CN102324369A - Double-row direct insertion type ultraviolet photoelectric tube - Google Patents
Double-row direct insertion type ultraviolet photoelectric tube Download PDFInfo
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- CN102324369A CN102324369A CN201110271455A CN201110271455A CN102324369A CN 102324369 A CN102324369 A CN 102324369A CN 201110271455 A CN201110271455 A CN 201110271455A CN 201110271455 A CN201110271455 A CN 201110271455A CN 102324369 A CN102324369 A CN 102324369A
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Abstract
The invention discloses a double-row direct insertion type ultraviolet photoelectric tube, which comprises a tube cap and a tube seat. The tube cap and the tube seat are vacuumized and encapsulated into a whole; the tube cap is provided with a built-in step; the step is provided with an optical window made of a transparent ultraviolet material; the lower surface of the optical window is connected with an anode; the upper surface of the tube seat is provided with a cathode; two sides of the tube seat are provided with an anode pin and a cathode pin; and the anode and the cathode are respectively connected with the anode pin and the cathode pin. By using the double-row direct insertion type ultraviolet photoelectric tube, the interelectrode distance and the parallelism between the anode and the cathode are guaranteed; the working time and the service life of a device are improved; the rate of finished products and the consistency of products are improved; the blank of an ultraviolet photosensitive tube in an encapsulation way is filled; and the compatibility of the device in encapsulation, circuit design and application is improved. The double-row direct insertion type ultraviolet photoelectric tube is applicable to the fields needing ultraviolet radiation detection.
Description
Technical field
The present invention relates to a kind of photoelectric tube, particularly a kind of dual inline type ultraviolet light fulgurite.
Background technology
The ultraviolet detection technology is the another important detecting technique that after infrared and laser technology, grows up; It has a extensive future fields such as medical science, biology, military affairs; The national defence and the development of the national economy to a country all have important meaning, can be widely used in the aspect such as wake flame detection, guided missile detection and guidance, ultraviolet secure communication, fire alarm of airborne vehicle, rocket etc.Present ultraviolet light fulgurite all is to adopt uviol or quartz glass as shell and optical window; Utilize metal materials such as molybdenum, nickel as the photoelectron emissions negative electrode; Be encapsulated in photoelectric tube the inside to anode and cathode with glass bulb; Through charging into working gas after the exhaust again, complete then as making bulb.
Application number is that the Chinese invention patent of 200810044571.X discloses a kind of ultraviolet flame sensor and preparation method thereof, comprises the uviol sheet; Meshed anode, this anode layer are produced on the uviol sheet; The cathode substrate sheet glass; Photocathode, this layer are produced on above the cathode substrate sheet glass; Glass ring, this glass ring are produced in the middle of negative electrode and the anode; Vacuum orifice, this vacuum orifice is produced on the glass ring; Plastic packaging base, this base are produced on below the cathode substrate glass; Negative electrode and anode lead wire, this lead-out wire are bonded on the plastic packaging base, are connected with anode lead wire with negative electrode respectively; Plastic casing, this shell is produced on around plastic packaging base, glass ring and the sheet glass.This invention is simple in structure, size is little, intensity is high, highly sensitive.But; In making the ultraviolet flame sensor process, during the bonding formation glass chamber of glass ring and electroded uviol sheet, be difficult to guarantee the anode-cathode distance and the depth of parallelism between negative electrode and the anode; Influence device operating time and useful life, the rate of finished products and the consistency of product are low.
Summary of the invention
The objective of the invention is to overcome existing above-mentioned deficiency in the prior art; A kind of dual inline type ultraviolet light fulgurite of guaranteeing anode-cathode distance and the depth of parallelism between negative electrode and the anode is provided; This dual inline type ultraviolet light fulgurite is highly sensitive, volume is little, production automation degree high, shock resistance is good, and the consistency of finished product and quality product rate are high.
In order to realize the foregoing invention purpose, the present invention adopts following technical scheme:
A kind of dual inline type ultraviolet light fulgurite comprises pipe cap and base, and said pipe cap and base vacuumize and be packaged into one; Correspondence is provided with step in the said pipe cap; Saidly be arranged on this step by passing through the optical window that purple material processes, said optical window lower surface connects anode, and said base upper surface is provided with negative electrode; Said base both sides are provided with anode pin and negative electrode pin, and said anode and negative electrode are connected respectively to anode pin and negative electrode pin.The machining accuracy of said step reaches the micron number magnitude; Negative electrode and anode lay respectively at lower plane place on the said step; Step has been guaranteed the anode-cathode distance and the depth of parallelism of anode and negative electrode, and the anode-cathode distance and the depth of parallelism margin of tolerance are controlled in the 10um, have improved device operating time and useful life.
As preferably, said anode is a metal film, and is filament or network structure.The anode light transmittance of this structure is good, can strengthen photoelectric effect intensity.
Further, said anode adopts metal film to be attached to the optical window back side and is integrally formed structure.Anode is difficult for falling apart, and has improved device useful life.
As preferably, said optical window lower surface is the plane, and upper surface or be the plane or be convex surface, upper surface can increase outside logical light quantity during for convex surface, improve detectivity.
As preferably, said negative electrode adopts ceramic matrix plating metal on surface film to be integrally formed structure, and this metal film is a negative electrode.Negative electrode is the face electrode, has enlarged the photoelectron contact area, improves detectivity.
As preferably, said pipe cap and base are ceramic material, and ceramic insulation property is good, and thermal coefficient of expansion is little.
As preferably, the parallelism tolerance scope of plane and lower plane is controlled in the 10um on the said step, with the anode-cathode distance and the depth of parallelism of guaranteeing anode and negative electrode.
As preferably, said purple material is quartz glass or sapphire, and it is effective that these two kinds of materials pass through ultraviolet light.
A kind of manufacture method of dual inline type ultraviolet light fulgurite, said method comprises:
1) will pass through a metal-coated membrane of purple material through technique for vacuum coating, and be made into thread or netted anode and optical window through photoetching, mask, etching process, said anode is integrally formed structure attached to the optical window back side; With the pottery is that matrix is produced base, makes negative electrode through ceramic metalizing process at base upper surface metal-coated membrane; A built-in step is set in pipe cap, and the parallelism tolerance scope of plane and lower plane is controlled in the 10um on the said step;
2) metallize the optical window of the Manufactured integrative-structure that adheres to anode and the part that pipe cap need weld in advance through metallization process, then this optical window is placed on the pipe cap step and with the pipe cap sealing-in be one, be made into the pipe cap of band optical window; Through vacuum coating, photoetching, etching process anode is linked to each other with anode pin, negative electrode pin respectively with negative electrode.
3) pipe cap and base being vacuumized encapsulation connects as one.
Compared with prior art, beneficial effect of the present invention:
1, the present invention is employed in a built-in step is set on the pipe cap; Its machining accuracy reaches the micron number magnitude; Parallelism tolerance scope of plane and lower plane is controlled in the 10um on it; Guaranteed between anode and the negative electrode anode-cathode distance and and the depth of parallelism, the anode-cathode distance and the depth of parallelism margin of tolerance are controlled in the 10um, improve device operating time and useful life;
2, the present invention adopts the light transmittance of the thread or meshed anode that passes through purple material good, and negative electrode is the face electrode, has enlarged the photoelectron contact area, and the photoelectric effect response speed is fast, highly sensitive;
3, the present invention adopts the solid encapsulation structure, and sealing-in is that all parts become a rigid body behind the finished product, and to guarantee that under certain jerk the part and the relative position of pipe are constant, the shock resistance vibratility is good.
Description of drawings:
Fig. 1 is a structure chart of the present invention;
Fig. 2 is a vertical view of the present invention;
Fig. 3 is meshed anode figure of the present invention;
Fig. 4 is the thread anode figure of the present invention;
Mark among the figure: 1-optical window, 2-pipe cap, 3-anode pin, 4-base, 5-anode, 6-negative electrode, 7-negative electrode pin, the 8-brazing layer that metallizes.
Embodiment
Below in conjunction with Test Example and embodiment the present invention is made further detailed description.But should this be interpreted as that the scope of the above-mentioned theme of the present invention only limits to following embodiment, allly all belong to scope of the present invention based on the technology that content of the present invention realized.
Embodiment
Like Fig. 1, shown in Figure 2, a kind of dual inline type ultraviolet light fulgurite of the present invention comprises pipe cap 2 and base 4; The pipe, 2 with base 4 be ceramic material, ceramic insulation property is good; Thermal coefficient of expansion is little, and said pipe cap 2 vacuumizes with base 4 and is packaged into one, and correspondence is provided with step in the said pipe cap 2.Saidly be arranged on this step by passing through the optical window 1 that purple material processes, said optical window 1 lower surface is the plane, and upper surface or be the plane or be convex surface, upper surface can increase outside logical light quantity during for convex surface, improve detectivity.Said purple material is quartz glass or sapphire, and it is effective that these two kinds of materials pass through ultraviolet light.Said optical window 1 lower surface connects anode 5, and said anode 5 is a metal film, and is filament or network structure; Like Fig. 3, shown in Figure 4; Anode 5 light transmittances of this structure are good, and further, said anode 5 adopts metal film to be attached to optical window 1 back side and is integrally formed structure; Anode 5 is difficult for falling apart, and has improved device useful life.Said base 4 upper surfaces are provided with negative electrode 4, and said negative electrode 6 adopts ceramic matrix plating metal on surface film to be integrally formed structure, and this metal film is a negative electrode 6.Negative electrode 6 is the face electrode, has enlarged the photoelectron contact area, improves detectivity.Said base 4 both sides are provided with anode pin 3 and negative electrode pin 7, and said anode 5 is connected respectively to anode pin 3 and negative electrode pin 7 with negative electrode 6.Negative electrode 6 lays respectively at lower plane place on the said step with anode 5; The parallelism tolerance scope of plane and lower plane is controlled in the 10um on the said step; To guarantee the anode-cathode distance and the depth of parallelism of anode 5 and negative electrode 6; The anode-cathode distance and the depth of parallelism margin of tolerance are controlled in the 10um, have improved device operating time and useful life, highly sensitive.
A kind of manufacture method of dual inline type ultraviolet light fulgurite, said method comprises:
1) through technique for vacuum coating will pass through that the one side of purple material is gold-plated, nickel, tungsten, molybdenum and/or metal film such as can cut down; And be made into thread or netted anode 5 and optical window 1 through photoetching, mask, etching process; Said anode 5 is integrally formed structure attached to optical window 1 back side; Make the anode firm attachment in the optical window back side, be difficult for falling apart; With the pottery is that matrix is produced base 4, through ceramic metalizing process at base 4 upper surface nickel plating or molybdenum film production negative electrode 6; On pipe cap 2, process a built-in step; Machining accuracy is controlled at the micron number magnitude, and the parallelism tolerance scope of plane and lower plane is controlled in the 10um on the said step, in order to guarantee the anode-cathode distance and the depth of parallelism between anode and the negative electrode; Prolong the device operating time, improve sensitivity;
2) need the Manufactured optical window 1 that adheres to the integrative-structure of anode 5 part of welding to metallize in advance with pipe cap 2 through metallization process and form metallization brazing layer 8; Then this optical window 1 is placed on pipe cap 2 steps and with pipe cap 2 welding to be packaged as a whole, be made into the pipe cap 2 of band optical window 1; Processing technology and method through integrated circuit are made anode pin 3 and negative electrode pin 7 in base 4 both sides; Through vacuum metallizing, nickel, tungsten, molybdenum and/or metal film, photoetching, etching process groove such as can cut down anode 5 is connected with anode pin 3, negative electrode 6 links to each other with negative electrode pin 7 again;
3) pipe cap 2 and base 4 being vacuumized encapsulation connects as one.
Dual inline type ultraviolet light fulgurite of the present invention is employed in a built-in step is set on the pipe cap; Machining accuracy reaches the micron number magnitude; Parallelism tolerance scope of plane and lower plane is controlled in the 10um on it; Guarantee the anode-cathode distance and the depth of parallelism between anode and the negative electrode, improved device operating time, useful life and sensitivity; The present invention adopts the light transmittance of the thread or meshed anode that passes through purple material good, and the quantity of illumination is many more, is easy to generate photoelectric effect more, and sensitivity improves; The present invention adopts the solid encapsulation structure, and sealing-in is that all parts become a rigid body behind the finished product, and to guarantee that under certain jerk the part and the relative position of pipe are constant, the shock resistance vibratility is good; The present invention adopts the manufacture method of the processing technology of integrated circuit, and the dual inline type ultraviolet light photo pipe volume of making is little, production automation degree is high, rate of finished products and quality product rate improve.
Claims (10)
1. a dual inline type ultraviolet light fulgurite comprises pipe cap and base, it is characterized in that; Said pipe cap and base vacuumize and are packaged into one, and said pipe cap is provided with built-in step, and said step is provided with by passing through the optical window that purple material is processed; Said optical window lower surface connects anode; Said base upper surface is provided with negative electrode, and said base both sides are provided with anode pin and negative electrode pin, and said anode and negative electrode are connected respectively to anode pin and negative electrode pin.
2. dual inline type ultraviolet light fulgurite according to claim 1 is characterized in that: said anode is a metal film, and is filament.
3. dual inline type ultraviolet light fulgurite according to claim 1 is characterized in that: said anode is a metal film, and is network structure.
4. according to claim 2 or 3 any described dual inline type ultraviolet light fulgurites, it is characterized in that: said anode adopts metal film to be attached to the optical window back side and is integrally formed structure.
5. dual inline type ultraviolet light fulgurite according to claim 4 is characterized in that: said optical window lower surface is the plane, upper surface or be plane or for convex surface.
6. dual inline type ultraviolet light fulgurite according to claim 5 is characterized in that: said negative electrode is a metal film.
7. dual inline type ultraviolet light fulgurite according to claim 6 is characterized in that: said pipe cap and base are ceramic material.
8. dual inline type ultraviolet light fulgurite according to claim 7 is characterized in that: the parallelism tolerance scope of plane and lower plane is controlled in the 10um on the said step.
9. dual inline type ultraviolet light fulgurite according to claim 8 is characterized in that: said purple material is quartz glass or sapphire.
10. the manufacture method of dual inline type ultraviolet light fulgurite according to claim 9 is characterized in that: said method comprises:
1) will pass through a metal-coated membrane of purple material through technique for vacuum coating, and be made into thread or netted anode and optical window through photoetching, mask, etching process, said anode is integrally formed structure attached to the optical window back side; With the pottery is that matrix is produced base, makes negative electrode through ceramic metalizing process at base upper surface metal-coated membrane; A built-in step is set in pipe cap, and the parallelism tolerance scope of plane and lower plane is controlled in the 10um on the step;
2) metallize the optical window of the Manufactured integrative-structure that adheres to anode and the part that pipe cap need weld in advance through metallization process, then this optical window is placed on the pipe cap step and with the pipe cap sealing-in be one, be made into the pipe cap of band optical window; Through vacuum coating, photoetching, etching process anode is linked to each other with anode pin, negative electrode pin respectively with negative electrode;
3) pipe cap and base being vacuumized encapsulation connects as one.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201110271455 CN102324369B (en) | 2011-09-14 | 2011-09-14 | Double-row direct insertion type ultraviolet photoelectric tube |
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| CN 201110271455 CN102324369B (en) | 2011-09-14 | 2011-09-14 | Double-row direct insertion type ultraviolet photoelectric tube |
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| CN102324369A true CN102324369A (en) | 2012-01-18 |
| CN102324369B CN102324369B (en) | 2013-07-10 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103681171A (en) * | 2013-12-07 | 2014-03-26 | 四川天微电子有限责任公司 | Ceramic gas discharge tube |
| CN107733388A (en) * | 2017-09-20 | 2018-02-23 | 戴承萍 | The processing method of resonator and resonator |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2466613Y (en) * | 2001-02-08 | 2001-12-19 | 高明 | Explosion-proof pressure-resistant photoelectric liquid level sensor |
| US20040094694A1 (en) * | 2002-11-13 | 2004-05-20 | Hamamatsu Photonics K.K. | Photocathode, electron tube, and method of assembling photocathode |
| CN1945776A (en) * | 2006-10-10 | 2007-04-11 | 四川天微电子有限责任公司 | Photoelectric cathode and process for preparing vacuum ultraviolet electric device using said cathode |
| CN101251416A (en) * | 2008-04-10 | 2008-08-27 | 电子科技大学 | Ultraviolet flame sensor and manufacturing method thereof |
| CN202196740U (en) * | 2011-09-14 | 2012-04-18 | 成都凯迈科技有限公司 | Dual in-line type ultraviolet photoelectric tube |
-
2011
- 2011-09-14 CN CN 201110271455 patent/CN102324369B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2466613Y (en) * | 2001-02-08 | 2001-12-19 | 高明 | Explosion-proof pressure-resistant photoelectric liquid level sensor |
| US20040094694A1 (en) * | 2002-11-13 | 2004-05-20 | Hamamatsu Photonics K.K. | Photocathode, electron tube, and method of assembling photocathode |
| CN1945776A (en) * | 2006-10-10 | 2007-04-11 | 四川天微电子有限责任公司 | Photoelectric cathode and process for preparing vacuum ultraviolet electric device using said cathode |
| CN101251416A (en) * | 2008-04-10 | 2008-08-27 | 电子科技大学 | Ultraviolet flame sensor and manufacturing method thereof |
| CN202196740U (en) * | 2011-09-14 | 2012-04-18 | 成都凯迈科技有限公司 | Dual in-line type ultraviolet photoelectric tube |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103681171A (en) * | 2013-12-07 | 2014-03-26 | 四川天微电子有限责任公司 | Ceramic gas discharge tube |
| CN107733388A (en) * | 2017-09-20 | 2018-02-23 | 戴承萍 | The processing method of resonator and resonator |
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| Publication number | Publication date |
|---|---|
| CN102324369B (en) | 2013-07-10 |
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Owner name: CHENGDU XUGUANG ELECTRIC EQUPMENTS CO., LTD. Free format text: FORMER OWNER: CHENGDU K + M METALS CO., LTD. Effective date: 20140428 |
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Effective date of registration: 20140428 Address after: 610500, No. 299, electronic road, Xindu town, Xindu District, Sichuan, Chengdu Patentee after: Chengdu Xuguang Electronic Equipments Co., Ltd. Address before: 610500 New Industrial Road, Xindu Industrial District, Sichuan, Chengdu Patentee before: Chengdu K & M Metals Co., Ltd. |
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Effective date of registration: 20210325 Address after: No.2-13, Shiyang Road, Yangma Town, Jianyang City, Chengdu, Sichuan 610000 Patentee after: Chengdu ultraviolet photoelectric technology Co.,Ltd. Address before: No. 299, dianzi Road, Xindu town, Xindu District, Chengdu, Sichuan 610500 Patentee before: CHENGDU XUGUANG ELECTRONIC EQUIPMENTS Co.,Ltd. |
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