CN201829809U - Semiconductor laser module with various detection sensors and protectors - Google Patents
Semiconductor laser module with various detection sensors and protectors Download PDFInfo
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- CN201829809U CN201829809U CN2010202441769U CN201020244176U CN201829809U CN 201829809 U CN201829809 U CN 201829809U CN 2010202441769 U CN2010202441769 U CN 2010202441769U CN 201020244176 U CN201020244176 U CN 201020244176U CN 201829809 U CN201829809 U CN 201829809U
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Abstract
The utility model relates to a semiconductor laser module with various detection sensors and protectors, which comprises semiconductor lasers, a laser pipe temperature sensor, an optical fiber interface temperature sensor, a light power sensor, an optical fiber insertion detection sensor, an indication light source, a replaceable protection window, an optical assembly and a light reflecting feedback window. Because the various detection sensors and protectors are encapsulated in a laser module, more effective real-time control and monitoring on a laser by a control system can be realized to ensure that the laser operation is more stable. Meanwhile, the semiconductor laser chip array encapsulation and serial optical assembly coupling are adopted, so the laser output power is high. The semiconductor laser module has the advantages of high output power, high coupling efficiency, small size, long service life and good stability.
Description
Technical field
The utility model relates to a kind of laser module, concretely, relates to the semiconductor laser module with multiple detecting sensor and protective device.
Background technology
As a kind of potential novel tumor treatment technology, photodynamic therapy is the set laser technology, light guide techniques, the high-tech technology that multinomial technology such as optical information processing is formed, high power semiconductor lasers is an equipment most crucial in the photodynamic therapy, its technology content also is the highest, production optical fiber connector power output is a present technical bottleneck both domestic and external greater than the 630nm laser of 2W, according at present domestic and international manufacturing technology of semiconductor laser and ability, single laser die power output is mostly below 200-300mW near the 630nm wavelength, and finally the luminous power of our system requirements is less than or equals 10W and (considers that each is grade coupled, even higher luminous power loss).So after finishing tube core, must adopt some special technique to synthesize to obtain a plurality of laser die outputs high-power.Industry generally is to adopt two kinds of methods to solve the laser coupled problem at present: a kind of mode is that each tube core is coupled respectively to single small-bore optical fiber, and then forms light beam (Bundle) output, shown in following Figure 1A:
Adopt the laser of this mode to have following shortcoming: when optical fiber connector need reach than macro-energy, to need a plurality of single tube series connection or in parallel at least, each laser also wants Laser Power Devices to power separately, form by many small-bore optical fiber then and close bundle, therefore bulky, the output optical fibre core diameter is thick, failure rate is high, cost is high.Another kind of mode is that laser itself adopts array (Bar) form, by one group of optical module system energy is coupled in the output optical fibre of a smaller aperture due, as shown in Figure 3 then.Advantage is: volume is little, high-output power, high coupling efficiency, and little, the good stability of spot diameter easily drives and control.Native system adopts the second way, adopts the single array fibre coupling of conduction cooling to be made into laser module.
And generally only integrated temperature sensor or the photo-detector diode of being packaged with of traditional laser can not satisfy the particularly practical application in medical operating better, the failure rate height,
The utility model content
The purpose of this utility model is to provide the semiconductor laser with multiple detecting sensor and protective device; in module integrated conventional laser the multiple detection and the defencive function that can't possess; with the real-time monitoring of overall process in the actual operating position that solves laser medicine, guarantee that laser more stably moves.
To achieve these goals, the utility model provides following technical scheme:
The semiconductor laser module that has multiple detecting sensor and protective device of the present utility model, comprise substrate, substrate is provided with semiconductor laser element, it is used to produce laser and is installed on substrate, adjacent locations in this unit is provided with temperature sensor, this temperature sensor is used for the actual work temperature of detection laser, for thermostatic control and overtemperature alarm provide the temperature detection sampled signal; Be provided with optical power sensor with semiconductor laser element outgoing position on substrate, its effect is the actual light power of detection laser, for the outside provides laser power feedback sample signal; Comprise the optical module that optical focus mirror group, polarizing coupler, fast slow axes collimating module are formed, be arranged on the emitting light path axis of semiconductor laser element, effect is the laser that semiconductor laser produces to be focused on by this optical module launch on the central shaft of the optical fiber connector, guarantee when external fiber is screwed onto the optical fiber connector simultaneously, can focus on the fiber optic hub end face, reach maximum light transmissioning efficiency; In optical fiber connector passage, be provided with simultaneously optical fiber and insert detecting sensor and optical fiber interface temperature sensor, being used for detecting output optical fiber, whether to be connected temperature bad or that therefore interface causes too high, and handle to the control system in the equipment detected signal feedback.
Can also be independently or integrated pilot light light source, replaceable protection window and light reflection feedback window in substrate simultaneously.
Of the present utility model at first is to make semiconductor laser element: screening semiconductor laser tube die chip; heat sink with gold-plated cuboid as intermediate carrier; with the mode of full wafer evaporation scolder on heat sink; utilize the scolder semiconductor laser tube core chip that in each heat sink unit, bonds; after finishing, bonding puts into alloying furnace together; adopt golden tin solder; sintering is 10 seconds～60 seconds under 280 ℃～300 ℃ and logical nitrogen protection condition; the heat sink unit that is stained with chip behind the sintering is cut down from heat sink of full wafer; utilize the single array arrangement of silver slurry to be bonded on the alloyed copper layer plane edge; bonding gold thread on the N of semiconductor laser tube core chip face electrode; gold thread is connected on the negative electrode pin, and the alloyed copper layer is as positive pole.Adopt parallel connected array to arrange between the chip, overall fixed is in the can of sealing, bondd simultaneously temperature sensor, optical power sensor, optical fiber inserts acquisition sensor and pilot light light source part etc., and with its lead-in wire by signal line set of interfaces holding wire output interface the most.By one group of optics self-built systems, regulate the optical focus point, laser energy is coupled to the optical fiber connector (SMA905 interface) standard output interface, guarantee the highest efficiency of transmission.
The beneficial effects of the utility model are; can be in conjunction with the actual operating position of laser medicine; integrated not available multiple detection of conventional laser and defencive function in module insert detecting sensor, optical module and light reflection feedback window etc. as replaceable protection window, optical fiber interface temperature sensor, optical power sensor, optical fiber.Advantage is: high-output power, high coupling efficiency, volume is little, the life-span is long, good stability, can realize that the work overall process monitors in real time, has guaranteed laser more safe and reliable operation in system.
Description of drawings
Fig. 1 is the principle schematic according to the optical fiber coupling of prior art.
Fig. 2 is the structure side view of semiconductor laser module critical piece semiconductor laser element according to having of a kind of embodiment of the present utility model multiple detecting sensor and protective device;
Fig. 3 is the structural perspective of semiconductor laser module critical piece semiconductor laser element according to having of a kind of embodiment of the present utility model multiple detecting sensor and protective device
Fig. 4 be installed according to having of a kind of embodiment of the present utility model multiple detecting sensor and protective device the structural representation of integral module.
Fig. 5 is according to a kind of inner critical piece of semiconductor laser module and sensor signal lead-in wire connection layout that has multiple detecting sensor and protective device of the present utility model.
Fig. 6 is for adopting its optical principle and three kinds of applicating examples of concrete enforcement according to a kind of semiconductor laser module that has multiple detecting sensor and protective device of the present utility model.
Embodiment:
Fig. 2, Fig. 3 are for showing critical piece of the present utility model, it is the structural representation of semiconductor laser element 10, with reference to Fig. 2,3, this semiconductor laser element 10 comprise one heat sink be semiconductor laser positive pole 104, be crimped on the semiconductor laser negative pole 103 that this mutual electricity on heat sink is isolated, and be arranged at the semiconductor laser tube core chip array 102 on the semiconductor laser positive pole 104.This semiconductor laser positive pole can be the alloyed copper layer, and the heat that the assurance laser is produced in running is by this heat sink conduction.The laser tube core negative pole is welded to above the laser negative pole 103 or the direct surface crimping by the gold thread wire drawing, semiconductor laser anodal 104 and semiconductor laser negative pole 103 are fixed to shell substrate 100 by copper stud 13, copper stud 14 extensions, referring to Fig. 4, use the good insulation between working of plastics assurance positive-negative polarity simultaneously, copper stud 14 and copper stud 13 are as the external power source both positive and negative polarity input terminal of laser power supply.A is laser beam and the direction that semiconductor laser tube core chip array 102 penetrates.
The production method of this semiconductor laser element 10 is as follows: at first screen the semiconductor laser tube die chip; heat sink with gold-plated cuboid as intermediate carrier; after this; with the mode of full wafer evaporation scolder on heat sink; utilize the scolder semiconductor laser tube core chip that in each heat sink unit, bonds; after finishing, bonding puts into alloying furnace together; adopt golden tin solder; sintering is 10 seconds～60 seconds under 280 ℃～300 ℃ and logical nitrogen protection condition; the heat sink unit that is stained with chip behind the sintering is cut down from heat sink of full wafer; utilize the single array arrangement of silver slurry to be bonded on the alloyed copper layer plane edge; bonding gold thread on the N of semiconductor laser tube core chip face electrode connects gold thread on the negative electrode pin, and the alloyed copper layer is as positive pole; adopt parallel connected array to arrange between the chip, quantity can single or a plurality of parallel connections.This semiconductor laser wavelength scope is 375nm～980nm.
As shown in Figure 4 and Figure 5, this has the semiconductor laser module of multiple detecting sensor and protective device, comprise substrate 100, substrate 100 is provided with semiconductor laser element 10, it is used to produce laser and is installed on substrate, adjacent locations in this unit 10 is provided with temperature sensor 20, and this temperature sensor 20 is used for the actual work temperature of detection laser, for thermostatic control and overtemperature alarm provide the temperature detection sampled signal; Be provided with optical power sensor 30 with semiconductor laser element outgoing position on substrate, its effect is the actual light power of detection laser, for the outside provides laser power feedback sample signal; Comprise optical focus mirror group 87, polarizing coupler 88, the optical module that fast slow axes collimating module 89 is formed, as Fig. 4, shown in 6, be arranged on the emitting light path axis of semiconductor laser element 10, effect is the laser that semiconductor laser produces to be focused on by this optical module launch on the central shaft of the optical fiber connector 40, guarantee when external fiber is screwed onto the optical fiber connector 40 simultaneously, can focus on the fiber optic hub end face, reach maximum light transmissioning efficiency, can see by Fig. 6 schematic diagram applicating example, the laser beam of launching from semiconductor laser tube core, collimate through optical module, arrange, after focusing on transformation, be coupled to the optical fiber connector 40 central shafts to focus, when external fiber is connected this focus by the optical fiber connector, guarantee that the laser energy on this focus converges at the end face coincidence of external fiber center.This method is than the laser of light beam (Bundle) output form output, arrayed encapsulation between laser tube core that can greater number in parallel and tube core, and great advantage is: high power, small size; Also integrated pilot light light source 11 in substrate 100 simultaneously, the light that pilot light is launched enters polarizing coupler 88 by 86 reflections of mirror group, can be coupled into simultaneously with the light that semiconductor laser is launched in the external optical fiber by focus lamp group 87 at last, this pilot light light source has the important function of target location and treatment guide in the medical operating process.The optical fiber connector 40 can be SMA or FC interface, and polarizing coupler 8 and mirror group 86 are 45 ° of installations.
In the optical fiber connector 40 passages, be provided with optical fiber and insert detecting sensor 50 and optical fiber interface temperature sensor 60, whether be used for detecting output optical fiber is connected bad or comes off, and the temperature that therefore interface causes is too high, and handle to the control system in the equipment the detected signal feedback, guarantee the maximum transmitted efficient of laser and move safely.These two transducers provide detection signal for laser effectively transmits, and have protected laser better.
Replaceable protection window 70 is installed on the optical fiber connector 40 rear ends; main effect is for when frequently connecting external fiber; foreign matter and dust very easily enter in optical module 80 cavitys by the optical fiber connector 40 passages, have hindered axial optics transmission channel, have a strong impact on efficiency of transmission.Can guarantee cavity and outside effective isolation with this protection window; Its two, for pollution face is cleaned and changes, this protection window is the Embedded substrate 100 that is fixed in, and is for convenience detach and change.
Light reflection feedback window 90 is arranged on branch's light path of polarizing coupler 88, its effect be at laser in transmission course, because reflexing to this light by polarizing coupler 88, the outside cause reflex time reflects feedback window as laser, for the outside provides the laser-bounce light signal fed back.Make things convenient for control system to detect and control with this function.
Whole module adopts sealed package, and inside is filled with nitrogen, and purpose is in order to prevent under the effect of refrigeration semiconductor laser owing to the temperature difference produces the dewfall phenomenon, thereby damages laser in the course of the work.
Described semiconductor laser can directly be welded on the heat sink laser strip that goes up for single or array arrangement.
It can be mechanical or photoelectric type that described optical fiber inserts acquisition sensor.
Described laser tube temperature transducer is negative tempperature coefficient thermistor (NTC) or semistor (PTC).
Described optical power sensor is the electro-optical pickoff of photodiode (PD) type.
Described pilot light light source is that wave-length coverage is LASER Light Source or the led light source of 375～800nm.
Claims (8)
1. semiconductor laser module that has multiple detecting sensor and protective device, it is characterized in that: comprise substrate (100), substrate (100) is provided with semiconductor laser element (10), it is used to produce laser and is installed on substrate, adjacent locations in this unit (10) is provided with temperature sensor (20), this temperature sensor (20) is used for the actual work temperature of detection laser, for thermostatic control and overtemperature alarm provide the temperature detection sampled signal; Be provided with optical power sensor (30) with semiconductor laser element outgoing position on substrate, its effect is the actual light power of detection laser, for the outside provides laser power feedback sample signal; Comprise the optical module that optical focus mirror group (87), polarizing coupler (88), fast slow axes collimating module (89) are formed, be arranged on the emitting light path axis of semiconductor laser element (10), effect is the laser that semiconductor laser produces to be focused on by this optical module launch on the central shaft of the optical fiber connector (40), guarantee when external fiber is screwed onto the optical fiber connector (40) simultaneously, can focus on the fiber optic hub end face, reach maximum light transmissioning efficiency; In the optical fiber connector (40) passage, be provided with simultaneously optical fiber and insert detecting sensor (50) and optical fiber interface temperature sensor (60), being used for detecting output optical fiber, whether to be connected temperature bad or that therefore interface causes too high, and handle to the control system in the equipment detected signal feedback.
2. the semiconductor laser module that has multiple detecting sensor and protective device according to claim 1; it is characterized in that: also comprise replaceable protection window (70); it is installed between the optical module (80) and the optical fiber connector (40), and main effect is to be convenient for changing when having dust or dirt residual when frequent connection external fiber minute surface.
3. the semiconductor laser module that has multiple detecting sensor and protective device according to claim 1; it is characterized in that: also comprise light reflection feedback window (90); it is arranged on branch's light path of polarizing coupler (88); its effect be at laser in transmission course; when laser-bounce, reflex to this light reflection feedback window, for the outside provides the laser-bounce feedback by polarizing coupler (88).
4. have the semiconductor laser module of multiple detecting sensor and protective device according to claim 1, it is characterized in that: described semiconductor laser is single or array arrangement directly is welded on the heat sink laser strip that goes up.
5. have the semiconductor laser module of multiple detecting sensor and protective device according to claim 1, it is characterized in that: it can be mechanical or photoelectric type that described optical fiber inserts acquisition sensor.
6. have the semiconductor laser module of multiple detecting sensor and protective device according to claim 1, it is characterized in that: described laser tube temperature transducer is negative tempperature coefficient thermistor NTC or semistor PTC.
7. have the semiconductor laser module of multiple detecting sensor and protective device according to claim 1, it is characterized in that: described optical power sensor is the electro-optical pickoff of photodiode PD type.
8. have the semiconductor laser module of multiple detecting sensor and protective device according to claim 1, it is characterized in that: described pilot light light source is that wave-length coverage is LASER Light Source or the led light source of 375～800nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202441769U CN201829809U (en) | 2010-06-29 | 2010-06-29 | Semiconductor laser module with various detection sensors and protectors |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202441769U CN201829809U (en) | 2010-06-29 | 2010-06-29 | Semiconductor laser module with various detection sensors and protectors |
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| Publication Number | Publication Date |
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| CN201829809U true CN201829809U (en) | 2011-05-11 |
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| CN2010202441769U Expired - Lifetime CN201829809U (en) | 2010-06-29 | 2010-06-29 | Semiconductor laser module with various detection sensors and protectors |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102315586A (en) * | 2010-06-29 | 2012-01-11 | 深圳市雷迈科技有限公司 | Semiconductor laser module with multiple detection sensors and protection devices |
| CN104836099A (en) * | 2015-05-19 | 2015-08-12 | 大族激光科技产业集团股份有限公司 | Optical fiber laser system and monitoring device thereof |
| CN105334024A (en) * | 2015-09-18 | 2016-02-17 | 西安炬光科技股份有限公司 | Semiconductor laser array single-laser-bar real-time testing system and method |
| CN109557873A (en) * | 2018-12-10 | 2019-04-02 | 雷斯罗普(北京)激光科技有限公司 | A kind of laser cleaning machine control system |
| CN110385313A (en) * | 2019-07-26 | 2019-10-29 | 中国工程物理研究院激光聚变研究中心 | High power laser light cleaning system based on laser array and bundling optical fiber |
| CN111934191A (en) * | 2020-08-19 | 2020-11-13 | 苏州长光华芯光电技术有限公司 | Semiconductor laser coupling structure |
| CN112033574A (en) * | 2020-09-29 | 2020-12-04 | 江苏亨通光纤科技有限公司 | Distributed fiber laser monitoring system and monitoring method |
-
2010
- 2010-06-29 CN CN2010202441769U patent/CN201829809U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102315586A (en) * | 2010-06-29 | 2012-01-11 | 深圳市雷迈科技有限公司 | Semiconductor laser module with multiple detection sensors and protection devices |
| CN104836099A (en) * | 2015-05-19 | 2015-08-12 | 大族激光科技产业集团股份有限公司 | Optical fiber laser system and monitoring device thereof |
| CN105334024A (en) * | 2015-09-18 | 2016-02-17 | 西安炬光科技股份有限公司 | Semiconductor laser array single-laser-bar real-time testing system and method |
| CN105334024B (en) * | 2015-09-18 | 2017-08-25 | 西安炬光科技股份有限公司 | Semiconductor laser array list bar real-time testing system and method for testing |
| CN109557873A (en) * | 2018-12-10 | 2019-04-02 | 雷斯罗普(北京)激光科技有限公司 | A kind of laser cleaning machine control system |
| CN110385313A (en) * | 2019-07-26 | 2019-10-29 | 中国工程物理研究院激光聚变研究中心 | High power laser light cleaning system based on laser array and bundling optical fiber |
| CN111934191A (en) * | 2020-08-19 | 2020-11-13 | 苏州长光华芯光电技术有限公司 | Semiconductor laser coupling structure |
| CN112033574A (en) * | 2020-09-29 | 2020-12-04 | 江苏亨通光纤科技有限公司 | Distributed fiber laser monitoring system and monitoring method |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C53 | Correction of patent for invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Du Yi Inventor after: Wu Rongliang Inventor after: Tu Shihu Inventor after: Fan Haiding Inventor before: Du Yi Inventor before: Wu Rongliang |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: DU YI WU RONGLIANG TO: DU YI WU RONGLIANG TU SHIHU FAN HAITING |
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| CX01 | Expiry of patent term |
Granted publication date: 20110511 |
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| CX01 | Expiry of patent term |