CN102324353B - Making method of solid ultraviolet phototube - Google Patents
Making method of solid ultraviolet phototube Download PDFInfo
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- CN102324353B CN102324353B CN201110271458.7A CN201110271458A CN102324353B CN 102324353 B CN102324353 B CN 102324353B CN 201110271458 A CN201110271458 A CN 201110271458A CN 102324353 B CN102324353 B CN 102324353B
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- 238000000034 method Methods 0.000 title claims abstract description 72
- 239000007787 solid Substances 0.000 title claims abstract description 36
- 238000009413 insulation Methods 0.000 claims abstract description 46
- 238000004519 manufacturing process Methods 0.000 claims abstract description 34
- 239000000463 material Substances 0.000 claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims abstract description 16
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 25
- 238000007373 indentation Methods 0.000 claims description 22
- 238000001771 vacuum deposition Methods 0.000 claims description 12
- 239000011159 matrix material Substances 0.000 claims description 11
- 239000000919 ceramic Substances 0.000 claims description 7
- 238000009738 saturating Methods 0.000 claims description 7
- 238000007747 plating Methods 0.000 claims description 6
- 238000001259 photo etching Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims description 4
- 238000001465 metallisation Methods 0.000 claims description 3
- 229910000679 solder Inorganic materials 0.000 claims description 3
- 230000035939 shock Effects 0.000 abstract description 4
- 239000011521 glass Substances 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000036461 convulsion Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 230000035800 maturation Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007363 ring formation reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The invention discloses a kind of manufacture method of solid ultraviolet photoelectric tube, the method step comprises, and adopts purple material to make optical window and anode; Make electrode cathode; Make electrode insulation part, electrode insulation part comprises the first electrode insulation part and the second electrode insulation part, and it is connected with anode and negative electrode respectively; Negative electrode pin and anode pin are connected to negative electrode lower surface; Anode pin, negative electrode pin are connected conducting respectively with anode, negative electrode; Shell and optical window sealing-in are integrated; Shell and base are encapsulated to vacuumize and connects as one.The solid ultraviolet photoelectric tube that method of the present invention makes ensure that anode and negative electrode anode-cathode distance and the depth of parallelism, and the solid ultraviolet photoelectric tube of making is highly sensitive, volume is little, production automation degree is high, shock resistance good impact resistance.
Description
Technical field
The present invention relates to a kind of manufacture method of ultraviolet phototube, particularly a kind of manufacture method of solid ultraviolet photoelectric tube.
Background technology
Ultraviolet phototube is often applied in flame monitoring and fire alarm, current ultraviolet phototube is all adopt uviol or quartz glass as shell and optical window, utilize the metal material such as molybdenum, nickel as photoelectron emissions negative electrode, with glass bulb, anode and cathode is encapsulated in inside photoelectric tube, then by being filled with working gas again after exhaust, complete as making bulb.Conventional fabrication method complex process, the ultraviolet pipe volume of making is large, intensity is little, sensitivity is low.
Application number is that the Chinese invention patent of 200810044571.X discloses a kind of ultraviolet flame sensor and preparation method thereof, comprises uviol sheet; Meshed anode, this anode layer is produced on uviol sheet; Cathode substrate sheet glass; Photocathode, this layer is produced on above cathode substrate sheet glass; Glass ring, this glass ring is produced in the middle of negative electrode and anode; Vacuum orifice, this vacuum orifice is produced on glass ring; Plastic packaging base, this base is produced on below cathode substrate glass; Negative electrode and anode lead wire, this lead-out wire is bonded on plastic packaging base, is connected respectively with negative electrode with anode lead wire; Plastic casing, this shell is produced on around plastic packaging base, glass ring and sheet glass.This invention structure is simple, size is little, intensity is high, sensitivity is higher.But, in making ultraviolet flame sensor process, during glass ring formation glass chamber bonding with electroded uviol sheet, be difficult to ensure the anode-cathode distance between negative electrode and anode and the depth of parallelism, affect devices function time and useful life, rate of finished products and the consistency of product are low, and production automation degree is low, shock resistance impact resistance is poor.
Summary of the invention
The object of the invention is to overcome above-mentioned deficiency existing in prior art, a kind of manufacture method of solid ultraviolet photoelectric tube is provided, anode-cathode distance between the method guarantee anode and negative electrode and the depth of parallelism, the solid ultraviolet photoelectric tube simultaneously utilizing the method to make is highly sensitive, volume is little, production automation degree is high, shock resistance good impact resistance.
In order to realize foregoing invention object, the present invention by the following technical solutions:
A manufacture method for solid ultraviolet photoelectric tube, step comprises as follows:
A) purple material is adopted to make optical window and anode; Make electrode cathode; Make electrode insulation part, electrode insulation part comprises the first electrode insulation part and the second electrode insulation part;
B) respectively the first electrode insulation part is connected with anode and cathode metallization with the second electrode insulation part; Negative electrode pin and the metallization of anode pin are connected to negative electrode lower surface; Anode pin is connected conducting with anode, and negative electrode pin is connected conducting with negative electrode; Anode pin and negative electrode pin being arranged stretches out outside base, and described anode pin and base junction are separated by nonmetallic materials separator, and described negative electrode pin is communicated with base.
C) maybe can cut down material by glass solder shell and optical window sealing-in are integrated;
D) shell and base are encapsulated to vacuumize connect as one.
The manufacture method of described step a) Anodic comprises saturating purple material matrix surface employing technique for vacuum coating metal-coated membrane making anode, and by photoetching, mask, etching process, described metal film is made netted or filament.
The manufacture method of described step a) Anodic also comprises and anode is attached to the optical window back side and optical window is made of one structure.
In described step b), the manufacture method of electrode insulation part comprises employing technique for vacuum coating at ceramic matrix plating metal on surface film.
In described step a), the manufacture method of negative electrode comprises employing technique for vacuum coating at ceramic matrix plating metal on surface film, and this metal film is negative electrode.
Described step b) Anodic pin is connected conducting with anode, and negative electrode pin is connected conducting method with negative electrode comprises:
On described cathode surface, inside the first electrode insulation part, place is provided with the vertical indentation of at least one circle first, on described cathode surface, inside the second electrode insulation part, place is provided with the vertical indentation of at least one circle second, described cathode surface metal film is vertically broken as three parts, i.e. first anode district, cathodic region, second plate district by the described first vertical indentation and the second vertical indentation;
At described first anode district or lower end, second plate district jointed anode pin, connect negative electrode pin in the lower end in described cathodic region.
Described step b) Anodic pin is connected conducting with anode, and negative electrode pin is connected conducting method with negative electrode can also be:
Described cathode surface is provided with the vertical indentation of at least one circle, and cathode surface metal film is vertically broken as two parts by described vertical indentation, i.e. first area and second area, and described vertical indentation is located inside the second electrode insulation part;
First electrode insulation part is provided with at least one circle transverse scribes, and the first electrode insulation part metal film on surface is laterally broken as two parts by described transverse scribes;
Negative electrode pin is connected, at described second area lower end jointed anode pin in lower end, described first area.
compared with prior art, beneficial effect of the present invention:
1, the method for the present invention accuracy of electrode processing that saturating purple material makes through vacuum coating photoetching corrosion reaches micron number magnitude, electrode insulation part is connected between the anode and cathode by the method for sealing-in of metallizing, ensure that the anode-cathode distance between anode and negative electrode and the depth of parallelism, anode-cathode distance and the depth of parallelism margin of tolerance control within 10 μm, devices function time and long service life, good stability, highly sensitive.
2, the light transmittance that is thread or meshed anode that the solid ultraviolet photoelectric tube that method of the present invention makes adopts saturating purple material to make is good, and negative electrode is face electrode, expands photoelectron contact area, enhances optoelectronic induction intensity.
3, compared with conventional ultra-violet photoelectric tube, the solid ultraviolet photoelectric tube that method of the present invention makes adopts solid encapsulation structure, sealing-in is that after finished product, all parts become a rigid body, to ensure under certain jerk, part and the relative position of solid ultraviolet photoelectric tube are constant, and impact resistance anti-vibration resistance is good;
4, the solid ultraviolet photoelectric tube that method of the present invention makes adopts the structure of integrated circuit and footprint design to make ultraviolet phototube, use the production and processing technology of integrated circuit maturation, the solid ultraviolet photoelectric tube volume of production is little, production efficiency is high, rate of finished products is high.
accompanying drawing illustrates:
Fig. 1 is the structure chart of the solid ultraviolet photoelectric tube embodiment 1 that method of the present invention makes;
Fig. 2 is the structure chart of the solid ultraviolet photoelectric tube embodiment 2 that method of the present invention makes;
Fig. 3 is the meshed anode figure that method of the present invention makes;
Fig. 4 is the filament anode figure that method of the present invention makes;
Mark in figure: 1-shell, 2-optical window, 3-anode, 4-negative electrode, 5-base, 6-electrode insulation part, 61-first electrode insulation part, 62-second electrode insulation part, 7-anode pin, 8-negative electrode pin, 9-separator.
Embodiment
Below in conjunction with test example and embodiment, the present invention is described in further detail.But this should be interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to following embodiment, all technology realized based on content of the present invention all belong to scope of the present invention.
embodiment 1
As shown in Figure 1, the step of the solid ultraviolet photoelectric tube that method of the present invention makes is as follows, comprising:
A) purple material is adopted to make optical window 2, saturating purple material matrix surface is adopted technique for vacuum coating is gold-plated, nickel, tungsten, molybdenum and the metal film such as can to cut down and make anode 3, and by photoetching, mask, etching process, described metal film is made netted or filament, as shown in Figure 3, Figure 4.Described netted or filament anode 3 is attached to optical window 2 back side and optical window 2 is made of one structure, difficult drop-off, improve device lifetime and service time; Adopt technique for vacuum coating at ceramic matrix plating nickel on surface or molybdenum film production negative electrode 4, this metal film is as negative electrode 4.Negative electrode 4 is face electrode, expands photoelectron contact area, strengthens photoelectric effect response speed, improves sensitivity; Adopt ceramic matrix, at ceramic matrix plating metal on surface film production electrode insulation part 6, described electrode insulation part 6 comprises the first electrode insulation part 61 and the second electrode insulation part 62, lays respectively at both sides, region between negative electrode 4 and anode 3.Described first electrode insulation part 61 and the second electrode insulation part 62 upper and lower surface parallelism tolerance all control within 10um, guarantee the anode-cathode distance between anode 3 and negative electrode 4 and the depth of parallelism, and metal-coated membrane is convenient to be connected with anode 3 and negative electrode 4.It should be noted that, anode 3 and optical window 2, negative electrode 4 and electrode insulation part 6, the making order in no particular order of these parts;
B) the vertical indentation of at least one circle first is provided with at place inside the first electrode insulation part 61 by lithography corrosion process on the surface at described negative electrode 4, described negative electrode 4 is provided with the vertical indentation of at least one circle second at place inside the second electrode insulation part 62 on the surface, described negative electrode 4 metal film on surface is vertically broken as three parts, i.e. first anode district, cathodic region, second plate district by the described first vertical indentation and the second vertical indentation; By the method for sealing-in of metallizing at described first anode district or lower end, second plate district jointed anode pin 7, negative electrode pin 8 is connected in the lower end in described cathodic region by the method for sealing-in of metallizing, anode pin 7 and negative electrode pin 8 stretch out outside base 5, described anode pin 7 is separated by nonmetallic materials separator 9 with base 5 junction, described negative electrode pin 8 is communicated with base 5, electrode pin can play fixed support effect, makes the solid ultraviolet photoelectric tube structure of making more firm;
C) maybe can cut down material by glass solder shell 1 and optical window 2 sealing-in are integrated;
D) shell 1 and base 5 are encapsulated to vacuumize connect as one.
embodiment 2
As shown in Figure 2, similar to embodiment 1 of the solid ultraviolet photoelectric tube structure that the method for the present embodiment makes, its difference is, the vertical indentation of two circles first is provided with at place inside the first electrode insulation part 61 on the surface at described negative electrode 4 by lithography corrosion process, described negative electrode 4 is provided with the vertical indentation of two circles second at place inside the second electrode insulation part 62 on the surface, described negative electrode 4 metal film on surface is vertically broken as three parts, i.e. first anode district, cathodic region, second plate district by the described first vertical indentation and the second vertical indentation; By the method for sealing-in of metallizing at described first anode district lower end jointed anode pin 7, connect negative electrode pin 8 by the method for sealing-in of metallizing in the lower end in described cathodic region.Realize the connection of anode 3 and anode pin 7, negative electrode 4 and negative electrode pin 8 like this, electrode pin can play fixed support effect, makes the solid ultraviolet photoelectric tube structure of making more firm.
In sum, the solid ultraviolet photoelectric tube that method of the present invention makes connects electrode insulation part between the anode and cathode, ensure that the anode-cathode distance between anode and negative electrode and the depth of parallelism, anode-cathode distance and the depth of parallelism margin of tolerance control within 10 μm, devices function time and long service life, good stability, highly sensitive; The light transmittance that is thread or meshed anode that the solid ultraviolet photoelectric tube that method of the present invention makes adopts saturating purple material to make is good, and negative electrode is face electrode, expands photoelectron contact area, enhances photoelectric effect response speed; Compared with conventional ultra-violet photoelectric tube, the solid ultraviolet photoelectric tube that method of the present invention makes adopts solid encapsulation structure, sealing-in is that after finished product, all parts become a rigid body, to ensure under certain jerk, part and the relative position of solid ultraviolet photoelectric tube are constant, and shock resistance anti-vibration resistance is good; The solid ultraviolet photoelectric tube that method of the present invention makes adopts the structure of integrated circuit and footprint design to make ultraviolet phototube, use the production and processing technology of integrated circuit maturation, the solid ultraviolet photoelectric tube volume of production is little, production efficiency is high, rate of finished products is high.
Claims (8)
1. a manufacture method for solid ultraviolet photoelectric tube, is characterized in that, described method step comprises:
A) purple material is adopted to make optical window (2) and anode (3); Make electrode cathode (4); Make electrode insulation part (6), electrode insulation part (6) comprises the first electrode insulation part (61) and the second electrode insulation part (62); Wherein, adopt technique for vacuum coating to make anode (3), adopt technique for vacuum coating to make negative electrode (4), described first electrode insulation part (61) and the second electrode insulation part (62) upper and lower surface parallelism tolerance all control within 10um;
B) the first electrode insulation part (61) and the second electrode insulation part (62) are metallized with anode (3) and negative electrode (4) be connected respectively; Negative electrode pin (7) and anode pin (8) metallization are connected to negative electrode (4) lower surface; Anode pin (7) is connected conducting with anode (3), and negative electrode pin (8) is connected conducting with negative electrode (4); Anode pin (7) and negative electrode pin (8) being arranged stretches out outside base (5), and described anode pin (7) is separated by nonmetallic materials separator (9) with base (5) junction, and described negative electrode pin (8) is communicated with base (5);
C) maybe can cut down material by glass solder shell (1) and optical window (2) sealing-in are integrated;
D) shell (1) and base (5) are encapsulated to vacuumize connect as one.
2. the manufacture method of solid ultraviolet photoelectric tube according to claim 1, it is characterized in that, the manufacture method of described step a) Anodic (3) comprises saturating purple material matrix surface employing technique for vacuum coating metal-coated membrane making anode (3), and makes netted by photoetching, mask, etching process by described metal film.
3. the manufacture method of solid ultraviolet photoelectric tube according to claim 1, it is characterized in that, the manufacture method of described step a) Anodic (3) comprises saturating purple material matrix surface employing technique for vacuum coating metal-coated membrane making anode (3), and makes thread by photoetching, mask, etching process by described metal film.
4. the manufacture method of the solid ultraviolet photoelectric tube according to Claims 2 or 3, is characterized in that, the manufacture method of described step a) Anodic (3) also comprises and anode (3) is attached to optical window (2) back side and optical window (2) is made of one structure.
5. the manufacture method of solid ultraviolet photoelectric tube according to claim 4, is characterized in that, in described step b), the manufacture method of electrode insulation part (6) comprises employing technique for vacuum coating at ceramic matrix plating metal on surface film.
6. the manufacture method of solid ultraviolet photoelectric tube according to claim 5, is characterized in that, in described step a), the manufacture method of negative electrode (4) comprises employing technique for vacuum coating at ceramic matrix plating metal on surface film, and this metal film is negative electrode (4).
7. the manufacture method of solid ultraviolet photoelectric tube according to claim 6, is characterized in that, described step b) Anodic pin (7) comprising with the method for the connection conducting of negative electrode (4) with anode (3), negative electrode pin (8):
The vertical indentation of at least one circle first is provided with near the first electrode insulation part (61) inner side place on the surface at described negative electrode (4), the vertical indentation of at least one circle second is provided with near the second electrode insulation part (62) inner side place on the surface at described negative electrode (4), described negative electrode (4) metal film on surface is vertically broken as three parts, i.e. first anode district, cathodic region, second plate district by the described first vertical indentation and the second vertical indentation;
In described first anode district or lower end, second plate district jointed anode pin (7), connect negative electrode pin (8) in the lower end in described cathodic region.
8. the manufacture method of solid ultraviolet photoelectric tube according to claim 6, is characterized in that, the method that described step b) Anodic pin (7) is connected conducting with anode (3), negative electrode pin (8) with negative electrode (4) comprises:
The vertical indentation of at least one circle is provided with on the surface at described negative electrode (4), negative electrode (4) metal film on surface is vertically broken as two parts by described vertical indentation, i.e. first area and second area, and described vertical indentation is near the second electrode insulation part (62) inner side place;
First electrode insulation part (61) is provided with at least one circle transverse scribes, and the first electrode insulation part (61) metal film on surface is laterally broken as two parts by described transverse scribes;
Negative electrode pin (8) is connected, described second area lower end jointed anode pin (7) in lower end, described first area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110271458.7A CN102324353B (en) | 2011-09-14 | 2011-09-14 | Making method of solid ultraviolet phototube |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110271458.7A CN102324353B (en) | 2011-09-14 | 2011-09-14 | Making method of solid ultraviolet phototube |
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| CN102324353A CN102324353A (en) | 2012-01-18 |
| CN102324353B true CN102324353B (en) | 2015-09-09 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4845355A (en) * | 1985-12-20 | 1989-07-04 | Canon Kabushiki Kaisha | Photoconductive type sensor and its driving method and apparatus |
| EP0383463A2 (en) * | 1989-02-13 | 1990-08-22 | Galileo Electro-Optics Corp. | Conductively cooled microchannel plates |
| EP0642147A1 (en) * | 1993-09-01 | 1995-03-08 | Hamamatsu Photonics K.K. | Photoemitter, electron tube, and photodetector |
| CN101251416A (en) * | 2008-04-10 | 2008-08-27 | 电子科技大学 | Ultraviolet flame sensor and manufacturing method thereof |
-
2011
- 2011-09-14 CN CN201110271458.7A patent/CN102324353B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4845355A (en) * | 1985-12-20 | 1989-07-04 | Canon Kabushiki Kaisha | Photoconductive type sensor and its driving method and apparatus |
| EP0383463A2 (en) * | 1989-02-13 | 1990-08-22 | Galileo Electro-Optics Corp. | Conductively cooled microchannel plates |
| EP0642147A1 (en) * | 1993-09-01 | 1995-03-08 | Hamamatsu Photonics K.K. | Photoemitter, electron tube, and photodetector |
| CN101251416A (en) * | 2008-04-10 | 2008-08-27 | 电子科技大学 | Ultraviolet flame sensor and manufacturing method thereof |
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| CN102324353A (en) | 2012-01-18 |
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Effective date of registration: 20240401 Address after: 610000 Shunkang Xinke Incubation Park, No. 4 Xinhang Road, high tech Zone (West), Chengdu, Sichuan Province Patentee after: CHENGDU QITE SAFETY TECHNOLOGY CO.,LTD. Country or region after: China Address before: 610500 Xingong Avenue, Xindu Industrial East District, Chengdu, Sichuan Patentee before: CHENGDU K & M METALS Co.,Ltd. Country or region before: China |