CN102332386B - A kind of solid ultraviolet photoelectric tube - Google Patents
A kind of solid ultraviolet photoelectric tube Download PDFInfo
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- CN102332386B CN102332386B CN201110271462.3A CN201110271462A CN102332386B CN 102332386 B CN102332386 B CN 102332386B CN 201110271462 A CN201110271462 A CN 201110271462A CN 102332386 B CN102332386 B CN 102332386B
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- 239000007787 solid Substances 0.000 title claims abstract description 46
- 238000009413 insulation Methods 0.000 claims abstract description 54
- 239000000463 material Substances 0.000 claims abstract description 20
- 230000003287 optical effect Effects 0.000 claims abstract description 15
- 238000009738 saturating Methods 0.000 claims abstract description 12
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 4
- 229910052751 metal Inorganic materials 0.000 claims description 29
- 239000002184 metal Substances 0.000 claims description 29
- 238000007373 indentation Methods 0.000 claims description 22
- 239000012528 membrane Substances 0.000 claims description 10
- 239000011159 matrix material Substances 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 238000005538 encapsulation Methods 0.000 claims description 4
- 229910052755 nonmetal Inorganic materials 0.000 claims description 4
- 239000010980 sapphire Substances 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000035939 shock Effects 0.000 abstract description 2
- 230000005855 radiation Effects 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 4
- 239000005357 flat glass Substances 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000036461 convulsion Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
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- 238000007363 ring formation reaction Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000000825 ultraviolet detection Methods 0.000 description 1
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Abstract
The invention discloses a kind of solid ultraviolet photoelectric tube, comprise shell and base, opening is arranged at described shell top, described base and case package vacuumize formation seal chamber, negative electrode is comprised in described cavity, anode is provided with above described negative electrode, the optical window be made up of saturating purple material is provided with above described anode, described optical window is in described shell opening part and shell sealing-in, described anode and negative electrode jointed anode pin and negative electrode pin respectively, described negative electrode pin and anode pin stretch out in outside base, are provided with electrode insulation part between described negative electrode and anode.Solid ultraviolet photoelectric tube of the present invention is highly sensitive, volume is little, production automation degree is high, shock resistance good, and consistency and the quality product rate of finished product are high.Solid ultraviolet photoelectric tube of the present invention is applicable to the field needing ultraviolet radiation to detect.
Description
Technical field
The present invention relates to a kind of ultraviolet phototube, particularly a kind of solid ultraviolet photoelectric tube.
Background technology
Ultraviolet detection technology is the another important detecting technique grown up after infrared and laser technology, it has a extensive future the fields such as medical science, biology, military affairs, all there is important meaning to a national national defence and the development of the national economy, the aspects such as the wake flame detection of airborne vehicle, rocket etc., guided missile detection and guidance, ultraviolet secure communication, fire alarm can be widely used in.Current ultraviolet phototube is all adopt uviol or quartz glass as shell and optical window, utilize the metal material such as molybdenum, nickel as photoelectron emissions negative electrode, with glass bulb, anode and cathode is encapsulated in inside photoelectric tube, then by being filled with working gas again after exhaust, complete as making bulb.
Application number is that the Chinese invention patent of 200810044571.X discloses a kind of ultraviolet flame sensor and preparation method thereof, comprises uviol sheet; Meshed anode, this anode layer is produced on uviol sheet; Cathode substrate sheet glass; Photocathode, this layer is produced on above cathode substrate sheet glass; Glass ring, this glass ring is produced in the middle of negative electrode and anode; Vacuum orifice, this vacuum orifice is produced on glass ring; Plastic packaging base, this base is produced on below cathode substrate glass; Negative electrode and anode lead wire, this lead-out wire is bonded on plastic packaging base, is connected respectively with negative electrode with anode lead wire; Plastic casing, this shell is produced on around plastic packaging base, glass ring and sheet glass.This invention structure is simple, size is little, intensity is high, highly sensitive.But, in making ultraviolet flame sensor process, during glass ring formation glass chamber bonding with electroded uviol sheet, be difficult to the Distance geometry depth of parallelism between guarantee negative electrode and anode, affect devices function time and useful life, rate of finished products and the consistency of product are low.
Summary of the invention
The object of the invention is to overcome above-mentioned deficiency existing in prior art, a kind of solid ultraviolet photoelectric tube ensureing anode-cathode distance and the depth of parallelism is provided, this solid ultraviolet photoelectric tube is highly sensitive, volume is little, production automation degree is high, shock resistance good, and consistency and the quality product rate of finished product are high.
In order to realize foregoing invention object, the present invention by the following technical solutions:
A kind of solid ultraviolet photoelectric tube, comprise shell and base, opening is arranged at described shell top, described base and case package vacuumize formation seal chamber, negative electrode is comprised in described cavity, anode is provided with above described negative electrode, the optical window be made up of saturating purple material is provided with above described anode, described optical window is in described shell opening part and shell sealing-in, described anode and negative electrode jointed anode pin and negative electrode pin respectively, described negative electrode pin and anode pin stretch out in outside base, are provided with electrode insulation part between described negative electrode and anode.
As preferably, described purple material is quartz glass or sapphire.The saturating ultraviolet light of this bi-material is effective.
As preferably, described shell and base are metal, and the whole metal shell that shell and base are formed has shielding action.
As preferably, described electrode insulation part comprises the first electrode insulation part and the second electrode insulation part, and described first electrode insulation part and the second electrode insulation part lay respectively at the left and right sides in region between negative electrode and anode;
Described first electrode insulation part and the second electrode insulation part are pottery, and good insulating, the thermal coefficient of expansion of pottery are little; Described first electrode insulation part and the second electrode insulation part surface metal-plated membrane, be conveniently connected with anode and negative electrode.
As preferably, described anode adopts saturating purple material matrix plating metal on surface membrane structure.Making on saturating purple material matrix surface through vacuum coating lithography corrosion process and form network structure, also can be filament, the anode glazed area of this structure than high, photoelectric effect fast response time.
As preferably, described optical window is packaged on outer wall or the inwall of described shell opening part.
As preferably, described optical window lower surface is plane, upper surface or be plane or be convex surface, when upper surface is convex surface, increases outside logical light quantity, improves detectivity.
As preferably, described negative electrode adopts nonmetal basal body plating metal on surface membrane structure, and this negative electrode expands photoelectron contact area, improves sensitivity.
As preferably, described nonmetal basal body adopts ceramic matrix.
As preferably, be provided with anode pin and negative electrode pin below described negative electrode, electrode pin can play fixed support effect.
As preferably, anode and negative electrode respectively jointed anode pin and negative electrode pin are achieved in that on described cathode surface, place is provided with the vertical indentation of at least one circle first inside close first electrode insulation part, described cathode surface is provided with the vertical indentation of at least one circle second at place inside the second electrode insulation part, described cathode surface metal film is vertically broken as three parts, i.e. first anode district, cathodic region, second plate district by the described first vertical indentation and the second vertical indentation;
Described first anode district or lower end, second plate district jointed anode pin, the lower end in described cathodic region connects negative electrode pin;
Above-mentioned anode and negative electrode respectively jointed anode pin and negative electrode pin also can realize like this: described cathode surface is provided with the vertical indentation of at least one circle, cathode surface metal film is vertically broken as two parts by described vertical indentation, i.e. first area and second area, and described vertical indentation is located inside the second electrode insulation part;
First electrode insulation part is provided with at least one circle transverse scribes, and the first electrode insulation part metal film on surface is laterally broken as two parts by described transverse scribes; Lower end, described first area connects negative electrode pin, described second area lower end jointed anode pin.These two kinds of implementations are when effective working region that guarantee negative electrode is large as far as possible, make the connection of electrode insulation part and anode and negative electrode more firm, two electrode pins connected below negative electrode also can play fixed support effect, make solid ultraviolet photoelectric tube structure more firm.
Described anode pin and base junction are separated by nonmetallic materials separator; Described negative electrode pin is communicated with base.Base and shell are metal, and by negative electrode pin ground connection, during solid ultraviolet photoelectric tube work, whole metal shell has shielding action, prevents external environment on the impact of the operating circuit of solid ultraviolet photoelectric tube.
compared with prior art, beneficial effect of the present invention:
1, the solid ultraviolet photoelectric tube of the present invention accuracy of electrode processing that saturating purple material makes through vacuum coating photoetching corrosion reaches micron number magnitude, electrode insulation part is connected between the anode and cathode by the method for sealing-in of metallizing, ensure that anode-cathode distance and the depth of parallelism, anode-cathode distance and the depth of parallelism margin of tolerance control within 10 μm, make the consistency of finished product and quality product rate bring up to 90%;
2, solid ultraviolet photoelectric tube of the present invention adopts the light transmittance that is thread or netted optical window of saturating purple material making good, and negative electrode is face electrode, expands photoelectron contact area, improves detectivity;
3, compared with conventional ultra-violet photoelectric tube, solid ultraviolet photoelectric tube of the present invention adopts solid encapsulation structure, and sealing-in is that after finished product, all parts become a rigid body, to ensure under certain jerk, part and the relative position of solid ultraviolet photoelectric tube are constant, and impact resistance anti-vibration resistance is good;
4, solid ultraviolet photoelectric tube volume of the present invention little, easily realize automated production, production efficiency is high;
5, solid ultraviolet photoelectric tube shell of the present invention and base adopt metal, and are connected with negative electrode pin, and metal shell whole during work has shielding action, prevent external environment on the impact of the operating circuit of solid ultraviolet photoelectric tube.
accompanying drawing illustrates:
Fig. 1 is the structure chart of the embodiment of the present invention 1;
Fig. 2 is the structure chart of the embodiment of the present invention 2;
Fig. 3 is meshed anode figure of the present invention;
Fig. 4 is filament anode figure of the present invention;
Mark in figure: 1-shell, 2-optical window, 3-anode, 4-negative electrode, 5-base, 6-electrode insulation part, 61-first electrode insulation part, 62-second electrode insulation part, 7-anode pin, 8-negative electrode pin, 9-separator.
Embodiment
Below in conjunction with test example and embodiment, the present invention is described in further detail.But this should be interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to following embodiment, all technology realized based on content of the present invention all belong to scope of the present invention.
Embodiment 1
As shown in Figure 1, the solid ultraviolet photoelectric tube of the present embodiment comprises shell 1 and base 5, opening is arranged at described shell 1 top, described base 1 and shell 5 encapsulation vacuumize formation seal chamber, negative electrode 4 is comprised in described cavity, anode pin 7 and negative electrode pin 8 is provided with below negative electrode 4, described negative electrode 4 adopts ceramic matrix plating nickel on surface or molybdenum membrane structure, negative electrode 4 is face electrode, increase photoelectron contact area, improve response speed, matrix surface metal-coated membrane is convenient to and anode pin 7, negative electrode pin 8 is connected with electrode insulation part 6 metallization, electrode pin can play fixed support effect simultaneously.Anode 3 is provided with above described negative electrode 4, anode 3 adopts purple material matrix plating metal on surface membrane structure, network structure or filament is made into by vacuum coating lithography corrosion process, as shown in Figure 4, Figure 5, this anode 3 light transmittance is good, and UV light permeability anode 3 is radiated on 4, negative electrode, produce photoelectric effect, electronics is under DC Electric Field, and anode 3 is moved, and forms electric current.Electrode insulation part 6 is provided with between described negative electrode 4 and anode 3, described electrode insulation part 6 comprises the first electrode insulation part 61 and the second electrode insulation part 62, be pottery and surperficial metal-plated membrane, ceramic insulation is good, thermal coefficient of expansion is low, metal film is beneficial to electrode insulation part 6 and is connected with the metallization of anode 3 and negative electrode 4, and described first electrode insulation part 61 and the second electrode insulation part 62 lay respectively at both sides, region between negative electrode 4 and anode 3.Electrode insulation part 6 ensure that anode-cathode distance between anode 3 and negative electrode 4 and the depth of parallelism, and make anode-cathode distance and the depth of parallelism margin of tolerance control within 10um, consistency and the quality product rate of finished product bring up to 90%.Be provided with the optical window 2 be made up of saturating purple material above described anode 3, described purple material is sapphire or quartz glass, and the saturating ultraviolet light of this bi-material is effective.Described optical window 2 lower surface is plane, upper surface or be plane or for convex surface, for improving outside logical light rate during convex surface, optical window 2 is packaged on outer wall or the inwall of described shell 1 opening part.Described anode 3 and negative electrode 4 jointed anode pin 7 and negative electrode pin 8 respectively, described negative electrode pin 8 and anode pin 7 stretch out in outside base 5, described shell 1 and base 5 are metal, described anode pin 7 is separated by nonmetallic materials separators 9 such as glass with base 5 junction, described negative electrode pin 8 is communicated with base 5, so negative electrode pin 8 is just communicated with base 5 with Can 1, during solid ultraviolet photoelectric tube work, the whole metal shell that Can 1 and base 5 form becomes a shield, and by negative electrode pin 8 ground connection, external environment can be prevented the impact of solid ultraviolet photoelectric tube operating circuit, anti-interference is good.
Wherein, described anode 3 and negative electrode 4 respectively jointed anode pin 7 and negative electrode pin 8 are achieved in that described negative electrode 4 is provided with the vertical indentation of at least one circle first at place inside the first electrode insulation part 61 on the surface, described negative electrode 4 is provided with the vertical indentation of at least one circle second at place inside the second electrode insulation part 62 on the surface, described negative electrode 4 metal film on surface is vertically broken as three parts, i.e. first anode district, cathodic region, second plate district by the described first vertical indentation and the second vertical indentation; Described first anode district or lower end, second plate district jointed anode pin 7, the lower end in described cathodic region connects negative electrode pin 8, so just achieves the connection of anode 3 and anode pin 7, the connection of negative electrode 4 and negative electrode pin 8.This connected mode is when effective working region that guarantee negative electrode 4 is large as far as possible, make electrode insulation part 6 more firm with the connection of anode 3 and negative electrode 4, two electrode pins connected below negative electrode 4 also can play the effect of fixed support, make solid ultraviolet photoelectric tube structure more firm.
Embodiment 2
As shown in Figure 2, the structure of the solid ultraviolet photoelectric tube of the present embodiment is similar to embodiment 1, and its difference is, described anode 3 and negative electrode 4 respectively jointed anode pin 7 and negative electrode pin 8 are achieved in that
Described negative electrode 4 is provided with the vertical indentation of at least one circle on the surface, and negative electrode 4 metal film on surface is vertically broken as two parts by described vertical indentation, i.e. first area and second area, and described vertical indentation is located inside the second electrode insulation part 62; First electrode insulation part 61 is provided with at least one circle transverse scribes, and the first electrode insulation part 61 metal film on surface is laterally broken as two parts by described transverse scribes; Lower end, described first area connects negative electrode pin 8, described second area lower end jointed anode pin 7.This connected mode is when effective working region that guarantee negative electrode 4 is large as far as possible, make electrode insulation part 6 more firm with the connection of anode 3 and negative electrode 4, two electrode pins connected below negative electrode 4 also can play the effect of fixed support, make solid ultraviolet photoelectric tube structure more firm.
In sum, the solid ultraviolet photoelectric tube of the present invention accuracy of electrode processing that saturating purple material makes through vacuum coating photoetching corrosion reaches micron number magnitude, electrode insulation part is connected between the anode and cathode by the method for sealing-in of metallizing, ensure that anode-cathode distance and the depth of parallelism, anode-cathode distance and the depth of parallelism margin of tolerance control within 10 μm, make the consistency of finished product and quality product rate bring up to 90%; The light transmittance that is thread or meshed anode that solid ultraviolet photoelectric tube of the present invention adopts saturating purple material to make is good, and negative electrode is face electrode, expands photoelectron contact area, improves detectivity; Solid ultraviolet photoelectric tube of the present invention adopts solid encapsulation structure, and sealing-in is that after finished product, all parts become a rigid body, and to ensure under certain jerk, part and the relative position of solid ultraviolet photoelectric tube are constant, and impact resistance anti-vibration resistance is good; Solid ultraviolet photoelectric tube volume of the present invention is little, easily realize automated production, production efficiency is high; Solid ultraviolet photoelectric tube shell of the present invention and base adopt metal, and are connected with negative electrode pin, and metal shell whole during work has shielding action, and prevent external environment on the impact of the operating circuit of solid ultraviolet photoelectric tube, anti-interference is good.
Claims (12)
1. a solid ultraviolet photoelectric tube, comprise shell (1) and base (5), opening is arranged at described shell (1) top, described base (1) and shell (5) encapsulation vacuumize formation seal chamber, negative electrode (4) is comprised in described cavity, described negative electrode (4) top is provided with anode (3), described anode (3) top is provided with the optical window (2) be made up of saturating purple material, described optical window (2) is in described shell (1) opening part and shell (1) sealing-in, described anode (3) and negative electrode (4) jointed anode pin (7) and negative electrode pin (8) respectively, described negative electrode pin (8) and anode pin (7) stretch out in outside base (5), it is characterized in that, electrode insulation part (6) is provided with between described negative electrode (4) and anode (3), described electrode insulation part (6) comprises the first electrode insulation part (61) and the second electrode insulation part (62), described first electrode insulation part (61) and the second electrode insulation part (62) lay respectively at the left and right sides in region between negative electrode (4) and anode (3), described first electrode insulation part (61) and the second electrode insulation part (62) are pottery, described first electrode insulation part (61) and the second electrode insulation part (62) surperficial metal-plated membrane, described negative electrode (4) adopts nonmetal basal body plating metal on surface membrane structure, described negative electrode (4) below is provided with anode pin (7) and negative electrode pin (8),
Described negative electrode (4) is being provided with the vertical indentation of at least one circle first near the first electrode insulation part (61) inner side place on the surface, described negative electrode (4) is being provided with the vertical indentation of at least one circle second near the second electrode insulation part (62) inner side place on the surface, described negative electrode (4) metal film on surface is vertically broken as three parts, i.e. first anode district, cathodic region, second plate district by the described first vertical indentation and the second vertical indentation; Described first anode district or lower end, second plate district jointed anode pin (7), the lower end in described cathodic region connects negative electrode pin (8).
2. solid ultraviolet photoelectric tube according to claim 1, is characterized in that, described purple material is quartz glass or sapphire.
3. solid ultraviolet photoelectric tube according to claim 2, is characterized in that, described shell and base are metal.
4. solid ultraviolet photoelectric tube according to claim 3, is characterized in that, described anode (3) adopts purple material matrix plating metal on surface membrane structure.
5. solid ultraviolet photoelectric tube according to claim 4, is characterized in that, the metal film of described anode (3) is network structure.
6. solid ultraviolet photoelectric tube according to claim 4, is characterized in that, the metal film of described anode (3) is filament.
7. the solid ultraviolet photoelectric tube according to claim 1 to 6 any one, is characterized in that described optical window (2) is packaged on outer wall or the inwall of described shell (1) opening part.
8. solid ultraviolet photoelectric tube according to claim 7, is characterized in that, described optical window (2) lower surface is plane, upper surface or be plane or for convex surface.
9. solid ultraviolet photoelectric tube according to claim 7, is characterized in that, described nonmetal basal body adopts ceramic matrix.
10. solid ultraviolet photoelectric tube according to claim 9, is characterized in that, described indentation replaces with and realizes with under type:
Described negative electrode (4) is provided with the vertical indentation of at least one circle on the surface, and negative electrode (4) metal film on surface is vertically broken as two parts by described vertical indentation, i.e. first area and second area, and described vertical indentation is near the second electrode insulation part (62) inner side place;
First electrode insulation part (61) is provided with at least one circle transverse scribes, and the first electrode insulation part (61) metal film on surface is laterally broken as two parts by described transverse scribes; Lower end, described first area connects negative electrode pin (8), described second area lower end jointed anode pin (7).
11. solid ultraviolet photoelectric tubes according to claim 10, is characterized in that, described anode pin (7) is separated by nonmetallic materials separator (9) with base (5) junction.
12. solid ultraviolet photoelectric tubes according to claim 11, is characterized in that, described negative electrode pin (8) is communicated with base (5).
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| CN201110271462.3A CN102332386B (en) | 2011-09-14 | 2011-09-14 | A kind of solid ultraviolet photoelectric tube |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110271462.3A CN102332386B (en) | 2011-09-14 | 2011-09-14 | A kind of solid ultraviolet photoelectric tube |
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| CN102332386A CN102332386A (en) | 2012-01-25 |
| CN102332386B true CN102332386B (en) | 2015-09-23 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4845355A (en) * | 1985-12-20 | 1989-07-04 | Canon Kabushiki Kaisha | Photoconductive type sensor and its driving method and apparatus |
| EP0383463A2 (en) * | 1989-02-13 | 1990-08-22 | Galileo Electro-Optics Corp. | Conductively cooled microchannel plates |
| EP0642147A1 (en) * | 1993-09-01 | 1995-03-08 | Hamamatsu Photonics K.K. | Photoemitter, electron tube, and photodetector |
| CN101251416A (en) * | 2008-04-10 | 2008-08-27 | 电子科技大学 | Ultraviolet flame sensor and manufacturing method thereof |
-
2011
- 2011-09-14 CN CN201110271462.3A patent/CN102332386B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4845355A (en) * | 1985-12-20 | 1989-07-04 | Canon Kabushiki Kaisha | Photoconductive type sensor and its driving method and apparatus |
| EP0383463A2 (en) * | 1989-02-13 | 1990-08-22 | Galileo Electro-Optics Corp. | Conductively cooled microchannel plates |
| EP0642147A1 (en) * | 1993-09-01 | 1995-03-08 | Hamamatsu Photonics K.K. | Photoemitter, electron tube, and photodetector |
| CN101251416A (en) * | 2008-04-10 | 2008-08-27 | 电子科技大学 | Ultraviolet flame sensor and manufacturing method thereof |
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