CN102252690A - Measuring system of relative position of laser mode and aperture and measuring method thereof - Google Patents
Measuring system of relative position of laser mode and aperture and measuring method thereof Download PDFInfo
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Abstract
The invention discloses a measuring system of relative position of a laser mode and an aperture and a measuring method thereof, and mainly solves the disadvantage of low measurement precision of present systems. The whole system comprises a laser (1), an optical system (15), a resonator to be measured (6), a spectroscope (7), a total reflective mirror (8), an image acquisition and data acquisition system (16), a main control computer (13), and a piezoelectric ceramics driver (14); the piezoelectric ceramics driver drives the laser to output laser; the optical system is adjusted to allow the laser outputted by the laser to be coupled to the resonator to be measured; the laser outputted by the resonator to be measured are divided into two paths by the spectroscope and the total reflective mirror; the two-path laser is collected and transmitted to the main control computer by the image acquisition and data acquisition system; the main control computer processes images of the aperture and the laser mode by using a high-precision image processing algorithm, and calculates the central coordinates of the aperture and the laser mode respectively. The invention has the advantages of synchronous CCD camera acquisition and sawtooth wave signals, and high measurement precision, and is applicable to the high-precision automatic regulation of the laser.
Description
Technical Field
The invention belongs to the technical field of measurement, and particularly relates to measurement of an inner diaphragm and a laser mode of a resonant cavity of a laser gyroscope, which is used for realizing high-precision automatic cavity adjustment of a laser.
Background
In the production process of the laser gyroscope, the processing and installation errors of optical components such as a resonant cavity, a lens and the like, and the disturbance of the ambient temperature and pressure can cause the position and the inclination angle of the reflection lens to deviate, so that the cavity mirror is disordered, the performance of the resonant cavity of the laser gyroscope is reduced, and the optical loss of the resonant cavity is increased. Therefore, in order to minimize the loss of the resonator, the resonator needs to be tuned, and the above errors and disturbances are compensated by adjusting the position and tilt angle of the mirror, so as to eliminate the cavity mirror disorder. In the cavity adjusting process, the positions of the diaphragm and the light beam in the resonant cavity need to be detected, and the position of the reflector needs to be adjusted accordingly. The traditional method for detecting the positions of the diaphragm and the light beam in the resonant cavity is generally to use a detector for detection, and the method has low digitization degree and low controllability on the system.
At present, the system described in the document uses a CCD camera and a photoelectric converter to acquire signals output by a resonant cavity, and proposes an image processing method based on statistics, and then a main control computer analyzes and calculates the relative position of the diaphragm and the light beam. The method for detecting the relative position of the diaphragm and the light beam in the document overcomes the defect that the detection is directly carried out by using a detector in the traditional method, but in the system, because the acquisition of a camera cannot be synchronous with a sawtooth wave signal, the intensity of the light beam observed by the camera can be continuously and alternately changed between intensity and weakness along with the change of the sawtooth wave signal, the position of the obtained light beam can be greatly fluctuated due to the continuous change of the intensity of the light beam, and the identification result is very unreliable. Although an image processing algorithm based on statistics is also provided to effectively identify the light beam, when the light beam deviates far from the central axis of the resonant cavity, the intensity and the shape of the light beam are unstable, and the analysis result of the image fluctuates greatly, which affects the measurement accuracy.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a system and a method for measuring the relative position of a laser mode and a diaphragm, so as to avoid the fluctuation of the light beam position caused by the change of the light beam intensity, realize the synchronization of the acquisition of a CCD camera and a sawtooth wave signal and improve the measurement precision.
The technical idea for realizing the purpose of the invention is as follows: a single-mode swept-frequency laser is used as an excitation source, a sawtooth wave high-voltage signal generated by a piezoelectric ceramic driver drives piezoelectric ceramic in the laser so that the laser outputs periodic laser with continuously changed frequency, a master control computer controls the amplitude and bias voltage of the piezoelectric ceramic driver and triggers and controls a CCD camera to realize that the CCD camera collects an image of a specified single laser mode, and a high-precision image processing method is adopted to respectively calculate the central coordinates of a diaphragm image and the laser mode image. The technical scheme is described as follows:
the relative position measuring system of the laser mode and the diaphragm comprises: the device comprises a laser, a resonant cavity to be detected, a CCD camera, a photoelectric detector, an image acquisition card, a data acquisition card, a main control computer and a piezoelectric ceramic driver, wherein:
an optical system is arranged between the laser and the resonant cavity to be measured, and the optical system comprises: the device comprises a spherical reflector, a two-dimensional parallel flat plate, a polaroid and an 1/2 wave plate;
a spectroscope and a total reflection mirror are arranged between the resonant cavity to be measured and the image acquisition card and the data acquisition card;
laser emitted by a laser is adjusted by a spherical reflector, a two-dimensional parallel flat plate, a polaroid and an 1/2 wave plate in sequence and is incident into a resonant cavity to be detected, the laser output by the resonant cavity to be detected is divided into two paths by a spectroscope, and one path of laser is converted into a voltage signal by a photoelectric detector and is transmitted to a main control computer by a data acquisition card; the other path is collected by a CCD camera after the direction is changed by the spectroscope and is transmitted to a main control computer by an image collecting card;
the main control computer is provided with a control module and an image processing module, the control module consists of a USB drive and an interface program, the USB drive main control computer is respectively communicated with the piezoelectric ceramic driver and the CCD camera to transmit a control instruction, the interface program displays and stores the images of the laser mode and the diaphragm in real time, and the processing module is used for further dividing the images and obtaining the positions of the laser beams in different modes relative to the diaphragm through calculation.
The method for measuring the relative position of the laser mode and the diaphragm comprises the following steps:
(1) selecting a gain value of a CCD camera within a range of 0-60 dB according to the intensity of light rays in the environment, selecting the exposure time of the CCD camera within a range of 1/15-1/3100 s, detecting an image of a diaphragm and a laser mode of the diaphragm in a resonant cavity to be detected through the CCD camera, detecting the power of laser output by the resonant cavity to be detected through a photoelectric detector, and transmitting the power to a main control computer;
(2) the main control computer adjusts the amplitude and bias voltage of the sawtooth wave signal output by the piezoelectric ceramic driver according to the signal of the laser basic mode collected by the photoelectric detector, and adjusts the position, amplitude and spectral line width of the laser basic mode to make the spectral line width consistent with the exposure time of the CCD camera;
(3) setting the trigger voltage of a CCD camera to be 0-1V according to system calibration, and when the voltage of the adjusted laser basic mode reaches the trigger voltage, sending a trigger signal to the CCD camera by a main control computer, starting to acquire an image of the laser mode and a diaphragm by the CCD camera, and sending acquired image information to the main control computer for storage through an image acquisition card;
(4) removing image noise by adopting a Gaussian filter, respectively segmenting a resonant cavity diaphragm image and a laser fundamental mode image from the de-noised image by utilizing an automatic threshold-based image segmentation method, carrying out binarization processing on the two images, and then respectively calculating the central coordinates of the diaphragm image and the laser fundamental mode image
Wherein [ i, j]Is the coordinates of the pixels in the image, n is the total number of rows of pixels in the image, m is the total number of columns of pixels in the image,
is the area of the image, B [ i, j]The pixel values after the image binarization are obtained.
The invention has the following advantages:
1) the invention adopts the combination of the spherical reflector and the two-dimensional parallel flat plate, can simultaneously and finely adjust the incidence angle and the translation scale of the laser entering the resonant cavity to be measured, improves the coupling efficiency, and effectively reduces the cross coupling between modes by carrying out the mode matching on the laser and the resonant cavity to be measured through the spherical reflector, thereby improving the measurement precision.
2) The invention designs a unique optical imaging system, and imaging errors are reduced to the minimum. The invention adopts the CCD camera with high sensitivity, high resolution, adjustable gain and small pixel size, thereby realizing the high-definition shooting of the diaphragm and laser mode images. The invention adopts the control module to ensure that the main control computer can trigger and control the CCD camera to take a snapshot, thereby realizing the synchronization of the CCD camera acquisition and the sawtooth wave signal.
3) The piezoelectric ceramic driver used by the invention enables the voltage stepping resolution of the output sawtooth wave signal to reach 1mV, ensures that the frequency variation of the laser output by the laser is smaller than the spectral line width of the laser output by the resonant cavity to be tested, and successfully realizes the function of shooting by randomly selecting a laser mode.
4) Because the single-mode frequency-sweeping laser is adopted, the frequency of the laser output by the laser and the frequency of the intrinsic laser mode of the resonant cavity to be measured can be kept consistent for a long time, sufficient time is provided for shooting the laser mode, the intrinsic laser mode of the resonant cavity to be measured is ensured to be shot in a high-definition mode, and the measurement precision is further improved.
5) The invention uses the polaroid and the 1/2 wave plate, so that the polarization state, the polarization direction and the light intensity of the excitation light beam can be conveniently converted, the measurement of a linear polarization mode and a circular polarization mode is compatible, and the requirements of a jitter laser gyro cavity adjusting and a zero-locking laser gyro cavity adjusting can be met.
6) The invention adopts a high-precision image processing algorithm, namely, firstly, a Gaussian filter is adopted to remove the image noise of the acquired laser mode and the diaphragm, an image segmentation method based on an automatic threshold value is adopted to segment a resonant cavity diaphragm image and a laser mode image from the de-noised images respectively, binarization processing is carried out on the two images, then the central coordinates of the diaphragm image and the laser mode image are calculated respectively, and the high-precision measurement of the coordinates of the diaphragm center and the laser mode center is realized.
Drawings
FIG. 1 is a block diagram of the relative position measuring system of the laser mode and the diaphragm of the present invention;
FIG. 2 is a flow chart of the method for measuring the relative position of the laser mode and the diaphragm according to the present invention;
Detailed Description
The detailed process of processing and calculating the center coordinates of the laser mode and the diaphragm by the image processing module will be clearly and completely described below with reference to the accompanying drawings.
Referring to fig. 1, the measuring system of the present invention includes a laser 1, an optical system 15, a resonant cavity 6 to be measured, a spectroscope 7, a total reflection mirror 8, an image acquisition and data acquisition system 16, a main control computer 13 and a piezoelectric ceramic driver 14. Wherein:
the laser 1 adopts a single-mode swept-frequency laser, piezoelectric ceramics are attached to the laser, the frequency of laser output by the laser 1 can be adjusted by controlling the piezoelectric ceramics, and the output laser is transmitted to the optical system 15.
The optical system 15 comprises a spherical reflector 2, a two-dimensional parallel flat plate 3, a polaroid 4 and an 1/2 wave plate 5, wherein the spherical reflector 2 is placed at the beam waist position of the laser output by the laser 1, and the two-dimensional parallel flat plate 3, the polaroid 4 and the 1/2 wave plate 5 are sequentially placed behind the spherical reflector 2; the spherical reflector 2 and the two-dimensional parallel plate 3 can accurately adjust the angle and the position of incident laser, reduce the difficulty of adjusting a light path and improve the coupling efficiency of the incident laser and a laser gyroscope resonant cavity to be measured; the polaroids 4 and the 1/2 wave plate 5 can adjust and convert the polarization state, the polarization direction and the light intensity of the laser incident into the resonant cavity 6 to be measured according to the measurement requirement.
The resonant cavity 6 to be measured is placed behind the optical system 15 and used for receiving the laser output by the optical system 15, the spectroscope 7 and the total reflection mirror 8 are sequentially placed at the rear end of the resonant cavity 6 to be measured, and the spectroscope 7 and the total reflection mirror 8 divide the laser output by the resonant cavity 6 to be measured into two paths and transmit the two paths of laser to the subsequent image acquisition and data acquisition system 16.
The image acquisition and data acquisition system 16 comprises a CCD camera 9, a photoelectric detector 10, an image acquisition card 11 and a data acquisition card 12, wherein the photoelectric detector 10 is positioned at the front end of the data acquisition card 12 and is used for converting one path of acquired laser into a voltage signal and transmitting the voltage signal to the main control computer 13 through the data acquisition card 12; the CCD camera 9 is located at the front end of the image acquisition card 11 and used for acquiring the other path of laser and transmitting the other path of laser to the main control computer 13 through the image acquisition card 11.
The main control computer 13 is positioned behind the image acquisition and data acquisition system 16, the main control computer 13 is provided with a control module and an image processing module, the control module consists of a USB drive and an interface program, and the USB drive and the interface program are mutually independent and are connected with the image processing module; the USB driver is used for sending a control instruction to external equipment through a USB interface, and the interface program displays and stores the laser mode and the image of the diaphragm in real time; the processing module is used for processing images and feeding back signals to the control module, and the positions of the laser beams in different modes relative to the diaphragm are obtained through calculation.
During measurement, the laser 1 outputs periodic laser with continuously changing frequency under the control of the piezoelectric ceramic driver 14, then the spherical reflector 2, the two-dimensional parallel plate 3, the polaroid 4 and the 1/2 wave plate 5 are adjusted, so that the laser output by the laser 1 is well coupled into the resonant cavity 6 to be measured, the laser output by the resonant cavity 6 to be measured is divided into two paths by the spectroscope 7, one path is converted into a voltage signal by the photoelectric detector 10 and is transmitted to the main control computer 13 by the data acquisition card 12, the other path is changed by the holophote 8 and then is acquired by the CCD camera 9 and is transmitted to the main control computer 13 by the image acquisition card 11, the control module in the main control computer 13 synchronously controls the piezoelectric ceramic driver 14 and the CCD camera 9 according to the data signal acquired by the photoelectric detector 10, the image processing module processes the acquired image information, and the center coordinates of the diaphragm and the laser mode are calculated.
Referring to fig. 2, the measuring method of the present invention includes the steps of:
step 1, adjusting the optical path of the system
1.1) opening a piezoelectric ceramic driver and a laser, wherein the piezoelectric ceramic driver drives the laser to output laser, and an optical system is adjusted to well couple a laser beam into a resonant cavity to be measured;
1.2) adjusting the spectroscope to divide laser output by the resonant cavity to be detected into two paths, wherein one path of laser is incident on a photoelectric detector, and the other path of laser is vertically incident on a CCD camera lens after the direction of the laser is changed by a total reflection mirror;
step 2, setting parameters
2.1) opening the CCD camera, and setting a gain value and an exposure time parameter of the CCD camera according to the intensity of light rays in the environment;
2.2) setting the trigger voltage of the CCD camera according to the system calibration, when the laser mode voltage acquired by the photoelectric detector reaches the trigger voltage, sending a trigger signal to the CCD camera by the main control computer, and starting acquiring images of the laser mode and the diaphragm by the CCD camera;
2.3) setting the amplitude and bias voltage parameters of the sawtooth wave signal output by the piezoelectric ceramic driver to ensure that the spectral line width of a specified single laser mode is consistent with the exposure time of the CCD camera;
step 3, the data acquisition card uploads the laser power spectrum waveform data acquired by the photoelectric detector to a main control computer for real-time display, and an operator is assisted in adjusting the setting of system parameters by observing the laser power spectrum waveform data in real time;
step 4, the image acquisition card uploads the laser mode and the image of the diaphragm acquired by the CCD camera to a main control computer, and real-time display and storage are carried out, and an operator is assisted in adjusting the optical path of the system by observing the laser mode and the image of the diaphragm in real time;
step 5, processing the collected laser mode and the image of the diaphragm
5.1) removing the collected laser mode and the image noise of the diaphragm by adopting a Gaussian filter;
5.2) respectively segmenting a resonant cavity diaphragm image and a laser mode image from the denoised image by adopting an automatic threshold-based image segmentation method;
5.3) selection threshold Tb ═ bmax-0.1, wherein bmaxMax (f (w, q)), f (w, q) is the gray value at the (w, q) position in the divided image of the laser mode, bmaxFor the maximum gray level in the image, the divided laser mode image is binarized according to a threshold value Tb, namely:
f (w, q) ≦ Tb, when f (w, q) ≦ 0,
f (w, q) > Tb when f (w, q) > 1;
5.4) selection of threshold t Using Otsu method of Otsu's development*：
t*＝max(η2(t))，
η2(t)＝a0(u0-u)2+a1(u1-u)2＝a0a1(u0-u1)2，
Wherein,a1＝1-a0，
Pkthe probability of each gray level in the image is shown, k is the gray level of the image, L is the total gray level of the image, and t is a certain gray level in the middle of the image;
5.5) dividing the diaphragm image according to the threshold value t*And (3) carrying out binarization, namely:
g (u, v) ≦ t when g (u, v) ≦ 0*，
g (u, v) < 1, when g (u, v) > t*，
Wherein g (u, v) is the gray value at the (u, v) position in the divided diaphragm image;
5.6) respectively calculating the center coordinates of the diaphragm image and the laser mode image after binaryzation by using a gravity center calculation method
Wherein [ i, j]Is the coordinates of the pixels in the image, n is the total number of rows of pixels in the image, m is the total number of columns of pixels in the image,
is the area of the image, B [ i, j]The pixel values after the image binarization are obtained.
Claims (7)
1. The utility model provides a relative position measurement system of laser mode and diaphragm, includes laser instrument (1), resonant cavity (6) that awaits measuring, CCD camera (9), photoelectric detector (10), image acquisition card (11), data acquisition card (12), main control computer (13) and piezoceramics driver (14), its characterized in that:
an optical system (15) is arranged between the laser (1) and the resonant cavity (6) to be measured, and the optical system comprises: the device comprises a spherical reflector (2), a two-dimensional parallel flat plate (3), a polarizing plate (4) and an 1/2 wave plate (5);
a spectroscope (7) and a total reflection mirror (8) are arranged between the resonant cavity to be measured and the image acquisition card and the data acquisition card;
laser emitted by a laser is adjusted by a spherical reflector (2), a two-dimensional parallel flat plate (3), a polarizing plate (4) and an 1/2 wave plate (5) in sequence and is incident into a resonant cavity (6) to be detected, the laser output by the resonant cavity (6) to be detected is divided into two paths by a spectroscope (7), and one path of laser is converted into a voltage signal by a photoelectric detector (10) and is transmitted to a main control computer (13) by a data acquisition card (12); the other path is collected by a CCD camera (9) after the direction is changed by a total reflection mirror (8), and is transmitted to a main control computer (13) through an image collecting card (11);
the main control computer (13) is internally provided with a control module and an image processing module, the control module consists of a USB drive and an interface program, the USB drive main control computer (13) is respectively communicated with the piezoelectric ceramic driver (14) and the CCD camera (9) to transmit a control instruction, the interface program displays and stores the images of the laser mode and the diaphragm in real time, and the processing module is used for further dividing the images and obtaining the positions of the laser beams in different modes relative to the diaphragm through calculation.
2. The measuring system according to claim 1, characterized in that the laser (1) is a single-mode swept laser which outputs a periodic, continuously variable frequency laser under the control of a piezoceramic driver (14) and which is capable of successively exciting a plurality of eigenmodes of the cavity (6) to be measured during a sweep period.
3. A measuring system according to claim 1, characterized in that the CCD camera (9) is a CCD camera with a sensitivity of 0.001lux, a resolution of 1392 x 1040, a gain adjustment range of 0-60 dB, and a pixel size of 4.65um x 4.65 um.
4. The measurement system according to claim 1, wherein the image acquisition card (11) and the data acquisition card (12) are arranged in parallel to simultaneously detect two laser beams output by the resonant cavity (6) to be measured.
5. The measuring system according to claim 1, wherein the piezoelectric ceramic driver (14) is composed of a DDS signal generator and a high voltage amplifying module, the DDS signal generator generates a sawtooth wave voltage signal of 0-5V under the control of the main control computer (13), and the voltage signal is amplified into a sawtooth wave voltage signal of 0-240V by the high voltage amplifying module and is output to the laser (1).
6. A measuring system according to claim 1, characterized in that the spherical mirror (2) is placed at the beam waist of the laser output from the laser (1) to ensure that the mode of the laser output from the laser matches the natural mode in the resonator (6) to be measured.
7. A method for measuring the relative position of a laser mode and a diaphragm comprises the following steps:
(1) selecting a gain value of a CCD camera within a range of 0-60 dB according to the intensity of light rays in the environment, selecting the exposure time of the CCD camera within a range of 1/15-1/3100 s, detecting an image of a diaphragm and a laser mode of the diaphragm in a resonant cavity to be detected through the CCD camera, detecting the power of laser output by the resonant cavity to be detected through a photoelectric detector, and transmitting the power to a main control computer;
(2) the main control computer adjusts the amplitude and bias voltage of the sawtooth wave signal output by the piezoelectric ceramic driver according to the signal of the laser basic mode collected by the photoelectric detector, and adjusts the position, amplitude and spectral line width of the laser basic mode to make the spectral line width consistent with the exposure time of the CCD camera;
(3) setting the trigger voltage of a CCD camera to be 0-1V according to system calibration, and when the voltage of the adjusted laser basic mode reaches the trigger voltage, sending a trigger signal to the CCD camera by a main control computer, starting to acquire an image of the laser mode and a diaphragm by the CCD camera, and sending acquired image information to the main control computer for storage through an image acquisition card;
(4) removing image noise by adopting a Gaussian filter, and respectively segmenting a resonant cavity diaphragm image and a laser from the de-noised image by utilizing an automatic threshold-based image segmentation methodThe light base mode image is processed with binarization, and then the center coordinates of the diaphragm image and the laser base mode image are calculated respectively
Wherein [ i, j]Is the coordinates of the pixels in the image, n is the total number of rows of pixels in the image, m is the total number of columns of pixels in the image,
is the area of the image, B [ i, j]The pixel values after the image binarization are obtained.
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| CN107543682A (en) * | 2017-09-08 | 2018-01-05 | 中国科学院上海技术物理研究所 | A kind of device and method of active suppression optical system for testing shake |
| CN110542433A (en) * | 2019-08-13 | 2019-12-06 | 中国航空工业集团公司西安飞行自动控制研究所 | Non-prior zero-latching inertial navigation system starting process suppression method |
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