CN102253047A - Solar silicon wafer photoluminescence on-line sampling detection system and its detection method - Google Patents
Solar silicon wafer photoluminescence on-line sampling detection system and its detection method Download PDFInfo
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- CN102253047A CN102253047A CN2011101065565A CN201110106556A CN102253047A CN 102253047 A CN102253047 A CN 102253047A CN 2011101065565 A CN2011101065565 A CN 2011101065565A CN 201110106556 A CN201110106556 A CN 201110106556A CN 102253047 A CN102253047 A CN 102253047A
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Abstract
The invention belongs to the technical field of detection systems, and specifically relates to a solar silicon wafer photoluminescence on-line sampling detection system and its detection method, wherein the solar silicon wafer photoluminescence on-line sampling detection system comprises a silicon wafer conveyer belt and an imaging system, inclusive of a synchronization device for synchronizing the imaging system and sampling silicon wafers. According to the invention, the imaging system synchronizes with the sampling silicon wafers and the detection of the sampling silicon wafers on the conveyer belt in rapid motion is accomplished, therefore realizing the photoluminescence on-line sampling detection, maintaining a rapid operation of the production line, reducing the operation of the silicon wafers and decreasing the fragment percent.
Description
Technical field
The invention belongs to the detection system technical field, specifically, relate to a kind of solar silicon wafers photoluminescence online sampling Detection system and detection method thereof.
Background technology
Photoluminescence (PL) is the important method that detects solar silicon wafers (Bare wafer), and this method adopts infrared laser to be radiated on the silicon chip, and silicon chip inspires the fluorescence of near-infrared band and gathered imaging by camera.Because the normal zone of the fluorescent effect of defect area dies down, can detect the defective of silicon chip by graphical analysis, and this method is contactless detection, has the advantage of not damaging silicon chip, but, need to adopt very expensive high power laser and refrigeration camera could accomplish in short exposure time (a second), to generate the good fluoroscopic image of signal to noise ratio (S/N ratio) reluctantly because the fluorescence radiation efficient of silicon chip itself is very low.If adopt moderate refrigeration camera of cost and medium or low power laser then to be difficult to realize the short time exposure image, this has just limited the online application that photoluminescence detects.And simultaneously, some other detection method detects such as outward appearance, and minority carrier life time detects, and thickness detects, or the like can in the very short time (less than one second), finish, this type of checkout equipment can be accomplished per hour 3000 or above detection speed.Therefore, the photoluminescence detection speed is slow and other detection methods such as outward appearance detects, and it is very fast that minority carrier life time detects uniform velocity, and this has just influenced the whole detection speed of solar silicon wafers.
Sampling observation is reasonably for the major defect (evil mind and black surround) that photoluminescence detected, and can increase omission hardly, because with regard to the monocrystalline production technology, there is continuity in this fault in material of the evil mind of the silicon chip that silicon single crystal rod cuts into and black surround; With regard to the polycrystalline production technology, also there is continuity in this fault in material of the black surround of the silicon chip that polysilicon block cuts into.That is to say,, on some silicon chips before and after it, all very likely find same defective if on certain a slice silicon chip, find black surround or evil mind defective.Otherwise,, have the possibility of evil mind black surround defective also very low on some silicon chips before and after it if do not find black surround or evil mind defective on a certain silicon chip.
Summary of the invention
The present invention has overcome shortcoming of the prior art, at photoluminescence, a kind of solar silicon wafers photoluminescence online sampling Detection system and detection method thereof have been proposed, photoluminescence at a slow speed is module integrated in the high speed on-line detecting system, in this system, the high speed detection module is such as outward appearance detection etc., detect each the sheet silicon chip on the production line, and the photoluminescence module is every some silicon chip sampling Detection a slice silicon chips.
In order to solve the problems of the technologies described above, the present invention is achieved by the following technical solutions:
The online sampling Detection of a kind of solar silicon wafers photoluminescence system comprises silicon chip transporting belt and imaging system, also comprises making imaging system and the synchronous synchronous device of sampling silicon chip.
Further, described synchronous device comprises the moving-out device that the sampling silicon chip is shifted out from the silicon chip conveying belt.
Further, described moving-out device is that silicon chip holds up mechanism.
Further, also comprise the feeding device that the silicon chip of sampling in the silicon chip picking-up mechanism is moved in conveying belt direction of motion.
Further, described silicon chip transporting belt is separated at least two cover conveying belt point-blank, be provided with a rotating disk between the two cover conveying belt, the parallel rotating disk conveying belt of two covers is set on this rotating disk, this two covers rotating disk conveying belt all can go between the two cover conveying belt of above-mentioned silicon chip conveying belt, and this imaging system is located at and two cover conveying belt of above-mentioned silicon chip conveying belt point-blank rotating disk conveying belt top not.
Further, described synchronous device comprises the device of control imaging system in silicon chip belt direction move left and right.
The detection method of the online sampling Detection of a kind of solar silicon wafers photoluminescence system, every some silicon chips, just there is at least one room not place silicon chip, the sampling silicon chip is moved out of device and shifts out conveying belt, and imaging system is to sampling silicon chip illumination imaging, simultaneously, silicon chip on the transporting belt continues motion, after finishing imaging, when above-mentioned room arrived the moving-out device position, moving-out device returned transporting belt to the sampling silicon slice placed of finishing detection thereon.
The detection method of the online sampling Detection of another kind of solar silicon wafers photoluminescence system, described silicon chip holds up mechanism and will sample below silicon chip extracts and be placed into imaging system from transporting belt, imaging system is to sampling silicon chip illumination imaging, simultaneously, silicon chip on the transporting belt continues motion, when the sampling silicon chip is extracted, form a room on the transporting belt, after the sampling silicon chip is finished detection, described feeding device is with the speed greater than transporting belt, the sampling silicon chip is transported to the transporting belt travel direction, and the sampling silicon chip is placed on the described room.
Also can, the detection method of the online sampling Detection of solar silicon wafers photoluminescence system, silicon chip interrupted transmission on the transporting belt, when the sampling silicon chip arrives the rotating disk Lower Half, dial rotation, the sampling silicon chip is forwarded to the detection position of the rotating disk first half, imaging system is to sampling silicon chip illumination imaging, the sampling silicon chip of finishing detection is transferred to the rotating disk Lower Half, finish detection sampling silicon chip and another sheet sampling silicon chip position exchange, imaging system is to another sheet sampling silicon chip illumination imaging, finished detection the sampling silicon chip continue motion from left to right with transporting belt.
All right, the detection method of the online sampling Detection of solar silicon wafers photoluminescence system, transporting belt is uninterruptedly motion from left to right, and when the sampling silicon chip arrived the imaging system initial position, imaging system began to quicken to the right, after the imaging system accelerates to identical speed with transporting belt, itself and transporting belt are synchronized with the movement, and to the imaging of throwing light on of sampling silicon chip, the illumination imaging finishes, imaging system is returned initial position to left movement, waits for a slice sampling silicon chip down.
Compared with prior art, the invention has the beneficial effects as follows:
Imaging system of the present invention and sampling silicon chip are synchronous, realization detects the sampling silicon chip on the transporting belt of high-speed motion, thereby realized the online sampling Detection of photoluminescence and kept the fast turn-around of production line, and reduced operation to silicon chip to reduce the fragmentation rate.
Description of drawings
The present invention is further detailed explanation below in conjunction with the drawings and specific embodiments.
Fig. 1 a, 1b, 1c, 1d are the synoptic diagram of the embodiment of the invention 1;
Fig. 2 a, 2b, 2c, 2d are the synoptic diagram of the embodiment of the invention 2;
Fig. 3 a, 3b, 3c are the synoptic diagram of the embodiment of the invention 3;
Fig. 4 a, 4b, 4c are the synoptic diagram of the embodiment of the invention 4.
Embodiment
The online sampling Detection of solar silicon wafers photoluminescence of the present invention system comprises silicon chip transporting belt 1, imaging system 2 and makes imaging system 2 and synchronous device that sampling silicon chip 3 is synchronous that imaging system 2 comprises a laser instrument and a camera.
Embodiment 1:
As shown in Figure 1a: a series of silicon chips 4 are motion from left to right incessantly on silicon chip transporting belt 1, when material loading, every some silicon chips 4, just there is a room 5 not place silicon chip 4, there is a silicon chip to hold up mechanism 6 in silicon chip transporting belt 1 both sides, this silicon chip holds up mechanism 6 can be flexible at vertical direction, and power can be that cylinder can also be motor or the like.When lifting (elongation) state when it is in, silicon chip 4 motions under not influencing on the side silicon wafer transporting belt 1.Above silicon chip holds up mechanism 6 is that imaging system 2 comprises a laser instrument and a camera.Fig. 1 a has described the running of a complete cycle of photoluminescence sampling observation to Fig. 1 d, and among Fig. 1 a, sampling silicon chip 3 arrives silicon chips and holds up mechanisms 6 positions, is held up mechanism 6 by silicon chip and holds up.The sampling silicon chip 3 that Fig. 1 b is held up is still in silicon chip and holds up in the mechanism 6, and imaging system 2 is to its illumination imaging.In this simultaneously, other silicon chips 4 on the silicon chip transporting belt 1 continue original tangential movement from left to right.Fig. 1 c is after finishing imaging, and when room shown in Fig. 1 a and the 1b 5 arrived silicon chip picking-up mechanism 6 positions, silicon chip held up mechanism 6 and puts down (contraction), and the sampling silicon chip 3 of finishing detection is thereon put back to silicon chip transporting belt 1.Fig. 1 d is when down a slice sampling silicon chip arrives silicon chip and holds up mechanism 6, and silicon chip holds up mechanism 6 silicon chip 6 of will sampling and lifts and detect.Go round and begin again from Fig. 1 a to Fig. 1 d and just to have realized extracting sampling silicon chip 3, detect, sampling silicon chip 3 is put back to the online sampling Detection of silicon chip transporting belt 1 from silicon chip transporting belt 1.
Embodiment 2:
Shown in Fig. 2 a, 2b, 2c, 2d, silicon chip transporting belt 1 transports a series of silicon chips 4 from left to right incessantly, and among Fig. 2 a, the moving-out device silicon chip 3 of will sampling extracts and be placed into imaging system 2 belows from silicon chip transporting belt 1.Moving-out device can be that the silicon chip among the embodiment 1 holds up mechanism 6, also can be such as mechanical arm, sucker or the like device.Among Fig. 2 b, the sampling silicon chip 3 that is extracted accepts to detect (illumination imaging), and in this simultaneously, other silicon chips 4 on the silicon chip transporting belt 1 continue to move right.Owing to have a slice sampling silicon chip 3 to be extracted, form a room 5 on the silicon chip transporting belt 1.Among Fig. 2 c, this sampling silicon chip 3 is finished detection, and feeding device transports this sampling silicon chip 3 to the right with the speed greater than silicon chip transporting belt 1, and purpose is to catch up with before this room 5 that forms and this sheet sampling silicon chip 3 is placed on 5 positions, room on silicon chip transporting belt 1.This feeding device can be a mechanical arm, also can be another transporting belt.Among Fig. 2 d, when this sampling silicon chip 3 arrived rooms 5, the moving-out device silicon chip 3 of should sampling was put back to silicon chip transporting belt 1.In this while, another sheet sampling silicon chip 3 is extracted out silicon chip transporting belt 1 and detects.
Embodiment 3:
Be depicted as vertical view as Fig. 3 a, 3b, 3c, silicon chip transporting belt 1 is divided into two parts, and the centre has rotating disk 6 to separate, and two cover transporting belts 61,62 are also arranged above the rotating disk 6.Rotating disk 6 can rotate, and among Fig. 3 a, the sampling silicon chip of having examined 3 is at rotating disk 6 first halves, rotating disk 6 first halves are detection positions, in its vertical direction imaging system 2 are arranged, and silicon chip transporting belt 1 runs without interruption, when silicon chip transporting belt 1 arrived rotating disk 6 Lower Halves, rotating disk 6 rotated.Among Fig. 3 b, rotating disk 6 rotates and finishes, and the silicon chip 3 of will sampling forwards the detection position to, and the sampling silicon chip 3 that has detected is transferred to rotating disk 6 Lower Halves, continues motion from left to right with silicon chip transporting belt 1.On silicon chip transporting belt 1 in silicon chip 4 interrupted transmissions, at the sampling silicon chip 3 of rotating disk 6 first halves by laser radiation and imaging.In Fig. 3 c, detection is finished.When another sheet sampling silicon chip 3 arrives rotating disk 6 Lower Halves by the time, rotating disk 6 will rotate once more, and sampling silicon chip 3 that has detected and sampling silicon chip 3 positions to be checked are exchanged.
Embodiment 4:
Shown in Fig. 4 a, 4b, 4c, silicon chip transporting belt 1 is uninterruptedly motion from left to right, and among Fig. 4 a, when sampling silicon chip 3 arrived imaging system 2 initial positions, imaging system 2 beginnings were quickened to the right.Among Fig. 4 b, when imaging system 2 accelerate to silicon chip transporting belt 1 identical speed after, it and silicon chip transporting belt 1 are synchronized with the movement and take pictures, among Fig. 4 c, when ends of taking pictures, imaging system 2 is returned initial position to left movement, waits for down a slice silicon chip 3 of sampling.
The present invention is not limited to above-mentioned embodiment, if various changes of the present invention or distortion are not broken away from the spirit and scope of the present invention, if these changes and distortion belong within claim of the present invention and the equivalent technologies scope, then the present invention also is intended to comprise these changes and distortion.
Claims (10)
1. the online sampling Detection of a solar silicon wafers photoluminescence system comprises silicon chip transporting belt and imaging system, it is characterized in that: also comprise making imaging system and the synchronous synchronous device of sampling silicon chip.
2. the online sampling Detection of solar silicon wafers photoluminescence according to claim 1 system is characterized in that: described synchronous device comprises the moving-out device that the sampling silicon chip is shifted out from the silicon chip conveying belt.
3. the online sampling Detection of solar silicon wafers photoluminescence according to claim 2 system is characterized in that: described moving-out device is that silicon chip holds up mechanism.
4. the online sampling Detection of solar silicon wafers photoluminescence according to claim 3 system is characterized in that: also comprise making silicon chip hold up the feeding device that the sampling silicon chip moves in conveying belt direction of motion in the mechanism.
5. the online sampling Detection of solar silicon wafers photoluminescence according to claim 2 system, it is characterized in that: described silicon chip transporting belt is separated at least two cover conveying belt point-blank, be provided with a rotating disk between the two cover conveying belt, the parallel rotating disk conveying belt of two covers is set on this rotating disk, this two covers rotating disk conveying belt all can go between the two cover conveying belt of above-mentioned silicon chip conveying belt, and this imaging system is located at and two cover conveying belt of above-mentioned silicon chip conveying belt point-blank rotating disk conveying belt top not.
6. the online sampling Detection of solar silicon wafers photoluminescence according to claim 1 system is characterized in that: described synchronous device comprises the device of control imaging system in silicon chip belt direction move left and right.
7. the detection method of the online sampling Detection of solar silicon wafers photoluminescence according to claim 2 system, it is characterized in that: every some silicon chips, just there is at least one room not place silicon chip, the sampling silicon chip is moved out of device and shifts out conveying belt, and imaging system is to sampling silicon chip illumination imaging, simultaneously, silicon chip on the transporting belt continues motion, after finishing imaging, when above-mentioned room arrived the moving-out device position, moving-out device returned transporting belt to the sampling silicon slice placed of finishing detection thereon.
8. the detection method of the online sampling Detection of solar silicon wafers photoluminescence according to claim 4 system, it is characterized in that: described silicon chip holds up mechanism and will sample below silicon chip extracts and be placed into imaging system from transporting belt, imaging system is to sampling silicon chip illumination imaging, simultaneously, silicon chip on the transporting belt continues motion, when the sampling silicon chip is extracted, form a room on the transporting belt, after the sampling silicon chip is finished detection, described feeding device is with the speed greater than transporting belt, the sampling silicon chip is transported to the transporting belt travel direction, and the sampling silicon chip is placed on the described room.
9. the detection method of the online sampling Detection of solar silicon wafers photoluminescence according to claim 5 system, it is characterized in that: silicon chip interrupted transmission on the transporting belt, when the sampling silicon chip arrives the rotating disk Lower Half, dial rotation, the sampling silicon chip is forwarded to the detection position of the rotating disk first half, imaging system is to sampling silicon chip illumination imaging, the sampling silicon chip of finishing detection is transferred to the rotating disk Lower Half, finish detection sampling silicon chip and another sheet sampling silicon chip position exchange, imaging system is to another sheet sampling silicon chip illumination imaging, finished detection the sampling silicon chip continue motion from left to right with transporting belt.
10. the detection method of the online sampling Detection of solar silicon wafers photoluminescence according to claim 6 system, it is characterized in that: transporting belt is uninterruptedly motion from left to right, when the sampling silicon chip arrives the imaging system initial position, imaging system begins to quicken to the right, and after the imaging system accelerated to identical speed with transporting belt, itself and transporting belt were synchronized with the movement, and to the imaging of throwing light on of sampling silicon chip, the illumination imaging finishes, and imaging system is returned initial position to left movement, waits for a slice sampling silicon chip down.
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Cited By (7)
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| CN103308491A (en) * | 2013-05-29 | 2013-09-18 | 浙江大学 | Multi-camera synchronously-tracked photoluminescence solar battery detecting device |
| CN103852470A (en) * | 2012-12-04 | 2014-06-11 | 浚丰太阳能(江苏)有限公司 | Production line inspection bench |
| CN106903073A (en) * | 2017-03-20 | 2017-06-30 | 常州亿晶光电科技有限公司 | Silicon chip automatic separation equipment |
| CN107548324A (en) * | 2015-05-26 | 2018-01-05 | 瓦克化学股份公司 | For conveying the device of chunk polysilicon or granular polycrystalline silicon product stream |
| CN109502267A (en) * | 2018-12-11 | 2019-03-22 | 埃华路（芜湖）机器人工程有限公司 | A kind of multi-process sampling observation transportation system |
| CN111865215A (en) * | 2019-04-29 | 2020-10-30 | 北京铂阳顶荣光伏科技有限公司 | Detection device and method for solar cell |
| CN117690846A (en) * | 2024-02-02 | 2024-03-12 | 深圳市双翌光电科技有限公司 | Visual detection method, device and equipment for solar silicon wafer and storage medium |
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| CN117690846A (en) * | 2024-02-02 | 2024-03-12 | 深圳市双翌光电科技有限公司 | Visual detection method, device and equipment for solar silicon wafer and storage medium |
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