CN102259473A - Printing Stamper For Alignment Layer, Manufacturing Method And System Therefore - Google Patents

Printing Stamper For Alignment Layer, Manufacturing Method And System Therefore Download PDF

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Publication number
CN102259473A
CN102259473A CN2011101323603A CN201110132360A CN102259473A CN 102259473 A CN102259473 A CN 102259473A CN 2011101323603 A CN2011101323603 A CN 2011101323603A CN 201110132360 A CN201110132360 A CN 201110132360A CN 102259473 A CN102259473 A CN 102259473A
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thickness
substrate
plate
pressing mold
stacking material
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洪永基
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

The invention discloses a stamper for an printing alignment layer, a manufacturing method and a system thereof. The system includes a material supplying unit used to provide printing film laminated material comprising sensitive resin, a base film and a negative film; a thickness adjusting unit used to adjust the thickness of the printing film laminated material; and an upper surface exposure unit. The upper surface exposure unit includes an upper side glass disposed above the printing film laminated material, an UV emitter including an UV lamp disposed above the glass, a thickness adjusting board forming an oblique angle with a releasing direction of the printing film laminated material and disposed under the printing film laminated material, and a flatness adjusting component used to adjust the height of part areas of the thickness adjusting unit precisely.

Description

The pressing mold that is used for the printing direction-orienting layer is made the method for pressing mold and the system of manufacturing pressing mold
Technical field
The present invention relates to a kind of pressing mold (stamper) that is used for printing direction-orienting layer (alignment layer), make the method for this pressing mold and make the system of this pressing mold.Particularly, the present invention relates to a kind of printing pressing mold that is used for the printing direction-orienting layer, make the method for this pressing mold and make the system of this pressing mold, it can improve the precision of the print thickness of the precision of thickness of the pressing mold that is used for printing the oriented layer that LCD (LCD) uses and oriented layer.
Background technology
In general, LCD (LCD) can adjust the light transmission rate of liquid crystal with display image by using electric field.
For this purpose, LCD comprises: liquid crystal panel and the drive circuit that is used for driving liquid crystal panel with liquid crystal cell of arranging with matrix form.Have common electrode and a plurality of pixel electrode in the liquid crystal panel electric field is applied to each liquid crystal cell.In general, each pixel electrode that is used for each liquid crystal cell is formed at infrabasal plate, and common electrode then is positioned at the front of upper substrate.
Each pixel electrode of infrabasal plate is connected to the TFT (thin film transistor (TFT)) as switchgear.Pixel electrode and common electrode drive liquid crystal cell according to the data-signal that is provided by TFT together.
Fig. 1 is the sectional view of expression according to the LCD of prior art.
Referring to Fig. 1, comprise upper plate according to the LCD of prior art, it has black matrix" 32, colored filter 30 and the transparency electrode 28 that forms successively on upper substrate 11; Lower plate, it has TFT and the pixel electrode 22 that forms on infrabasal plate 1; Be inserted into the slider 26 between upper plate and the lower plate; And be injected into by the liquid crystal 38 in upper and lower plates and the slider 26 formed inner spaces.
The surface that black matrix" 32 on upper plate has upper substrate 11 is divided into a plurality of cellular zones that form colored filter 30, and the matrix form that prevents the optical interference between the adjacent cells.Represent the colored filter 30 of red, green, blue three primary colours to be formed at successively on the upper substrate 11 with black matrix" 32.Here, only allow the material of the light by having specific wavelength (red, green, blue) and carry out patterning (patterning) and form each colored filter 30 of representing three primary colours by on the whole surface of upper substrate 11, apply absorbing white light with black matrix" 32.Then, the transparency electrode 28 that is used to receive earthy transparency conducting layer is applied on the upper substrate 11 with black matrix" 32 and colored filter 30, thereby forms upper plate.
TFT is formed at the driving of the crosspoint of gate line on the lower plate and data wire with switch (switch) liquid crystal cell.Be placed on the infrabasal plate 1 with one of them equitant pixel electrode 22 in data wire and the gate line form with matrix.Form gate line and gate electrode by metal level being coated on the infrabasal plate 1 and carrying out patterning.Gate insulator 12 is formed on the whole surface of infrabasal plate 1, and it comes covering gate polar curve and gate electrode by deposition approach.On gate insulator 12 after deposition first and second semi-conducting materials and carry out patterning, thus formation active layer 14 and ohmic contact layer 16.Subsequently, on gate insulator 12 after the metallizing layer, this metal level of patterning, thus form source electrode and drain electrode 8 and 10.Then, in order to form the raceway groove with preliminary dimension, etching ohmic contact layer 16 is with exposure active layer 14.Then, on gate insulator 12, deposit organic protection layer 18 by the rotation coating scheme and make its surface be evened up and carry out patterning, thereby form contact hole 20 with the drain electrode 10 that exposes.Next, after on organic protection layer 18, covering transparent, conductive material, carry out patterning, thus the pixel electrode 22 that formation and this drain electrode 10 are electrically connected.Have on the whole surface of infrabasal plate 1 of pixel electrode 22 and apply after the oriented layer 24, carry out gel and handle to finish the manufacturing of lower plate.
Then, in conjunction with upper and lower plates 11 and 1 after the two, spherical slider 6 is dispersed between upper plate and lower plate 11 and 1, then injects liquid crystal betwixt, thereby finishes LCD accurately.
For above-mentioned LCD is used as optical device, liquid crystal molecule must be calibrated on the specific direction.In general, liquid crystal molecule only is orientated at regional area.Therefore, for liquid crystal molecule is calibrated on the specific direction, the organic polymer body layer that is called as oriented layer is formed on ITO (tin indium oxide) electrode by the artificially.For this purpose, promptly in order to form oriented layer, on substrate, apply orientation solvent (for example poly-propylhomoserin or soluble polyimide) and solidify orientation solvent (alignment solution) afterwards, by after the polyimidesization and gel form.
Specifically,, will be orientated on the surface that solvent is printed onto substrate, and heat the orientation solvent to carry out first curing processing to about 80 ℃ temperature at about 60 ℃ by using the oriented layer printing equipment for the printing direction-orienting layer.Then, heating the orientation solvent in about 80 ℃ to 200 ℃ higher temperature handles to carry out regelate.After this, gel is carried out on the surface of orientation solvent handled, perhaps use up the surface of irradiation orientation solvent, thereby form oriented layer.
Fig. 2 is the schematic diagram of expression according to the oriented layer printing equipment of prior art.
Referring to Fig. 2, the oriented layer printing equipment of typical LCD comprises distributor (dispenser) 56, so that the orientation solvent to be provided; By printing mask (printing mask) 52 print roller that center on (printing roll) 51, will be orientated on the upper surface that solvent is printed onto LCD substrate 50; Anilox roll (anilox roll) 53 will be will be orientated solvent coating on printing mask 52; Dancer rools (doctor roll) 54 will be being coated in equably by the orientation solvent that distributor 56 provides on the anilox roll 53; Base station (stage) 58 loads and fixed L CD substrate 50 thereon; Charging appliance 60 is to be loaded into LCD substrate 50 on the base station 58; With unloading equipment 62, unload from base station with the LCD substrate 50 that will be printed with oriented layer.
After being loaded into LCD substrate 50 on the base station 58,, LCD substrate 50 is unloaded from base station 58 by unloading equipment 62 if oriented layer is printed on the LCD substrate 50 by charging appliance 60.Base station 58 is connected with CD-ROM drive motor (not shown in Figure 2), and moves along a direction by the driven roller 59 of rotation.
Distributor 56 is installed on the anilox roll 53, and moves to left or move to right by the driving arrangement (not shown), therefore is orientated the exterior periphery that solvent is provided for anilox roll 53.The exterior periphery of dancer rools 54 contacts with the exterior periphery of anilox roll 53, being coated in equably on the exterior periphery of anilox roll 53 by the orientation solvent that distributor 56 provides.
Printing mask 52 is made by elastomeric material, and on the exterior periphery attached to print roller 51.Printing mask 52 contacts with the exterior periphery of anilox roll 53 along with the rotation of print roller 51, and the orientation solvent that therefore is coated on the exterior periphery of anilox roll 53 is printed on the LCD substrate 50.
As mentioned above, according to the oriented layer printing equipment and the method thereof of prior art, provide the distributor 56 of orientation solvent will be orientated solvent by being moved to the left or moving right, for example polyimide solvent accumulates between dancer rools 54 and the anilox roll 53.Then, after flowing down, be orientated solvent coating along with the rotation of dancer rools 54 and anilox roll 53 on the printing mask 52 of the exterior periphery that centers on print roller 51 at the orientation solvent.In this case,, then provide power supply, so driven roller 59 begins rotation to CD-ROM drive motor if print roller 51 begins rotation.Along with the rotation of driven roller 59, the base station 58 with loading LCD substrate 50 thereon moves along a direction at a predetermined velocity.Under these circumstances, the rotary speed of print roller 51 is identical with the speed of service of base station 58.
The printing masks 52 that are coated with all orientation solvents rotate along with the rotation of print roller 51, contacting with the LCD substrate 50 that moves on base station 58, thereby very thin oriented layer are printed onto on the surface of LCD substrate 50.
After oriented layer was printed onto LCD substrate 50, the LCD substrate 50 that unloading equipment 62 will be fixed on base station 58 was unloaded to the outside.In this case, passing through unloading equipment 62 with after LCD substrate 50 is under base station 58 unloadings, driven roller 59 counter-rotatings make base station 58 move towards charging appliance 60 backward.Then, will be orientated solvent by above process is printed onto on another LCD substrate 50.
Can also oriented layer be printed onto on the substrate that comprises transparency electrode and colored filter by the method for another kind of printing direction-orienting layer.For example rich auspicious relief printing plate (flexographic) print solution can be printed the oriented layer corresponding to pressing mold.
Developed and the technology that multiple manufacturing is used for the pressing mold of printing direction-orienting layer.
Especially, recently a kind of technology that is used for the pressing mold of printing direction-orienting layer by use UV (ultraviolet ray) photosensitive resin manufacturing has caused the public's attention.
According to by using the UV photosensitive resin to make the technology of the pressing mold that is used for the printing direction-orienting layer, on first glass substrate after the deposition substrate, the UV photosensitive resin of liquid state is coated on the substrate.Then, but will have transmission region and thin transparent mulch film and image film that can not transmission region be stacked to together mutually, and second glass substrate will be piled up thereon.
Then, predetermined time cycle by the UV irradiator make UV light from the film external irradiation to film.In this case, along with UV illumination is mapped on the film, but the UV photosensitive resin in the transmission region of image film be cured, and the UV photosensitive resin in can not transmission region is not cured.
Subsequently, after removing coverlay and image film, the resin that is not cured also is removed, thereby has made the pressing mold that is used for the printing direction-orienting layer.
Yet this conventional pressing mold that is used for the printing direction-orienting layer can't increase dimensionally.
In addition, make, therefore can't make pressing mold continuously because this pressing mold fixedly inserted into form such between first and second glass substrates with for example these materials of substrate, liquid UV photosensitive resin, coverlay and image film.
In addition, when product was cured between two glass substrates, the thickness of this product had just been determined.Yet,, can't reduce the error of the spacing of the about ± 30 μ m between two blocks of glass according to existing glass technology technology.
Summary of the invention
Therefore, the present invention is proposed to solve the problem that in according to prior art system, occurs, an object of the present invention is to provide a kind of pressing mold that is used for the printing direction-orienting layer, a kind of method and a kind of system that is used to make this pressing mold that makes this pressing mold, it can manufacture a product by distributed treatment is carried out in material supply, lower surface exposure, thickness adjustment and upper surface exposure, thereby makes the pressing mold that is used for the printing direction-orienting layer continuously.
Another object of the present invention provides a kind of pressing mold that is used for the printing direction-orienting layer, a kind of method of making this pressing mold, with a kind of system that makes this pressing mold, it can be by being installed to meticulous adjustment component in the thickness adjustment part thickness with meticulous adjustment product, and improve the size of product and the precision of thickness by upper surface exposure portion.
According to an aspect of the present invention, the system that it provides a kind of manufacturing to be used for the pressing mold of printing direction-orienting layer, it comprises material supply department, is used for photosensitive resin is stacked between the negative film of the substrate of roll form and roll form; Lower surface exposure portion is used for by using UV light to solidify the substrate of above-mentioned stacked structure; The thickness adjustment part is used to adjust the thickness of the above-mentioned exposed portion that piles up; Upper surface exposure portion is used for adjusting subtly the zone that needs thickness to adjust, and by using UV light to come cured pattern; Draw off portion with product, be used for drawing off various piece with predetermined speed.
Upper surface exposure portion comprises the upper glass plates on the upper surface that is positioned over the print film stacking material; Be positioned over the top UV irradiator on the top glass; The thickness that is positioned over the lower surface of print film stacking material is adjusted plate, thereby determines product thickness to adjust with the spacing of upper glass plates; And the flatness adjustment component, be used for adjusting subtly the height that thickness is adjusted the part of plate, to adjust the flatness between upper glass plates and the thickness adjustment plate.
Described flatness adjustment component comprises: be positioned at described thickness and adjust the lower plate of the below of plate, make described lower plate adjust the connecting elements that plate is connected with described thickness, and run through described lower plate adjust the tight deformation element that contacts of lower surface of plate with described thickness.
Connecting elements and deformation element comprise screw bolt and nut, and deformation element is that unit moves up and down with μ m.
Top UV irradiator comprises a plurality of UV lamps with stock shape, and the axle of the bearing of trend of described UV lamp and the transmission direction of described print film stacking material spool between angle be in 30 ° to 85 ° the scope.
According to another aspect of the present invention, the system that a kind of manufacturing is used for the pressing mold of printing direction-orienting layer comprises material supply department, be used to provide the print film stacking material, described print film stacking material is to form between the negative film by substrate that photosensitive resin is stacked to the roll form and roll form; The thickness adjustment part is used to adjust the thickness of described print film stacking material; With upper surface exposure portion, it comprises the upper glass plates that is positioned at described print film stacking material top, be positioned at the top UV irradiator that comprises a plurality of UV lamps that extend with shaft-like profile on the described upper glass plates, being used to below the described print film stacking material adjust and described upper glass plates between spacing adjust plate with the thickness of the thickness of determining the described pressing mold that is used for the printing direction-orienting layer, and flatness adjustment component, it is used for adjusting the height in the part zone of plate and adjusting described upper glass plates and described thickness and adjust flatness between the plate by adjusting described thickness subtly, wherein, described print film stacking material is transferred to described upper surface exposure portion from described material supply department.
The axle of the bearing of trend of described UV lamp and the transmission direction of described print film stacking material spool between angle be in 30 ° to 85 ° the scope.
This system further comprises lower surface exposure portion, is used to expose adjacent to the adjacent photosensitive resin part of substrate that provides with material supply department, and is used to draw off the portion that draws off by the pressing mold that is used for the printing direction-orienting layer after the described upper surface exposure portion.
Thickness error by photosensitive resin being inserted into the pressing mold that is used for the printing direction-orienting layer that forms between substrate and the negative film is less than ± 30 μ m.
Its thickness error preferably at ± 5 μ m to the scope of ± 10 μ m.
According to a further aspect of the present invention, the method that it provides a kind of manufacturing to be used for the pressing mold of printing direction-orienting layer, it comprises photosensitive resin is coated on the substrate, and place negative film on described photosensitive resin; By solidifying the photosensitive resin part that is positioned at above the described substrate from described substrate below towards described substrate irradiation UV light; By pushing described substrate and described negative film is adjusted thickness; With push by glass plate described negative film above, and the height of adjusting the part of described metallic plate comes substrate is pushed when making that the described pressing mold that is used for the printing direction-orienting layer has the thickness of expectation, solidifies the photosensitive resin that is not cured by the top irradiation UV light from described negative film.
As mentioned above, according to the present invention, by using system that distributed treatment is carried out in material supply, lower surface exposure, thickness adjustment and upper surface exposure obtaining product, thereby can make the pressing mold that is used for the printing direction-orienting layer continuously.
In addition, can in exposure-processed, adjust product thickness, can improve product in the precision aspect size and the thickness by the lamp position that is adjusted in the upper surface exposure portion by meticulous adjustment component is installed.
Description of drawings
Fig. 1 is the sectional view of expression according to the LCD of prior art;
Fig. 2 is the schematic diagram of expression according to the oriented layer printing equipment of prior art;
Fig. 3 is that a kind of manufacturing of the specific embodiment is used for the view of system of the pressing mold of printing direction-orienting layer according to the present invention in expression;
Fig. 4 is the view of expression a kind of lower surface exposure portion of the specific embodiment according to the present invention;
Fig. 5 is the view of expression a kind of thickness adjustment part of the specific embodiment according to the present invention;
Fig. 6 is the view of expression a kind of upper surface exposure portion of the specific embodiment according to the present invention;
Fig. 7 is the schematic diagram of expression a kind of upper surface exposure portion of the specific embodiment according to the present invention;
Fig. 8 be used for explaining a kind of specific embodiment according to the present invention adjust the plane of the annexation between plate and the flatness adjustment component at the thickness of upper surface exposure portion;
Fig. 9 is the perspective view of expression a kind of top UV irradiator of the specific embodiment according to the present invention;
Figure 10 is the floor map of expression a kind of top UV irradiator of the specific embodiment according to the present invention;
Figure 11 is expression when the view of the position when the transmission direction of print film stacking material and the angle between the UV lamp are 0 °;
Figure 12 is expression when the view of the position when the transmission direction of print film stacking material and the angle between the UV lamp are 30 °;
Figure 13 is the schematic diagram of the product after expression is handled through exposed.
The specific embodiment
Referring now to accompanying drawing exemplary embodiment of the present invention is elaborated.Although the present invention has described exemplary embodiment of the present invention, clearly those skilled in the art can carry out various modifications and variation to it within as following desired spirit of the present invention and category.Provide present embodiment to be used for intactly openly the present invention and to allow those skilled in the art ideally to understand the present invention.Identical reference marker is used to the mark components identical in the accompanying drawing.
Fig. 3 is that a kind of manufacturing of the specific embodiment is used for the view of system of the pressing mold of printing direction-orienting layer according to the present invention in expression.Fig. 4 is the view of expression a kind of lower surface exposure portion of the specific embodiment according to the present invention; Fig. 5 is the view of expression a kind of thickness adjustment part of the specific embodiment according to the present invention; Fig. 6 is the view of expression a kind of upper surface exposure portion of the specific embodiment according to the present invention; Fig. 7 is the schematic diagram of expression a kind of upper surface exposure portion of the specific embodiment according to the present invention; Fig. 8 be used for explaining a kind of specific embodiment according to the present invention adjust the plane of the annexation between plate and the flatness adjustment component at the thickness of upper surface exposure portion; Fig. 9 is the perspective view of expression a kind of top UV irradiator of the specific embodiment according to the present invention; Figure 10 is the floor map of expression a kind of top UV irradiator of the specific embodiment according to the present invention.
Referring to Fig. 3 to Figure 10, the system of pressing mold that manufacturing according to the present invention is used to print the oriented layer of LCD (LCD) is pipeline system (in-line system), and by using roll to come the scheme manufacturing of removal product to be used for the pressing mold of printing direction-orienting layer.The system that manufacturing is used for the pressing mold of printing direction-orienting layer comprises that sequentially arrangement material supply department 100, lower surface exposure portion 200, thickness adjustment part 300, upper surface exposure portion 400 and product within it draws off portion 500.
Material supply department 100 provides print film stacking material 101 to lower surface exposure portion 200, forms these print film stacking materials 101 between substrate (the base film) 102 by photosensitive resin 103 being coated in the roll form and the negative film (negative film) 104 of roll form.
As described in Figure 3, material supply department 100 comprises: the substrate feed rolls 110 that forms by coiling substrate 102; The supply pedestal 120 that is used for substrate transport 102; Photosensitive resin 103 is provided to resin supply container 130 on the substrate 102 in the transmission; The negative film feed rolls 140 that forms with the negative film 104 will be provided to the upper surface of photosensitive resin 103 by reeling.
As mentioned above, material supply department 100 makes print film stacking material 101 by photosensitive resin 103 is inserted between substrate 102 and the negative film 104, and print film stacking material 101 is transferred to product draws off portion 500.In other words, when substrate feed rolls 110 discharges, substrate 102 draws off portion's 500 transmission towards product.Along direction when transmission that obtains product, photosensitive resin 103 is applied on the substrate 102, and places negative film 104 on photosensitive resin 103.
As shown in Figure 1, supply pedestal 120, for example Xuan Zhuan roll can be arranged at a plurality of positions of material supply department 100 by multiple scheme.
In this case, resin supply container 130 provides the upper surface of resin to the substrate 102 in the motion equably.For this purpose, the resin floss hole of resin supply container 130 preferably has and the same or analogous width of the width of substrate 102.
Lower surface exposure portion 200 mainly makes in the print film stacking material 101 that is provided by material supply department 100 adjacent to the part exposure of the photosensitive resin 103 of substrate 102.Carried out after the initial exposure processing, the resin with predetermined thickness in substrate 102 zones obtains solidifying.
As shown in Figure 4, lower surface exposure portion 200 comprises with the substrate 102 contacted below glass plates 210 of print film stacking material 101 and is positioned at below UV irradiator 220 below the below glass plate 210, with UV illumination directive substrate 102.
Below glass plate 210 preferably has the width wideer than substrate 102.Thereby when below glass plate 210 was passed through on the whole surface of substrate 102, substrate 102 can be transferred to product and draw off portion 500.
Below UV irradiator preferably comprises a plurality of UV lamps as shown in Figure 4.The UV lamp can be placed on inner hollow and top has in the box shape space of opening.And described box has and is used for catoptrical reflecting layer.Certainly can also place light-passing board on box top.
In this case, the UV lamp preferably comprises rod-type (bar-type) lamp.In addition, preferred, the bearing of trend of UV lamp is perpendicular to the transmission direction of substrate 102.Yet the present invention is not limited only to this, and the UV lamp can be placed as the arrangement of the UV lamp in the upper surface exposure portion 400 as will be described below.
UV light by the UV lamp solidifies photosensitive resin 103 (referring to the regional A of Fig. 4), and it is attached to substrate 102.In addition, the remaining top part of photosensitive resin 103 remain liquid in by lower surface exposure portion 200.
The thickness adjustment part 300 main thickness of adjusting print film stacking material 101.In other words, thickness adjustment part 300 is pushed print film stacking material 101 and is made it reach thickness corresponding to the pressing mold that is used for the printing direction-orienting layer.
As described in Figure 5, thickness adjustment part 300 comprises the first and second thickness adjustment units 311 and 312, and (both are spaced apart up and down, this distance is corresponding to the thickness of the pressing mold that is used for the printing direction-orienting layer) and spacing adjustment equipment 320, to adjust the spacing between the first and second thickness adjustment units 311 and 312.
As shown in Figure 5, according to present embodiment, a pair of first thickness adjustment unit 311 and a pair of second thickness adjustment unit 312 are provided at the place ahead and the rear in the transmission direction of print film stacking material 101.
The first and second thickness adjustment units 311 and 312 preferably have cylindrical shaft-like profile.In this case, the length of bar preferably is equal to or greater than the width of printed films stacking material 101.Therefore, can push the whole surface of print film stacking material 101 equably.In this case, the first thickness adjustment unit 311 contacts with the substrate 102 of print film stacking material 101, and the second thickness adjustment unit 312 contacts with the negative film 104 of print film stacking material 101.
Spacing is adjusted equipment 320 and is comprised: first and second fixed components 321 and 322 that are fixedly mounted in the above and below of print film stacking material 101, first support member 323 is used for supporting respectively a pair of first thickness adjustment unit 311, second support member 324 is used to support a pair of second thickness adjustment unit 312, adjust the height that member 325 is used for adjusting subtly first support member 323 with first spacing that first support member 323 is connected with first fixed component 321, adjust the height that member 326 is used to adjust second support member 324 with second spacing that second support member 324 is connected with second fixed component 322.
In this case, first and second spacings are adjusted member 325 and are linked to each other by bolt arrangement respectively with 324 with support member 323 with 326.Along with the rotation of first and second spacings adjustment member 325 and 326, support member 323 and 324 moves down because of bolt arrangement.Yet the present invention is not limited only to this, and above-mentioned member can have the rack pinion structure or slide up and down structure.In addition, above-mentioned member can be controlled by automatic drive scheme or manual drives scheme.
Spacing between the first and second thickness adjustment units 311 and 312 is that unit carries out meticulous adjustment with μ m.
Can come the photosensitive resin 103 of cured printed membrane stack thing 101 fully by upper surface exposure portion 400.Here, a part of photosensitive resin 103 does not expose because being positioned over the negative film 104 on photosensitive resin 103 tops or solidifies.In addition, in upper surface exposure portion 400, make the printing pressing mold, and determine the final thickness of printing pressing mold.Therefore, must accurately adjust the surface thickness of printing pressing mold.According to prior art, the error of product thickness can not be lowered to ± 30 μ m or littler.Therefore, application of the present invention can obtain by the control of upper surface exposure portion 400 error of product thickness being reduced to ± 30 μ m or littler manufacturing a product.
Below will upper surface exposure portion 400 be described referring to Fig. 6 to 10.
Upper surface exposure portion 400 comprises: be positioned at the upper glass plates 410 on the upper surface of print film stacking material 101; Be positioned at the top UV irradiator 420 on the upper glass plates 410; The thickness that is positioned at the lower surface below of print film stacking material 101 is adjusted plate 430, with by adjusting the thickness of product that spacing with upper glass plates 410 is identified for the pressing mold of printing direction-orienting layer; And flatness adjustment component 440, it is used for adjusting upper glass plates 410 and thickness by the meticulous adjustment that thickness is adjusted plate 430 and adjusts flatness between the plate 430.
As described in Figure 7, upper glass plates 410 separates with predetermined spacing and thickness adjustment part 430 and flatness adjustment component 440.In this case, this spacing is identical with the product thickness of the expectation of the pressing mold that is used for the printing direction-orienting layer.In this case, adjust on the plate 430 by using extra fixed cell that upper glass plates 410 is fixed on thickness.Upper glass plates 410 preferably contacts with print film stacking material 101.Thereby the UV light that comes from the irradiation of the top of upper glass plates 410 can be passed to print film stacking material 101.
Thickness is adjusted the below that plate 430 is positioned at upper glass plates 410.Thickness is adjusted plate 430 and is contacted with the substrate 102 of print film stacking material 101.According to present embodiment, thickness is adjusted plate 430 and is comprised iron plate.Yet the present invention is not limited only to this, and thickness is adjusted plate 430 can comprise the multiple material with platy morphology.In addition, preferred, thickness is adjusted plate 430 and is comprised the metallic plate that has good surface flatness by surface treatment.
In addition, flatness adjustment component 440 comprises: the lower plate 441 below thickness is adjusted plate 430; Make lower plate 441 adjust the connecting elements 442 that plate 430 is connected with thickness; And deformation element 443, be used for adjusting the lower surface of plate 430 and changing the flatness that thickness is adjusted plate 430 partly by using lower plate 441 to push thickness partly.As shown in Figure 6, flatness adjustment component 440 comprises that further bottom product guide member 444 is to support above-mentioned member.
In this case, lower plate 441 can comprise having the iron plate of adjusting the same metal of plate 430 with thickness, perhaps comprises another kind of metallic plate.Preferably, the thickness of lower plate 441 is adjusted the thickness of plate 430 greater than thickness.Therefore, lower plate 441 can support thickness to adjust plate 430 effectively, to keep the elastic force that distortion was caused of adjusting plate 430 because of thickness.
Connecting elements 442 preferably comprises bolt and/or nut.As shown in Figure 8, in order to use connecting elements 442, in adjusting plate, thickness provide hole (for example, fixed bolt hole and hold-down nut hole) to be fixedly connected to connecting elements 442.In addition, as shown in Figure 8, in lower plate 441, provide through hole, passed wherein to allow connecting elements 442.
Deformation element 443 preferably comprises bolt or the nut that passes lower plate 441, closely to contact with the lower surface of thickness adjustment plate 430.Preferably, deformation element 443 is evenly distributed in the whole surface of lower plate 441.Therefore, can adjust the flatness that thickness is adjusted the whole surface of plate 430.In other words, if deformation element 443 moves up, the zone of adjusting plate 430 with the thickness that deformation element 443 closely contacts also moves up.In addition, if deformation element 430 moves down, the zone of adjusting plate 430 with the thickness that deformation element 443 closely contacts also moves down.As mentioned above, by adjusting the nut of forming deformation element 443, the flatness that thickness is adjusted plate 430 can be complementary with the flatness of upper glass plates 410.Therefore, thus thickness is adjusted the crooked interval error that can minimize with glass plate of plate 430.
In this case, deformation element 443 is that unit moves up and down with μ m.Therefore, the flatness of the respective regions of thickness adjustment plate 430 can obtain micron-sized adjustment.Therefore, by deformation element 443, the flatness error between upper glass plates 410 and thickness adjustment plate 430 can be reduced to ± 10 μ m.
According to existing glass technology, in fact the flatness error of glass surface can't be eased down to ± 30 μ m or littler.Therefore, the thickness flatness error of the common pressing mold that is used for the printing direction-orienting layer surpasses ± 30 μ m.Yet according to present embodiment, the thickness flatness error that is used for the pressing mold of printing direction-orienting layer can be reduced to ± 10 μ m.
Preferably in lower plate 441, provide screw hole, to allow deformation element 443 to run through wherein and to be connected with deformation element 443.In this case, screw hole preferably is provided at inner side wherein, and has the screw thread corresponding to deformation element 443.
About the precision of the print thickness that need consider when the printing direction-orienting layer, wherein product thickness precision accounts for 30% greatly, and the size of the site that forms on product surface and precision arranged in a uniform account for 70% greatly.
Therefore, when comparing, can greatly improve product thickness precision by above-mentioned flatness adjustment component with conventional art.
In addition, according to present embodiment, the uniformity of arranging for the size that improves the site that on product surface, forms and site, UV light is shone to print film stacking material 101 in the mode that is evenly distributed on the print film stacking material 101, the arrangement of the UV lamp that provides in top UV irradiator 420 can be provided.
As shown in Figures 9 and 10, UV irradiator 420 comprises the UV lamp box of a plurality of UV lamps 421 and support UV lamp 421.
As shown in Figures 9 and 10, UV lamp box 422 has rectangular configuration, and its transmission direction along print film stacking material 101 is extended.UV lamp box 422 is fixedly mounted in the top of upper glass plates 410.Upper glass plates 410 can be fixed on the UV lamp box 422.
As shown in Figures 9 and 10, UV lamp 421 comprises the rod shaped lamp that extends along a direction.According to present embodiment, UV lamp 421 is preferred and be parallel to the reference axis bevel of the transmission direction of print film stacking material 101.In this case, preferred, be parallel to the axle of bearing of trend of UV lamp 421 and the angle θ between the reference axis preferably be in about 20 ° to about 85 ° scope.Particularly, angle θ be in about 30 ° to about 45 ° scope.
Therefore, the UV light of UV lamp has uniform exposure, can improve thus a little size and the arrangement uniformity of point.If angle θ less than this scope, may occur not by the zone of illumination.If angle θ is greater than this scope, the quantity of illumination of UV light just is concentrated in the middle body of print film stacking material, this with according to conventional art to arrange the situation of UV lamp in vertical direction identical.
Therefore, can measure the quantity of illumination and the print thickness of each position of the oriented layer under following two kinds of situations: the UV lamp with direction irradiation UV light time of the transmission direction bevel of print film stacking material 101, and aforesaid UV light irradiation UV light time when arranged vertical.
In this case, according to the present invention, when the transmission direction of print film stacking material 101 and the angle between the UV lamp are approximately 30 °, and when the transmission direction of print film stacking material 101 and the angle between the UV lamp are 0 °, can be at the quantity of illumination of each position measurement from UV irradiator (being exposure device) irradiation.
Figure 11 and 12 is used to explain the view of UV luminaire at the quantity of illumination of each position.
The view of the position that Figure 11 is expression when the transmission direction of print film stacking material 101 and the angle between the UV lamp are 0 °, Figure 12 are the views of representing the position when the transmission direction of print film stacking material 101 and the angle between the UV lamp are 30 °.
Shown in Figure 11 and 12, according to the transmission direction of print film stacking material 101, the UV irradiator is divided into lead-in portion, discharge section and mid portion.
As shown in figure 11, when the transmission direction of print film stacking material 101 and the angle between the UV lamp were 0 °, 8 UV lamps were on the print film stacking material 101.Yet the present invention is not limited only to this, and the quantity of UV lamp can increase or reduce.
In this case, label 1 to 15 is distributed to UV lamp zone in the lead-in portion and the zone between the UV lamp in proper order.In addition, label 16 to 30 is distributed to the UV lamp zone of mid portion and the zone between the UV lamp in proper order.In addition, label 31 to 45 is distributed to the UV lamp zone of discharge section and the zone between the UV lamp in proper order.Calculate from exposure device the quantity of illumination of UV irradiator irradiation just around in the zone that is assigned corresponding label.The position and the quantity of illumination are summarized as table 1.
Table 1
Slot # 1 2 3 4 5 6 7 8 9 10
The quantity of illumination 1.4 1.45 1.5 1.47 1.45 1.53 1.6 1.55 1.5 1.45
Slot # 11 12 13 14 15 16 17 18 19 20
The quantity of illumination 1.4 1.45 1.5 1.55 1.6 2.0 2.1 2.2 2.18 2.15
Slot # 21 22 23 24 25 26 27 28 29 30
The quantity of illumination 2.18 2.21 2.2 2.18 2.24 2.3 2.23 2.16 2.18 2.2
Slot # 31 32 33 34 35 36 37 38 39 40
The quantity of illumination 1.6 1.53 1.45 1.5 1.5 1.45 1.4 1.5 1.6 1.55
Slot # 41 42 43 44 45 ? ? ? ? ?
The quantity of illumination 1.5 1.53 1.55 1.53 1.5 ? ? ? ? ?
As shown in figure 12, when the transmission direction of print film stacking material 101 and the angle between the UV lamp were 30 °, 9 to 10 UV lamps were on the print film stacking material 101.Yet the present invention is not limited only to this, and the quantity of UV lamp can increase or reduce according to the spacing between angle or the UV lamp.Spacing when spacing between the UV lamp when here, angle is 30 ° and above-mentioned angle are 0 ° equates.Lead-in portion has about 9 UV lamps, and label 1 to 18 is distributed to the zone between UV lamp zone and the UV lamp in proper order.Each of mid portion and discharge section all has about 10 UV lamps, label 19 to 36 is distributed to the UV lamp zone of mid portion and the zone between the UV lamp in proper order, in addition, label 38 to 56 is distributed to the UV lamp zone of discharge section and the zone between the UV lamp in proper order.Calculate from the quantity of illumination of exposure device irradiation in the zone that is assigned corresponding label.The position and the quantity of illumination are summarized as table 2.
Table 2
Slot # 1 2 3 4 5 6 7 8 9 10 11 12 13 14
The quantity of illumination 1.4 1.38 1.55 1.48 1.6 1.5 1.6 1.48 1.55 1.45 1.55 1.43 1.5 1.45
Slot # 15 16 17 18 19 20 21 22 23 24 25 26 27 28
[0109]?
The quantity of illumination 1.6 1.4 1.4 1.5 2.1 2.3 2.17 2.24 2.05 2.05 2.03 2.2 2.09 2.18
Slot # 29 30 31 32 33 34 35 36 37 38 39 40 41 42
The quantity of illumination 2.14 2.3 2.18 2.25 2.07 2.08 2.01 2.15 1.5 1.6 1.43 1.45 1.38 1.5
Slot # 43 44 45 46 47 48 49 50 51 52 53 54 55 56
The quantity of illumination 1.55 1.46 1.48 1.5 1.42 1.54 1.37 1.4 1.4 1.6 1.45 1.5 1.38 1.45
Figure 13 is the schematic diagram of the product after expression is handled through exposed.
As shown in figure 13, product is divided into 13 zones, and calculates the print thickness (coating thickness just) of oriented layer in these 13 zones.
At first, when the transmission direction of print film stacking material 101 and the angle between the UV lamp were 0 °, the print thickness (coating thickness just) of the oriented layer in these 13 zones was expressed as following table 3.The unit of coating thickness is a dust.
Table 3
Slot # ?1 ?2 ?3 ?4 ?5 ?6 ?7 ?8 ?9 ?10 ?11 ?12 ?13
Coating thickness ?802 ?810 ?830 ?813 ?906 ?910 ?908 ?915 ?905 ?813 ?802 ?825 ?810
Then, when the transmission direction of print film stacking material 101 and the angle between the UV lamp were 30 °, the print thickness (coating thickness just) of the oriented layer in these 13 zones was expressed as following table 4.
Table 4
Slot # ?1 ?2 ?3 ?4 ?5 ?6 ?7 ?8 ?9 ?10 ?11 ?12 ?13
Coating thickness ?905 ?903 ?909 ?910 ?904 ?895 ?902 ?900 ?894 ?899 ?905 ?906 ?902
As shown in Tables 3 and 4, when the transmission direction of print film stacking material 101 and the angle between the UV lamp were 0 °, because the differing greatly of the quantity of illumination between these zones, the difference of the print thickness of the oriented layer between these zones was approximately 113 dusts.Opposite is, when the transmission direction of print film stacking material 101 and the angle between the UV lamp are 30 °, because the difference of the quantity of illumination between these zones is less, the difference of the print thickness of the oriented layer between these zones is approximately 15 dusts, and this is a very little value.Therefore can recognize the improvement of flatness from table 3 and 4, this has also reflected the inhomogeneity raising of printing.
According to present embodiment, the product with the photosensitive resin that solidifies via upper surface exposure portion 400 can be output to product and draw off portion 500, and therefore when keeping horizontal configuration, product can be discharged to the outside.
Product draws off portion 500 and comprises and draw off roller and be used to rotate the motor that draws off roller.
As mentioned above, according to present embodiment, can make by piling up the pressing mold that is used for the printing direction-orienting layer that substrate, photosensitive resin and negative film form by the system that makes pressing mold.In this case, the error of the product thickness of pressing mold can reduce to ± 30 μ m or littler.Preferably, the error of product thickness can reduce to ± 20 μ m.Preferred, can make have the product thickness error about ± 5 μ m to approximately ± product in the scope of 10 μ m.
The pressing mold that is used for the printing direction-orienting layer by said system manufacturing.Specifically, at first, after being coated to photosensitive resin on the substrate, on photosensitive resin, place negative film.By solidifying the photosensitive resin that is positioned at above the substrate from the substrate below towards substrate irradiation UV light.Then, carry out the thickness adjustment by pushing substrate and negative film.Subsequently, by solidifying the photosensitive resin that is not cured from negative film top irradiation UV light.Here, by glass plate push negative film above, push substrate by metallic plate, the product thickness that therefore can obtain to expect.In this case, in order to reduce the interval error between glass plate and the metallic plate, adjust the height of the part of metallic plate.In addition, the UV lamp of irradiation UV light and the transmission direction bevel of substrate (and negative film).Therefore, can improve the uniformity of the product thickness that prints pressing mold and the uniformity that the raising printshop gets product thickness.

Claims (6)

1. a manufacturing is used for the system of the pressing mold of printing direction-orienting layer, and described system comprises:
Material supply department is used to provide the print film stacking material, and described print film stacking material is to form between the negative film by substrate that photosensitive resin is stacked to the roll form and roll form;
The thickness adjustment part is used to adjust the thickness of described print film stacking material; With
Upper surface exposure section; It comprises the upper glass plates that is positioned at described print film stacking material top; Be positioned at the top UV irradiator that comprises a plurality of UV lamps that extend with shaft-like profile on the described upper glass plates; Below the described print film stacking material be used for to adjust with described upper glass plates between spacing with the thickness adjustment plate of the thickness of determining described pressing mold for the printing direction-orienting layer; And flatness adjustment component; It is for the flatness of adjusting by the regional height of a part of adjusting subtly described thickness adjustment plate between described upper glass plates and the described thickness adjustment plate
Wherein, described print film stacking material is transferred to described upper surface exposure portion from described material supply department, the axle of the bearing of trend of described UV lamp and the transmission direction of described print film stacking material spool between angle be in 20 ° to 85 ° the scope.
2. system according to claim 1, wherein, described flatness adjustment component comprises: be positioned at described thickness and adjust the lower plate of the below of plate, make described lower plate adjust the connecting elements that plate is connected with described thickness, and run through described lower plate adjust the tight deformation element that contacts of lower surface of plate with described thickness.
3. system according to claim 2, wherein, described connecting elements and described deformation element comprise bolt or nut, and described deformation element is that unit moves up and down with μ m.
4. system according to claim 1, wherein, the axle of the bearing of trend of described UV lamp and the transmission direction of described print film stacking material spool between angle be in 30 ° to 45 ° the scope.
5. according to each described system in the claim 1 to 4, it further comprises:
Lower surface exposure portion, the photosensitive resin part adjacent that is used to expose and provides with described substrate by described material supply department; With
Draw off portion, be used to draw off by the pressing mold that is used for the printing direction-orienting layer after the described upper surface exposure portion.
6. a manufacturing is used for the method for the pressing mold of printing direction-orienting layer, and described method comprises:
Photosensitive resin is coated on the substrate, and on described photosensitive resin, places negative film;
By solidifying the photosensitive resin part that is positioned at above the described substrate from described substrate below towards described substrate irradiation UV light;
By pushing described substrate and described negative film is adjusted thickness; With
Push by glass plate described negative film above, and the height of adjusting the part of described metallic plate comes substrate is pushed when making that the described pressing mold that is used for the printing direction-orienting layer has the thickness of expectation, by solidifying the photosensitive resin that is not cured from the top of described negative film irradiation UV light, the angle that wherein is used to shine between the axle of transmission direction of the axle of bearing of trend of UV lamp of described UV light and described substrate and negative film is positioned at 20 ° to 85 ° scope.
CN2011101323603A 2010-05-18 2011-05-17 Printing Stamper For Alignment Layer, Manufacturing Method And System Therefore Pending CN102259473A (en)

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CN108790392A (en) * 2018-08-16 2018-11-13 魏志伟 A kind of Quick Response Code graphic arts die

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JP6035137B2 (en) * 2012-12-19 2016-11-30 株式会社ジャパンディスプレイ Alignment film printing plate and method of manufacturing liquid crystal display device
JP6478565B2 (en) * 2014-11-06 2019-03-06 キヤノン株式会社 Imprint system and article manufacturing method

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