CN102315586A - Semiconductor laser module with multiple detection sensors and protection devices - Google Patents
Semiconductor laser module with multiple detection sensors and protection devices Download PDFInfo
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- CN102315586A CN102315586A CN201010215178XA CN201010215178A CN102315586A CN 102315586 A CN102315586 A CN 102315586A CN 201010215178X A CN201010215178X A CN 201010215178XA CN 201010215178 A CN201010215178 A CN 201010215178A CN 102315586 A CN102315586 A CN 102315586A
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Abstract
The invention relates to a semiconductor laser module with multiple detection sensors and protection devices, comprising a semiconductor laser, a laser tube temperature sensor, an optical-fiber interface temperature sensor, an optical power sensor, an optical-fiber inserting detection sensor, an indicating light source, a replaceable protection window, optical components and a light reflecting feedback window. Since the detection sensors and the protection devices are packaged in the laser module, more effective real-time control and monitoring of a control system for the laser can be realized, so that the more stable operation of the laser is ensured; and simultaneously a semiconductor laser chip array package is coupled with a series of optical components, so that the output power of the laser is high. The semiconductor laser module has the advantages that the output power is high, the coupling efficiency is high, the volume is small, the service life is long and the stability is good.
Description
Technical field
The present invention relates to a kind of laser module, concretely, relate to semiconductor laser module with multiple detecting sensor and protective device.
Background technology
As a kind of potential novel tumor treatment technology; PDT is the high-tech technology that multinomial technology such as set laser technology, light guide techniques, optical information processing is formed; High power semiconductor lasers is an equipment most crucial in the PDT; Its technology content also is the highest; Production optical fiber connector power output is a present technical bottleneck both domestic and external greater than the 630nm laser of 2W, and according at present domestic and international manufacturing technology of semiconductor laser and ability, single laser die power output is mostly below 200-300mW near the 630nm wavelength; And finally the luminous power of our system requirements is less than or equals 10W (considering each grade coupled, loss), even higher luminous power.So after accomplishing tube core, must adopt some special technique to synthesize to obtain a plurality of laser die outputs high-power.Industry generally is to adopt two kinds of methods to solve the laser coupled problem at present: a kind of mode is that each tube core is coupled respectively to single small-bore optical fiber, and then forms light beam (Bundle) output, shown in following Figure 1A:
Adopt the laser of this mode to have following shortcoming: a plurality of single tube series connection of needs or parallel connection at least when optical fiber connector need reach than macro-energy; Each laser also wants Laser Power Devices to supply power separately; Form by many small-bore optical fiber then and close bundle, therefore bulky, the output optical fibre core diameter is thick, failure rate is high, cost is high.Another kind of mode is that laser itself adopts array (Bar) form, energy is coupled in the output optical fibre of a smaller aperture due through one group of optical module system then, and is as shown in Figure 3.Advantage is: volume is little, high-output power, high coupling efficiency, and little, the good stability of spot diameter is prone to drive and control.Native system adopts the second way, adopts the single array fibre coupling of conduction cooling to be made into laser module.
And generally only integrated temperature sensor or the photo-detector diode of being packaged with of traditional laser can not satisfy the particularly practical application in medical operating better, and failure rate is high.
Summary of the invention
The object of the present invention is to provide semiconductor laser with multiple detecting sensor and protective device; In module integrated conventional laser the multiple detection and the defencive function that can't possess; With the real-time monitoring of overall process in the actual operating position that solves laser medicine, guarantee that laser more stably moves.
To achieve these goals, the invention provides following technical scheme:
The semiconductor laser module that has multiple detecting sensor and protective device of the present invention; Comprise substrate; Substrate is provided with semiconductor laser element, and it is used to produce laser and is installed on substrate, and the adjacent locations in this unit is provided with temperature sensor; This temperature sensor is used for the actual work temperature of detection laser, for thermostatic control and overtemperature alarm provide the temperature detection sampled signal; On substrate, be provided with optical power sensor with semiconductor laser element outgoing position, its effect is the actual light power of detection laser, for the outside provides laser power feedback sample signal; Comprise the optical module that optical focus mirror group, polarizing coupler, fast slow axes collimating module are formed; Be arranged on the emitting light path axis of semiconductor laser element; Effect is the laser that semiconductor laser produces to be focused on through this optical module launch on the central shaft of the optical fiber connector; Guarantee simultaneously when external fiber is screwed onto the optical fiber connector, can focus on the fiber optic hub end face, reach maximum light transmissioning efficiency; In optical fiber connector passage, be provided with simultaneously optical fiber and insert detecting sensor and optical fiber interface temperature sensor; Being used for detecting output optical fiber, whether to be connected temperature bad or that therefore interface causes too high, and handle to the control system in the equipment detected signal feedback.
Can also be independently or integrated pilot light light source, replaceable protection window and light reflection feedback window in substrate simultaneously.
Of the present invention at first is to make semiconductor laser element: screening semiconductor laser tube die chip; Heat sink with gold-plated cuboid as intermediate carrier, with the mode of full wafer vapor deposition scolder on heat sink, utilize the scolder semiconductor laser tube core chip that in each heat sink unit, bonds; After finishing, bonding puts into alloying furnace together; Adopt golden tin solder, sintering is 10 seconds～60 seconds under 280 ℃～300 ℃ and logical nitrogen protection condition, and the heat sink unit that is stained with chip behind the sintering is cut down from heat sink of full wafer; Utilize the single array arrangement of silver slurry to be bonded on the alloyed copper layer plane edge; Bonding gold thread on the N of semiconductor laser tube core chip face electrode connects gold thread on the negative electrode pin, and the alloyed copper layer is as positive pole.Adopt parallel connected array to arrange between the chip; Overall fixed is in the can of sealing; Bondd simultaneously temperature sensor, optical power sensor, optical fiber inserts acquisition sensor and pilot light light source part etc., and with its lead-in wire by signal line set of interfaces holding wire output interface the most.Through one group of optics self-built systems, regulate the optical focus point, laser energy is coupled to the optical fiber connector (SMA905 interface) standard output interface, guarantee the highest efficiency of transmission.
Beneficial effect of the present invention is; The actual operating position that can combine laser medicine; Integrated not available multiple detection of conventional laser and defencive function in module insert detecting sensor, optical module and light reflection feedback window etc. like replaceable protection window, optical fiber interface temperature sensor, optical power sensor, optical fiber.Advantage is: high-output power, high coupling efficiency, volume is little, the life-span is long, good stability, can realize that the work overall process monitors in real time, has guaranteed laser more safe and reliable operation in system.
Description of drawings
The principle schematic that Fig. 1 is coupled for the optical fiber according to prior art.
Fig. 2 is the structure side view according to the semiconductor laser module critical piece semiconductor laser element that has multiple detecting sensor and protective device of a kind of embodiment of the present invention;
Fig. 3 is the structural perspective according to the semiconductor laser module critical piece semiconductor laser element that has multiple detecting sensor and protective device of a kind of embodiment of the present invention
Fig. 4 be installed according to a kind of embodiment of the present invention have multiple detecting sensor and protective device the structural representation of integral module.
Fig. 5 is for accordinging to a kind of inner critical piece of semiconductor laser module and sensor signal lead-in wire connection layout that has multiple detecting sensor and protective device of the present invention.
Fig. 6 is for adopting its optical principle and three kinds of applicating examples of practical implementation according to a kind of semiconductor laser module that has multiple detecting sensor and protective device of the present invention.
Embodiment:
Fig. 2, Fig. 3 are for showing critical piece of the present invention; It is the structural representation of semiconductor laser element 10; With reference to Fig. 2,3; This semiconductor laser element 10 comprise one heat sink be that semiconductor laser is anodal 104, be crimped on the semiconductor laser negative pole 103 that this mutual electricity on heat sink is isolated, and be arranged at the semiconductor laser tube core chip array 102 on the semiconductor laser anodal 104.This semiconductor laser positive pole can be the alloyed copper layer, and the heat that the assurance laser is produced in running is by this heat sink conduction.The laser tube core negative pole is welded to above the laser negative pole 103 or the direct surface crimping through the gold thread wire drawing; Semiconductor laser anodal 104 is fixed to shell substrate 100 with semiconductor laser negative pole 103 through copper stud 13, copper stud 14 extensions; Referring to Fig. 4; Use working of plastics to guarantee the good insulation between positive-negative polarity simultaneously, copper stud 14 and the external power source both positive and negative polarity input terminal of copper stud 13 as the laser power supply.A is laser beam and the direction that semiconductor laser tube core chip array 102 penetrates.
The production method of this semiconductor laser element 10 is following: at first screen the semiconductor laser tube die chip, and heat sink with gold-plated cuboid as intermediate carrier, after this; With the mode of full wafer vapor deposition scolder on heat sink, utilize the scolder semiconductor laser tube core chip that in each heat sink unit, bonds, after finishing, bonding puts into alloying furnace together; Adopt golden tin solder, sintering is 10 seconds～60 seconds under 280 ℃～300 ℃ and logical nitrogen protection condition, and the heat sink unit that is stained with chip behind the sintering is cut down from heat sink of full wafer; Utilize the single array arrangement of silver slurry to be bonded on the alloyed copper layer plane edge; Bonding gold thread on the N of semiconductor laser tube core chip face electrode connects gold thread on the negative electrode pin, and the alloyed copper layer is as positive pole; Adopt parallel connected array to arrange between the chip, quantity can single or a plurality of parallel connections.This semiconductor laser wavelength scope is 375nm～980nm.
Like Fig. 4 and shown in Figure 5; The semiconductor laser module that this has multiple detecting sensor and protective device comprises substrate 100, and substrate 100 is provided with semiconductor laser element 10; It is used to produce laser and is installed on substrate; Adjacent locations in this unit 10 is provided with temperature sensor 20, and this temperature sensor 20 is used for the actual work temperature of detection laser, for thermostatic control and overtemperature alarm provide the temperature detection sampled signal; On substrate, be provided with optical power sensor 30 with semiconductor laser element outgoing position, its effect is the actual light power of detection laser, for the outside provides laser power feedback sample signal; Comprise the optical module that optical focus mirror group 87, polarizing coupler 88, fast slow axes collimating module 89 are formed; Like Fig. 4, shown in 6; Be arranged on the emitting light path axis of semiconductor laser element 10, effect is the laser that semiconductor laser produces to be focused on through this optical module launch on the central shaft of the optical fiber connector 40, guarantees when external fiber is screwed onto the optical fiber connector 40 simultaneously; Can focus on the fiber optic hub end face; Reach maximum light transmissioning efficiency, can see, the laser beam of launching from semiconductor laser tube core by Fig. 6 sketch map applicating example; After collimating, arrange, focus on transformation through optical module; Be coupled to the optical fiber connector 40 central shafts to focus, when external fiber is connected this focus through the optical fiber connector, guarantee that laser energy on this focus converges at external fiber center end face and overlaps.This method is than the laser of light beam (Bundle) output form output, arrayed encapsulation between laser tube core that can parallelly connected greater number and tube core, and great advantage is: high power, small size; Also integrated pilot light light source 11 in substrate 100 simultaneously; The light that pilot light is launched gets into polarizing coupler 88 through 86 reflections of mirror group; Can be coupled into simultaneously with the light that semiconductor laser is launched in the external optical fiber through focus lamp group 87 at last, this pilot light light source has the important function of target location and treatment guide in the medical operating process.The optical fiber connector 40 can be SMA or FC interface, and polarizing coupler 8 is 45 ° of installations with mirror group 86.
In the optical fiber connector 40 passages, be provided with optical fiber and insert detecting sensor 50 and optical fiber interface temperature sensor 60; Whether be used for detecting output optical fiber is connected bad or comes off; And the temperature that therefore interface causes is too high; And handle to the control system in the equipment the detected signal feedback, guarantee the maximum transmitted efficient of laser and move safely.These two transducers are that the effective transmission of laser provides detection signal, have protected laser better.
Light reflection feedback window 90 is arranged on branch's light path of polarizing coupler 88; Its effect be at laser in transmission course; Because reflexing to this light through polarizing coupler 88, the outside cause reflex time reflects feedback window as laser, for the outside provides the laser-bounce light signal fed back.Make things convenient for control system to detect and control with this function.
Whole module adopts sealed package, and inside is filled with nitrogen, and purpose is in order to prevent under the effect of refrigeration semiconductor laser owing to the temperature difference produces the dewfall phenomenon, thereby damages laser in the course of the work.
Described semiconductor laser can directly be welded on the heat sink laser strip that goes up for single or array arrangement.
It can be mechanical or photoelectric type that described optical fiber inserts acquisition sensor.
Described laser tube temperature transducer is negative tempperature coefficient thermistor (NTC) or semistor (PTC).
Described optical power sensor is the electro-optical pickoff of photodiode (PD) type.
Described pilot light light source is that wave-length coverage is LASER Light Source or the led light source of 375～800nm
Claims (8)
1. semiconductor laser module that has multiple detecting sensor and protective device; It is characterized in that: comprise substrate 100; Substrate 100 is provided with semiconductor laser element 10, and it is used to produce laser and is installed on substrate, and the adjacent locations in this unit 10 is provided with temperature sensor 20; This temperature sensor 20 is used for the actual work temperature of detection laser, for thermostatic control and overtemperature alarm provide the temperature detection sampled signal; On substrate, be provided with optical power sensor 30 with semiconductor laser element outgoing position, its effect is the actual light power of detection laser, for the outside provides laser power feedback sample signal; Comprise the optical module that optical focus mirror group 87, polarizing coupler 88, fast slow axes collimating module 89 are formed; Be arranged on the emitting light path axis of semiconductor laser element 10; Effect is the laser that semiconductor laser produces to be focused on through this optical module launch on the central shaft of the optical fiber connector 40; Guarantee simultaneously when external fiber is screwed onto the optical fiber connector 40, can focus on the fiber optic hub end face, reach maximum light transmissioning efficiency; In the optical fiber connector 40 passages, be provided with simultaneously optical fiber and insert detecting sensor 50 and optical fiber interface temperature sensor 60; Being used for detecting output optical fiber, whether to be connected temperature bad or that therefore interface causes too high, and handle to the control system in the equipment detected signal feedback.
2. the semiconductor laser module that has multiple detecting sensor and protective device according to claim 1; It is characterized in that: also comprise replaceable protection window 70; It is installed between the optical module 80 and the optical fiber connector 40, and main effect is to be convenient for changing when having dust or dirt residual when frequent connection external fiber minute surface.
3. the semiconductor laser module that has multiple detecting sensor and protective device according to claim 1; It is characterized in that: also comprise light reflection feedback window 90; It is arranged on branch's light path of polarizing coupler 88; Its effect be at laser in transmission course, when laser-bounce, reflex to this light reflection feedback window, for the outside provides the laser-bounce feedback through polarizing coupler 88.
4. have the semiconductor laser module of multiple detecting sensor and protective device according to claim 1, it is characterized in that: described semiconductor laser is single or array arrangement directly is welded on the heat sink laser strip that goes up.
5. have the semiconductor laser module of multiple detecting sensor and protective device according to claim 1, it is characterized in that: it can be mechanical or photoelectric type that described optical fiber inserts acquisition sensor.
6. have the semiconductor laser module of multiple detecting sensor and protective device according to claim 1, it is characterized in that: described laser tube temperature transducer is negative tempperature coefficient thermistor (NTC) or semistor (PTC).
7. have the semiconductor laser module of multiple detecting sensor and protective device according to claim 1, it is characterized in that: described optical power sensor is the electro-optical pickoff of photodiode (PD) type.
8. have the semiconductor laser module of multiple detecting sensor and protective device according to claim 1, it is characterized in that: described pilot light light source is that wave-length coverage is LASER Light Source or the led light source of 375～800nm.
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| CN201010215178XA CN102315586A (en) | 2010-06-29 | 2010-06-29 | Semiconductor laser module with multiple detection sensors and protection devices |
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| CN201010215178XA CN102315586A (en) | 2010-06-29 | 2010-06-29 | Semiconductor laser module with multiple detection sensors and protection devices |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104951725A (en) * | 2015-06-19 | 2015-09-30 | 四川飞阳科技有限公司 | Laser barcode scanner and scanning engine thereof |
| WO2018006657A1 (en) * | 2016-07-04 | 2018-01-11 | 深圳市光峰光电技术有限公司 | Semiconductor laser and temperature control method therefor |
| CN109564136A (en) * | 2016-06-03 | 2019-04-02 | 恩耐公司 | For monitoring the multifunctional circuit of Connectorized fiber optic cabling health status |
| CN111628405A (en) * | 2019-02-28 | 2020-09-04 | 潍坊华光光电子有限公司 | High-power conduction cooling packaging structure bar laser sintering fixture and sintering method thereof |
| CN113236126A (en) * | 2021-05-24 | 2021-08-10 | 中国工程物理研究院激光聚变研究中心 | Underground light source drilling system |
| CN114665379A (en) * | 2022-03-25 | 2022-06-24 | 中国工程物理研究院应用电子学研究所 | Semiconductor laser device with stable wavelength |
| CN114878148A (en) * | 2022-06-07 | 2022-08-09 | 济南大学 | Microchannel stacked-array laser performance detection device and detection method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104951725A (en) * | 2015-06-19 | 2015-09-30 | 四川飞阳科技有限公司 | Laser barcode scanner and scanning engine thereof |
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| CN111628405A (en) * | 2019-02-28 | 2020-09-04 | 潍坊华光光电子有限公司 | High-power conduction cooling packaging structure bar laser sintering fixture and sintering method thereof |
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| CN114665379A (en) * | 2022-03-25 | 2022-06-24 | 中国工程物理研究院应用电子学研究所 | Semiconductor laser device with stable wavelength |
| CN114878148A (en) * | 2022-06-07 | 2022-08-09 | 济南大学 | Microchannel stacked-array laser performance detection device and detection method |
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Inventor after: Du Yi Inventor after: Wu Rongliang Inventor after: Liu Jian Inventor before: Du Yi Inventor before: Wu Rongliang |
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Application publication date: 20120111 |