CN102231406A - Quartz boat used in solar energy cell silicon chip production - Google Patents
Quartz boat used in solar energy cell silicon chip production Download PDFInfo
- Publication number
- CN102231406A CN102231406A CN2011101726816A CN201110172681A CN102231406A CN 102231406 A CN102231406 A CN 102231406A CN 2011101726816 A CN2011101726816 A CN 2011101726816A CN 201110172681 A CN201110172681 A CN 201110172681A CN 102231406 A CN102231406 A CN 102231406A
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- quartz
- rod
- silicon chip
- plate
- quartz rod
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention relates to a quartz boat used in solar energy cell silicon chip production. The quartz boat comprises a plurality of quartz bars arranged horizontally, a quartz plate arranged on the quartz rods and a first quartz rod and a second quartz rod which are respectively vertically arranged at the both opposite sides of the quartz plate, wherein both the first quartz rod and the second quartz rod along their length directions are provided with a plurality of grooves used for bearing silicon chip. The quartz plate is provided with jacks and the first quartz rod and the second quartz rod are inserted into the jacks. According to the invention, the quartz rods and the quartz plate are connected in a latch manner, the quartz rods can be directly dismounted when they are damaged; hence the service life of the quartz boat is prolonged and the cost is saved. Meanwhile, the invention is characterized by simple structure.
Description
Technical field
The present invention relates to silicon chip of solar cell and produce used silicon chip loading attachment, particularly a kind of quartz boat that is used for the silicon chip of solar cell diffusion technology.
Background technology
The crystal solar cell is as emerging clean reproducible energy, by application more and more widely.Diffusion technology is very crucial in the silicon chip of solar cell production process, it is exactly in diffusion furnace P type silicon chip to be become the N type in the diffusion rear surface, thereby form the P-N knot, silicon chip just has photovoltaic effect like this, load silicon chip devices yet must use, therefore the silicon chip loading attachment that has adopted quartz to make for material, the quartz boat that promptly is commonly called as.
At present the quartz boat that generally uses is made of the loading attachment of whole quartz boat 4 horizontal pins and 4 vertical bars, wherein 4 horizontal pins are provided with the silicon chip groove, being inserted in this silicon chip groove of silicon chip interval, 4 vertical bars are 4 feets of whole quartz boat, and the lower end of 4 vertical bars and quartz boat base plate sinter molding, latch is yielding and damage behind long term high temperature aborning, has seriously shortened the useful life of quartz boat.
Summary of the invention
Technical problem to be solved by this invention is to overcome the deficiencies in the prior art, and a kind of quartz boat that silicon chip of solar cell is produced that is used for is provided.
For solving the problems of the technologies described above, the present invention adopts following technical scheme:
A kind of quartz boat that is used for silicon chip of solar cell production, first quartz rod and second quartz rod that it comprises horizontally disposed many quartz pushrods, is arranged on the quartz plate on the many quartz pushrods and vertically is arranged on the quartz plate two opposite sides respectively, wherein first quartz rod and second quartz rod are equipped with a plurality of grooves that are used to carry silicon chip along its length direction, and quartz plate is provided with jack, and first quartz rod and second quartz rod are plugged in the jack.
Preferably, first quartz rod, second quartz rod have four respectively, four first quartz rods are corresponding respectively with four second quartz rods, and wherein first quartz rod evenly distributes along a side of quartz plate, and second quartz rod evenly distributes along another opposite side of quartz plate.
Preferably, described a plurality of groove evenly distributes along the length direction of first quartz rod or second quartz rod
Because adopt the enforcement of above technical scheme, the present invention compared with prior art has following advantage:
The present invention adopts that bolt-type is connected between quartz rod and the quartz plate, can directly disassemble after quartz rod damages and replace, and has prolonged the useful life of quartz boat, has saved cost.The present invention simultaneously is simple in structure.
Description of drawings
Below in conjunction with specific embodiment, the present invention will be further described in detail.
Fig. 1 is the local main cross-sectional schematic of the quartz boat according to the present invention;
Fig. 2 is the schematic top plan view of Fig. 1;
Fig. 3 looks schematic diagram for the left side of Fig. 1;
Wherein: 1, quartz pushrod; 2, quartz plate; 20, jack; 3, first quartz rod; 4, second quartz rod; 5, silicon chip; 6, groove.
Embodiment
As shown in Figure 1 to Figure 3, first quartz rod 3 and second quartz rod 4 that quartz boat according to present embodiment comprises horizontally disposed many quartz pushrods 1, is arranged on the quartz plate 2 on the many quartz pushrods 1 and vertically is arranged on quartz plate 2 two opposite sides respectively, wherein first quartz rod 3 and second quartz rod 4 are equipped with a plurality of grooves 6 that are used to carry silicon chip 5 along its length direction, and quartz plate 2 is provided with jack 20, the first quartz rods 3 and second quartz rod 4 is plugged in the jack 20.
Above-mentioned first quartz rod 3, second quartz rod 4 have four respectively, four first quartz rods 3 are corresponding respectively with four second quartz rods 4, wherein first quartz rod 3 evenly distributes along a side of quartz plate 2, second quartz rod 4 evenly distributes along another opposite side of quartz plate 2, and a plurality of groove 6 evenly distributes along the length direction of first quartz rod 3 or second quartz rod 4.
The present invention is with in the groove 6 on silicon chip 5 embedding first quartz rods 3 and second quartz rod 4, make that silicon chip 5 can stable being carried in the groove 6, simultaneously between first quartz rod 3, second quartz rod 4 and quartz plate 2, take bolt-type to be connected, can directly disassemble after quartz rod in first quartz rod 3, second quartz rod 4 damages and replace, prolong the useful life of quartz boat, saved cost.
More than the present invention has been done detailed description; its purpose is to allow the personage that is familiar with this art can understand content of the present invention and is implemented; can not limit protection scope of the present invention with this; all equivalences of doing according to spirit of the present invention change or modify, and all should be encompassed in protection scope of the present invention.
Claims (4)
1. one kind is used for the quartz boat that silicon chip of solar cell is produced, described quartz boat comprises horizontally disposed many quartz pushrods (1), first quartz rod (3) and second quartz rod (4) that are arranged on the quartz plate (2) on the described many quartz pushrods (1) and vertically are arranged on described quartz plate (2) two opposite sides respectively, described first quartz rod (3) and second quartz rod (4) are equipped with a plurality of grooves (6) that are used to carry silicon chip (5) along its length direction, it is characterized in that: described quartz plate (2) is provided with jack (20), and described first quartz rod (3) and second quartz rod (4) are plugged in the described jack (20).
2. according to the described quartz boat that is used for silicon chip of solar cell production of claim 1, it is characterized in that: described first quartz rod (3), second quartz rod (4) have four respectively, and four described first quartz rods (3) are corresponding respectively with four described second quartz rods (4).
3. according to claim 1 or the 2 described quartz boats that are used for silicon chip of solar cell production, it is characterized in that: described many first quartz rods (3) evenly distribute along a side of described quartz plate (2), and described many second quartz rods (4) evenly distribute along another opposite side of described quartz plate (2).
4. according to claim 1 or the 2 described quartz boats that are used for silicon chip of solar cell production, it is characterized in that: described a plurality of grooves (6) evenly distribute along the length direction of described first quartz rod (3) or second quartz rod (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101726816A CN102231406A (en) | 2011-06-24 | 2011-06-24 | Quartz boat used in solar energy cell silicon chip production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101726816A CN102231406A (en) | 2011-06-24 | 2011-06-24 | Quartz boat used in solar energy cell silicon chip production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102231406A true CN102231406A (en) | 2011-11-02 |
Family
ID=44843959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101726816A Pending CN102231406A (en) | 2011-06-24 | 2011-06-24 | Quartz boat used in solar energy cell silicon chip production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102231406A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110042473A (en) * | 2019-03-20 | 2019-07-23 | 常州大学 | A kind of quartz boat device for improving diffusion uniformity and promoting production capacity |
| WO2019196538A1 (en) * | 2018-04-09 | 2019-10-17 | 深圳市捷佳伟创新能源装备股份有限公司 | Pevcd horizontal graphite boat structure |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03159233A (en) * | 1989-11-17 | 1991-07-09 | Tokyo Electron Ltd | Heat-treating furnace device |
| CN1090344A (en) * | 1992-12-03 | 1994-08-03 | 圣戈本/诺顿工业搪瓷有限公司 | Vertical boat frame and wafer supports |
| EP0884769A1 (en) * | 1996-02-29 | 1998-12-16 | Tokyo Electron Limited | Heat-treating boat for semiconductor wafer |
| CN201556614U (en) * | 2009-12-16 | 2010-08-18 | 北京凯德石英塑料制品有限公司 | Vertical quartz boat |
| CN201788959U (en) * | 2010-09-08 | 2011-04-06 | 绿华能源科技（杭州）有限公司 | Diffusing quartz boat used for manufacturing silicon wafers |
-
2011
- 2011-06-24 CN CN2011101726816A patent/CN102231406A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03159233A (en) * | 1989-11-17 | 1991-07-09 | Tokyo Electron Ltd | Heat-treating furnace device |
| CN1090344A (en) * | 1992-12-03 | 1994-08-03 | 圣戈本/诺顿工业搪瓷有限公司 | Vertical boat frame and wafer supports |
| EP0884769A1 (en) * | 1996-02-29 | 1998-12-16 | Tokyo Electron Limited | Heat-treating boat for semiconductor wafer |
| CN201556614U (en) * | 2009-12-16 | 2010-08-18 | 北京凯德石英塑料制品有限公司 | Vertical quartz boat |
| CN201788959U (en) * | 2010-09-08 | 2011-04-06 | 绿华能源科技（杭州）有限公司 | Diffusing quartz boat used for manufacturing silicon wafers |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019196538A1 (en) * | 2018-04-09 | 2019-10-17 | 深圳市捷佳伟创新能源装备股份有限公司 | Pevcd horizontal graphite boat structure |
| CN110042473A (en) * | 2019-03-20 | 2019-07-23 | 常州大学 | A kind of quartz boat device for improving diffusion uniformity and promoting production capacity |
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Application publication date: 20111102 |