CN203026490U - Wafer boat - Google Patents
Wafer boat Download PDFInfo
- Publication number
- CN203026490U CN203026490U CN 201220748836 CN201220748836U CN203026490U CN 203026490 U CN203026490 U CN 203026490U CN 201220748836 CN201220748836 CN 201220748836 CN 201220748836 U CN201220748836 U CN 201220748836U CN 203026490 U CN203026490 U CN 203026490U
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- China
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- supporting
- support bars
- brilliant boat
- supporting plate
- utility
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Abstract
The utility model discloses a wafer boat. The wafer boat comprises a plurality of supporting rods and two end plates, wherein a plurality of the supporting rods are arranged in parallel and are distributed on the same circumference; two ends of the plurality of supporting rods are respectively connected through the two end plates; the inner sides of the plurality of supporting rods are correspondingly provided with supporting plates for supporting wafers; and supporting faces of the supporting plates are inclined downward. According to the wafer boat disclosed by the utility model, the supporting faces of the supporting plates are inclined downward, so that the original face contact between the wafers and the supporting plates is changed into point-line contact, the contact area between the wafers and the supporting plates can be reduced and the generation of grain substances is further reduced. Furthermore, existing four supporting rods are changed into three supporting rods and the three supporting plates are used for supporting the wafers; one plane is defined by three points so that the wafers can be more stably supported and the possibility of vibrating the wafers is further reduced; and therefore, the generation of the grain substances is reduced and the yield of products is improved.
Description
Technical field
The utility model relates to field of semiconductor manufacture, relates in particular to a kind of brilliant boat.
Background technology
In semiconductor fabrication process, usually use brilliant boat to load wafer and carry out technological reaction.See also Fig. 1 and Fig. 2, existing brilliant boat generally includes four support bars 11 and two end plates, described four support bars 11 be arranged in parallel and are distributed on same circumference, the two ends of described four support bars 11 connect by described two end plates respectively, the inboard correspondence of described four support bars 11 is provided with the supporting plate 13 for supporting wafer 10, and the upper surface of described supporting plate 13 is horizontally disposed with.Each wafer 10 supports by the supporting plate 13 of four correspondences.
Yet, on the one hand, because supporting plate 13 itself is difficult to guarantee flatness completely; On the other hand, in some high temperature process, gate oxide technique (GOX for example, be Gate oxide process) in, due to temperature higher (800 ~ 1000 degrees centigrade), the brilliant easy Yin Gaowen of boat and being out of shape, making in the supporting plate 13 of four correspondences has a supporting plate 13 unsettled, do not have supporting role, cause wafer 10 because steadily with this unsettled supporting plate 13, the vibrations friction not occuring, thereby produce a large amount of particulate matters (particle), these particulate matters easily descend slowly and lightly to wafer 10, finally cause product yield to reduce.
Therefore, how to provide a kind of steadily supporting wafer, reduce that particulate matter produces brilliant boat be the technical problem that those skilled in the art need to be resolved hurrily.
The utility model content
The purpose of this utility model is to provide a kind of brilliant boat, steady supporting wafer, and can reduce the contact area of wafer and supporting plate, produce thereby reduce particulate matter.
To achieve the above object, the utility model adopts following technical scheme:
A kind of brilliant boat, comprise some support bars and two end plates, described some support bars be arranged in parallel and are distributed on same circumference, the two ends of described some support bars connect by described two end plates respectively, the inboard correspondence of described some support bars is provided with the supporting plate for supporting wafer, and the supporting surface of described supporting plate is downward-sloping.
Preferably, in above-mentioned brilliant boat, downward-sloping 2 ~ 3 degree of the supporting surface of described supporting plate.
Preferably, in above-mentioned brilliant boat, downward-sloping 2.5 degree of the supporting surface of described supporting plate.
Preferably, in above-mentioned brilliant boat, the quantity of described some support bars is three.
Preferably, in above-mentioned brilliant boat, two support bars in described some support bars are positioned at the two ends of described circumference, and another root support bar equates with the distance of described two support bars respectively.
Preferably, in above-mentioned brilliant boat, described support bar and two end plates are quartzy material.
The brilliant boat that the utility model provides by the supporting surface of described supporting plate is downward-sloping, can touch the area between original wafer and supporting plate and make the dotted line contact into, thereby reduce the contact area between wafer and supporting plate, and then reduce the particulate matter generation.In addition, by making existing four support bars into three support bars, adopt three blocks of supporting plates that wafer is supported, due to 3 definite planes, thereby can be so that wafer obtains supporting more stably, further reduce the possibility that vibrations occur wafer, produce thereby reduce particulate matter, improve product yield.
Description of drawings
Brilliant boat of the present utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of the support bar of existing brilliant boat;
Fig. 2 is the structural representation that existing four blocks of supporting plates support a wafer;
Fig. 3 is the structural representation of the brilliant boat of the utility model one embodiment;
Fig. 4 is the structural representation of support bar of the brilliant boat of the utility model one embodiment;
Fig. 5 is the structural representation of three supporting plate supporting wafer of the utility model one embodiment.
In figure, 10, the 20-wafer, 11, the 21-support bar, 12, the 22-end plate, 13, the 23-supporting plate.
Embodiment
Below will be described in further detail brilliant boat of the present utility model.
Below with reference to accompanying drawings the utility model is described in more detail, has wherein represented preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here and still realize the beneficial effects of the utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.
For the purpose of this utility model, feature are become apparent, below in conjunction with accompanying drawing, embodiment of the present utility model is further described.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.
See also Fig. 3 to Fig. 5, wherein, shown in Figure 3 is the structural representation of the brilliant boat of the utility model one embodiment; Shown in Figure 4 is the structural representation of support bar of the brilliant boat of the utility model one embodiment; Shown in Figure 5 is the structural representation of three supporting plate supporting wafer of the utility model one embodiment.
The brilliant boat that the present embodiment provides, comprise some support bars 21 and two end plates 22, described some support bars 21 be arranged in parallel and are distributed on same circumference, the two ends of described some support bars 21 connect by described two end plates 22 respectively, the inboard correspondence of described some support bars 21 is provided with the supporting plate 23 for supporting wafer 20, and the supporting surface of described supporting plate 23 is downward-sloping.By the supporting surface of described supporting plate 23 is downward-sloping, the area between original wafer 20 and supporting plate 23 can be touched and make the dotted line contact into, thereby reduce the contact area between wafer 20 and supporting plate 23, and then reduce the particulate matter generation.
Further, in above-mentioned brilliant boat, downward-sloping 2 ~ 3 degree of the supporting surface of described supporting plate 23.In the present embodiment, downward-sloping 2.5 degree of the supporting surface of described supporting plate 23.
Preferably, in above-mentioned brilliant boat, the quantity of described some support bars 21 is three.Concrete, in above-mentioned brilliant boat, two support bars 21 in described some support bars 21 are positioned at the two ends of described circumference, and another root support bar 21 equates with the distance of described two support bars 21 respectively.Adopt 23 pairs of wafers 20 of three blocks of supporting plates to support, due to 3 definite planes, thereby can further reduce the possibility that vibrations occur wafer 20 so that wafer 20 obtains supporting more stably, produce the raising product yield thereby reduce particulate matter.
Preferably, in above-mentioned brilliant boat, described support bar 21 and two end plates 22 are quartzy material.The brilliant boat that is formed by support bar 21 and the end plate 22 of quartzy material, except hydrofluoric acid and the hot phosphoric acid more than 300 degree, at high temperature, the erosions such as its ability sulfuric acid, nitric acid, hydrochloric acid, chloroazotic acid, neutral salt, carbon and sulphur, it learns stable 30 times of being equivalent to acid-proof ceramics, is equivalent to nichrome and pottery 150 times, and it is high temperature resistant, resistance to thermal shock, thermal coefficient of expansion is especially little.
The brilliant boat that the utility model provides by the supporting surface of described supporting plate is downward-sloping, can touch the area between existing wafer and supporting plate and make the dotted line contact into, thereby reduce the contact area between wafer and supporting plate, and then reduce the particulate matter generation.In addition, by making existing four support bars into three support bars, adopt three blocks of supporting plates that wafer is supported, due to 3 definite planes, thereby can be so that wafer obtains supporting more stably, further reduce the possibility that vibrations occur wafer, produce thereby reduce particulate matter, improve product yield.
Obviously, those skilled in the art can carry out various changes and modification and not break away from spirit and scope of the present utility model the utility model.Like this, if within of the present utility model these are revised and modification belongs to the scope of the utility model claim and equivalent technologies thereof, the utility model also is intended to comprise these changes and modification interior.
Claims (6)
1. brilliant boat, it is characterized in that, comprise some support bars and two end plates, described some support bars be arranged in parallel and are distributed on same circumference, the two ends of described some support bars connect by described two end plates respectively, the inboard correspondence of described some support bars is provided with the supporting plate for supporting wafer, and the supporting surface of described supporting plate is downward-sloping.
2. brilliant boat according to claim 1, downward-sloping 2 ~ 3 degree of the supporting surface of described supporting plate.
3. brilliant boat according to claim 2, downward-sloping 2.5 degree of the supporting surface of described supporting plate.
4. brilliant boat according to claim 1, is characterized in that, the quantity of described support bar is three.
5. brilliant boat according to claim 4, is characterized in that, two support bars in described some support bars are positioned at the two ends of described circumference, and another root support bar equates with the distance of described two support bars respectively.
6. the described brilliant boat of any one according to claim 1 ~ 5, is characterized in that, described support bar and two end plates are quartzy material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220748836 CN203026490U (en) | 2012-12-31 | 2012-12-31 | Wafer boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220748836 CN203026490U (en) | 2012-12-31 | 2012-12-31 | Wafer boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203026490U true CN203026490U (en) | 2013-06-26 |
Family
ID=48650451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220748836 Expired - Fee Related CN203026490U (en) | 2012-12-31 | 2012-12-31 | Wafer boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203026490U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114454940A (en) * | 2022-02-23 | 2022-05-10 | 上海利扬创芯片测试有限公司 | Transport vehicle for reducing transport risk after chip conversion to wafer boat |
-
2012
- 2012-12-31 CN CN 201220748836 patent/CN203026490U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114454940A (en) * | 2022-02-23 | 2022-05-10 | 上海利扬创芯片测试有限公司 | Transport vehicle for reducing transport risk after chip conversion to wafer boat |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130626 Termination date: 20181231 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |