beam deflection control.Because bigbore fast anti-mirror all has higher requirements to driving power, positioning accuracy and the stroke of driving control system.At present Piezoelectric Ceramic is subject to that stroke is too little can not to meet the demands.And the Linear Driving of voice coil motor is subject to that driving force is little, power consumption is big, and it is low and harmonic noise is big that conventional P WM power drive is subject to positioning accuracy, all can't satisfy requirement high-power, the fast anti-mirror drive system of high accuracy.
Summary of the invention
For the fast anti-mirror system that solves existing voice coil motor driving has the technical problem that driving force is little, positioning accuracy is low, the invention provides a kind of control system that has the driving speculum that driving force is strong, positioning accuracy is high simultaneously.
A kind of technical solution that drives the control system of speculum of the present invention comprises: first voice coil motor, second voice coil motor, the 3rd voice coil motor, the 4th voice coil motor, speculum, digitial controller, AD collection plate, many level power of X-axis amplifier, many level power of Y-axis amplifier, X-axis current sensor, Y-axis current sensor, X-axis primary importance transducer, X-axis second place transducer, Y-axis primary importance transducer, Y-axis second place transducer, Reflector base;
The input of AD collection plate is connected with X-axis current sensor, Y-axis current sensor, X-axis primary importance transducer, X-axis second place transducer, Y-axis primary importance transducer and the output of Y-axis second place transducer respectively, be used for gathering the analog quantity of current signal and position signalling, and analog quantity converted to the digital quantity of current signal digital quantity and position signalling;
The input of digitial controller is connected with the AD collection plate, receive the digital quantity of X-axis desired signal, Y-axis desired signal, current signal digital quantity and position signalling, and generate the position closed loop control algolithm of described position transducer and the current closed-loop control algolithm of described current sensor; Digitial controller is output as voltage signal;
Many level power of X-axis amplifier input terminal, many level power of Y-axis amplifier input terminal are connected with the output of digitial controller respectively, receive respectively and the voltage signal of the output of digitial controller is carried out power amplification, generate and export the pwm voltage signal of many level;
First voice coil motor is connected with speculum with second voice coil motor and is arranged on the X-axis line of speculum, the negative terminal of first voice coil motor is connected with the negative terminal of second voice coil motor, the anode of the anode of first voice coil motor, second voice coil motor is connected with the positive and negative output of many level power of X-axis amplifier respectively, receives the pwm voltage signal of many level and controls first voice coil motor and the output torque of second voice coil motor drives speculum at X-axis line upper deflecting;
The 3rd voice coil motor is connected with speculum with the 4th voice coil motor and is arranged on the Y-axis line of speculum; The negative terminal of the 3rd voice coil motor is connected with the negative terminal of the 4th voice coil motor, the anode of the anode of the 3rd voice coil motor and the 4th voice coil motor is connected with the positive and negative output of many level power of Y-axis amplifier respectively, receives the pulse-width signal of many level and drives speculum at Y-axis line upper deflecting;
The stator of first voice coil motor, second voice coil motor, the 3rd voice coil motor, the 4th voice coil motor is fixed on the Reflector base, and the mover of first voice coil motor, second voice coil motor, the 3rd voice coil motor, the 4th voice coil motor is fixed on the back side of speculum.
In the X-axis current sensor, be equipped with the negative output end line of many level power of X-axis amplifier, be used for measuring and exporting the current signal analog quantity size that flows through first voice coil motor and second voice coil motor;
In the Y-axis current sensor, be equipped with the positive output end line of many level power of Y-axis amplifier, be used for measuring and exporting the current signal analog quantity size that flows through the 3rd voice coil motor and the 4th voice coil motor;
X-axis primary importance transducer, X-axis second place transducer, Y-axis primary importance transducer and Y-axis second place transducer are installed on the Reflector base, X-axis primary importance transducer and X-axis second place transducer are positioned on the X-axis line of speculum, symmetry is installed on the both sides of the center O point of speculum, is used for measuring speculum along the deflection angle of X-axis line; Y-axis primary importance transducer and Y-axis second place transducer are positioned on the Y-axis line of speculum, and symmetry is installed on the both sides of the center O point of speculum, are used for measuring speculum along the deflection angle of Y-axis line.
The present invention's advantage compared with prior art is:
(1) the present invention drives voice coil motor by many level pulse-width modulation power amplifier, has the advantage that power output is big, loss is low, harmonic wave is little, positioning accuracy is high.
(2) among the present invention two of X-axis motor differential concatenations together, with push pull mode work; Two motor differential concatenations of Y-axis together, with push pull mode work; Only need two groups of current sensors and position transducer, just can carry out precise current closed loop and position closed loop to four motors.Has the advantage that control mode is simple, control precision is high.
Description of drawings
Fig. 1 is electric motor mounting structure figure of the present invention;
Fig. 2 is driving control structure figure of the present invention;
Fig. 3 is the function diagram of digitial controller;
Fig. 4 is the output voltage of two level power amplifiers;
Fig. 5 is the output voltage of three level power amplifiers;
Fig. 6 is the current of electric harmonic wave of two level power amplifier correspondences;
Fig. 7 is the current of electric harmonic wave of three level power amplifier correspondences;
Error curve when Fig. 8 is the position step signal stable state of two level and three level power amplifier correspondences.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
The mounting structure figure of voice coil motor of the present invention, position transducer and speculum is shown as Fig. 1, Fig. 2 illustrates for control speculum voice coil motor driving control system, the present invention is a kind of control system that drives speculum, comprises speculum, four voice coil motors, two current sensors, AD collection plate, digitial controller, level power amplifier more than two, four position transducers; Four voice coil motors are pressed the back side that " ten " font is arranged in speculum on the space structure, first voice coil motor and the second voice coil motor differential concatenation, and the 3rd voice coil motor and the 4th voice coil motor differential concatenation, two motors of every are all by push pull mode work.Two voice coil motors of every form current closed-loop by same current sensor feedback armature current signal; Current closed-loop control algolithm and position closed loop control algolithm realize by digitial controller; Generate many level pulse width by many level power amplifier.
The present invention drives in the control system of speculum and comprises first voice coil motor 1, second voice coil motor 2, the 3rd voice coil motor 3, the 4th voice coil motor 4, speculum 5, digitial controller 6, AD collection plate 7, many level power of X-axis amplifier 8, many level power of Y-axis amplifier 9, X-axis current sensor 10, Y-axis current sensor 11, X-axis position transducer 12, X-axis position transducer 13, Y-axis position transducer 14, Y-axis position transducer 15 and Reflector base 16, wherein: the input of AD collection plate 7 respectively with X-axis current sensor 10, Y-axis current sensor 11, X-axis primary importance transducer 12, X-axis second place transducer 13, Y-axis primary importance transducer 14 is connected with the output of Y-axis second place transducer 15, be used for gathering the analog quantity of current signal and position signalling, and analog quantity converted to the digital quantity of current signal digital quantity and position signalling;
The input of digitial controller 6 is connected with AD collection plate 7, receive the digital quantity of X-axis desired signal, Y-axis desired signal, current signal digital quantity and position signalling, and generate the position closed loop control algolithm of described position transducer and the current closed-loop control algolithm of described current sensor; Digitial controller 6 is output as voltage signal;
The input of the input of many level power of X-axis amplifier 8, many level power of Y-axis amplifier 9 is connected with the output of digitial controller 6 respectively, receive respectively and the voltage signal of the output of digitial controller 6 is carried out power amplification, generate and export the pwm voltage signal of many level;
First voice coil motor 1 is connected with speculum 5 with second voice coil motor 2 and is arranged on the X-axis line of speculum 5, the negative terminal of first voice coil motor 1 is connected with the negative terminal of second voice coil motor 2, the anode of the anode of first voice coil motor 1, second voice coil motor 2 is connected with the positive and negative output of many level power of X-axis amplifier 8 respectively, receives the pwm voltage signal of many level and controls first voice coil motor 1 and the output torque of second voice coil motor 2 drives speculum 5 at X-axis line upper deflecting;
The 3rd voice coil motor 3 is connected with speculum 5 with the 4th voice coil motor 4 and is arranged on the Y-axis line of speculum 5; The negative terminal of the 3rd voice coil motor 3 is connected with the negative terminal of the 4th voice coil motor 4, the anode of the anode of the 3rd voice coil motor 3 and the 4th voice coil motor 4 is connected with the positive and negative output of many level power of Y-axis amplifier 9 respectively, receives the pulse-width signal of many level and drives speculum 5 at Y-axis line upper deflecting;
The stator of first voice coil motor 1, second voice coil motor 2, the 3rd voice coil motor 3, the 4th voice coil motor 4 is fixed on the Reflector base 16, and the mover of first voice coil motor 1, second voice coil motor 2, the 3rd voice coil motor 3, the 4th voice coil motor 4 is fixed on the back side of speculum 5.
In X-axis current sensor 10, be equipped with the negative output end line of many level power of X-axis amplifier 8, be used for measuring and exporting the current signal analog quantity size that flows through first voice coil motor 1 and second voice coil motor 2;
In Y-axis current sensor 11, be equipped with the positive output end line of many level power of Y-axis amplifier 9, be used for measuring and exporting the current signal analog quantity size that flows through the 3rd voice coil motor 3 and the 4th voice coil motor 4;
X-axis primary importance transducer 12, X-axis second place transducer 13, Y-axis primary importance transducer 14 and Y-axis second place transducer 15 are installed on the Reflector base 16, X-axis primary importance transducer 12 and X-axis second place transducer 13 are positioned on the X-axis line of speculum 5, symmetry is installed on the both sides of the center O point of speculum 5, is used for measuring speculum 5 along the deflection angle of X-axis line; Y-axis primary importance transducer 14 and Y-axis second place transducer 15 are positioned on the Y-axis line of speculum 5, and symmetry is installed on the both sides of the center O point of speculum 5, are used for measuring speculum 5 along the deflection angle of Y-axis line.
Wherein, many level power of the X-axis amplifier 8, many level power of Y-axis amplifier 9 that drives first voice coil motor 1, second voice coil motor 2, the 3rd voice coil motor 3, the 4th voice coil motor 4 is many level pulse width modulation mode.
Wherein, the X-axis line of speculum 5 is vertical mutually with the Y-axis line.
Wherein, first voice coil motor 1 and second voice coil motor, 2 differential concatenations, and by an X-axis current sensor 10 feedback armature current signals formation current closed-loops, thereby reach the purpose of controlling first voice coil motor 1 and second voice coil motor, 2 output torques.
Wherein, the 3rd voice coil motor 3 and the 4th voice coil motor 4 differential concatenations, and by a Y-axis current sensor 11 feedback armature current signals formation current closed-loops, thereby reach the purpose of controlling the 3rd voice coil motor 3 and the 4th voice coil motor 4 output torques.
Wherein, first voice coil motor 1 and second voice coil motor 2 are formed push pull mode work; The 3rd voice coil motor 3 and form the push pull mode work with the 4th voice coil motor 4.
The functional description of digitial controller 6 is as follows as shown in Figure 3:
1) digitial controller 6 receives X-axis desired signal θ
x *, Y-axis desired signal θ
y *, and reception is from the digital quantity i of the X-axis current feedback signal of AD collection plate 7
x, the Y-axis current feedback signal digital quantity i
y, X-axis primary importance straight-line displacement digital quantity x1, X-axis second place straight-line displacement digital quantity x2, Y-axis primary importance straight-line displacement digital quantity y1, Y-axis second place straight-line displacement digital quantity y2;
2) to the mapping algorithm TO of deflection angle X-axis primary importance straight-line displacement digital quantity x1, X-axis second place straight-line displacement digital quantity x2, Y-axis primary importance straight-line displacement digital quantity y1, Y-axis second place straight-line displacement digital quantity y2 are converted into the angular deflection signal θ of X-axis by following two formula by straight-line displacement
xAngular deflection signal θ with Y-axis
y
Wherein, l represents that X-axis primary importance transducer 12, X-axis second place transducer 13, Y-axis primary importance transducer 14, Y-axis second place transducer 15 are apart from the distance of the central point O of speculum 5.
3) calculate the angular error signal θ of X-axis by negative feedback unit ("+zero-" unit among Fig. 3)
x *-θ
x, the angular error signal θ of Y-axis
y *-θ
y, the current error signal i of X-axis
x *-i
x, the current error signal i of Y-axis
y *-i
yFinish current loop control algorithm G
cWith position ring control algolithm G
p, introduce among the embodiment below the specific design step.
4) magnitude of voltage that calculates is delivered to many level power of X-axis amplifier 8 and many level power of Y-axis amplifier 9.
It is as follows to introduce footpath rapid control reflector drive system embodiment at a gulp below: its partial parameters is: the moment of inertia of speculum 5 is 0.1kgm
2The parameter unanimity of first voice coil motor 1, second voice coil motor 2, the 3rd voice coil motor 3, the 4th voice coil motor 4, resistance R=5 Ω; Inductance L=8mH; Torque coefficient K
t=20N/A (newton/ampere).
Install first voice coil motor 1, second voice coil motor 2, the 3rd voice coil motor 3, the 4th voice coil motor 4 and speculum 5 according to Fig. 1 mode, set up driving control system according to Fig. 2: system adopts the control mode of current closed-loop and position closed loop.Current circuit is as inner looping, and position loop is as external loop.
(1) many level power of X-axis amplifier 8, many level power of Y-axis amplifier 9 adopt MOSFET power drive device; The level number of many level pulse-width modulation is three level: 30V, 15V and 0V (in addition as a comparison, also can export two level: 30V and 0V); The frequency of pulsewidth is 20kHz; Modulation system adopts phase shift carrier modulation method;
(2) X-axis current sensor 10, Y-axis current sensor 11 adopt the Hall current sensor; X-axis primary importance transducer 12, X-axis second place transducer 13, Y-axis primary importance transducer 14, Y-axis second place transducer 15 all adopt current vortex sensor; Digitial controller 6 adopts FPGA;
(3) because first voice coil motor 1, second voice coil motor 2, the 3rd voice coil motor 3 of Y-axis, the 4th voice coil motor 4 of X-axis are identical, X-axis current sensor 10, Y-axis current sensor 11 are identical, X-axis primary importance transducer 12, X-axis second place transducer 13, Y-axis primary importance transducer 14, Y-axis second place transducer 15 are identical, the moment of inertia of speculum 5 too, so control algolithm is too.Adopt frequency domain method design current ring control algolithm G
cWith position ring control algolithm G
p, but be not limited only to the method.Design current ring control algolithm G
cFor:
Wherein, s is Laplacian, obtains the about 1000Hz of current closed-loop bandwidth;
(4) frequency domain method design attitude ring control algolithm is adopted in design, but is not limited only to the method.The position ring control algolithm G of design
pFor:
Be the advantage of many level pulse-width modulation of proving absolutely many level power of X-axis amplifier 8 and many level power of Y-axis amplifier 9, following relatively (be example with the X-axis) made in three level pulse-width modulations and two level pulse-width modulations:
At first, the electric current desired signal i of given X-axis
x *Be sinusoidal current signal, amplitude is 3A, and frequency is 100Hz, relatively the output voltage of two kinds of pulse width modulation modes and the harmonic wave of current of electric.Specifically as Fig. 4-shown in Figure 7:
Fig. 4 has shown the voltage waveform the when output level of many level power of X-axis amplifier 8 and many level power of Y-axis amplifier 9 is two level pwm voltage signals (± 30V and 0V).
Fig. 5 has shown the voltage waveform the when output level of many level power of X-axis amplifier 8 and many level power of Y-axis amplifier 9 is three level pwm voltage signals (± 30V, ± 15V and 0V).
Fig. 6 has shown the current harmonics of the voice coil motor of correspondence when the output level of many level power of X-axis amplifier 8 and many level power of Y-axis amplifier 9 is two level pwm voltage signals (± 30V and 0V);
Fig. 7 has shown the current harmonics situation of the voice coil motor of correspondence when the output level of many level power of X-axis amplifier 8 and many level power of Y-axis amplifier 9 is three level pwm voltage signals (± 30V, ± 15V and 0V).As can be seen from Figures 6 and 7, the current harmonics of two level pulse-width modulation correspondences is that the current harmonics of 4.28%, three level pulse-width modulation correspondence is 2.41%, is 56.3% of two level pulse-width modulations.Among Fig. 6-Fig. 7, the frequency of first-harmonic is 100Hz, and abscissa is the number of times of harmonic wave, and ordinate is the percentage of the shared fundamental voltage amplitude of amplitude of harmonic wave.
Secondly, the position desired signal θ of given X-axis
x *Be step signal, the angle of inclination that makes speculum 5 changes to 10 μ rad from 0, after the stable state, and the steady-state error of two kinds of pulse width modulation mode correspondences relatively, as shown in Figure 8.The error mean square root of two level pulse-width modulation correspondences is 0.0056 μ rad; The root mean square of the site error of three level pulse-width modulation correspondences is 0.0018 μ rad, is 32.2% of two level.The maximum of the site error of two level correspondences is 0.0147 μ rad; The maximum of the error of three level correspondences is 0.0056 μ rad, is 37.9% of two level.
This specific implementation process has illustrated that the pulse-width modulation of many level is applied to the feasibility that high accuracy speculum 5 drives, and along with the increasing of number of levels, all littler aspect current harmonics and steady-state error.And compare with Linear Driving, many level pulse-width modulation power amplifier more powerful, loss is lower.
The above; only be the embodiment among the present invention, but protection scope of the present invention is not limited thereto, anyly is familiar with the people of this technology in the disclosed technical scope of the present invention; conversion or the replacement expected can be understood, all of the present invention comprising within the scope should be encompassed in.
Claims (7)
1. a control system that drives speculum is characterized in that; Comprise first voice coil motor, second voice coil motor, the 3rd voice coil motor, the 4th voice coil motor, speculum, digitial controller, AD collection plate, many level power of X-axis amplifier, many level power of Y-axis amplifier, X-axis current sensor, Y-axis current sensor, X-axis primary importance transducer, X-axis second place transducer, Y-axis primary importance transducer, Y-axis second place transducer, Reflector base; Wherein:
The input of AD collection plate is connected with X-axis current sensor, Y-axis current sensor, X-axis primary importance transducer, X-axis second place transducer, Y-axis primary importance transducer and the output of Y-axis second place transducer respectively, be used for gathering the analog quantity of current signal and position signalling, and analog quantity converted to the digital quantity of current signal digital quantity and position signalling;
The input of digitial controller is connected with the AD collection plate, receive the digital quantity of X-axis desired signal, Y-axis desired signal, current signal digital quantity and position signalling, and generate the position closed loop control algolithm of described position transducer and the current closed-loop control algolithm of described current sensor; Digitial controller is output as voltage signal;
Many level power of X-axis amplifier input terminal, many level power of Y-axis amplifier input terminal are connected with the output of digitial controller respectively, receive respectively and the voltage signal of the output of digitial controller is carried out power amplification, generate and export the pwm voltage signal of many level;
First voice coil motor is connected with speculum with second voice coil motor and is arranged on the X-axis line of speculum, the negative terminal of first voice coil motor is connected with the negative terminal of second voice coil motor, the anode of the anode of first voice coil motor, second voice coil motor is connected with the positive and negative output of many level power of X-axis amplifier respectively, receives the pwm voltage signal of many level and controls first voice coil motor and the output torque of second voice coil motor drives speculum at X-axis line upper deflecting;
The 3rd voice coil motor is connected with speculum with the 4th voice coil motor and is arranged on the Y-axis line of speculum; The negative terminal of the 3rd voice coil motor is connected with the negative terminal of the 4th voice coil motor, the anode of the anode of the 3rd voice coil motor and the 4th voice coil motor is connected with the positive and negative output of many level power of Y-axis amplifier respectively, receives the pulse-width signal of many level and drives speculum at Y-axis line upper deflecting;
The stator of first voice coil motor, second voice coil motor, the 3rd voice coil motor, the 4th voice coil motor is fixed on the Reflector base, and the mover of first voice coil motor, second voice coil motor, the 3rd voice coil motor, the 4th voice coil motor is fixed on the back side of speculum;
In the X-axis current sensor, be equipped with the negative output end line of many level power of X-axis amplifier, be used for measuring and exporting the current signal analog quantity size that flows through first voice coil motor and second voice coil motor;
In the Y-axis current sensor, be equipped with the positive output end line of many level power of Y-axis amplifier, be used for measuring and exporting the current signal analog quantity size that flows through the 3rd voice coil motor and the 4th voice coil motor;
X-axis primary importance transducer, X-axis second place transducer, Y-axis primary importance transducer and Y-axis second place transducer are installed on the Reflector base, X-axis primary importance transducer and X-axis second place transducer are positioned on the X-axis line of speculum, symmetry is installed on the both sides of the center O point of speculum, is used for measuring speculum along the deflection angle of X-axis line; Y-axis primary importance transducer and Y-axis second place transducer are positioned on the Y-axis line of speculum, and symmetry is installed on the both sides of the center O point of speculum, are used for measuring speculum along the deflection angle of Y-axis line.
2. according to the control system of the described driving speculum of claim 1, it is characterized in that: many level power of the X-axis amplifier, many level power of the Y-axis amplifier that drive described first voice coil motor, second voice coil motor, the 3rd voice coil motor, the 4th voice coil motor are many level pulse width modulation mode.
3. according to the control system of the described driving speculum of claim 1, it is characterized in that: the X-axis line of speculum is vertical mutually with the Y-axis line.
4. according to the control system of the described driving speculum of claim 1, it is characterized in that: first voice coil motor and the second voice coil motor differential concatenation, and by an X-axis current sensor feedback armature current signal formation current closed-loop, thereby reach the purpose of controlling first voice coil motor and the second voice coil motor output torque.
5. according to the control system of the described driving speculum of claim 1, it is characterized in that: the 3rd voice coil motor and the 4th voice coil motor differential concatenation, and by a Y-axis current sensor feedback armature current signal formation current closed-loop, thereby reach the purpose of controlling the 3rd voice coil motor and the 4th voice coil motor output torque.
6. according to the control system of the described driving speculum of claim 1, it is characterized in that: first voice coil motor and second voice coil motor are formed push pull mode work.
7. according to the control system of the described driving speculum of claim 1, it is characterized in that: the 3rd voice coil motor and form push pull mode work with the 4th voice coil motor.
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104516086A (en) * | 2014-12-17 | 2015-04-15 | 中国科学院长春光学精密机械与物理研究所 | Control system and method of fast-steering mirror |
| CN104793333A (en) * | 2015-04-29 | 2015-07-22 | 中国科学院光电技术研究所 | Large stroke high-speed multi-stage drive inclined mirror |
| CN106054603A (en) * | 2016-05-30 | 2016-10-26 | 中国科学院光电技术研究所 | Delay prediction method capable of improving control bandwidth of fast steering mirror |
| CN106899799A (en) * | 2015-12-21 | 2017-06-27 | 意法半导体公司 | Optical imagery increases steady actuator drive power distribution control |
| CN107528502A (en) * | 2016-06-22 | 2017-12-29 | 大族激光科技产业集团股份有限公司 | A kind of four motor resultant motion control methods |
| CN107797271A (en) * | 2017-11-06 | 2018-03-13 | 中国科学院光电技术研究所 | A kind of inclined mirror system |
| CN108614353A (en) * | 2018-05-10 | 2018-10-02 | 西安交通大学 | Two-dimensional deflection decoupling mechanism and its deflection method based on ion-exchange polymer metal material |
| CN108873945A (en) * | 2017-05-11 | 2018-11-23 | 北京遥感设备研究所 | A kind of fast anti-mirror high precision tracking method based on position stepping |
| CN109579690A (en) * | 2018-12-04 | 2019-04-05 | 天津津航技术物理研究所 | A kind of high-precision angular displacement detecting device for fast anti-mirror image stabilization system |
| CN109799762A (en) * | 2019-03-20 | 2019-05-24 | 中国科学院长春光学精密机械与物理研究所 | The control system of face battle array sweeping imaging |
| CN110715795A (en) * | 2019-10-14 | 2020-01-21 | 中国科学院光电技术研究所 | Calibration and measurement method for fast reflector in photoelectric tracking system |
| CN113009820A (en) * | 2021-02-22 | 2021-06-22 | 中国科学院光电技术研究所 | System architecture design method of high-speed control algorithm based on FPGA |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030197910A1 (en) * | 2002-02-01 | 2003-10-23 | Witt John D. | Fast steering mirror |
| CN101419330A (en) * | 2008-11-17 | 2009-04-29 | 华中科技大学 | Split second control reflecting mirror |
| CN101794020A (en) * | 2010-01-27 | 2010-08-04 | 中国人民解放军国防科学技术大学 | Light beam precision pointing device based on resolution multiplied compliant mechanism |
-
2013
- 2013-05-27 CN CN2013102001273A patent/CN103281018A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030197910A1 (en) * | 2002-02-01 | 2003-10-23 | Witt John D. | Fast steering mirror |
| CN101419330A (en) * | 2008-11-17 | 2009-04-29 | 华中科技大学 | Split second control reflecting mirror |
| CN101794020A (en) * | 2010-01-27 | 2010-08-04 | 中国人民解放军国防科学技术大学 | Light beam precision pointing device based on resolution multiplied compliant mechanism |
Non-Patent Citations (2)
| Title |
|---|
| 徐新行等: "音圈电机驱动的球面副支撑式快速控制反射镜设计", 《光学 精密工程》 * |
| 杨艳等: "激光跟踪仪两级双轴联动闭环控制系统研究", 《中国测试》 * |
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| CN104793333A (en) * | 2015-04-29 | 2015-07-22 | 中国科学院光电技术研究所 | Large stroke high-speed multi-stage drive inclined mirror |
| CN106899799A (en) * | 2015-12-21 | 2017-06-27 | 意法半导体公司 | Optical imagery increases steady actuator drive power distribution control |
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| CN106054603A (en) * | 2016-05-30 | 2016-10-26 | 中国科学院光电技术研究所 | Delay prediction method capable of improving control bandwidth of fast steering mirror |
| CN107528502A (en) * | 2016-06-22 | 2017-12-29 | 大族激光科技产业集团股份有限公司 | A kind of four motor resultant motion control methods |
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| CN108873945A (en) * | 2017-05-11 | 2018-11-23 | 北京遥感设备研究所 | A kind of fast anti-mirror high precision tracking method based on position stepping |
| CN107797271A (en) * | 2017-11-06 | 2018-03-13 | 中国科学院光电技术研究所 | A kind of inclined mirror system |
| CN108614353A (en) * | 2018-05-10 | 2018-10-02 | 西安交通大学 | Two-dimensional deflection decoupling mechanism and its deflection method based on ion-exchange polymer metal material |
| CN109579690A (en) * | 2018-12-04 | 2019-04-05 | 天津津航技术物理研究所 | A kind of high-precision angular displacement detecting device for fast anti-mirror image stabilization system |
| CN109799762A (en) * | 2019-03-20 | 2019-05-24 | 中国科学院长春光学精密机械与物理研究所 | The control system of face battle array sweeping imaging |
| CN110715795A (en) * | 2019-10-14 | 2020-01-21 | 中国科学院光电技术研究所 | Calibration and measurement method for fast reflector in photoelectric tracking system |
| CN110715795B (en) * | 2019-10-14 | 2021-06-01 | 中国科学院光电技术研究所 | Calibration and measurement method for fast reflector in photoelectric tracking system |
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