CN102254810A - 半导体器件制备过程中光阻的去除方法 - Google Patents
半导体器件制备过程中光阻的去除方法 Download PDFInfo
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- CN102254810A CN102254810A CN2011101870802A CN201110187080A CN102254810A CN 102254810 A CN102254810 A CN 102254810A CN 2011101870802 A CN2011101870802 A CN 2011101870802A CN 201110187080 A CN201110187080 A CN 201110187080A CN 102254810 A CN102254810 A CN 102254810A
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CN2011101870802A CN102254810A (zh) | 2011-07-05 | 2011-07-05 | 半导体器件制备过程中光阻的去除方法 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20000004749A (ko) * | 1998-06-30 | 2000-01-25 | 김영환 | 누설전류를 감소한 트랜지스터 제조방법 |
CN1650235A (zh) * | 2002-04-26 | 2005-08-03 | 东京应化工业株式会社 | 光致抗蚀剂剥离方法 |
KR100638984B1 (ko) * | 2004-12-15 | 2006-10-26 | 동부일렉트로닉스 주식회사 | 금속-절연체-금속 커패시터의 제조 방법 |
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- 2011-07-05 CN CN2011101870802A patent/CN102254810A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20000004749A (ko) * | 1998-06-30 | 2000-01-25 | 김영환 | 누설전류를 감소한 트랜지스터 제조방법 |
CN1650235A (zh) * | 2002-04-26 | 2005-08-03 | 东京应化工业株式会社 | 光致抗蚀剂剥离方法 |
KR100638984B1 (ko) * | 2004-12-15 | 2006-10-26 | 동부일렉트로닉스 주식회사 | 금속-절연체-금속 커패시터의 제조 방법 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HONGLI SEMICONDUCTOR MANUFACTURE CO LTD, SHANGHAI Effective date: 20140430 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20140430 Address after: 201203 Shanghai Zhangjiang hi tech park Zuchongzhi Road No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201203 Shanghai Guo Shou Jing Road, Pudong New Area Zhangjiang hi tech Park No. 818 Applicant before: Hongli Semiconductor Manufacture Co., Ltd., Shanghai |
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SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication | ||
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Application publication date: 20111123 |