CN210467793U - Automatic workpiece conveying device - Google Patents
Automatic workpiece conveying device Download PDFInfo
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- CN210467793U CN210467793U CN201921265201.9U CN201921265201U CN210467793U CN 210467793 U CN210467793 U CN 210467793U CN 201921265201 U CN201921265201 U CN 201921265201U CN 210467793 U CN210467793 U CN 210467793U
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Abstract
The utility model discloses a work piece automatic conveying device, including material loading part, conveying part and unloading part. The feeding part comprises a lifting mechanism, a turnover mechanism, a cylinder push rod mechanism, a smooth guide rail and a first wafer boat box with a workpiece stacked in the inner layer; the transfer section includes a belt conveyor and an optical sensor; the blanking portion includes a guide mechanism, a reciprocating loading mechanism, and a second wafer boat for loading the workpiece. It has the following advantages: the automatic feeding, conveying and discharging can be realized, the automation of the production process is improved, the labor demand in the production process is reduced, the sheet conveying efficiency is improved, and the production cost is favorably reduced.
Description
Technical Field
The utility model relates to a work piece automatic processing auxiliary facilities technical field especially relates to a work piece automatic conveying (material loading-conveying-unloading) device.
Background
With the rapid development of society, the direction of sustainable development of human beings is formed by green, environmental protection and energy conservation, and new energy is generated and replaced. A Light Emitting Diode (LED) is a semiconductor electronic component capable of emitting light, is a fourth-generation novel solid light source following incandescent lamps, sodium lamps, and fluorescent lamps, and is widely used in the fields of indicator lamps, signal lamps, display screens, landscape lighting, street lamp lighting, interior decorative lamps, automobile lighting, special lighting, military, and the like. The LED lamp mainly comprises a lamp bead, a chip, an aluminum substrate, a radiator, a driving module and the like. Wherein the chip is the most core part. However, the substrate sheet, which is the bottom layer of the whole chip, affects the subsequent whole epitaxial processing, and has an important influence on the indexes of the LED lamp, such as light transmittance, thermal conductivity, and lattice matching. The substrate material mainly comprises sapphire, silicon carbide, silicon and the like in combination with various performance requirements of the LED market on semiconductor substrate materials.
However, in the substrate processing process, due to the low degree of automation, the substrate sheet has defects such as edge breakage, the processing efficiency is reduced, and the production cost is greatly increased. Taking a sapphire substrate as an example, automation and intellectualization are inevitable trends in the development of sapphire substrate processing in order to improve processing efficiency and substrate quality. In the prior sapphire substrate processing process, the boxing and the taking out of the substrate sheets mainly depend on manual operation, namely, the substrate sheets are manually loaded into a wafer boat box after each process is completed, the boxed substrate sheets are conveyed to the processing area of the next process, and then the substrate sheets in the wafer boat box are manually placed on each processing station. Because manual operation adorns the dress of sapphire substrate and takes out, not only increased the damaged risk of substrate piece when dress box with take out, and degree of automation low production efficiency who influences the substrate piece.
SUMMERY OF THE UTILITY MODEL
The utility model provides a work piece automatic conveying device, it has overcome the not enough that a work piece transmission method exists among the background art.
The utility model provides an adopted technical scheme of its technical problem is:
an automatic workpiece conveying device comprises a feeding part, a conveying part and a discharging part;
the feeding part comprises a lifting mechanism, a turnover mechanism, an air cylinder push rod mechanism, a smooth guide rail and a first wafer boat box with a workpiece stacked in an inner layer, the turnover mechanism is connected to the lifting mechanism in a mounting mode and can lift the turnover mechanism through the lifting mechanism, the first wafer boat box is connected to the turnover mechanism in a mounting mode and can turn over the first wafer boat box through the turnover mechanism, the air cylinder push rod mechanism comprises an air cylinder and a push rod connected with the air cylinder in a sliding mode, and the push rod corresponds to the first wafer boat box so that the workpiece in the first wafer boat box can be pushed out;
the conveying part comprises a belt conveyor and an optical sensor, the optical sensor is fixedly arranged and positioned above the belt conveyor, the smooth guide rail is obliquely arranged, the upper end of the smooth guide rail corresponds to the first wafer cassette and is not higher than the height of the push rod, the lower end of the smooth guide rail corresponds to the input end of the belt conveyor and is not lower than the belt conveyor, and a workpiece pushed out by the push rod can slide onto the belt conveyor through the smooth guide rail;
the unloading part includes guiding mechanism, reciprocating motion loading mechanism and is used for installing the second crystal boat box of work piece, the second crystal boat box dress connects on reciprocating motion loading mechanism and drives second crystal boat box horizontal migration through reciprocating motion loading mechanism, guiding mechanism sets up in reciprocating motion loading mechanism's top so that the work piece of following the output of belt conveyer output can fall into in the second crystal boat box through guiding mechanism.
In one embodiment: tilting mechanism includes bottom plate, mounting panel and actuating mechanism, the bottom plate dress connects on elevating system, the mounting panel can rotate to be connected at the bottom plate, and the elongated slot has been seted up to this mounting panel, the elongated slot at the mounting panel is installed to first boat box adaptation, actuating mechanism transmission connection mounting panel is in order to drive first boat box swing upset between the position of keeping flat and vertical position, and the work piece that is located the first boat box of vertical position stacks up the setting from top to bottom, the push rod horizontal slip just the work piece of push rod and the superiors aligns.
In one embodiment: the smooth guide rail is of a structure with a wide upper part and a narrow lower part and is provided with a smooth plane, and the workpiece slides on the smooth plane of the smooth guide rail by using gravity.
In one embodiment: guiding mechanism includes gravity direction slide rail, initiative belt and driven belt are all vertical to be arranged and are formed with the clearance between the two, the belt conveyor output is just not higher than to gravity direction slide rail upper end, the port on the corresponding clearance of gravity direction slide rail lower extreme, the port is located on the second boat box under the clearance to the work piece that makes from the output of belt conveyor slides to the clearance through gravity direction slide rail, falls from the clearance again and inserts in the second boat box.
In one embodiment: the inside width from top to bottom of gravity direction slide rail is narrow, the work piece utilizes gravity to slide on the gravity direction slide rail.
In one embodiment: the gap is adapted to the thickness of the workpiece.
In one embodiment: the driving belt upper end is higher than the driven belt upper end, the driving belt lower extreme is higher than the driven belt lower extreme.
In one embodiment: the belt conveyor is arranged horizontally.
In one embodiment: the second wafer boat boxes are provided with a plurality of second wafer boat boxes, and the plurality of second wafer boat boxes are used for installing qualified workpieces and unqualified workpieces respectively.
Compared with the background technology, the technical scheme has the following advantages:
the automatic feeding, conveying and discharging can be realized, the automation of the production process is improved, the labor demand in the production process is reduced, the sheet conveying efficiency is improved, and the production cost is favorably reduced.
The slide rail is wide at the top and narrow at the bottom, slides smoothly and plays a role in guiding and positioning.
Drawings
The present invention will be described in detail with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of an automatic substrate transport apparatus according to the present embodiment.
Fig. 2 is a schematic structural view of the feeding portion of this embodiment.
Fig. 3 is a schematic structural view of the blanking portion of the present embodiment.
Fig. 4 is a schematic structural view of the lifting mechanism of the feeding portion in this embodiment.
Fig. 5 is a static structure diagram of the cylinder push rod mechanism of the feeding part of the embodiment.
Fig. 6 is a schematic structural diagram of an operating state of the cylinder push rod mechanism of the feeding portion of the present embodiment.
Fig. 7 is a schematic structural diagram of the working state of the turnover mechanism of the feeding part in the embodiment.
Fig. 8 is a static structure diagram of the turnover mechanism of the feeding part of the embodiment.
Fig. 9 is a schematic structural view of a guide device of the blanking portion of the present embodiment.
Fig. 10 is a schematic structural diagram of an automated inspection line according to this embodiment.
Description of the labeling: a loading part 1, a turnover mechanism 10 and a wafer boat mounting plate 100; the cylinder push rod mechanism 12, the cylinder 121 and the push rod 125; the lifting mechanism 13, the belt 130, the fixing device 131, the mounting groove 132, the first stepping motor 133, the bracket 134, and the smooth guide rail 14; a belt conveyor 2, a sapphire substrate 20, an optical sensor 21, a belt 22, a second stepping motor 23, a belt baffle 24; the automatic feeding device comprises a blanking part 3, a gravity guide slide rail 300, a driving belt 301, a third stepping motor 302, a conveying belt 303 and a driven belt 304; the loading mechanism 31, the fixing plate 310, and the second wafer boat 311, 312, 313 are reciprocally moved.
Detailed Description
Referring to fig. 1 to 9, an automatic workpiece conveying (loading-transferring-unloading) apparatus includes a loading portion 1, a transferring portion, and an unloading portion 3.
The loading part 1 comprises a turnover mechanism 10, a first wafer boat 11, a cylinder push rod mechanism 12, a lifting mechanism 13, a smooth guide rail 14 and a sapphire substrate 15. The first wafer boat 11 has stacked therein workpieces, which may be circular workpieces of different sizes such as 2 inches, 4 inches, and 6 inches, or square or other shaped parts, and in this embodiment, the workpieces are sapphire substrates 15.
The turnover mechanism 10 includes a base plate, a wafer boat mounting plate 100, and a driving mechanism, the wafer boat mounting plate 100 is rotatably connected to the base plate, and the driving mechanism is in transmission connection with the wafer boat mounting plate 100 to drive the wafer boat mounting plate 100 to swing and turn over relative to the base plate, so as to drive the first wafer boat to swing and turn over between a horizontal position and a vertical position. The bottom plate is tightly connected to the mounting groove 132 so as to fixedly mount the bottom plate on the mounting groove 132, so that the lifting mechanism can drive the turnover mechanism to lift. The mounting plate 100 is provided with a long groove, and the first boat box is adapted to be mounted in the long groove of the mounting plate, so that the first boat box 11 is mounted on the boat box mounting plate 100. Wherein: the workpieces in the first wafer cassette positioned at the vertical position are stacked up and down.
The inner cavity of the first wafer boat box 11 is filled with sapphire substrates 15 to be subjected to quality inspection in a stacked arrangement mode; the cylinder push rod mechanism 12 comprises a cylinder 121 and a push rod 125, the cylinder 121 is fixedly arranged, for example, fixed relative to the support 134, the cylinder 121 is provided with the push rod 125 capable of sliding, and the push rod 125 and the sapphire substrate 15 at the uppermost layer in the vertical wafer boat 14 are at the same horizontal height (the lifting mechanism 13 can drive the first wafer boat 11 to lift through the installation groove 132 and the turnover mechanism 10); the smooth guide rail 14 is fixedly arranged, the smooth guide rail 14 is obliquely arranged, the upper end of the smooth guide rail 14 is slightly lower than the push rod 125, the lower end of the smooth guide rail 14 is slightly higher than the input end of the belt conveyor 2, in the specific structure, the smooth guide rail is of a structure with a wide upper part and a narrow lower part and is provided with a smooth plane, and the workpiece slides on the smooth plane of the smooth guide rail by utilizing gravity and slides stably. The push rod corresponds to the first wafer boat box so as to push out the workpieces in the first wafer boat box, and the workpieces pushed out by the push rod can slide to the belt conveyor through the smooth guide rail. The front end of the push rod is arc-shaped, Y-shaped or step-shaped, and a layer of rubber or other soft materials is attached to the front end of the push rod.
The transfer section includes a belt conveyor 2, which is horizontally arranged, and an optical sensor 21. The belt conveyor 2 comprises a gemstone substrate 20, a belt 22, a second stepper motor 23 and a belt stop 24. The optical sensors 21 are fixedly arranged and located above the belt, the sapphire substrate 20 is transported on the belt 22, one end of the belt 22 is matched with the second stepping motor 23 to move under the driving of the motor 23, and the belt baffle 24 is fixedly arranged.
The unloading part includes a guide mechanism, a reciprocating loading mechanism 31 and a second wafer boat 311, 312, 313 for loading the workpiece, the second wafer boat 311, 312, 313 is attached to the reciprocating loading mechanism 31 and drives the second wafer boat 311, 312, 313 to move horizontally by the reciprocating loading mechanism 31, the guide mechanism is disposed above the reciprocating loading mechanism 31 so that the workpiece output from the output end of the belt conveyer 20 can fall into the second wafer boat through the guide mechanism.
The guide mechanism comprises a gravity guide slide rail 300, a driving belt 301, a third stepping motor 302, a transmission belt 303 and a driven belt 304, wherein the driving belt and the driven belt are vertically arranged, a gap is formed between the driving belt and the driven belt, and the gap is matched with the thickness of a workpiece; the upper end of the gravity guide slide rail 300 corresponds to the output end of the belt conveyor 20 and is lower than the output end of the belt conveyor 20, the lower end of the gravity guide slide rail 300 corresponds to the upper port of the gap, and the lower port of the gap is positioned above the second boat box, so that a workpiece output from the output end of the belt conveyor slides to the gap through the gravity guide slide rail and then falls into the second boat box from the gap. The third stepping motor 302 is connected to the driving belt 301 through a transmission belt 303. The reciprocating loading mechanism 31 is similar in structure to the elevating mechanism 13, except that a wafer boat 311, a wafer boat 312, a wafer boat 313 and a plurality of second wafer boats are placed on the fixed plate 310 for mounting a qualified workpiece and a non-qualified workpiece, respectively. The inside width from top to bottom of gravity direction slide rail is narrow, the work piece utilizes gravity to slide on the gravity direction slide rail, slides steadily. The driving belt and the driven belt drive rotating shaft are not at the same height, so that the workpiece is stably conveyed between the two belts.
A plurality of processing or detecting devices can be arranged in the middle of the belt conveyor 2 so as to process or detect workpieces in different procedures.
The automatic transmission method comprises a feeding step, a transmitting step and a discharging step;
(1) a feeding step: by arranging the lifting mechanism 13, the turnover mechanism 10, the cylinder push rod mechanism 12, the belt conveyor 2 and the second stepping motor 23, the first wafer boat is placed in the wafer boat mounting plate 100, the turnover mechanism 10 rotates the horizontally placed first wafer boat 11 by 90 degrees to a vertical position, at this time, the uppermost substrate 15 and the push rod 125 are at the same height, and the smooth guide rail 14 is slightly lower than the uppermost substrate 15. The air cylinder push rod mechanism 12 pushes the substrate 15 out of the placing box 14, and the substrate 15 is conveyed to the belt conveyor 2 through the smooth guide rail 14 by gravity sliding;
after the cylinder push rod mechanism 12 of the feeding part 1 returns to the original point and the lifting mechanism 13 finishes feeding once, the stepping motor drives the toothed belt to operate to drive the turnover mechanism 10 to ascend, so that the cylinder push rod mechanism 12 and the uppermost sapphire substrate are horizontally equal in height, and the feeding process is carried out again;
after the loading of one cassette of substrates is completed, the turnover mechanism 10 is reset, the lifting mechanism 13 is then reset, and the first cassette on the loading part 1 is replaced.
(2) A transmission step: the second stepping motor 23 drives the belt conveyor 22 to transport the substrate 15. The optical sensor 21 is used to sense the position of the workpiece on the belt, the speed of conveyance, the number of workpieces, etc. as the substrate 15 passes by the optical sensor. Then, the sapphire substrate is processed or/and detected by a conveying device such as a vacuum chuck mechanical arm or a manual connection processing device or a detection device, the feeding mechanism 1 is connected with the processing or/and detection device through a conveying belt, and then the processed or/and detected sapphire substrate is placed back to the belt conveyor 2, so that the processing or/and detection device is connected with the blanking part 3 through the conveying belt.
(3) Blanking: the processed or inspected substrate is then transported to the end by a conveyor belt and slid between a drive belt 301 and a driven belt 304 by gravity guided slide rails 300. The third stepping motor 302 of the driving belt 301 operates to smoothly insert the sapphire substrate 15 into the cassette 311-313 to complete the automatic unloading process.
The reciprocating loading mechanism 31 horizontally moves between the driving belt 301 and the driven belt 302 each time, and the blanking process is carried out again; after the sapphire substrate is filled in the boat cassette 311-313 of the blanking part 3, the boat cassette is taken out and replaced.
The automatic transmission device and the method of the embodiment have the following technical effects: the automatic substrate feeding-conveying-blanking part enables the substrates to be stably and transitionally transferred between the conveyer belt and the wafer carrier box, and the guiding and positioning are accurate in the substrate blanking process, so that the defects of edge breakage and the like of the substrates are not easy to cause, and the wafer conveying efficiency is improved. The conveying part can determine the movement speed, the movement position and the like of the workpiece on the belt while conveying, has a certain storage and buffering function, can be connected with equipment with different processing production efficiencies, has a certain fault-tolerant space, and is suitable for building an automatic production line. In the working process of the automatic substrate feeding-conveying-blanking part, only a worker needs to put the wafer boat box into a groove of the feeding part, the feeding part automatically feeds materials, the substrate conveyor enables the feeding and blanking part to be connected with processing detection equipment, the blanking part automatically blanks the wafer boat box through inserting pieces, and the automatic substrate feeding-conveying-blanking part greatly improves the production efficiency of the substrate and reduces the production cost. The automatic substrate feeding-conveying-discharging part enables substrates between the conveying belt and the wafer carrier box to be stably and transitionally transferred, and the substrate feeding and discharging is accurate in guiding and positioning, so that the defects of edge breakage and the like of the substrates are not easy to cause, and the wafer conveying efficiency is improved. The substrate conveyor can determine the speed, the position and the like of the substrate on the belt, has a certain storage buffer function, can be connected with equipment with different processing production efficiencies, has a certain fault-tolerant space, and is suitable for building an automatic production line. The automatic substrate feeding-conveying-blanking part is arranged at the periphery of processing equipment or detection equipment, a conveying belt is connected with the equipment through a vacuum chuck mechanical arm or manually, the original structure and process of the processing equipment and the detection equipment do not need to be changed, and the automatic substrate feeding-conveying-blanking part can be widely applied to assist in processing and production of the existing equipment.
The automatic feeding-conveying-blanking detection line for the sapphire substrate is set up by applying the embodiment, and the automatic feeding-conveying-blanking detection line can be set up as follows.
As shown in fig. 10, the vacuum chuck robot arms are evenly distributed behind the belt conveyor 2; the detection analyzer is arranged corresponding to the vacuum chuck mechanical arm. Specifically, loading, conveying and unloading:
in the loading part 1, the substrates in the cassette are pushed one by one onto the conveyor belt 22 by the cylinder pusher mechanism 12 according to a set rhythm.
The second stepping motor 23 drives the belt 22 to transport the substrate. The position and velocity of the substrate is determined as it passes the optical sensor 21. The work of vacuum chuck arm at this moment adsorbs the sucking disc with sapphire substrate 15 on the belt 22 to transport and carry out the quality control to the detection and analysis appearance, the quality control includes thickness analysis, macroscopic defect detects and surperficial micro-detection etc.. The sapphire substrate 15 after the quality inspection is then sucked and placed back on the flat belt 22.
When the sapphire substrate 15 is transported to the end of the belt conveyor 2, the sapphire substrate 15 is stably transported to the placing box 301 and 304 through the blanking part 3 to complete the automatic blanking operation.
In this embodiment: the automatic detection line is built, so that the substrate detection production efficiency is greatly improved, and the detection production cost is reduced.
The above description is only a preferred embodiment of the present invention, and therefore the scope of the present invention should not be limited by this description, and all equivalent changes and modifications made within the scope and the specification of the present invention should be covered by the present invention.
Claims (9)
1. An automatic workpiece conveying device is characterized in that: comprises a feeding part, a conveying part and a blanking part;
the feeding part comprises a lifting mechanism, a turnover mechanism, an air cylinder push rod mechanism, a smooth guide rail and a first wafer boat box with a workpiece stacked in an inner layer, the turnover mechanism is connected to the lifting mechanism in a mounting mode and can lift the turnover mechanism through the lifting mechanism, the first wafer boat box is connected to the turnover mechanism in a mounting mode and can turn over the first wafer boat box through the turnover mechanism, the air cylinder push rod mechanism comprises an air cylinder and a push rod connected with the air cylinder in a sliding mode, and the push rod corresponds to the first wafer boat box so that the workpiece in the first wafer boat box can be pushed out;
the conveying part comprises a belt conveyor and an optical sensor, the optical sensor is fixedly arranged and positioned above the belt conveyor, the smooth guide rail is obliquely arranged, the upper end of the smooth guide rail corresponds to the first wafer cassette and is not higher than the height of the push rod, the lower end of the smooth guide rail corresponds to the input end of the belt conveyor and is not lower than the belt conveyor, and a workpiece pushed out by the push rod can slide onto the belt conveyor through the smooth guide rail;
the unloading part includes guiding mechanism, reciprocating motion loading mechanism and is used for installing the second crystal boat box of work piece, the second crystal boat box dress connects on reciprocating motion loading mechanism and drives second crystal boat box horizontal migration through reciprocating motion loading mechanism, guiding mechanism sets up in reciprocating motion loading mechanism's top so that the work piece of following the output of belt conveyer output can fall into in the second crystal boat box through guiding mechanism.
2. An apparatus for automatically transferring a workpiece as set forth in claim 1, wherein: tilting mechanism includes bottom plate, mounting panel and actuating mechanism, the bottom plate dress connects on elevating system, the mounting panel can rotate to be connected at the bottom plate, and the elongated slot has been seted up to this mounting panel, the elongated slot at the mounting panel is installed to first boat box adaptation, actuating mechanism transmission connection mounting panel is in order to drive first boat box swing upset between the position of keeping flat and vertical position, and the work piece that is located the first boat box of vertical position stacks up the setting from top to bottom, the push rod horizontal slip just the work piece of push rod and the superiors aligns.
3. An apparatus for automatically transferring a workpiece as set forth in claim 1, wherein: the smooth guide rail is of a structure with a wide upper part and a narrow lower part and is provided with a smooth plane, and the workpiece slides on the smooth plane of the smooth guide rail by using gravity.
4. An apparatus for automatically transferring a workpiece as set forth in claim 1, wherein: guiding mechanism includes gravity direction slide rail, initiative belt and driven belt are all vertical to be arranged and are formed with the clearance between the two, the belt conveyor output is just not higher than to gravity direction slide rail upper end, the port on the corresponding clearance of gravity direction slide rail lower extreme, the port is located on the second boat box under the clearance to the work piece that makes from the output of belt conveyor slides to the clearance through gravity direction slide rail, falls from the clearance again and inserts in the second boat box.
5. An apparatus for automatically transferring a workpiece as set forth in claim 4, wherein: the inside width from top to bottom of gravity direction slide rail is narrow, the work piece utilizes gravity to slide on the gravity direction slide rail.
6. An apparatus for automatically transferring a workpiece as set forth in claim 4, wherein: the gap is adapted to the thickness of the workpiece.
7. An apparatus for automatically transferring a workpiece as set forth in claim 4, wherein: the driving belt upper end is higher than the driven belt upper end, the driving belt lower extreme is higher than the driven belt lower extreme.
8. An apparatus for automatically transferring a workpiece as set forth in claim 1, wherein: the belt conveyor is arranged horizontally.
9. An apparatus for automatically transferring a workpiece as set forth in claim 1, wherein: the second wafer boat boxes are provided with a plurality of second wafer boat boxes, and the plurality of second wafer boat boxes are used for installing qualified workpieces and unqualified workpieces respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921265201.9U CN210467793U (en) | 2019-08-06 | 2019-08-06 | Automatic workpiece conveying device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921265201.9U CN210467793U (en) | 2019-08-06 | 2019-08-06 | Automatic workpiece conveying device |
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| CN210467793U true CN210467793U (en) | 2020-05-05 |
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| CN201921265201.9U Active CN210467793U (en) | 2019-08-06 | 2019-08-06 | Automatic workpiece conveying device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110491814A (en) * | 2019-08-06 | 2019-11-22 | 华侨大学 | A kind of automatic conveying device for workpieces and its automatic transmission method |
| CN114310530A (en) * | 2021-12-03 | 2022-04-12 | 哈尔滨工业大学 | Automatic loading and unloading ejection structure applied to semiconductor substrate slice processing |
-
2019
- 2019-08-06 CN CN201921265201.9U patent/CN210467793U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110491814A (en) * | 2019-08-06 | 2019-11-22 | 华侨大学 | A kind of automatic conveying device for workpieces and its automatic transmission method |
| CN110491814B (en) * | 2019-08-06 | 2024-02-27 | 华侨大学 | Automatic workpiece conveying device and automatic workpiece conveying method |
| CN114310530A (en) * | 2021-12-03 | 2022-04-12 | 哈尔滨工业大学 | Automatic loading and unloading ejection structure applied to semiconductor substrate slice processing |
| CN114310530B (en) * | 2021-12-03 | 2023-10-17 | 哈尔滨工业大学 | Automatic loading and unloading ejection structure applied to processing of semiconductor substrate slice |
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