CN102323528B - Light-emitting measuring device, light-emitting measuring method, control program and readable recording medium - Google Patents

Light-emitting measuring device, light-emitting measuring method, control program and readable recording medium Download PDF

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Publication number
CN102323528B
CN102323528B CN201110081913.7A CN201110081913A CN102323528B CN 102323528 B CN102323528 B CN 102323528B CN 201110081913 A CN201110081913 A CN 201110081913A CN 102323528 B CN102323528 B CN 102323528B
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China
Prior art keywords
light
optical element
luminance
luminescence
image pickup
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CN201110081913.7A
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CN102323528A (en
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斎藤仁
尾上毅
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Sharp Corp
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Sharp Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/08Arrangements of light sources specially adapted for photometry standard sources, also using luminescent or radioactive material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/10Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G01J1/12Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using wholly visual means
    • G01J1/122Visual exposure meters for determining the exposure time in photographical recording or reproducing
    • G01J1/124Visual exposure meters for determining the exposure time in photographical recording or reproducing based on the comparison of the intensity of measured light with a comparison source or comparison illuminated surface
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/10Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G01J1/12Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using wholly visual means
    • G01J1/14Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using wholly visual means using comparison with a surface of graded brightness
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/60Noise processing, e.g. detecting, correcting, reducing or removing noise
    • H04N25/68Noise processing, e.g. detecting, correcting, reducing or removing noise applied to defects

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Led Devices (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

The invention relates to a light-emitting measuring device and a light-emitting measuring method, a program and a medium, capable of not only measuring the light-emitting amount of an optical element easily and accurately, measuring the light-emitting amounts of a plurality of optical elements easily and accurately without using a conventional ID identification circuit, but also measuring the light-emitting directivities and dust attachment badness of the optical elements easily and accurately. The light-emitting measuring method comprises the steps of using an address designating unit(41) to carry out address designation on a or a plurality of optical receiving parts among a plurality of optical receiving parts at light-emitting states of a camera LED; using a light-emitting amount judging unit(42) to compare a camera signal value with a reference value come from the or the plurality of optical receiving parts designated by the address designating unit(41) and judge the light-emitting amount, when the camera signal value is less than the reference value, the light-emitting amount is judged to be bad, and when the camera signal value is greater than the reference value, the light-emitting amount is judged to be good; using a directivity judging unit(43) to judge whether the directivity of the LED light-emitting is good or not by comparing the camera signal value with the reference value come from the or the plurality of optical receiving parts designated by the address designating unit(41).

Description

Luminescence measuring apparatus, Luminescence assay, control program and readable medium recording program performing
Technical field
The present invention relates to the luminescence measuring apparatus of the luminescence checking the light emitting diode optical element such as (hereinafter referred to as LED) and Luminescence assay, for making computing machine perform the control program of this Luminescence assay, store the readable medium recording program performing of this control program.
Background technology
In recent years, for the viewpoint of earth environment protection, as small-sized, long-life, the energy-conservation illuminace component not contain hazardous substance etc., in the process of necessity recognizing LED, also very high to the requirement of low price LED.
Existing LED measures, and makes LED and optical receiving sensor (photodiode) with man-to-man mode opposed (in opposite directions) configuration, by each optical receiving sensor light is converted to electricity and measures the luminous quantity of LED.This is because, when making multiple LED luminescence simultaneously, when light signal is converted to electric signal by light receiving surface unit by each optical receiving sensor, luminous while each optical receiving sensor side is to multiple LED, can not distinguish as the luminous quantity of each LED.
Thus, if arrange the optical receiving sensor of same number to multiple LED, make it with man-to-man mode opposed (in opposite directions), then can carry out the Simultaneously test of multiple LED.But, or device price can be made to increase, or plant bulk can be made to become large, or estimating precision can be caused to have problems because of the sensitivity variations of optical receiving sensor, present situation is, does not take such mode but carries out single mensuration with an optical receiving sensor.
Figure 10 is the schematic diagram of the major part structure example for illustration of existing luminescence measuring apparatus.
In Fig. 10, multiple semi-conductor chips 102 of the LED be provided with as light-emitting component are equipped on wafer 101 in a matrix form.Supply voltage can be put on pad 103 as probe contact from probe 104 for each of each semi-conductor chip 102 by existing luminescence measuring apparatus 100, makes LED luminous and checks.By PD mode or utilize measuring machine 105 on the axle of integrating sphere to measure the luminous quantity of this LED, whether the luminous quantity detecting this mensuration is bad.Like this, successively each semi-conductor chip 102 is measured to the luminous quantity of its LED.
Like this, in existing luminescence measuring apparatus 100, owing to measuring the luminous quantity of its LED successively to each semi-conductor chip 102, so the luminous quantity that there is the LED measuring all chips can time taking problem.For head it off, propose the luminous quantity of the multiple LED of Simultaneously test to shorten the patent documentation 1 of minute.
In patent documentation 1, its method is, in order to the luminous quantity of the multiple LED of Simultaneously test, and encloses the circuit making each LED measure circuit generation ID signal, and the luminous signal of LED is produced as synthesizing the signal that expression is the ID signal of the identification signal of which LED.This composite signal is when being converted to electricity by optical receiving sensor side by luminous signal, and by difference ID signal and the special software of luminous signal, limit judges it is the mensuration that luminous quantity is carried out on the signal limit of which LED.
Figure 11 is the block diagram of the major part configuration example representing existing LED Simultaneously test device disclosed in patent documentation 1.In addition, the situation of what Figure 11 represented is Simultaneously test 2 LED for ease of explanation, but by adding same circuit, can Simultaneously test multiple LEDs corresponding with its number.
As shown in figure 11, existing LED Simultaneously test device 200 can be divided into from make LED201,202 luminescences signal source to LED201,202 luminescence be biased the top of the central dotted line of applying portion A(Figure 11) and the bottom of central dotted line of light quantity detection assay part B(Figure 11) these two parts.
First, the action being biased applying portion A according to luminescence is described.
ACB is AC baseband signal generator, and it produces the sinusoidal AC baseband signal of certain amplitude and certain frequency (frequency f b).A part for this signal puts on bias modulator BM201b, at this, by the identification signal (frequency f 1) of identification generator ID201a, accept the modulation such as Modulation and Amplitude Modulation, frequency modulation (PFM) or phase-modulation, become AC offset signal (Figure 12 is Modulation and Amplitude Modulation example).
In the same manner as it, a part for AC baseband signal also puts on bias modulator BM202b, at this, accepts same modulation, become AC offset signal by the identification signal (frequency f 2) of identification generator ID202a.Because the identification signal (frequency f 1) of these identification generators ID201a and the identification signal (frequency f 2) of identification generator ID202a are different frequencies, thus the waveform of each AC offset signal is also correspondingly different from it.
Offset signal compositor BC201c, BC202c that it is representative that output from bias modulator BM201b, BM202b puts on analog addition machine respectively, at this, superpose by the DC offset voltage of certain ratio with DC biased reference level generator DCB.Carry out setting as described later this ratio be very important by such mode with the light emitting elements verily occurring AC offset signal in light-receiving side, preferably 0.1≤AC be biased/DC is biased≤ratio of 0.9 this scope.
Figure 12 represents one of the waveform of the output signal of offset signal compositor BC201c, BC202c example.
This signal is adjusted to the bias level of regulation by bias level adjustment part BL201d, the BL202d with D/A converter function.If to bias level adjustment part BL201d, BL202d in advance as each condition determination of program input LED, then bias level corresponding thereto can be set.
When this signal is supplied to applying electric current efferent IP20e1, IP202e as driving instruction signal, the electric current proportional with this driving instruction signal puts on determined LED and LED201, LED202 respectively as bias current.The waveform of this bias current is as shown in the waveform of Figure 12, owing to being superposed by certain ratio to have carried out the waveform of amplitude-modulated AC bias current by identification signal in the reference level of DC bias current, thus the luminescence of LED201, LED202 exports the inherent luminescence output also become corresponding thereto.
Then, the action of the light quantity detection assay part B of Figure 11 is described.
PD is the optical receiving sensor of photodiode and photoelectric tube and so on, can by the light quantity of the luminous quantity sum of light-receiving LED201, LED202 while of an optical receiving sensor PD.Therefore, the light between LED201 and LED202 is not needed to cover completely.In addition, even if the external incident light having the original obstruction beyond the luminescence of LED201 and LED202 output to measure, also can be got rid of like that by aftermentioned.
There is the curent change roughly proportional with incident light total amount in optical receiving sensor PD, is converted into the change of voltage by the current-to-voltage convertor IVC being called as I/V switching amplifier etc.
If be output into point analyze this, there is following composition (a) and (b).
A () is equivalent to the voltage of the summation of the DC bias component that each LED luminescence contains jointly (hereinafter referred to as DC light-receiving component voltage.)。
B () is equivalent to the voltage (hereinafter referred to as AC light-receiving component voltage, the frequency content fb containing AC baseband signal) of the summation of the AC offset signal composition superposing (overlapping) with DC light-receiving component voltage.
Above, the output voltage containing mentioned component (a) and (b) is input to Hi-pass filter HPF, first removes the DC light-receiving component voltage of mentioned component (a).
Even if remove DC light-receiving component voltage (a), owing to also containing the light amount information of each LED pro rata with the AC light-receiving component voltage of (b), thus mensuration can not be hindered.
Output from Hi-pass filter HPF is input to the phase detectors PSD203 with multiplication function.Meanwhile, apply AC baseband signal (frequency f b) from AC baseband signal generator ACB to these phase detectors PSD203, multiplication calculating is carried out to two signals.Like this, set the frequency of AC offset signal as fb, set identification signal frequency as f1, f2 time, then Hi-pass filter HPF interchange export frequency content be made up of upside wavestrip ingredient f b+f1, fb+f2 and downside wavestrip ingredient f b-f1, fb-f2.Wherein, phase place, timing is consistent with AC offset signal is only fb composition.Therefore, in the output from phase detectors PSD203, there will be the voltage of following frequency content.
By making the output of these phase detectors PSD203 through cut frequency being set fully lower than the low-pass filter LPF204 of fb, radio-frequency component can be removed, the voltage of (1) and (2) below only occurring in the output of low-pass filter LPF204.
(1) voltage of zero Hz just occurred when only there is the signal with the complete homophase of phase place of AC baseband signal in the output of Hi-pass filter HPF, i.e. direct current, the level of the AC baseband signal composition in the AC light-receiving component voltage of its voltage level and above-mentioned (b) is proportional.
(2) by voltage that f1, f2 make the amplitude of amplitude and identification signal proportional.
In addition, the band filter that band connection frequency is zero Hz < < band connection frequency < < fb if be replaced into by low-pass filter LPF204, then only have the voltage component of above-mentioned (2) to pass through.This signal is the summation signals of identification signal.
Only phase detectors PSD201f, the PSD202f with the multiplication computing function substantially same with phase detectors PSD203 is supplied to by the signal of above-mentioned (1) and (2) composition or the signal that is only made up of the voltage component of (2) by what obtain like this.
On the other hand, signal congruent for the identification signal corresponding with each system is supplied to phase detectors PSD201f, PSD202f by each identification generator ID201a, ID202a of being biased applying portion A from luminescence.
When the signal from phase detectors PSD201f, PSD202f being put on low-pass filter LPF201g, the LPF202g making cut frequency lower than identification signal frequency f 1, f2, radio-frequency component is removed, that is, the DC voltage ED201h, the ED202h that produce because of the luminescence of identification signal is obtained.This DC voltage ED201h, ED202h are input to the A/D converter ADC of the band scanner of more than two passages, are carried out time division and select to obtain measured value.
Prior art document
Patent documentation: Japanese Unexamined Patent Publication 2004-31460 publication.
In above-mentioned existing luminescence measuring apparatus 100, due to multiple LED luminescence can not be identified and measure luminous quantity, thus can not the multiple LED luminescence of Simultaneously test.Even if arranging two light receiving diode PD, when Simultaneously test two LED, owing to light quantity being converted to electricity respectively by each light receiving diode PD, thus system self also needs two, although can Simultaneously test LED luminous, there is the problem that system price becomes twice.
In above-mentioned existing luminescence measuring apparatus 200, compared with above-mentioned existing luminescence measuring apparatus 100, although can the overall minute shortening each luminous quantity, but when often increasing the LED number of mensuration, also must increasing for identifying the ID circuit measuring LED, the price of measuring machine correspondingly can be made to uprise.In this case, due to for being confirmed whether that accurately exporting the not in-problem inspection bodies of identification id circuit such as ID signal also needs software/hardware two aspects, so device price can be caused to increase further.And then, when identification id circuit generation problem, owing to being not part replacement but changing as measurement substrate, device stand-by time thus can be made to increase.In addition, when there is deviation in the synthesis timing of luminous quantity signal and identification id signal, accurately identification signal can not be read in.When loading noise etc. in this identification id signal, can not be taken into as identification id signal accurately.
No matter be any, in above-mentioned existing luminescence measuring apparatus 100,200, all by arranged opposite in man-to-man mode for LED and light receiving diode PD, by photodiode PD, the luminous quantity of LED is converted to the luminous quantity of coulometry LED, but, Problems existing is, whether the luminous quantity that only can measure LED reaches reference value, can not check that the directive property of LED luminescence, adhesive dust are bad etc. completely.
Summary of the invention
The invention solves above-mentioned existing problem, its object is to, a kind of luminous quantity that not only can measure easily and exactly an optical element is provided, but also existing such identification id circuit ground can not be used to measure easily and exactly the luminous quantity checking multiple optical element, and easily and exactly can measure the bad luminescence measuring apparatus of the directive property, the adhesive dust that check optical element luminescence and Luminescence assay, for making computing machine perform the control program of this Luminescence assay, store the readable medium recording program performing of this control program.
Luminescence measuring apparatus of the present invention, check the luminescence of optical element, it has: imaging apparatus, is equipped and carries out light-receiving and multiple light receivers of making a video recording to the luminescence from this optical element; And control part, use the image pickup signal from this imaging apparatus, inspection is carried out to the luminance of this optical element and controls, thus, achieve above-mentioned purpose.
In addition, the control part in preferred luminescence measuring apparatus of the present invention has: address specification unit, from multiple light receivers of making a video recording to the luminance of described optical element, carry out address appointment to one or more light receiver; And luminance inspection unit, based on the image pickup signal carrying out one or more light receivers that freely this address specification unit is specified, check the luminance of this optical element.
And then the address specification unit also in preferred luminescence measuring apparatus of the present invention carries out the appointment input of the pixel address using which pixel the inspection of the luminance of described optical element or selects this pixel address of setting in advance from outside.
And then, address specification unit also in preferred luminescence measuring apparatus of the present invention is specified through the luminescent center of described optical element and multiple pixel address of neighbouring direction or multiple directions thereof, or/and specify the luminescent center of this optical element pixel address or comprise the luminescent center of this optical element and multiple pixel address of neighbouring block district (block area) thereof.
And then, luminance inspection unit also in preferred luminescence measuring apparatus of the present invention has: light quantity identifying unit, it compares the value of the image pickup signal of one or more light receivers that next freely described address specification unit is specified and reference value, be judged to be that light quantity is bad in the value of this image pickup signal lower than when this reference value, be judged to be that light quantity is good when the value of this image pickup signal is more than this reference value.
And then, luminance inspection unit also in preferred luminescence measuring apparatus of the present invention has: directive property identifying unit, it compares the value of the image pickup signal of one or more light receivers that next freely described address specification unit is specified and reference value, judges the good no of the luminous directive property of this light-emitting component.
And then, also preferred have in luminescence measuring apparatus of the present invention: bad registering unit, its in the result of determination judged by described light quantity identifying unit and/or described directive property identifying unit as bad, by this judgement content registration in its chip number.
And then, also preferred in luminescence measuring apparatus of the present invention, between two adjacent described light-emitting components, be equipped with the dividing plate that light mixing (optical mixing) prevents.
And then also preferred in luminescence measuring apparatus of the present invention, what be equipped with between four adjacent described light-emitting components that light mixing prevents overlooks in criss-cross dividing plate.
And then also preferred have the luminous driver element making more than one described light-emitting component simultaneously luminous in luminescence measuring apparatus of the present invention.
Luminescence assay of the present invention, check the luminescence of optical element, have: check rate-determining steps, control module uses the image pickup signal from imaging apparatus, carry out inspection to the luminance of this optical element to control, wherein, described imaging apparatus is equipped and carries out light-receiving and multiple light receivers of making a video recording to the luminescence from this optical element, thus, above-mentioned purpose is realized.
In addition, inspection rate-determining steps in preferred Luminescence assay of the present invention has: address given step, address specification unit, from multiple light receivers of making a video recording to the luminance of described optical element, carries out address appointment to one or more light receiver; And luminance checks step, luminance inspection unit, based on the image pickup signal carrying out one or more light receivers that this address given step comfortable is specified, checks the luminance of this optical element.
And then, luminance also in preferred Luminescence assay of the present invention checks that step has: light quantity determination step, light quantity identifying unit compares the value of the image pickup signal of one or more light receivers that next freely described address specification unit is specified and reference value, be judged to be that light quantity is bad in the value of this image pickup signal lower than when this reference value, be judged to be that light quantity is good when the value of this image pickup signal is more than this reference value; And directive property determination step, directive property identifying unit compares the value of the image pickup signal of one or more light receivers that next free address specification unit is specified and reference value, judges the good no of the luminous directive property of this light-emitting component.
Control program of the present invention describes the processing procedure for making computing machine perform each operation of above-mentioned Luminescence assay of the present invention, thus, achieves above-mentioned purpose.
Readable medium recording program performing of the present invention is the medium of the embodied on computer readable storing above-mentioned control program of the present invention, thus, achieves above-mentioned purpose.
According to above-mentioned formation, the following describes effect of the present invention.
The present invention has: imaging apparatus, is equipped and carries out light-receiving and multiple light receivers of making a video recording to the luminescence from optical element; And control part, use the image pickup signal from this imaging apparatus, inspection is carried out to the luminance of optical element and controls.This control part has: address specification unit, from multiple light receivers of making a video recording to the luminance of optical element, carry out address appointment to one or more light receiver; And luminance inspection unit, based on the image pickup signal carrying out one or more light receivers that freely this address specification unit is specified, check the luminance of this optical element.
Thus, due to the luminance using the optical receiving sensor with multiple light receiver to detect light-emitting component (such as LED) as piece image, even if thus take out the data of a light receiver (pixel) of its immediate vicinity, also can measure luminous brightness (or briliancy), and if take out a column data of X-direction or Y-direction, also can measure luminous distribution.
In addition, when inserting the partition component of tabular between two light-emitting components (such as LED), the luminescence from two light-emitting components can be suppressed to interfere, can simultaneously as picture catching to the luminescence from two light-emitting components.If if four light-emitting components insert criss-cross partition component, then can simultaneously as picture catching to each luminescence from four light-emitting components.
Therefore, light-receiving is carried out to the luminescence from optical element and the imaging apparatus of multiple light receivers of making a video recording says the image pickup signal transmitted owing to using to be equipped with, take out signal with pixel scale and check the luminance of control both optical element, therefore, the luminous quantity of an inspection optical element can not only be measured easily and exactly, but also can not use existing such identification id circuit ground easily and measure the luminous quantity checking multiple optical element exactly, further, directive property, the adhesive dust that also easily and exactly can measure the luminescence of inspection optical element are bad.
By the above, according to the present invention, light-receiving is carried out to the luminescence from optical element and the image pickup signal that transmits of the imaging apparatus of multiple light receivers of making a video recording owing to using to be equipped with, take out signal with pixel scale and check the luminance of control both optical element, thus the luminous quantity of an inspection optical element can not only be measured easily and exactly, but also can not use existing such identification id circuit ground easily and measure the luminous quantity checking multiple optical element exactly, and, also easily and exactly can measure the directive property of inspection optical element luminescence, adhesive dust is bad.
Accompanying drawing explanation
Fig. 1 is the block diagram of the major part configuration example of the luminescence measuring apparatus represented in embodiment of the present invention 1.
Fig. 2 be represent the luminescence measuring apparatus of Fig. 1 measure chip cut off before the schematic diagram of situation of optical element luminescence of each chip.
Fig. 3 applies supply voltage respectively to two semi-conductor chips of Fig. 2 and makes the vertical view of the situation of LED luminescence.
Fig. 4 (a) and (b) represent that each street after expanding chip cut-out makes the schematic diagram of the situation of optical element luminescence.
Fig. 5 (a) and (b) represent that each chip after being cut off by chip carries out encapsulation and makes the schematic diagram of the situation of optical element luminescence.
Fig. 6 is the picture figure that the luminescence measuring apparatus of Fig. 1 measures the luminescence of the LED of two semi-conductor chips voltage source being put on respectively Fig. 3, is represent that the light quantity of each semi-conductor chip judges the picture figure in district.
Fig. 7 is the picture figure that the luminescence measuring apparatus of Fig. 1 measures the luminescence of the LED of two semi-conductor chips voltage source being put on respectively Fig. 3, is the picture figure in the address selection district representing each pixel.
The directive property distribution plan of the luminance of LED when Fig. 8 (a) ~ (e) is the address selection district representing selection Fig. 7.
Fig. 9 represents to employ multiple major part longitudinal diagram having the situation of the concrete example of the luminescence measuring apparatus of Fig. 1 of multiple dividing plate.
Figure 10 is the schematic diagram of the major part configuration example for illustration of existing luminescence measuring apparatus.
Figure 11 is the block diagram of the major part configuration example representing existing luminescence measuring apparatus disclosed in patent documentation 1.
Figure 12 is the figure of the waveform for illustration of the AC offset signal used in the existing luminescence measuring apparatus of Figure 11.
Description of reference numerals
1,1A, 1B: luminescence measuring apparatus
2: imaging apparatus
3:A/D converter section
4: control part
41: address specification unit
42: light quantity identifying unit
43: directive property identifying unit
44:NG chip registering unit
5: operating portion
6: display part
7:ROM
8:RAM
11: wafer
12: semi-conductor chip
13: pad
14: probe
15: ring
16: adhesive sheet
17: contact pilotage
18: packaging part
19: dividing plate
20:LED
A, B: chip
X, Y: pixel address
L: luminous
D1, X1, Y1: address selection district.
Embodiment
Below, limit describes the embodiment 1 of luminescence measuring apparatus of the present invention and Luminescence assay in detail with reference to accompanying drawing limit.In addition, for each object thickness, thickness etc. of the constituting portion material in each figure, the viewpoint made for accompanying drawing, is not limited to illustrated formation.
(embodiment 1)
Fig. 1 is the block diagram of the major part configuration example of the luminescence measuring apparatus represented in embodiment of the present invention 1.
In Fig. 1, the luminescence measuring apparatus 1 of present embodiment 1 has: when making the LED luminescence as the light-emitting component of semi-conductor chip 12 described later, the incident light from camera body is carried out opto-electronic conversion and the multiple light receivers carrying out making a video recording are arranged to rectangular imaging apparatus 2; Except the A/D converter section 3 that the laggard row A/D of denoising changes from the image pickup signal from imaging apparatus 2; By carrying out overall control and carrying out the CPU(central operation treating apparatus of luminescence assays control) control part 4 that forms; The operating portions 5 such as the input media of reception input are carried out via the keyboard for carrying out input instruction to CPU, mouse, touch-screen and pen-based input device and communication network (such as internet, in-house network); Display frame shows initial picture, selects picture, according to the display part 6 of the control result screen of CPU and operation input picture etc.; As the ROM7 of the readable medium recording program performing of the computer readable of storing control program and data etc. thereof; And read control program and data etc. thereof when starting and control to read/store the RAM8 as storage part played a role as working storage of data to each of CPU.
Imaging apparatus 2 is made up of as the CCD type imageing sensor of image pickup or CMOS type imageing sensor the luminance of the LED using the light-emitting component as semi-conductor chip 12 described later, both can such as be made up of 200 × 400 pixel degree as multiple light receiver, also can be more than this pixel count.
Control part 4 uses and carries out light-receiving to the luminescence from LED and the luminance of image pickup signal inspection control LED that transmits of the imaging apparatus 2 of multiple light receivers of making a video recording from being equipped with.Control part 4 has: specified input by the selection carrying out the pixel address using which pixel in the inspection of luminance from operating portion 5, or automatically select setting according to checking mode, specify the multiple pixel address of row through the X-direction near LED luminescence or Y-direction, or the address specification unit 41 of the address of one or more pixels in specified district; The luminescence of LED is made a video recording with image-type by one or more pixel, obtains value or the mean value of an one pixel, to the light quantity identifying unit 42 that itself and reference value compare; Judge the directive property identifying unit 43 as the directive property of the LED of light-emitting component; When the result of determination judged by light quantity identifying unit 42 and/or directive property identifying unit 43 is as NG, this judgement content and NG chip number are registered in the NG chip registering unit 44 as bad registering unit of RAM8.By these light quantity identifying units 42 and directive property identifying unit 43, form the luminance inspection unit checking the luminance of LED based on the image pickup signal carrying out one or more light receivers that free address specification unit 41 is specified.
Address specification unit 41 selects setting by the outside inside of specifying input or the regulation corresponding to checking mode of selecting, and column direction of being expert at (in length and breadth to) selects the pixel region of setting specialized range, such as, in 200 × 400 pixels, and the horizontal number of such as X(; The first for benchmark with the first row in left side, such as 1 ~ 200) be 50 ~ 100, the longitudinal number of Y(; 1 ~ 400) be such as 50 ~ 100 pixel region.In this case, the unit taking out the individual signal of a more than pixel from the imaging apparatus 2 carrying out optical detecting is provided with in address specification unit 41, from such as 200 × 400 pixel datas inputted successively, just the pixel data of the luminance of the pixel region of being specified by address is counted relative to the address designated information of address specification unit 41 column direction (in length and breadth to) of being expert at, make its count value consistent and be taken into.The directive property of LED is described, has that the luminescence profile with the LED of a peak value is circular or oval directive property, the luminescence profile with the LED of two peak values is the directive property etc. of heart shape.When specifying a multiple pixel address of row of X-direction or Y-direction, the directive property shape (peak value and its week boundary values) of the luminescence profile (circular or heart-shaped etc.) of LED can be measured.Even if the luminescence profile of LED is circular or oval, entreat in the led also adhesive dust when, because luminescence profile becomes heart shape, be thus set to bad (NG).No matter be any, by specifying multiple pixel address of row of X-direction or Y-direction, can easily and measure exactly optical element luminescence directive property shape, adhesive dust is bad and carry out good no inspection.
In address specification unit 41, as shown in X1, Y1, D1 of Fig. 7, the light receiving area of the imaging apparatus 2 carrying out optical detecting can be set arbitrarily.In addition, as at least two in Xl, Y1, Dl of Fig. 7, multi-region setting can also be carried out to the light receiving area of the imaging apparatus 2 carrying out optical detecting.And then, when being judged to be bad (NG), also the light-receiving data of this bad part can being carried out address appointment by a pixel pixel and being taken into the data of specifying its address to verify bad part in detail.
Light quantity identifying unit 42 gets the "AND" of each pixel (X, Y) in the determined pixel region setting light receiving area, whether meets the reference value of regulation, judge that LED light amount is good no according to summation light quantity or its average light quantity or peak value light quantity.
Directive property identifying unit 43 gets each pixel (X in the determined pixel region setting light receiving area, Y) "AND", judge directive property such as whether as circular or heart-shaped, in the situations such as the situation for one-tenth heart or peak offset from center position time circular, be judged to be the directive property bad (NG) containing dust or attachment spot etc.
This judgement content (light quantity NG is or/and the kind of directive property NG and directive property NG) and NG chip number, when the result of determination judged by light quantity identifying unit 42 and/or directive property decision means 43 is as NG, are registered in RAM8 by NG chip registering unit 44.
As the ROM7 of readable medium recording program performing, in addition to a hard disk, also can be made up of the CD carried freely, photomagneto disk, disk and IC storer etc.These control program and data etc. thereof are stored in ROM7, but this control program and data thereof also can download to ROM7 from other readable medium recording program performings or via wireless, wired or network etc.
Fig. 2 represents that the luminescence measuring apparatus 1 of Fig. 1 measures the schematic diagram of the situation of the optical element luminescence of each chip before cutting off.Fig. 3 applies supply voltage respectively to two semi-conductor chips 12 of Fig. 2 and makes the vertical view of the situation of LED luminescence.
In Fig. 2 and Fig. 3, wafer 11 is equipped with in rectangular the multiple semi-conductor chips 12 being provided with light emitting diode (LED) along the line of the column direction.For multiple semi-conductor chip 12(in this case two) each, supply voltage can be applied from probe 14 to probe contact and pad 13 and make LED luminous.Like this, control part 4 has and applies the supply voltage of regulation from probe 14 and make more than one LED20 or arbitrary LED20 simultaneously or the luminous driver element of separate radiation.Now, probe 14 needs to contact with pad 13, and meanwhile, with the semi-conductor chip 12 of upper left side for basic point, control part 4 needs to identify the semi-conductor chip 12 determining which position.Thus, the luminous quantity of LED, the good no judgement of directive property check by luminescence measuring apparatus 1.Like this, semi-conductor chip 12(chip A and chip B in regulation number (in this case two)) accompany dividing plate (not shown in Fig. 2 and Fig. 3, to be illustrated as dividing plate 19 in figure 6) between each, sequentially determining checks luminous quantity and the luminance of this LED.
In this case, luminescence measuring apparatus 1 carries can the imaging apparatus 2 of size of the multiple LED of light-receiving, is the determinator that can take out the image pickup signal having carried out the light receiving area that arbitrary address is specified relative to imaging region.
Relative to the luminescence of LED, the imaging region of imaging apparatus 2 is specified by pixel address (X, Y), by taking out as electric signal, even if make multiple (in this case two) LED luminescence also can select necessary Pixel Information for an imaging apparatus 2.And then, by arranging dividing plate (dividing plate 19 of Fig. 6) at imaging apparatus 2, can have not by the structure from the impact of the light of transverse direction.Owing to taking out multiple signal subtly with pixel scale, thus can understand the luminous quantity distribution relevant with directive property, also can check that directive property is bad and adhesive dust is bad.
Fig. 4 (a) and Fig. 4 (b) represents that each street after being cut off by chip expands and makes the schematic diagram of the situation of optical element luminescence.
In Fig. 4 (a) and Fig. 4 (b), by multiple semi-conductor chips 12 of above-mentioned wafer 11, to have pasted the state of cut frame and the fixing adhesive sheet 16 of ring 15, after being cut to each semi-conductor chip 12 by line of cut or cutting blade, adhesive sheet 16 is launched (stretching), between each semi-conductor chip 12, vacates certain gap to fix each semi-conductor chip 12.In this case, owing to vacating certain gap between each semi-conductor chip 12, be thus easy to insert dividing plate (not shown) between each semi-conductor chip 12, inspection become and is more prone to.
In this condition, for multiple semi-conductor chip 12(in this case two) each, supply voltage can be put on probe contacts and pad 13 from probe 14 and make LED luminous.The luminous quantity of this LED, the good no judgement of directive property is checked by luminescence measuring apparatus 1.Like this, between each semi-conductor chip 12 of stated number (in this case two), insert dividing plate (not shown) and check its LED successively.
Fig. 5 (a) and Fig. 5 (b) represents that each chip after being cut off by chip carries out encapsulation and makes the schematic diagram of the situation of optical element luminescence.
In Fig. 5 (a) and Fig. 5 (b), being cut to after each semi-conductor chip 12 carries out singualtion, contact pilotage 17 being secured to semi-conductor chip 12, to the packaging part 18 having been carried out encapsulation, supply voltage can being applied from contact pilotage 17 and make LED luminous.The luminous quantity of this LED, the good no judgement of directive property is checked by luminescence measuring apparatus 1.Like this, between each packaging part 18 of stated number (in this case two), insert dividing plate (not shown) and check its LED successively.
Fig. 6 and Fig. 7 measures by the luminescence measuring apparatus 1 of Fig. 1 the drawing figure two semi-conductor chips of Fig. 3 being applied respectively to the luminescence of the LED of supply voltage, Fig. 6 represents that the light quantity of each semi-conductor chip judges the picture figure in district, and Fig. 7 is the picture figure in the address selection district representing each pixel.
As shown in Figure 6, light quantity as each semi-conductor chip (each LED) judges district, be such as the light quantity judgement district A1 of 1 pixel in chip A, be the light quantity judgement district B1 of 1 pixel in chip B, but also can be multiple pixel region, light quantity judges that district presets, but is not limited thereto, but can set arbitrarily.
As shown in Figure 7, as the address selection district of each pixel, be such as address selection district Xl and Y1 of each row of X-direction and Y-direction in chip A, be the address selection district D1 of block of pixels in chip B, but also can be in address selection district X1 and Y1, D1 at least any one, be not limited thereto, in addition address selection district also can set arbitrarily.
In Fig. 8 (a), select a column address selection area X1, its section becomes the directive property distribution of regulation.That is, as the datum curve of circular directive property, LED central authorities its periphery bright is darker.In this case, with the brightness e1(central portion at two positions) and brightness e2(end) higher than stipulated standard value for benchmark.
In Fig. 8 (b), select a column address selection area X1, its section becomes the distribution of collapsing from directive property distribution (Fig. 8 (a)) of regulation.That is, although the luminous quantity gone up as a whole (brightness) is enough, the brightness of LED middle declines.This is because attached to except the dust of shading, spot except LED center, also likely in spite of wound, in addition, be also likely that the directive property of light is bad, directive property central bad (NG).In this case, reversion or lower than setting is there is by the difference of the brightness el of LED central portion and the brightness e2 of its edge (end), further, the brightness e1 of its central portion far below the lower limit of stipulated standard value, thus can be judged to be directive property central authorities bad (NG).
In Fig. 8 (c), select a column address selection area X1, its section becomes the distribution of collapsing from directive property distribution (Fig. 8 (a)) of regulation.That is, although the luminous quantity gone up as a whole is enough, the brightness of LED center is significantly higher than setting, and the brightness of periphery is lower than setting.This is except LED periphery attached to the dust of shading, spot, also likely in spite of wound, in addition, is also likely that the directive property of light is bad, directive property periphery bad (NG).In this case, exceed stipulated standard value by the difference of the brightness e1 of LED central portion and the brightness e2 of its periphery (end), and the brightness e2 of its periphery (end) lower than stipulated standard value, thus can be judged to be directive property periphery bad (NG).
In Fig. 8 (d), select a column address selection area X1, its section becomes the directive property distribution of regulation.That is, the luminous quantity gone up as a whole is enough, but only has the brightness of LED periphery folk prescription to reach degree same as the brightness of central portion, the brightness obfuscation of another folk prescription of LED periphery.This is except the one-sided portion of LED periphery attached to the dust of shading, spot, except situation in spite of wound, is containing the bad folk prescription periphery bad (NG) of encapsulation.In this case, by the difference of the brightness e1 of LED central portion and the brightness e2 of its periphery lower than setting, and the brightness e2 of its periphery is significantly higher than setting, thus can be judged to be folk prescription periphery bad (NG).
When being judged to be bad (NG) in these Fig. 8 (b) ~ Fig. 8 (d), can select a column address selection area Y1, whether its section of detailed inspection is the directive property distribution specified.Like this, the address selection can carrying out multiple position is specified.Generally speaking, further address selection appointment is carried out to the periphery of part and section thereof that are judged to be bad (NG), measure directive property distribution in more detail, the characteristic difference that the characteristic sum of LED luminescence is bad can be made.
In Fig. 8 (e), select the address selection district D1 of block, its section becomes the directive property distribution (heart-shaped distribution) of regulation.That is, as the datum curve of cardioid directivity, LED central authorities shade bright at its periphery two positions a little.In this case, with brightness e11, e21, the e12 at three positions higher than setting for benchmark.
Check in the Luminescence assay as the present embodiment 1 of the luminescence of the LED20 of optical element, performed by computing machine (CPU) and check rate-determining steps, namely, based on the control program in ROM7 and data thereof, check that control module uses to be equipped with and light-receiving is carried out to the luminescence from LED20 and the image pickup signal that transmits of the imaging apparatus 2 of multiple light receivers of making a video recording, check the luminance of control LED20.This inspection rate-determining steps has: the address given step of one or more light receiver is specified in address specification unit 41 address from multiple light receivers of making a video recording to the luminance of LED20; Based on the image pickup signal carrying out one or more light receivers that comfortable address given step is specified, luminance inspection unit checks that the luminance of the luminance of LED20 checks step.And then, this luminance checks that step has: light quantity identifying unit 42 compares the value of the image pickup signal of one or more light receivers that next free address specification unit 41 is specified and reference value, in the value of image pickup signal lower than being judged to be when reference value that light quantity is bad, be judged to be the light quantity determination step that light quantity is good when the value of image pickup signal is more than reference value; Directive property identifying unit 43 compares the value of the image pickup signal of one or more light receivers that next free address specification unit 41 is specified and reference value, judges the good no directive property determination step of luminous directive property of LED20.Like this, luminance inspection unit is made up of light quantity identifying unit 42 and directive property identifying unit 43.
As mentioned above, according to the present embodiment 1, have: from multiple light receivers of making a video recording to the luminance of LED20, the address specification unit 41 of one or more light receiver is specified in address; The value and reference value of carrying out the image pickup signal of one or more light receivers that free address specification unit 41 is specified are compared, in the value of image pickup signal lower than being judged to be when reference value that light quantity is bad, be judged to be the light quantity identifying unit 42 that light quantity is good when the value of image pickup signal is more than reference value; The value and reference value of carrying out the image pickup signal of one or more light receivers that free address specification unit 41 is specified are compared, judge the good no directive property identifying unit 43 of luminous directive property of LED20, use to be equipped and light-receiving is carried out to the luminescence from LED20 and the image pickup signal that transmits of the imaging apparatus 2 of multiple light receivers of making a video recording, take out signal with pixel scale, check the luminance of control LED20.Therefore, also can understand the luminous quantity relative with directive property distribute and get rid of the bad chip of directive property.In addition, there is no the increase and decrease as the circuit determined by Simultaneously test number, without the need to the transformation of software/hardware aspect yet.And then, do not need for the special inspection body in the software/hardware of image pickup element yet, just can have no problem by decision mechanism in detail by the routine check same with existing optical receiving sensor.
Finally, when the result of determination judged by light quantity identifying unit 42 and/or directive property identifying unit 43 is as NG, by NG chip registering unit 44, this judgement content (light quantity NG, or/and directive property NG, also has the kind of directive property NG in addition) and NG chip number are registered in RAM8.That is, the address location corresponding to the chip number that be called as address substitute corresponding with the position of wafer 11, stores and judges content (light quantity NG is or/and the NG kind of directive property NG).As the kind of NG, such as no problem in the light quantity of light quantity identifying unit 42, but in the problematic situation of directive property identifying unit 43, become grade B.In addition, such as there is problem in the light quantity of light quantity identifying unit 42 and when directive property identifying unit 43 is no problem, become grade C.And then, such as no problem in the light quantity of light quantity identifying unit 42, when directive property identifying unit 43 is also no problem, become grade A.And then, can also distinguish bad in detail.Such as about the light quantity of light quantity identifying unit 42, two threshold values can be set, be divided into two stages by bad for light quantity.
In addition, in above-mentioned embodiment 1, as shown in FIG. 6 and 7, as (chip A between two light-emitting components (such as LED), between B) when adding the dividing plate 19 of tabular, the mixing of the light from two light-emitting components (such as LED) can be suppressed, catch the luminescence from two light-emitting components as image simultaneously and check the good no of luminous quantity and directive property, but be not limited to this, also can as picture catching from the luminescence of a light-emitting component (such as LED) and check luminous quantity and directive property good no, in addition, if if four light-emitting components add criss-cross dividing plate, then can be used as image catch each luminescence from four light-emitting components simultaneously and check luminous quantity and directive property good no.And then, also can use the luminescence measuring apparatus having multiple dividing plates 19, catch each luminescence from multiple light-emitting component as image simultaneously and check luminous quantity and directive property good no, inspection can be made to carry out fast, easily.The concrete example of the luminescence measuring apparatus in this situation as shown in Figure 9.
Fig. 9 represents to employ multiple major part longitudinal diagram having the situation of the luminescence measuring apparatus concrete example of Fig. 1 of multiple dividing plate.
As shown in Figure 9, arrange multiple luminescence measuring apparatus 1A(4 × 4 mensuration to use), longitudinally and the multiple LED20 be transversely arranged in a matrix every one, dividing plate 19 is set, can making LED20 luminous every and measuring to carry out good no inspection to it by multiple LED20.To longitudinally and the multiple LED20 be transversely arranged in a matrix, if make multiple luminescence measuring apparatus 1A(4 × 4) slide into vertical or horizontal any one, then can measure light quantity and directive property to carry out good no inspection to all LED20 with image-type.In addition, 4 × 4 in 8 × 8 of multiple LED20 also can measure by 1 piece of 1 piece of ground by a luminescence measuring apparatus 1A.And then, by use multiple luminescence measuring apparatus 1B(1 × 4 measure with) stagger down in the vertical successively, also can to being equipped with 1 enforcement in region of multiple LED20 with this dividing plate 19.L represents the luminescence from LED20.The LED20 that the bottom surface of dividing plate 19 is opposed is not luminous.Luminescence is at longitudinal direction (depth direction of Fig. 9) and horizontal one, (left and right directions of Fig. 9) interval.
In addition, although illustrate in above-mentioned embodiment 1, but, from become wafer 11 basic point chip check successively the luminous quantity of each or every two and directive property good no, and detect now the chip LED which checks, can by being arranged at the address specification unit 41 of control part 4 except specified pixel address, also recognize when the LED of the chip of pre-test is which number from the basic point of wafer 11, also will judge the address location of NG content registration corresponding to the chip number that be called as address substitute corresponding with the position of wafer 11.In addition, when make multiple chip simultaneously luminous with check its luminous quantity and directive property good no, also can recognize as described above when the LED of the chip of pre-test is which number from the basic point of wafer 11.
In addition, although illustrate in above-mentioned embodiment 1, also there is the function of light-emitting component (such as LED) luminescence simultaneously making more than one electronic unit (semi-conductor chip).In addition, also there is the function making any parts luminescence relative to the light-emitting component (such as LED) of more than one electronic unit (semi-conductor chip).And then, the light-emitting component of more than one electronic unit (semi-conductor chip) also can be made simultaneously luminous, and identify the luminous quantity of each electronic unit.And then the imaging apparatus 2 carrying out optical detecting can take out arbitrarily the individual signal of a more than pixel.Thus, under LED20 attached to the situations such as the situation of dust, carry out validation signal level by taking out arbitrarily individual signal to each pixel, the position of adhesive dust on LED20 can be learnt in detail.
In addition, although illustrate to have in above-mentioned embodiment 1: be equipped and carry out light-receiving and the imaging apparatus 2 of multiple light receivers of making a video recording to the luminescence from LED20; And use the image pickup signal from this imaging apparatus 2 to check the control part 4 of the luminance of control both optical element.By this formation, object of the present invention can be realized, namely, not only can measure easily and exactly the luminous quantity of an inspection optical element, but also existing such identification id circuit ground can not be used to measure easily and exactly the luminous quantity checking multiple optical element, and easily and exactly can measure and check that the directive property of optical element luminescence, adhesive dust are bad.
In addition, in above-mentioned embodiment 1, light quantity identifying unit 42 and directive property identifying unit 43 are utilized to formation, check that the situation of the luminance inspection unit of the luminance of LED is illustrated based on the image pickup signal carrying out one or more light receivers that free address specification unit 41 is specified, but be not limited to this, can be readily appreciated that luminance inspection unit also only can have any one of light quantity identifying unit 42 and directive property identifying unit 43.In this case, as bad registering unit NG chip registering unit 44 when by least any one result of determination judged in light quantity identifying unit 42 and directive property identifying unit 43 as bad, can by this judgement content registration in its chip number.
As mentioned above, use the preferred embodiment of the present invention 1 exemplified with the present invention, but the present invention should not be defined in this embodiment 1 and make an explanation.The present invention can be understood should only be made an explanation to its scope by claims.Can understand those skilled in the art can according to the present invention concrete preferred embodiment 1 record, and to be implemented in the scope of equivalence based on record of the present invention and technology general knowledge.Can understand quote in this manual patent, patented claim and document, in the same manner as specifically should being recorded in this instructions with its content itself, its content is quoted as the reference to this instructions.
Utilizability in industry
The present invention is checking the luminescence measuring apparatus of luminescence and the Luminescence assay of the light emitting diode optical elements such as (hereinafter referred to as LED), for being performed the control program of this Luminescence assay by computing machine, store in the readable medium recording program performing field of this control program, can use to be equipped and light-receiving be carried out to the luminescence from optical element and the image pickup signal that transmits of the imaging apparatus of multiple light receivers of making a video recording, take out signal with pixel scale and check the luminance of control both optical element, thus the luminous quantity of an inspection optical element can not only be measured easily and exactly, but also can not use existing such identification id circuit ground easily and measure the luminous quantity of multiple optical element exactly, and, also easily and exactly can measure the directive property of inspection optical element luminescence, adhesive dust is bad.

Claims (13)

1. a luminescence measuring apparatus, checks the luminescence of optical element, wherein, has:
Imaging apparatus, is equipped and carries out light-receiving and multiple light receivers of making a video recording to the luminescence from this optical element; And
Control part, uses the image pickup signal from this imaging apparatus, carries out inspection control the luminance of this optical element,
This control part has: address specification unit, from multiple light receivers of making a video recording to the luminance of this optical element, carry out address appointment to one or more light receiver; And luminance inspection unit, based on the image pickup signal carrying out one or more light receivers that freely this address specification unit is specified, check the luminance of this optical element,
This luminance inspection unit compares the value of the image pickup signal of one or more light receivers that next freely this address specification unit is specified and reference value, judges the good no of the luminance of this optical element,
The result of determination judged at this luminance inspection unit is as bad, change the light receiver that this address specification unit institute address is specified, this luminance inspection unit compares the value of the image pickup signal from the light receiver after change and reference value, judges further the good no of luminance of this optical element.
2. luminescence measuring apparatus according to claim 1, wherein, described address specification unit carries out the appointment input of the pixel address using which pixel the inspection of the luminance of described optical element or selects this pixel address of setting in advance from outside.
3. luminescence measuring apparatus according to claim 2, wherein, described address specification unit is specified through the luminescent center of described optical element and multiple pixel address of neighbouring direction or multiple directions thereof, or/and specify the luminescent center of this optical element pixel address or comprise the luminescent center of this optical element and multiple pixel address in neighbouring block district thereof.
4. luminescence measuring apparatus according to claim 1, wherein, described luminance inspection unit has: light quantity identifying unit, it compares the value of the image pickup signal of one or more light receivers that next freely described address specification unit is specified and reference value, be judged to be that light quantity is bad in the value of this image pickup signal lower than when this reference value, be judged to be that light quantity is good when the value of this image pickup signal is more than this reference value.
5. the luminescence measuring apparatus according to claim 1 or 4, wherein, described luminance inspection unit has: directive property identifying unit, it compares the value of the image pickup signal of one or more light receivers that next freely described address specification unit is specified and reference value, judges the good no of the luminous directive property of this optical element.
6. luminescence measuring apparatus according to claim 4, wherein, has: bad registering unit, its in the result of determination judged by described light quantity identifying unit as bad, by judgement content registration bad for light quantity in its chip number.
7. luminescence measuring apparatus according to claim 1, wherein said luminance inspection unit has directive property identifying unit, this directive property identifying unit compares the value of the image pickup signal of one or more light receivers that next freely described address specification unit is specified and reference value, judge the good no of the luminous directive property of this optical element
Described luminescence measuring apparatus has: bad registering unit, its result of determination judged at described directive property identifying unit as bad, by judgement content registration bad for directive property in its chip number.
8. luminescence measuring apparatus according to claim 1, wherein,
Described luminance inspection unit has:
Light quantity identifying unit, the value of image pickup signal and reference value of carrying out one or more light receivers that freely described address specification unit is specified are compared, be judged to be that light quantity is bad in the value of this image pickup signal lower than when this reference value, be judged to be that light quantity is good when the value of this image pickup signal is more than this reference value; And
Directive property identifying unit, compares the value and reference value carrying out the image pickup signal of one or more light receivers that free address specification unit is specified, judges the good no of the luminous directive property of this optical element,
Described luminescence measuring apparatus has: bad registering unit, it is in the result of determination judged by described light quantity identifying unit and/or described directive property identifying unit as bad, and light quantity is bad and/or judgement content registration that directive property is bad is in its chip number.
9. luminescence measuring apparatus according to claim 1, wherein, is equipped with light and mixes the dividing plate prevented between two adjacent described optical elements.
10. luminescence measuring apparatus according to claim 1, wherein, is equipped with light and mixes the dividing plate prevented between four adjacent described optical elements.
11. luminescence measuring apparatus according to claim 1, wherein, have the luminous driver element making more than one described optical element simultaneously luminous.
12. 1 kinds of Luminescence assays checking the luminescence of optical element, wherein, have: check rate-determining steps, control module uses the image pickup signal from imaging apparatus, carry out inspection to the luminance of this optical element to control, wherein, described imaging apparatus is equipped and carries out light-receiving and multiple light receivers of making a video recording to the luminescence from this optical element
This inspection rate-determining steps has: address given step, and address specification unit, from multiple light receivers of making a video recording to the luminance of this optical element, carries out address appointment to one or more light receiver; And luminance checks step, luminance inspection unit, based on the image pickup signal carrying out one or more light receivers that this address given step comfortable is specified, checks the luminance of this optical element,
This luminance checks that step has:
Luminance inspection unit compares the value of the image pickup signal of one or more light receivers that next freely this address specification unit is specified and reference value, judges the good no determination step of the luminance of this optical element; And
Result of determination in this determination step is bad, change the light receiver that this address specification unit institute address is specified, this luminance inspection unit compares the value of the image pickup signal from the light receiver after change and reference value, to the good no further determination step carrying out judging further of the luminance of this optical element.
13. Luminescence assays according to claim 12, wherein, described luminance checks that step comprises:
Light quantity determination step, light quantity identifying unit compares the value of the image pickup signal of one or more light receivers that next freely described address specification unit is specified and reference value, be judged to be that light quantity is bad in the value of this image pickup signal lower than when this reference value, be judged to be that light quantity is good when the value of this image pickup signal is more than this reference value; And
Directive property determination step, directive property identifying unit compares the value of the image pickup signal of one or more light receivers that next free address specification unit is specified and reference value, judges the good no of the luminous directive property of this optical element.
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