CN102324353A - Making method of solid ultraviolet phototube - Google Patents
Making method of solid ultraviolet phototube Download PDFInfo
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- CN102324353A CN102324353A CN201110271458A CN201110271458A CN102324353A CN 102324353 A CN102324353 A CN 102324353A CN 201110271458 A CN201110271458 A CN 201110271458A CN 201110271458 A CN201110271458 A CN 201110271458A CN 102324353 A CN102324353 A CN 102324353A
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- 238000000034 method Methods 0.000 title claims abstract description 74
- 239000007787 solid Substances 0.000 title claims abstract description 36
- 238000004519 manufacturing process Methods 0.000 claims abstract description 34
- 239000000463 material Substances 0.000 claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims abstract description 16
- 238000009413 insulation Methods 0.000 claims description 40
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 25
- 238000007373 indentation Methods 0.000 claims description 22
- 239000011159 matrix material Substances 0.000 claims description 11
- 238000001771 vacuum deposition Methods 0.000 claims description 10
- 238000001465 metallisation Methods 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 claims description 7
- 238000007747 plating Methods 0.000 claims description 6
- 238000005538 encapsulation Methods 0.000 claims description 5
- 238000001259 photo etching Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims description 4
- 229910000679 solder Inorganic materials 0.000 claims description 3
- 235000012544 Viola sororia Nutrition 0.000 claims 1
- 241001106476 Violaceae Species 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 230000035939 shock Effects 0.000 abstract description 4
- 239000012212 insulator Substances 0.000 abstract 4
- 238000007789 sealing Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000036461 convulsion Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006664 bond formation reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
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Abstract
The invention discloses a making method of a solid ultraviolet phototube. The making method comprises the following the steps of: making an optical window and an anode by using an ultraviolet-transmitting material; making an electrode cathode; making an interpolar insulator, wherein the interpolar insulator comprises a first interpolar insulator and a second interpolar insulator which are respectively connected with the anode and the cathode; connecting a cathode pin and an anode pin with the lower surface of the cathode; connecting and conducting the anode pin and the cathode pin with the anode and the cathode respectively; connecting a tube shell and the optical window together in a sealing way; and connecting the tube shell and a tuber holder together in a vacuumizing way. By the adoption of the making method provided by the invention, the interpolar distance and the depth of parallelism of the anode and the cathode of the made solid ultraviolet phototube are ensured, and the made solid ultraviolet phototube has the advantages of high sensitivity, small size, high degree of automation for production as well as good shock and impact resistance.
Description
Technical field
The present invention relates to a kind of manufacture method of ultraviolet light fulgurite, the manufacture method of the outer photoelectric tube of particularly a kind of solid violet.
Background technology
The ultraviolet light fulgurite often is applied in flame monitoring and the fire alarm; Present ultraviolet light fulgurite all is to adopt uviol or quartz glass as shell and optical window; Utilize metal materials such as molybdenum, nickel as the photoelectron emissions negative electrode; Be encapsulated in photoelectric tube the inside to anode and cathode with glass bulb, through charging into working gas after the exhaust again, complete then as making bulb.Traditional fabrication method complex process, the ultraviolet pipe volume of making is big, intensity is little, sensitivity is low.
Application number is that the Chinese invention patent of 200810044571.X discloses a kind of ultraviolet flame sensor and preparation method thereof, comprises the uviol sheet; Meshed anode, this anode layer are produced on the uviol sheet; The cathode substrate sheet glass; Photocathode, this layer are produced on above the cathode substrate sheet glass; Glass ring, this glass ring are produced in the middle of negative electrode and the anode; Vacuum orifice, this vacuum orifice is produced on the glass ring; Plastic packaging base, this base are produced on below the cathode substrate glass; Negative electrode and anode lead wire, this lead-out wire are bonded on the plastic packaging base, are connected with anode lead wire with negative electrode respectively; Plastic casing, this shell is produced on around plastic packaging base, glass ring and the sheet glass.This invention is simple in structure, size is little, intensity is high, sensitivity is higher.But; In making the ultraviolet flame sensor process; During the bonding formation glass chamber of glass ring and electroded uviol sheet, be difficult to guarantee the anode-cathode distance and the depth of parallelism between negative electrode and the anode, influence device operating time and useful life; The rate of finished products and the consistency of product are low, and production automation degree is low, the shock resistance impact resistance is poor.
Summary of the invention
The objective of the invention is to overcome existing above-mentioned deficiency in the prior art; The manufacture method of the outer photoelectric tube of a kind of solid violet is provided; This method guarantees the anode-cathode distance and the depth of parallelism between anode and the negative electrode, and the outer photocell sensitivity of the solid violet that utilizes this method to make simultaneously is high, volume is little, production automation degree high, the shock resistance good impact resistance.
In order to realize the foregoing invention purpose, the present invention adopts following technical scheme:
The manufacture method of the outer photoelectric tube of a kind of solid violet, step comprises as follows:
A) purple material optical window and anode are passed through in employing; Make electrode cathode; Make the electrode insulation part, the electrode insulation part comprises the first electrode insulation part and the second electrode insulation part;
B) respectively the first electrode insulation part is connected with cathode metallization with anode with the second electrode insulation part; Negative electrode pin and the metallization of anode pin are connected the negative electrode lower surface; The anode pin is connected conducting with anode, and the negative electrode pin is connected conducting with negative electrode; Anode pin and the setting of negative electrode pin are stretched out outside the base, and said anode pin and base junction separate through the nonmetallic materials separator, and said negative electrode pin is communicated with base.
C) maybe can cut down material through glass solder is one with shell and optical window sealing-in;
D) encapsulation of shell and base is vacuumized connect as one.
The manufacture method of anode comprises that purple material matrix is surperficial to adopt technique for vacuum coating metal-coated membrane making anode with passing through in the said step a), and processes netted said metal film or filament through photoetching, mask, etching process.
The manufacture method of anode also comprises anode is attached to the optical window back side and optical window is made of one structure in the said step a).
The manufacture method of electrode insulation part comprises that the employing technique for vacuum coating is at ceramic matrix plating metal on surface film in the said step b).
The manufacture method of negative electrode comprises the employing technique for vacuum coating at ceramic matrix plating metal on surface film in the said step a), and this metal film is negative electrode.
The anode pin is connected conducting with anode in the said step b), and the negative electrode pin is connected conducting with negative electrode method comprises:
On said cathode surface, be provided with at least one circle first vertical indentation near the inboard place of the first electrode insulation part; On said cathode surface, be provided with at least one circle second vertical indentation near the inboard place of the second electrode insulation part; The said first vertical indentation and the second vertical indentation vertically are broken as three parts with said cathode surface metal film, i.e. first anode district, cathodic region, second plate district;
In said first anode district or lower end, second plate district connect the anode pin, connect the negative electrode pin in the lower end in said cathodic region.
The anode pin is connected conducting with anode in the said step b), and the negative electrode pin is connected conducting with negative electrode method can also be:
On said cathode surface, be provided with the vertical indentation of at least one circle, said vertical indentation vertically is broken as two parts with the cathode surface metal film, i.e. first area and second area, and said vertical indentation is near the inboard place of the second electrode insulation part;
On the first electrode insulation part, be provided with at least one circle transverse scribes, said transverse scribes laterally is broken as two parts with the first electrode insulation part metal film on surface;
Connect the negative electrode pin in lower end, said first area, connect the anode pin in said second area lower end.
Compared with prior art, beneficial effect of the present invention:
1, method of the present invention reaches the micron number magnitude with passing through the electrode machining accuracy of purple material through the making of vacuum coating photoetching corrosion; Method through the metallization sealing-in connects the electrode insulation part between anode and negative electrode; The anode-cathode distance and the depth of parallelism between anode and the negative electrode have been guaranteed; The anode-cathode distance and the depth of parallelism margin of tolerance are controlled in the 10 μ m, device operating time and long service life, good stability, highly sensitive.
2, the outer photoelectric tube of the solid violet of method making of the present invention adopts the light transmittance of the thread or meshed anode that passes through purple material good, and negative electrode is the face electrode, has enlarged the photoelectron contact area, has strengthened optoelectronic induction intensity.
3, compare with traditional ultraviolet light fulgurite; The outer photoelectric tube of the solid violet that method of the present invention is made adopts the solid encapsulation structure; Sealing-in is that all parts become a rigid body behind the finished product; To guarantee that under certain jerk the part and the relative position of the outer photoelectric tube of solid violet are constant, the impact resistance anti-vibration resistance is good;
4, the outer photoelectric tube of the solid violet of method making of the present invention adopts the structure of integrated circuit and footprint design to make the ultraviolet light fulgurite; Use the ripe production and processing technology of integrated circuit, the outer photoelectric tube volume of the solid violet of production is little, production efficiency is high, rate of finished products is high.
Description of drawings:
Fig. 1 is the structure chart of the outer photoelectric tube embodiment 1 of solid violet of method making of the present invention;
Fig. 2 is the structure chart of the outer photoelectric tube embodiment 2 of solid violet of method making of the present invention;
Fig. 3 is the meshed anode figure that method of the present invention is made;
Fig. 4 is the thread anode figure that method of the present invention is made;
Mark among the figure: 1-shell, 2-optical window, 3-anode, 4-negative electrode, 5-base, 6-electrode insulation part, the 61-first electrode insulation part, the 62-second electrode insulation part, 7-anode pin, 8-negative electrode pin, 9-separator.
Embodiment
Below in conjunction with Test Example and embodiment the present invention is made further detailed description.But should this be interpreted as that the scope of the above-mentioned theme of the present invention only limits to following embodiment, allly all belong to scope of the present invention based on the technology that content of the present invention realized.
As shown in Figure 1, the step of the outer photoelectric tube of the solid violet that method of the present invention is made is following, comprising:
A) purple material optical window 2 is passed through in employing; To pass through that purple material matrix surface adopts that technique for vacuum coating is gold-plated, nickel, tungsten, molybdenum and metal film such as can cut down and make anode 3; And process netted said metal film or filament through photoetching, mask, etching process, like Fig. 3, shown in Figure 4.Said netted or thread anode 3 is attached to optical window 2 back sides and optical window 2 is made of one structure, and difficult drop-off improves device lifetime and service time; Adopt technique for vacuum coating at ceramic matrix plating nickel on surface or molybdenum film production negative electrode 4, this metal film is as negative electrode 4.Negative electrode 4 is the face electrode, has enlarged the photoelectron contact area, strengthens the photoelectric effect response speed, improves sensitivity; Adopt ceramic matrix, at ceramic matrix plating metal on surface film production electrode insulation part 6, said electrode insulation part 6 comprises the first electrode insulation part 61 and the second electrode insulation part 62, lays respectively at regional both sides between negative electrode 4 and the anode 3.Said first electrode insulation part 61 and the second electrode insulation part, 62 upper and lower surfaces parallelism tolerances all are controlled in the 10um, guarantee the anode-cathode distance and the depth of parallelism between anode 3 and the negative electrode 4, and metal-coated membrane is convenient to be connected with negative electrode 4 with anode 3.Need to prove, anode 3 and optical window 2, negative electrode 4 and electrode insulation part 6, the making of these several parts is order in no particular order;
B) on said negative electrode 4 surfaces, be provided with at least one circle first vertical indentation through lithography corrosion process near the first electrode insulation part, 61 inboard places; Said negative electrode 4 surfaces are gone up and are being provided with at least one circle second vertical indentation near the second electrode insulation part, 62 inboard places; The said first vertical indentation and the second vertical indentation vertically are broken as three parts with said negative electrode 4 metal film on surface, i.e. first anode district, cathodic region, second plate district; Method through the metallization sealing-in in said first anode district or lower end, second plate district connect anode pin 7; Method through the metallization sealing-in connects negative electrode pin 8 in the lower end in said cathodic region; Anode pin 7 stretches out outside the base 5 with negative electrode pin 8, and said anode pin 7 separates through nonmetallic materials separator 9 with base 5 junctions, and said negative electrode pin 8 is communicated with base 5; Electrode pin can play the fixed support effect, makes the outer photoelectric tube structure of solid violet of making more firm;
C) maybe can cut down material through glass solder is one with shell 1 with optical window 2 sealing-ins;
D) shell 1 is vacuumized with base 5 encapsulation connect as one.
As shown in Figure 2; The outer photoelectric tube structure of the solid violet that the method for present embodiment is made similar with embodiment 1; Its difference is; On said negative electrode 4 surfaces, be provided with two circles, the first vertical indentation through lithography corrosion process near the first electrode insulation part, 61 inboard places; Said negative electrode 4 surfaces are gone up and are being provided with two circles, the second vertical indentation near the second electrode insulation part, 62 inboard places, and the said first vertical indentation and the second vertical indentation vertically are broken as three parts with said negative electrode 4 metal film on surface, i.e. first anode district, cathodic region, second plate district; Method through the metallization sealing-in connects anode pin 7 in lower end, said first anode district, the method through the metallization sealing-in connects negative electrode pin 8 in the lower end in said cathodic region.Realize that like this anode 3 is connected with negative electrode pin 8 with anode pin 7, negative electrode 4, electrode pin can play the fixed support effect, makes the outer photoelectric tube structure of solid violet of making more firm.
In sum; The outer photoelectric tube of the solid violet that method of the present invention is made connects the electrode insulation part between anode and negative electrode; The anode-cathode distance and the depth of parallelism between anode and the negative electrode have been guaranteed; The anode-cathode distance and the depth of parallelism margin of tolerance are controlled in the 10 μ m, device operating time and long service life, good stability, highly sensitive; The outer photoelectric tube of the solid violet that method of the present invention is made adopts the light transmittance of the thread or meshed anode that passes through purple material good, and negative electrode is the face electrode, has enlarged the photoelectron contact area, has strengthened the photoelectric effect response speed; Compare with traditional ultraviolet light fulgurite; The outer photoelectric tube of the solid violet that method of the present invention is made adopts the solid encapsulation structure; Sealing-in is that all parts become a rigid body behind the finished product; To guarantee that under certain jerk the part and the relative position of the outer photoelectric tube of solid violet are constant, the shock resistance anti-vibration resistance is good; The outer photoelectric tube of the solid violet that method of the present invention is made adopts the structure of integrated circuit and footprint design to make the ultraviolet light fulgurite; Use the ripe production and processing technology of integrated circuit, the outer photoelectric tube volume of the solid violet of production is little, production efficiency is high, rate of finished products is high.
Claims (8)
1. the manufacture method of the outer photoelectric tube of a solid violet is characterized in that said method step comprises:
A) purple material optical window (2) and anode (3) are passed through in employing; Make electrode cathode (4); Make electrode insulation part (6), electrode insulation part (6) comprises the first electrode insulation part 61 and the second electrode insulation part 62;
B) 4 metallization are connected with negative electrode with anode 3 with the second electrode insulation part 62 with the first electrode insulation part 61 respectively; 8 metallization are connected negative electrode 4 lower surfaces with the anode pin with negative electrode pin 7; Anode pin (7) is connected conducting with anode (3), and negative electrode pin (8) is connected conducting with negative electrode (4); Anode pin (7) and negative electrode pin (8) setting are stretched out outside the base (5), and said anode pin (7) separates through nonmetallic materials separator (9) with base (5) junction, and said negative electrode pin (8) is communicated with base (5);
C) maybe can cut down material through glass solder is one with shell (1) and optical window (2) sealing-in;
D) encapsulation of shell (1) and base (5) is vacuumized connect as one.
2. the manufacture method of the outer photoelectric tube of solid violet according to claim 1; It is characterized in that; The manufacture method of anode in the said step a) (3) comprises makes anode (3) with passing through purple material matrix surface employing technique for vacuum coating metal-coated membrane, and processes said metal film netted through photoetching, mask, etching process.
3. the manufacture method of the outer photoelectric tube of solid violet according to claim 1; It is characterized in that; The manufacture method of anode in the said step a) (3) comprises makes anode (3) with passing through purple material matrix surface employing technique for vacuum coating metal-coated membrane, and processes said metal film thread through photoetching, mask, etching process.
4. according to the manufacture method of the outer photoelectric tube of claim 2 or 3 described solid violets, it is characterized in that the manufacture method of anode in the said step a) (3) also comprises anode (3) is attached to optical window (2) back side and optical window (2) is made of one structure.
5. the manufacture method of the outer photoelectric tube of solid violet according to claim 4 is characterized in that, the manufacture method of electrode insulation part 6 comprises that the employing technique for vacuum coating is at ceramic matrix plating metal on surface film in the said step b).
6. the manufacture method of the outer photoelectric tube of solid violet according to claim 5 is characterized in that, the manufacture method of negative electrode in the said step a) (4) comprises the employing technique for vacuum coating at ceramic matrix plating metal on surface film, and this metal film is negative electrode (4).
7. the manufacture method of the outer photoelectric tube of solid violet according to claim 6 is characterized in that anode pin (7) comprising with the method that is connected conducting of negative electrode (4) with anode (3), negative electrode pin (8) in the said step b):
On said negative electrode (4) surface, be provided with at least one circle first vertical indentation near the inboard place of the first electrode insulation part (61); On said negative electrode (4) surface, be provided with at least one circle second vertical indentation near the inboard place of the second electrode insulation part (62); The said first vertical indentation and the second vertical indentation vertically are broken as three parts with said negative electrode (4) metal film on surface, i.e. first anode district, cathodic region, second plate district;
In said first anode district or lower end, second plate district connect anode pin (7), connect negative electrode pin (8) in the lower end in said cathodic region.
8. the manufacture method of the outer photoelectric tube of solid violet according to claim 6 is characterized in that anode pin (7) comprises with the method that negative electrode (4) is connected conducting with anode (3), negative electrode pin (8) in the said step b):
On said negative electrode (4) surface, be provided with the vertical indentation of at least one circle; Said vertical indentation vertically is broken as two parts with negative electrode (4) metal film on surface; Be first area and second area, and said vertical indentation is near the inboard place of the second electrode insulation part (62);
On the first electrode insulation part (61), be provided with at least one circle transverse scribes, said transverse scribes laterally is broken as two parts with first electrode insulation part (61) metal film on surface;
Connect negative electrode pin (8) in lower end, said first area, connect anode pin (7) in said second area lower end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110271458.7A CN102324353B (en) | 2011-09-14 | 2011-09-14 | Making method of solid ultraviolet phototube |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110271458.7A CN102324353B (en) | 2011-09-14 | 2011-09-14 | Making method of solid ultraviolet phototube |
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| CN102324353A true CN102324353A (en) | 2012-01-18 |
| CN102324353B CN102324353B (en) | 2015-09-09 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4845355A (en) * | 1985-12-20 | 1989-07-04 | Canon Kabushiki Kaisha | Photoconductive type sensor and its driving method and apparatus |
| EP0383463A2 (en) * | 1989-02-13 | 1990-08-22 | Galileo Electro-Optics Corp. | Conductively cooled microchannel plates |
| EP0642147A1 (en) * | 1993-09-01 | 1995-03-08 | Hamamatsu Photonics K.K. | Photoemitter, electron tube, and photodetector |
| CN101251416A (en) * | 2008-04-10 | 2008-08-27 | 电子科技大学 | Ultraviolet flame sensor and manufacturing method thereof |
-
2011
- 2011-09-14 CN CN201110271458.7A patent/CN102324353B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4845355A (en) * | 1985-12-20 | 1989-07-04 | Canon Kabushiki Kaisha | Photoconductive type sensor and its driving method and apparatus |
| EP0383463A2 (en) * | 1989-02-13 | 1990-08-22 | Galileo Electro-Optics Corp. | Conductively cooled microchannel plates |
| EP0642147A1 (en) * | 1993-09-01 | 1995-03-08 | Hamamatsu Photonics K.K. | Photoemitter, electron tube, and photodetector |
| CN101251416A (en) * | 2008-04-10 | 2008-08-27 | 电子科技大学 | Ultraviolet flame sensor and manufacturing method thereof |
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Effective date of registration: 20240401 Address after: 610000 Shunkang Xinke Incubation Park, No. 4 Xinhang Road, high tech Zone (West), Chengdu, Sichuan Province Patentee after: CHENGDU QITE SAFETY TECHNOLOGY CO.,LTD. Country or region after: China Address before: 610500 Xingong Avenue, Xindu Industrial East District, Chengdu, Sichuan Patentee before: CHENGDU K & M METALS Co.,Ltd. Country or region before: China |
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