CN204179069U - Quartz boat - Google Patents

Quartz boat Download PDF

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Publication number
CN204179069U
CN204179069U CN201420489217.9U CN201420489217U CN204179069U CN 204179069 U CN204179069 U CN 204179069U CN 201420489217 U CN201420489217 U CN 201420489217U CN 204179069 U CN204179069 U CN 204179069U
Authority
CN
China
Prior art keywords
quartz boat
quartz
column
groove
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201420489217.9U
Other languages
Chinese (zh)
Inventor
梁杭伟
钱大富
廖辉
叶雄新
孙小菩
彭华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CSG Holding Co Ltd
CSG Pvtech Co Ltd
Original Assignee
CSG Holding Co Ltd
CSG Pvtech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CSG Holding Co Ltd, CSG Pvtech Co Ltd filed Critical CSG Holding Co Ltd
Priority to CN201420489217.9U priority Critical patent/CN204179069U/en
Application granted granted Critical
Publication of CN204179069U publication Critical patent/CN204179069U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of quartz boat, for carrying silicon chip, comprising: supporting leg, be fixed on the quartzy framework on described supporting leg and the first quartz column be arranged on described quartzy framework and the second quartz column; Described first quartz column is provided with 180 parallel to each other and equidistant the first quartz boat grooves, described second quartz column is provided with 180 parallel to each other and equidistant the second quartz boat grooves, described first quartz boat groove and described second quartz boat groove correspondence are arranged, and described silicon chip is carried on described quartz boat by described first quartz boat groove and described second quartz boat groove.This quartz boat passes through 180 the first quartz boat grooves and 180 second quartz boat grooves of corresponding setting, completes the carrying of silicon chip.Relative to the quartz boat of 100 traditional grooves, the silicon chip increasing number that this quartz boat single diffusing procedure can complete, under the condition not increasing time and power consumption, promotes 80% by production capacity, can reduce power consumption.

Description

Quartz boat
Technical field
The utility model relates to solar cell and manufactures field, particularly relates to the quartz boat that a kind of diffusing procedure uses.
Background technology
In solar battery sheet manufacture field, diffusing procedure adopts high temperature to diffuse in silicon chip by foreign atom for a long time, and overall power consumption is higher.
The quartz boat groove number that traditional diffusing procedure uses is 100 grooves, and because quartz boat groove number is less, the silicon chip quantity that single diffusing procedure can complete is corresponding less, and diffusing procedure power consumption is higher.
Utility model content
Based on this, be necessary the quartz boat providing a kind of diffusing procedure that can reduce power consumption to use.
A kind of quartz boat, for carrying silicon chip, comprising: supporting leg, be fixed on the quartzy framework on described supporting leg and the first quartz column be arranged on described quartzy framework and the second quartz column;
Described first quartz column is arranged along the length direction of described quartz boat, and described first quartz column is parallel with described second quartz column;
Described first quartz column is provided with 180 parallel to each other and equidistant the first quartz boat grooves, described second quartz column is provided with 180 parallel to each other and equidistant the second quartz boat grooves, described first quartz boat groove and described second quartz boat groove correspondence are arranged, and described silicon chip is carried on described quartz boat by described first quartz boat groove and described second quartz boat groove.
In one embodiment, the length of described first quartz boat groove is identical with the width of described first quartz column, and the length of described second quartz boat groove is 1:2 ~ 4 with the ratio of the width of described second quartz column.
In one embodiment, the angle of the length direction of described first quartz boat groove and the length direction of described first quartz column is 75 ° ~ 85 °.
In one embodiment, the spacing of adjacent two described first quartz boat grooves is 2.33mm ~ 2.43mm.
In one embodiment, the width of each described first quartz boat groove is 0.3mm ~ 0.7mm.
This quartz boat passes through 180 the first quartz boat grooves and 180 second quartz boat grooves of corresponding setting, thus completes the carrying of silicon chip.Relative to the quartz boat of 100 traditional grooves, the silicon chip increasing number that this quartz boat single diffusing procedure can complete, under the condition not increasing time and power consumption, promotes 80% by production capacity, can reduce power consumption.
Accompanying drawing explanation
Fig. 1 is the structural representation of the quartz boat of an execution mode.
Embodiment
For enabling above-mentioned purpose of the present utility model, feature and advantage become apparent more, are described in detail embodiment of the present utility model below in conjunction with accompanying drawing.Set forth a lot of detail in the following description so that fully understand the utility model.But the utility model can be much different from alternate manner described here to implement, those skilled in the art can when doing similar improvement without prejudice to when the utility model intension, and therefore the utility model is by the restriction of following public concrete enforcement.
The quartz boat of an execution mode as shown in Figure 1, for carrying silicon chip, comprising: supporting leg 10, be fixed on the quartzy framework 20 on supporting leg 10 and be arranged on the first quartz column 30 and the second quartz column 40 on quartzy framework 20.
First quartz column 30 is arranged along the length direction of quartz boat, and the first quartz column 30 is parallel with the second quartz column 40.
First quartz column 30 is provided with and 180 parallel to each other and equidistant the first quartz boat groove 32, second quartz columns 40 is provided with 180 parallel to each other and equidistant the second quartz boat grooves 42.
180 the first quartz boat grooves 32 and 180 the second quartz boat groove 42 correspondences are arranged, and silicon chip is carried on quartz boat by the first quartz boat groove 32 and the second quartz boat groove 42.
In present embodiment, the length of the first quartz boat groove 32 is identical with the width of the first quartz column 30, and the length of the second quartz boat groove 42 is 1:3 with the ratio of the width of the second quartz column 42.
In other examples, the length of the second quartz boat groove 42 can be 1:2 ~ 4 with the ratio of the width of the second quartz column 42.
The angle of the length direction of the first quartz boat groove 32 and the length direction of the first quartz column 30 is 75 ° ~ 85 °.
In present embodiment, the spacing of two adjacent the first quartz boat grooves 32 is 2.33mm ~ 2.43mm.Corresponding, the spacing of two adjacent the second quartz boat grooves 42 is 2.33mm ~ 2.43mm.
In present embodiment, the width of each first quartz boat groove 32 is 0.3mm ~ 0.7mm.Corresponding, the width of each second quartz boat groove 42 is 0.3mm ~ 0.7mm.
By the width of the spacing and each first quartz boat groove 32 that shorten two adjacent the first quartz boat grooves 32, improve the quantity of the first quartz boat groove 32.
In this quartz boat, 180 the first quartz boat grooves 32 and 180 the second quartz boat groove 42 correspondences are arranged, thus complete the carrying of silicon chip.Relative to the quartz boat of 100 traditional grooves, the silicon chip increasing number that this quartz boat single diffusing procedure can complete, under the condition not increasing time and power consumption, promotes 80% by production capacity, can reduce power consumption.
The above embodiment only have expressed several execution mode of the present utility model, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the utility model the scope of the claims.It should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise utility, can also make some distortion and improvement, these all belong to protection range of the present utility model.Therefore, the protection range of the utility model patent should be as the criterion with claims.

Claims (5)

1. a quartz boat, for carrying silicon chip, is characterized in that, comprising: supporting leg, be fixed on the quartzy framework on described supporting leg and the first quartz column be arranged on described quartzy framework and the second quartz column;
Described first quartz column is arranged along the length direction of described quartz boat, and described first quartz column is parallel with described second quartz column;
Described first quartz column is provided with 180 parallel to each other and equidistant the first quartz boat grooves, described second quartz column is provided with 180 parallel to each other and equidistant the second quartz boat grooves, described first quartz boat groove and described second quartz boat groove correspondence are arranged, and described silicon chip is carried on described quartz boat by described first quartz boat groove and described second quartz boat groove.
2. quartz boat according to claim 1, is characterized in that, the length of described first quartz boat groove is identical with the width of described first quartz column, and the length of described second quartz boat groove is 1:2 ~ 4 with the ratio of the width of described second quartz column.
3. quartz boat according to claim 1, is characterized in that, the angle of the length direction of described first quartz boat groove and the length direction of described first quartz column is 75 ° ~ 85 °.
4. quartz boat according to claim 1, is characterized in that, the spacing of adjacent two described first quartz boat grooves is 2.33mm ~ 2.43mm.
5. quartz boat according to claim 1, is characterized in that, the width of each described first quartz boat groove is 0.3mm ~ 0.7mm.
CN201420489217.9U 2014-08-27 2014-08-27 Quartz boat Expired - Fee Related CN204179069U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420489217.9U CN204179069U (en) 2014-08-27 2014-08-27 Quartz boat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420489217.9U CN204179069U (en) 2014-08-27 2014-08-27 Quartz boat

Publications (1)

Publication Number Publication Date
CN204179069U true CN204179069U (en) 2015-02-25

Family

ID=52567856

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420489217.9U Expired - Fee Related CN204179069U (en) 2014-08-27 2014-08-27 Quartz boat

Country Status (1)

Country Link
CN (1) CN204179069U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110364465A (en) * 2019-07-21 2019-10-22 常州时创能源科技有限公司 Quartz boat is used in a kind of carrying of silicon wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110364465A (en) * 2019-07-21 2019-10-22 常州时创能源科技有限公司 Quartz boat is used in a kind of carrying of silicon wafer
CN110364465B (en) * 2019-07-21 2023-08-29 常州时创能源股份有限公司 Quartz boat for bearing silicon wafer

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150225

Termination date: 20200827

CF01 Termination of patent right due to non-payment of annual fee