CN102252690B - Measuring system of relative position of laser mode and aperture and measuring method thereof - Google Patents
Measuring system of relative position of laser mode and aperture and measuring method thereof Download PDFInfo
- Publication number
- CN102252690B CN102252690B CN 201110092728 CN201110092728A CN102252690B CN 102252690 B CN102252690 B CN 102252690B CN 201110092728 CN201110092728 CN 201110092728 CN 201110092728 A CN201110092728 A CN 201110092728A CN 102252690 B CN102252690 B CN 102252690B
- Authority
- CN
- China
- Prior art keywords
- laser
- image
- main control
- measured
- ccd camera
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Lasers (AREA)
Abstract
The invention discloses a measuring system of relative position of a laser mode and an aperture and a measuring method thereof, and mainly solves the disadvantage of low measurement precision of present systems. The whole system comprises a laser (1), an optical system (15), a resonator to be measured (6), a spectroscope (7), a total reflective mirror (8), an image acquisition and data acquisition system (16), a main control computer (13), and a piezoelectric ceramics driver (14); the piezoelectric ceramics driver drives the laser to output laser; the optical system is adjusted to allow the laser outputted by the laser to be coupled to the resonator to be measured; the laser outputted by the resonator to be measured are divided into two paths by the spectroscope and the total reflective mirror; the two-path laser is collected and transmitted to the main control computer by the image acquisition and data acquisition system; the main control computer processes images of the aperture and the laser mode by using a high-precision image processing algorithm, and calculates the central coordinates of the aperture and the laser mode respectively. The invention has the advantages of synchronous CCD camera acquisition and sawtooth wave signals, and high measurement precision, and is applicable to the high-precision automatic regulation of the laser.
Description
Technical field
The invention belongs to field of measuring technique, be specifically related to the measurement to diaphragm and zlasing mode in the laser gyro resonator cavity, be used for realizing the High Precision Automatic accent chamber of laser instrument.
Background technology
In the production run of laser gyro, the disturbance meeting of the processing of the optical module such as resonator cavity, eyeglass and alignment error and ambient temperature, pressure makes the position of reflecting optics and pitch angle produce skew, cause cavity mirror misalignment, cause the performance of laser gyro resonator cavity to reduce, namely the optical loss of resonator cavity increases.Therefore, minimum for the loss that makes resonator cavity, need to transfer the chamber to resonator cavity, come above-mentioned error and disturbance are compensated by position and the pitch angle of adjusting catoptron, eliminate cavity mirror misalignment.And in transferring the chamber process, need to the position of diaphragm in the resonator cavity and light beam be detected, accordingly the position of catoptron is adjusted.The method that traditional position to diaphragm in the resonator cavity and light beam is detected generally is to detect with detector, and this method digitized degree is not high, and is not strong to the controllability of system.
At present, domestic in the laser gyro optical resonator position of diaphragm and light beam carry out context of detection newer application arranged, referring to " based on the ring laser gyro automatic cavity-adjusting system of vision " (Shen Yang etc., the hi-tech communication, 2007) literary composition, the system described in the document has used CCD camera and photoelectric commutator to gather the signal of resonator cavity output, and a kind of image processing method based on statistics has been proposed, then by the relative position of main control computer analytical calculation diaphragm and light beam.Detection method to the relative position of diaphragm and light beam in the document has solved the deficiency that directly detects with detector in the classic method, but the collection owing to video camera in this system can't be synchronous with sawtooth signal, the intensity of the light beam of observing from video camera can constantly alternately change between power along with the variation of sawtooth signal, the light-beam position that obtains can very large fluctuation occur owing to the continuous variation of beam intensity, and recognition result is very unreliable.Although also proposed a kind of image processing algorithm based on statistics in the literary composition, light beam is effectively identified, but when the axis of BEAM SQUINT resonator cavity was far away, the intensity of light beam and shape were all unstable, larger fluctuation can appear in the analysis result of image, has affected measuring accuracy.
Summary of the invention
The object of the invention is to overcome the deficiency of above-mentioned prior art, relative position measurement system and the measuring method thereof of a kind of zlasing mode and diaphragm are proposed, the light-beam position fluctuation that causes to avoid beam intensity to change realizes the synchronous of CCD collected by camera and sawtooth signal, improves measuring accuracy.
The technical thought that realizes purpose of the present invention is: adopt single mode sweeping laser device as driving source, piezoelectric ceramics in the sawtooth wave high voltage signal drive laser that is produced by piezoelectric ceramic actuator is so that periodic, the frequency continually varying laser of laser instrument output, by amplitude, the bias voltage of main control computer control piezoelectric ceramic actuator and trigger control CCD camera and realized that the CCD collected by camera specifies the image of single zlasing mode, and adopt high-precision image processing method, calculate respectively the centre coordinate of diaphragm image and zlasing mode image.Its technical scheme is described below:
One. the relative position measurement system of zlasing mode of the present invention and diaphragm comprises: laser instrument, resonator cavity to be measured, CCD camera, photodetector, image pick-up card, data collecting card, main control computer and piezoelectric ceramic actuator, wherein:
Be provided with optical system between laser instrument and the resonator cavity to be measured, this optical system comprises: spherical reflector, two-dimentional parallel flat, polaroid and 1/2 wave plate;
Be provided with spectroscope and total reflective mirror between resonator cavity to be measured and image pick-up card and the data collecting card;
The laser that laser instrument sends passes through the adjusting of spherical reflector, two-dimentional parallel flat, polaroid, 1/2 wave plate successively, incide in the resonator cavity to be measured, the laser of resonator cavity output to be measured is divided into two-way through spectroscope, the photodetector of leading up to is converted into voltage signal, and is transferred on the main control computer by data collecting card; Another road by the CCD collected by camera, is transferred on the main control computer through image pick-up card after spectroscope changes direction;
Be provided with control module and image processing module in the main control computer, this control module is driven by USB and interface program forms, USB drives main control computer and communicates by letter with the CCD camera with piezoelectric ceramic actuator respectively, the transmission steering order, interface program shows the image of zlasing mode and diaphragm in real time and preserves, processing module is used for image is further cut apart, and by calculating the position of the relative diaphragm of different mode laser beam.
Two. the relative position measurement method of zlasing mode of the present invention and diaphragm comprises the steps:
(1) strong and weak according to the light in the environment, in 0～60dB scope, select the yield value of CCD camera, in 1/15s～1/3100s scope, select the time shutter of this CCD camera, image by diaphragm and zlasing mode thereof in this CCD camera calibration resonator cavity to be measured, detect the power of resonator cavity Output of laser to be measured by photodetector, and be transferred to main control computer;
(2) signal of the laser basic mode pattern that collects according to photodetector of main control computer, adjust amplitude and the bias voltage of piezoelectric ceramic actuator output sawtooth signal, adjust position, amplitude and the line width of laser basic mode pattern, make its line width consistent with the time shutter of CCD camera;
(3) trigger voltage that according to system calibrating the CCD camera is set is 0～1V, when the voltage of adjusted laser basic mode pattern reaches this trigger voltage, main control computer sends trigger pip for this CCD camera, this CCD camera begins to gather the image of this zlasing mode and diaphragm, and the image information that gathers is sent to the main control computer storage by image pick-up card;
(4) adopt Gaussian filter to remove picture noise, utilization is based on the image partition method of automatic threshold, be partitioned into respectively resonator diaphragm image and laser basic mode mode image the image after denoising, and these two images are carried out binary conversion treatment, then calculate respectively the centre coordinate of diaphragm image and laser basic mode mode image
Wherein [i, j] is the coordinate of pixel in the image, and n is total line number of pixel in the image, and m is total columns of pixel in the image,
Be the area of image, B[i, j] be the pixel value behind the binary image.
The present invention has following advantage:
1) the present invention is owing to adopt the combination of spherical reflector and two-dimentional parallel flat, incident angle and the translation yardstick of resonator cavity laser to be measured incided in simultaneously meticulous adjusting, improved coupling efficiency, and by spherical reflector laser instrument and resonator cavity to be measured are carried out pattern match, effectively reduce the cross-couplings between pattern, thereby improved measuring accuracy.
2) the present invention has designed unique optical imaging system, and image error has been reduced to minimum.The present invention has realized that the high-resolution of diaphragm and zlasing mode image is taken owing to adopt high sensitivity, high resolving power, CCD camera that gain is adjustable, the baby elephant elemental size.The present invention adopts control module to make main control computer can trigger control CCD camera and captures, and has realized the synchronous of CCD collected by camera and sawtooth signal.
3) piezoelectric ceramic actuator of the present invention's use, make the voltage steps resolution of output sawtooth signal reach 1mV, guaranteed that the frequency variation of laser instrument Output of laser less than the line width of resonator cavity Output of laser to be measured, successfully realized the function that any selection zlasing mode is taken.
4) the present invention is owing to adopt single mode sweeping laser device, the frequency of the frequency of this laser instrument Output of laser and the intrinsic zlasing mode of resonator cavity to be measured can be consistent for a long time, is provided to the shooting zlasing mode the sufficient time, guarantee the intrinsic zlasing mode that resonator cavity to be measured is taken on high-resolution ground, further improved measuring accuracy.
5) the present invention is owing to used polaroid and 1/2 wave plate, can make things convenient for polarization state, polarization direction and the light intensity of switched energization light beam, thereby the measurement of compatible linear polarization pattern and circular polarisation mode can be satisfied the shake laser gyro and transfer the chamber needs also can satisfy zero locking laser gyro to transfer the chamber needs.
6) the present invention has adopted high-precision image processing algorithm, the zlasing mode that namely adopts first Gaussian filter to remove to collect and the picture noise of diaphragm, employing is based on the image partition method of automatic threshold, be partitioned into respectively resonator diaphragm image and zlasing mode image the image after denoising, and these two images are carried out binary conversion treatment, then calculate respectively the centre coordinate of diaphragm image and zlasing mode image, realized measuring accurately the coordinate at diaphragm center and zlasing mode center.
Description of drawings
Fig. 1 is zlasing mode of the present invention and diaphragm relative position measurement system architecture diagram;
Fig. 2 is zlasing mode of the present invention and diaphragm relative position measurement method flow diagram;
Embodiment
Below with reference to accompanying drawing, describe clearly and completely the setting of optical system of the present invention, zlasing mode and diaphragm relative position measurement system, process, calculate the detailed process of zlasing mode centre coordinate and diaphragm centre coordinate with image processing module.
With reference to Fig. 1, measuring system of the present invention comprises laser instrument 1, optical system 15, resonator cavity to be measured 6, spectroscope 7, total reflective mirror 8, image acquisition and data acquisition system (DAS) 16, main control computer 13 and piezoelectric ceramic actuator 14.Wherein:
Optical system 15, comprise spherical reflector 2, two-dimentional parallel flat 3, polaroid 4 and 1/2 wave plate 5, this spherical reflector 2 is placed in the beam waist position of laser instrument 1 Output of laser, is placed with successively two-dimentional parallel flat 3, polaroid 4 and 1/2 wave plate 5 after this spherical reflector 2; But angle and the position of spherical reflector 2 and two-dimentional parallel flat 3 fine adjustment incident lasers reduce the optical path adjusting difficulty, improve the coupling efficiency of incident laser and testing laser gyro resonator cavity; The laser polarization state, polarization direction and the light intensity that are mapped to resonator cavity 6 to be measured be regulated and be converted into to polaroid 4 and 1/2 wave plate 5 can according to measuring needs.
Resonator cavity 6 to be measured is positioned over after the optical system 15, the laser that is used for receiving optics 15 outputs, be placed with successively spectroscope 7 and total reflective mirror 8 in resonator cavity to be measured 6 rear ends, transfer to image acquisition and data acquisition system (DAS) 16 afterwards after the laser that spectroscope 7 and total reflective mirror 8 are exported resonator cavity 6 to be measured is divided into two-way.
Image acquisition and data acquisition system (DAS) 16, comprise CCD camera 9, photodetector 10, image pick-up card 11 and data collecting card 12, photodetector 10 is positioned at the front end of data collecting card 12, the road laser that is used for collecting is converted into voltage signal, and is transferred on the main control computer 13 by this data collecting card 12; CCD camera 9 is positioned at the front end of image pick-up card 11, is used for gathering another road laser, and is transferred on the main control computer 13 by this image pick-up card 11.
Main control computer 13, be positioned at after image acquisition and the data acquisition system (DAS) 16, this main control computer 13 is provided with control module and image processing module, and control module is driven by USB and interface program forms, and USB drives separate with interface program and links to each other with image processing module; USB drive to be used for by USB interface to the external unit sending controling instruction, and interface program shows the image of zlasing mode and diaphragm in real time and preserves; Processing module is used for image to be processed, feeds back signal to control module, and by calculating the position of the relative diaphragm of different mode laser beam.
During measurement, laser instrument 1 is under the control of piezoelectric ceramic actuator 14, output is periodic, frequency continually varying laser, then regulate spherical reflector 2, two dimension parallel flat 3, polaroid 4 and 1/2 wave plate 5, the laser of laser instrument 1 output is coupled in the resonator cavity 6 to be measured well, the laser of these resonator cavity 6 outputs to be measured is divided into two-way through spectroscope 7, the photodetector 10 of leading up to is converted into voltage signal, and be transferred on the main control computer 13 by data collecting card 12, another road is gathered by CCD camera 9 after total reflective mirror 8 changes direction, be transferred on the main control computer 13 through image pick-up card 11, data-signal synchro control piezoelectric ceramic actuator 14 and CCD camera 9 that control module in the main control computer 13 collects according to photodetector 10, image processing module is processed the image information that collects, and calculates the centre coordinate of diaphragm and zlasing mode.
With reference to Fig. 2, measuring method of the present invention comprises the steps:
1.1) open piezoelectric ceramic actuator and laser instrument, piezoelectric ceramic actuator drive laser Output of laser is regulated optical system, makes laser beam be coupled into well resonator cavity to be measured;
1.2) regulate spectroscope, make the laser of resonator cavity output to be measured be divided into two-way, wherein one road laser incides on the photodetector, and another road laser impinges perpendicularly on the CCD camera lens after total reflective mirror changes direction;
Step 2, parameters
2.1) open the CCD camera, according to the power of the light in the environment, yield value and the time shutter parameter of CCD camera is set;
2.2) trigger voltage of CCD camera is set according to system calibrating, when the zlasing mode voltage that collects when photodetector reaches this trigger voltage, main control computer sends trigger pip for this CCD camera, and this CCD camera begins to gather the image of zlasing mode and diaphragm;
2.3) amplitude and bias voltage parameter that piezoelectric ceramic actuator is exported sawtooth signal are set, make and specify the line width of single zlasing mode consistent with the time shutter of CCD camera;
Step 3, the laser power spectrum Wave data that data collecting card collects photodetector is uploaded to main control computer and shows in real time, by Real Time Observation laser power spectrum Wave data, the setting of assist operator Adjustment System parameter;
Step 4, image pick-up card with the CCD collected by camera to zlasing mode and the image uploading of diaphragm to main control computer and show in real time and storage, by the image of Real Time Observation zlasing mode and diaphragm, assist operator regulating system light path;
Step 5, the zlasing mode that processing collects and the image of diaphragm
5.1) zlasing mode that adopts Gaussian filter to remove to collect and the picture noise of diaphragm;
5.2) adopt the image partition method based on automatic threshold, be partitioned into respectively resonator diaphragm image and zlasing mode image the image after denoising;
5.3) selection threshold value Tb=b
Max-0.1, wherein, b
Max=max (f (w, q)), f (w, q) is the gray-scale value of (w, q) position in the image of the zlasing mode that is partitioned into, b
MaxThen gray scale maximal value in the image carries out binaryzation with the zlasing mode image that is partitioned into according to threshold value Tb, that is: for this reason
F (w, q)=0, as f (w, q)≤Tb,
F (w, q)=1 is as f (w, q)＞Tb;
5.4) use the Otsu method of large Tianjin exhibition to select threshold value t
*:
t
*＝max(η
2(t))，
η
2(t)＝a
0(u
0-u)
2+a
1(u
1-u)
2＝a
0a
1(u
0-u
1)
2，
Wherein,
a
1=1-a
0,
P
kBe the probability that each gray level in the image occurs, k is the gray level of image, and L is the total number of greyscale levels of image, and t is the centre gray level of image;
5.5) with the diaphragm image that is partitioned into according to threshold value t
*Carry out binaryzation, that is:
G (u, v)=0 is as g (u, v)≤t
*,
G (u, v)=1 is as g (u, v)＞t
*,
Wherein, g (u, v) is the gray-scale value of (u, v) position in the diaphragm image that is partitioned into;
5.6) utilize the center of gravity calculation method to calculate respectively diaphragm image after the binaryzation and the centre coordinate of zlasing mode image
Wherein [i, j] is the coordinate of pixel in the image, and n is total line number of pixel in the image, and m is total columns of pixel in the image,
Be the area of image, B[i, j] be the pixel value behind the binary image.
Claims (3)
1. the relative position measurement system of a zlasing mode and diaphragm, comprise laser instrument (1), resonator cavity to be measured (6), CCD camera (9), photodetector (10), image pick-up card (11), data collecting card (12), main control computer (13) and piezoelectric ceramic actuator (14), it is characterized in that:
Be provided with optical system (15) between laser instrument (1) and the resonator cavity to be measured (6), this optical system comprises: spherical reflector (2), two-dimentional parallel flat (3), polaroid (4) and 1/2 wave plate (5);
Be provided with spectroscope (7) and total reflective mirror (8) between resonator cavity to be measured and image pick-up card and the data collecting card;
Spherical reflector (2) is placed in the beam waist position of laser instrument (1) Output of laser, is complementary with the pattern that guarantees this laser instrument Output of laser and the natural mode in the resonator cavity to be measured (6);
CCD camera (9), employing sensitivity are that 0.001lux, resolution are that 1392*1040, gain-adjusted scope are the CCD camera that 0～60dB, picture dot are of a size of 4.65um*4.65um;
Piezoelectric ceramic actuator (14), formed by DDS signal generator and high pressure amplifying, the DDS signal generator is under the control of main control computer (13), produce the sawtooth voltage signal of 0～5V, this voltage signal is enlarged into the voltage sawtooth signal of 0～240V by high pressure amplifying, exports to laser instrument (1);
Laser instrument (1) adopts single mode sweeping laser device, it is under the control of piezoelectric ceramic actuator (14), output is periodic, frequency continually varying laser, and can excite one by one a plurality of eigenmodes of resonator cavity to be measured (6) in a frequency sweep cycle;
The laser that laser instrument sends passes through the adjusting of spherical reflector (2), two-dimentional parallel flat (3), polaroid (4), 1/2 wave plate (5) successively, incide in the resonator cavity to be measured (6), the laser of resonator cavity to be measured (6) output is divided into two-way through spectroscope (7), the photodetector (10) of leading up to is converted into voltage signal, and is transferred on the main control computer (13) by data collecting card (12); Another road is gathered by CCD camera (9) after total reflective mirror (8) changes direction, is transferred on the main control computer (13) through image pick-up card (11);
Main control computer is provided with control module and image processing module in (13), this control module is driven by USB and interface program forms, USB drives main control computer (13) and communicates by letter with CCD camera (9) with piezoelectric ceramic actuator (14) respectively, the transmission steering order, interface program shows the image of zlasing mode and diaphragm in real time and preserves, processing module is used for image is further cut apart, and by calculating the position of the relative diaphragm of different mode laser beam.
2. measuring system according to claim 1 is characterized in that image pick-up card (11) and data collecting card (12) arrange for parallel, to finish simultaneously the detection to resonator cavity to be measured (6) output two-way laser.
3. an application rights requires the relative position measurement method of 1 described zlasing mode and diaphragm, comprises the steps:
(1) strong and weak according to the light in the environment, in 0～60dB scope, select the yield value of CCD camera, in 1/15s～1/3100s scope, select the time shutter of this CCD camera, image by diaphragm and zlasing mode thereof in this CCD camera calibration resonator cavity to be measured, detect the power of resonator cavity Output of laser to be measured by photodetector, and be transferred to main control computer;
(2) signal of the laser basic mode pattern that collects according to photodetector of main control computer, adjust amplitude and the bias voltage of piezoelectric ceramic actuator output sawtooth signal, adjust position, amplitude and the line width of laser basic mode pattern, make its line width consistent with the time shutter of CCD camera;
(3) trigger voltage that according to system calibrating the CCD camera is set is 0～1V, when the voltage of adjusted laser basic mode pattern reaches this trigger voltage, main control computer sends trigger pip for this CCD camera, this CCD camera begins to gather the image of this zlasing mode and diaphragm, and the image information that gathers is sent to the main control computer storage by image pick-up card;
(4) adopt Gaussian filter to remove picture noise, utilization is based on the image partition method of automatic threshold, be partitioned into respectively resonator diaphragm image and laser basic mode mode image the image after denoising, and these two images are carried out binary conversion treatment, then calculate respectively the centre coordinate of diaphragm image and laser basic mode mode image
Wherein [i, j] is the coordinate of pixel in the image, and n is total line number of pixel in the image, and m is total columns of pixel in the image,
Be the area of image, B[i, j] be the pixel value behind the binary image.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110092728 CN102252690B (en) | 2011-04-14 | 2011-04-14 | Measuring system of relative position of laser mode and aperture and measuring method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110092728 CN102252690B (en) | 2011-04-14 | 2011-04-14 | Measuring system of relative position of laser mode and aperture and measuring method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102252690A CN102252690A (en) | 2011-11-23 |
| CN102252690B true CN102252690B (en) | 2013-03-20 |
Family
ID=44980104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110092728 Expired - Fee Related CN102252690B (en) | 2011-04-14 | 2011-04-14 | Measuring system of relative position of laser mode and aperture and measuring method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102252690B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104713573A (en) * | 2013-12-11 | 2015-06-17 | 中国航空工业第六一八研究所 | Method for measuring diffraction loss of laser gyro |
| CN107482432B (en) * | 2017-08-16 | 2019-06-21 | 中国科学院上海光学精密机械研究所 | Annular multi-pass laser amplification device |
| CN107543682A (en) * | 2017-09-08 | 2018-01-05 | 中国科学院上海技术物理研究所 | A kind of device and method of active suppression optical system for testing shake |
| CN110542433B (en) * | 2019-08-13 | 2023-06-23 | 中国航空工业集团公司西安飞行自动控制研究所 | Non-prior zero-locking inertial navigation system starting process inhibition method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2599317T3 (en) * | 2006-01-19 | 2017-02-01 | Optovue, Inc. | Fourier domain optical coherence tomography imager |
| CN101576373B (en) * | 2009-06-17 | 2010-12-08 | 中国人民解放军总装备部军械技术研究所 | Laser spot collector with low frequency and narrow pulse |
| CN101728753B (en) * | 2009-11-30 | 2011-09-28 | 中国人民解放军国防科学技术大学 | Cavity adjustment system and cavity adjustment method of laser resonant cavity |
-
2011
- 2011-04-14 CN CN 201110092728 patent/CN102252690B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN102252690A (en) | 2011-11-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102360079B (en) | Laser range finder and working method thereof | |
| US7417717B2 (en) | System and method for improving lidar data fidelity using pixel-aligned lidar/electro-optic data | |
| CN103353285B (en) | The multi-light axis consistency pick-up unit of platform photoelectric instrument and detection method thereof | |
| CN102252690B (en) | Measuring system of relative position of laser mode and aperture and measuring method thereof | |
| CN102879110B (en) | Adaptive optical system based on modulation and modulation-free combined pyramid wave-front sensor | |
| CN101813558A (en) | Device for measuring modulation transfer function of optical system and method thereof | |
| CN103018179A (en) | Device and method for near-infrared polarization detection of crop water stress | |
| CN103592756B (en) | A kind of aperture light beam two-dimensional localization tracking and device altogether | |
| CN102818543B (en) | Target free multi-optical axis parallelism detection system based on digital image | |
| CN104568963A (en) | Online three-dimensional detection device based on RGB structured light | |
| CN106092302A (en) | The measurement system of scanning galvanometer vibration parameters and measuring method | |
| CN101153914A (en) | Remote sensing mechanism testing device and method thereof | |
| CN109283184A (en) | A kind of beauty defects measurement method based on spectral confocal sensor | |
| CN112304443A (en) | Hartmann wavefront sensor with variable spatial resolution | |
| CN1769855A (en) | Cavity mirror misalignment monitoring system based on positive-branch confocal unstable resonator and monitoring method thereof | |
| CN103558605B (en) | A kind of EO-1 hyperion Full wave shape laser radar remote sensing system | |
| CN101493325B (en) | Laser mapping system | |
| CN105092054A (en) | Testing evaluation device for pyroelectric non-refrigeration infrared focal plane detector | |
| CN104811244A (en) | Spatial light to single-mode fiber coupling system based on laser nutation | |
| CN102707434B (en) | In-cavity self-adaptive optical beam purification system and method | |
| CN116109540B (en) | Image registration fusion method and system based on particle swarm optimization gray curve matching | |
| CN111045030B (en) | Depth measuring device and method | |
| CN103983341A (en) | High-precision laser speckle micro-vibration measurement system and measurement method | |
| CN102103017A (en) | Novel un-cooled infrared focal plane imaging system | |
| CN102323828B (en) | Sun tracking error computing method of solar power generation tracker and special equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130320 Termination date: 20190414 |