CN101251416A - Ultraviolet flame sensor and manufacturing method thereof - Google Patents
Ultraviolet flame sensor and manufacturing method thereof Download PDFInfo
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- CN101251416A CN101251416A CNA200810044571XA CN200810044571A CN101251416A CN 101251416 A CN101251416 A CN 101251416A CN A200810044571X A CNA200810044571X A CN A200810044571XA CN 200810044571 A CN200810044571 A CN 200810044571A CN 101251416 A CN101251416 A CN 101251416A
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Abstract
An ultraviolet flame sensor and a manufacturing method thereof relate to a solar blind type ultraviolet flame sensor. The invention provides the ultraviolet flame sensor with simple structure, small size, high stability, high strength and high linearity and sensitivity, and the sensor manufacturing method with good versatility, simple technique and low cost. The invention is characterized in that: the ultraviolet flame sensor comprises a uviol piece, a meshed anode which is arranged on the uviol piece, a cathode substrate glass piece, a photocathode which is arranged on the cathode substrate glass piece, a glass ring which is arranged between the cathode and the anode, a vacuum orifice which is arranged on the glass ring, a plastic packaged base which is arranged under the cathode substrate glass piece, a cathode and an anode lead which are adhered to the plastic packaged base and are respectively connected with the cathode and the anode, and a plastic casing which is arranged around the plastic packaged base, the glass ring and the glass piece.
Description
Technical field
The invention belongs to the flame detector field, particularly a kind of ultraviolet flame sensor and preparation method thereof.
Background technology
The ultraviolet detection technology is the another important detecting technique that grows up after infrared and laser technology, it has a extensive future fields such as medical science, biology, military affairs, the national defence and the development of the national economy to a country all have important meaning, can be widely used in the aspect such as wake flame detection, guided missile detection and guidance, ultraviolet private communication technology, fire alarm of aircraft, rocket etc.
The tradition ultraviolet flame sensor is to adopt the ultraviolet light fulgurite as sensitive detection parts, can detect the 1800-2600 in the flame spectrum before flame does not form obvious flare as yet
Ultraviolet ray, thereby send a kind of device of alerting signal.The early stage Ultraviolet sensor that uses is owing to the restriction that is subjected to technical merit and technological level, and is relatively poor to the inhibition ability of environmental interference in actual applications, is easy to generate false alarm.Existing ultraviolet flame sensor as the ultraviolet flame sensor of offshore companies such as loose Co., Ltd. of domestic corporation and Japanese shore such as Chengdu rising sun light incorporated company, is all made based on the principle of ultraviolet light fulgurite.It adopts glass structure, mainly is made of uviol ball, wire or sheet photoelectricity anode and cathode, and not only volume is big, installs inconveniently, and the reliability of sensor and consistance are not good enough, has much room for improvement in performance aspect the rigidity of detector and the shock resistance especially.Existing ultraviolet light sensing tube all adopts glass spherical shell vacuum pumping method in hot environment to make, complex process, cost height.And glass shell is in molten condition in the hot environment, is difficult to guarantee the distance and the depth of parallelism between negative electrode and the anode in manufacturing process, and is higher to the performance requirement of glass material simultaneously.Therefore, it is necessary researching and developing and promote the use of small and exquisite reliable Ultraviolet sensor and general Ultraviolet sensor preparation technology strong, that cost is low real.
Summary of the invention
The object of the present invention is to provide that a kind of structure is small and exquisite, fiduciary level is highly sensitive, resistance to impact is good, the rigidity of structure is high, the linearity is high, the ultraviolet flame sensor that measurement stability is good.
Another object of the present invention is to provide a kind of method for making of ultraviolet flame sensor.
Described ultraviolet flame sensor, its structure comprises: a uviol sheet; One meshed anode, this anode layer are produced on the uviol sheet; One cathode substrate glass sheet; One photocathode, this layer are produced on above the cathode substrate glass sheet; One glass ring, this glass ring are produced in the middle of negative electrode and the anode; One vacuum orifice, this vacuum orifice is produced on the glass ring; One plastic packaging base, this base are produced on below the cathode substrate glass sheet; One negative electrode and anode lead wire, this extension line are bonded on the plastic packaging base, are connected with anode with negative electrode respectively; One plastic casing, this shell is produced on the plastic packaging base, around glass ring and the glass sheet.
Wherein said uviol sheet, cathode substrate glass sheet and glass ring are high uviol, by annular seal space that vacuumizes of bonding formation.
Wherein said meshed anode and photocathode are the above metallic nickel of 99.99% purity, and electrode anode is that netted nickel is plated on the uviol sheet, and photocathode is plated in the cathode substrate glass sheet, realize by plated film and photoetching process.
Leave vacuum orifice above the wherein said glass ring.Cavity is vacuumized and fills a certain proportion of hydrogen, helium, neon.
Wherein negative electrode and anode lead wire are bonded on the plastic packaging base, and electrode and lead-foot-line are to stick to around the glass ring by line insulation.
Wherein the pin of anode and cathode pin and fixation thereof is to iron erosion on the plastic packaging base, and plastic packaging base, glass ring and glass sheet and plastic housing are sealed to one, the fixed cavity position.
A kind of ultraviolet flame sensor and preparation method thereof is characterized in that comprising the steps:
(1) uviol sheet sample surfaces is handled: utilize ketone and alcohol reagent that sample is cleaned at first successively, remove the organism on surface; Utilize HNO3: H2O=1: (1～3) or hydrochloric acid clean sample, remove the oxide on surface; Utilize the deionized water rinsing sample then, dry for standby;
(2) plating high purity nickel photocathode on the uviol sheet;
(3) splash-proofing sputtering metal nickel after gluing, photoetching, development, baking on the uviol that will do anode is made the net metal anode with peeling off legal system;
(4) after the glass lined egative film of carrying out electrode uses toluene, acetone, anhydrous alcohol ultrasonic respectively, dry with deionized water rinsing;
(5) in super-clean environment, electroded uviol sheet is aimed at glass ring subsequently, and it is contacted carry out bondingly, form glass chamber;
(6) glass chamber is vacuumized, and canned a certain proportion of hydrogen, helium, neon, vacuum orifice is sealed;
(7) the anode and cathode extension line is bonded in the plastic packaging substrate welding pin;
(8) be coated with one deck bonding agent at sensor sealing position, load onto the grinding tool preheating one by one, encapsulating storEs in room temperature environment behind the encapsulating, removes bubble simultaneously, implants baking oven in batches, is heating and curing simultaneously;
(9) finish encapsulation, the device preparation finishes.
Compare with existing ultraviolet flame sensor technology, the present invention has following actively useful effect:
(1) compare with existing ultraviolet light photo Manifold technology, the present invention is owing to adopt integrated circuit processing technology and MEMS processing technology, and the solid envelope optoelectronic sensor that provides has the bijou characteristics of structure.
(2) the present invention is owing to adopt plated electrode on the parallel glass sheet, and this design is convenient to guarantee for a long time the anode and cathode electrode separation and the depth of parallelism, and it is little that device performance is influenced by working time and environmental interference.
(3) the netted surface anode and the face photocathode structure of the present invention's employing have enlarged the photoelectron contact area, have strengthened response signal, have improved detection sensitivity.
(4) in traditional ultraviolet flame detector production technology, be under hot environment, to vacuumize, be unfavorable for guaranteeing the electrode separation and the depth of parallelism, and introduce impurity easily.The present invention adopts the integrated circuit evacuation process, does not need hot environment, and easier assurance electrode distance and sensitivity, is convenient to processing and making.
(5) compare with existing sensor, the present invention makes detector that bigger improvement arranged aspect the rigidity of structure and the shock resistance owing to adopt integrated solid seal structure, is beneficial to the reliability and stability of raising work.Can be applicable in the high g acceleration environment, detect as the flame in the environment such as spacecraft, rocket, aircraft.
(6) the present invention adopts direct insertion pin, and is easy to connect, fixing reliable, improved detector shock resistance anti-vibration ability.
(7) compare with existing glass bead structure ultraviolet light fulgurite, structure of the present invention is small and exquisite, and the installation aspect is convenient to integratedly, constitutes the detection array group.
(8) the sensor material processing technology that the present invention introduced has versatility, is easy to large-scale production, compares with the complicated preparation section of existing ultraviolet light fulgurite, and its cost of manufacture is low.
Description of drawings:
Fig. 1 is the structural drawing of ultraviolet flame sensor.
Fig. 2 is the vertical view of ultraviolet flame sensor.
Fig. 3 is a vacuum glass cavity configuration synoptic diagram.
Fig. 4 is a nickel screen shape anode synoptic diagram.
Fig. 5 is a detector pin key diagram.
Embodiment:
Further specify below with reference to the ultraviolet flame sensor of accompanying drawing the technical program.
With reference to figure 1 and Fig. 2, the present invention is the new ultra-violet flame sensor that a kind of structure is small and exquisite, the good rigidity of resistance to impact is high.Electrode anode 2 is by being plated in uviol sheet 1 lower floor, and photocathode 4 is plated in cathode substrate glass sheet 3 upper surfaces, and glass sheet and glass ring 5 constitute glass chambers up and down.Glass chamber is bonded on the plastic packaging base 7, and contact conductor is connected to ironing on the plastic packaging base 7 and loses circuitry lines 10, is connected with each pin 8.Plastic packaging base 7, glass chamber become an integrated small and exquisite detector with plastic housing 9 seal bond.Thereby structurally relatively firmly, improved the rigidity and the shock resistance of detector, improved the reliability and stability of work.
With reference to figure 3, main part of the present invention, nickel screen shape anode 2 is to be plated in uviol sheet 1 lower floor, and photocathode 4 is plated in cathode substrate glass sheet 3 upper surfaces, and glass sheet is attached to glass ring 5 formations and surveys cavity up and down.Anode and cathode adopts the face electrode that is plated in glass sheet, and contact area increases, and helps detector sensitivity and improves.Glass ring has guaranteed the fixing and pole plate depth of parallelism of the spacing between anode and cathode.Reserve vacuum orifice 6 on the glass ring 5,, vacuumize at normal temperatures and carry out, can avoid the adverse effect of bringing under the high-temperature operation environment for vacuumizing and seal usefulness.Charge into a certain proportion of hydrogen, helium, neon again with its sealing after vacuumizing inflation.
With reference to figure 4, nickel screen shape anode 2 is plated in uviol sheet 1 lower floor.Employing is photo-etched into reticulated cell, and glazed area is than being 40%-80%.
With reference to figure 5, on silicon base, iron the erosion circuit, the circuitry lines 10 of being drawn by nickel screen shape anode 2 and photocathode 4 is connected with pin 8 respectively, and the pin 8 of other its fixations also irons erosion on plastic packaging base 7.Plastic housing 9, glass chamber are bonded in the plastic packaging substrate 7, and pin 8 is fixing.Because direct insertion pin is easy to connect, fixing reliable, improved detector shock resistance anti-vibration ability and suitable environment effectively, and be convenient to install.
Claims (7)
1, a kind of ultraviolet flame sensor is characterized in that, it comprises:
One uviol sheet;
One meshed anode, this anode layer are produced on the uviol sheet;
One cathode substrate glass sheet;
One photocathode, this layer are produced on above the cathode substrate glass sheet;
One glass ring, this glass ring are produced in the middle of negative electrode and the anode;
One vacuum orifice, this vacuum orifice is produced on the glass ring;
One plastic packaging base, this base are produced on below the cathode substrate glass sheet;
One negative electrode and anode lead wire, this extension line are bonded on the plastic packaging base, are connected with anode with negative electrode respectively;
One plastic casing, this shell is produced on the plastic packaging base, around glass ring and the glass sheet.
2, ultraviolet flame sensor according to claim 1 is characterized in that, uviol sheet, cathode substrate glass sheet and glass ring are high uviol, by annular seal space that vacuumizes of bonding formation.
3, ultraviolet flame sensor according to claim 1, it is characterized in that meshed anode and photocathode are the above metallic nickel of 99.99% purity, electrode anode is that netted nickel is plated on the uviol sheet, photocathode is plated in the cathode substrate glass sheet, realizes by plated film and photoetching process.
4, ultraviolet flame sensor according to claim 1 is characterized in that, leaves vacuum orifice above the glass ring.Cavity is vacuumized and fills a certain proportion of hydrogen, helium, neon.
5, ultraviolet flame sensor according to claim 1 is characterized in that, negative electrode and anode lead wire are bonded on the plastic packaging base, and electrode and lead-foot-line are to stick to around the glass ring by line insulation.
6, ultraviolet flame sensor according to claim 1 is characterized in that, the pin of anode and cathode pin and fixation thereof is to iron erosion on the plastic packaging base, the plastic packaging base, and glass ring and glass sheet and plastic housing are sealed to one, the fixed cavity position.
7, a kind of manufacturing method of ultraviolet flame sensor according to claim 1 is characterized in that adopting following process steps:
(1) uviol sheet sample surfaces is handled: utilize ketone and alcohol reagent that sample is cleaned at first successively, remove the organism on surface; Utilize HNO3: H2O=1: (1～3) or hydrochloric acid clean sample, remove the oxide on surface; Utilize the deionized water rinsing sample then, dry for standby;
(2) plating high purity nickel photocathode on the uviol sheet;
(3) splash-proofing sputtering metal nickel after gluing, photoetching, development, baking on the uviol that will do anode is made the net metal anode with peeling off legal system;
(4) after the glass lined egative film of carrying out electrode uses toluene, acetone, anhydrous alcohol ultrasonic respectively, dry with deionized water rinsing;
(5) in super-clean environment, electroded uviol sheet is aimed at glass ring subsequently, and it is contacted carry out bondingly, form glass chamber;
(6) glass chamber is vacuumized, and canned a certain proportion of hydrogen, helium, neon, vacuum orifice is sealed;
(7) the anode and cathode extension line is bonded in the plastic packaging substrate welding pin;
(8) be coated with one deck bonding agent at sensor sealing position, load onto the grinding tool preheating one by one, encapsulating storEs in room temperature environment behind the encapsulating, removes bubble simultaneously, implants baking oven in batches, is heating and curing simultaneously;
(9) finish encapsulation, the device preparation finishes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200810044571XA CN101251416A (en) | 2008-04-10 | 2008-04-10 | Ultraviolet flame sensor and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200810044571XA CN101251416A (en) | 2008-04-10 | 2008-04-10 | Ultraviolet flame sensor and manufacturing method thereof |
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| Publication Number | Publication Date |
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| CN101251416A true CN101251416A (en) | 2008-08-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNA200810044571XA Pending CN101251416A (en) | 2008-04-10 | 2008-04-10 | Ultraviolet flame sensor and manufacturing method thereof |
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| CN (1) | CN101251416A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102324369A (en) * | 2011-09-14 | 2012-01-18 | 成都凯迈科技有限公司 | Double-row direct insertion type ultraviolet photoelectric tube |
| CN102324353A (en) * | 2011-09-14 | 2012-01-18 | 成都凯迈科技有限公司 | Making method of solid ultraviolet phototube |
| CN102332386A (en) * | 2011-09-14 | 2012-01-25 | 成都凯迈科技有限公司 | Solid ultraviolet phototube |
| CN102856152A (en) * | 2011-06-30 | 2013-01-02 | 安徽华东光电技术研究所 | Solar blind type air inflation ultraviolet detector and manufacturing method thereof |
| CN103604497A (en) * | 2013-11-26 | 2014-02-26 | 四川天微电子有限责任公司 | Ultraviolet light detection sensor |
| CN104048751A (en) * | 2014-06-30 | 2014-09-17 | 四川天微电子有限责任公司 | Flame detector with good adaptive capacity to thermal stress |
| CN104260020A (en) * | 2014-09-17 | 2015-01-07 | 陕西航空电气有限责任公司 | Ultraviolet photoelectric sensor positioning fixture and mounting method thereof |
| CN106093606A (en) * | 2016-07-25 | 2016-11-09 | 华北电力大学 | Flame monitoring apparatus based on silk screen electrostatic transducer and method |
| CN102856152B (en) * | 2011-06-30 | 2016-12-14 | 安徽华东光电技术研究所 | A kind of blind type air inflation ultraviolet detector and preparation method thereof |
| TWI567408B (en) * | 2015-08-18 | 2017-01-21 | China Steel Corp | Flame Detector Inspection Device |
| US11473973B2 (en) | 2018-11-30 | 2022-10-18 | Carrier Corporation | Ultraviolet flame detector |
-
2008
- 2008-04-10 CN CNA200810044571XA patent/CN101251416A/en active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102856152A (en) * | 2011-06-30 | 2013-01-02 | 安徽华东光电技术研究所 | Solar blind type air inflation ultraviolet detector and manufacturing method thereof |
| CN102856152B (en) * | 2011-06-30 | 2016-12-14 | 安徽华东光电技术研究所 | A kind of blind type air inflation ultraviolet detector and preparation method thereof |
| CN102324353B (en) * | 2011-09-14 | 2015-09-09 | 成都凯迈科技有限公司 | Making method of solid ultraviolet phototube |
| CN102324353A (en) * | 2011-09-14 | 2012-01-18 | 成都凯迈科技有限公司 | Making method of solid ultraviolet phototube |
| CN102332386A (en) * | 2011-09-14 | 2012-01-25 | 成都凯迈科技有限公司 | Solid ultraviolet phototube |
| CN102332386B (en) * | 2011-09-14 | 2015-09-23 | 成都凯迈科技有限公司 | A kind of solid ultraviolet photoelectric tube |
| CN102324369A (en) * | 2011-09-14 | 2012-01-18 | 成都凯迈科技有限公司 | Double-row direct insertion type ultraviolet photoelectric tube |
| CN103604497B (en) * | 2013-11-26 | 2015-04-08 | 四川天微电子有限责任公司 | Ultraviolet light detection sensor |
| CN103604497A (en) * | 2013-11-26 | 2014-02-26 | 四川天微电子有限责任公司 | Ultraviolet light detection sensor |
| CN104048751A (en) * | 2014-06-30 | 2014-09-17 | 四川天微电子有限责任公司 | Flame detector with good adaptive capacity to thermal stress |
| CN104260020A (en) * | 2014-09-17 | 2015-01-07 | 陕西航空电气有限责任公司 | Ultraviolet photoelectric sensor positioning fixture and mounting method thereof |
| CN104260020B (en) * | 2014-09-17 | 2016-03-09 | 陕西航空电气有限责任公司 | A kind of installation method of ultraviolet light photo inductor |
| TWI567408B (en) * | 2015-08-18 | 2017-01-21 | China Steel Corp | Flame Detector Inspection Device |
| CN106093606A (en) * | 2016-07-25 | 2016-11-09 | 华北电力大学 | Flame monitoring apparatus based on silk screen electrostatic transducer and method |
| CN106093606B (en) * | 2016-07-25 | 2019-06-18 | 华北电力大学 | Flame monitoring apparatus and method based on silk screen electrostatic transducer |
| US11473973B2 (en) | 2018-11-30 | 2022-10-18 | Carrier Corporation | Ultraviolet flame detector |
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Open date: 20080827 |