CN102220980A - Dry vacuum pump apparatus and method of cooling the same - Google Patents
Dry vacuum pump apparatus and method of cooling the same Download PDFInfo
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- CN102220980A CN102220980A CN2011101213834A CN201110121383A CN102220980A CN 102220980 A CN102220980 A CN 102220980A CN 2011101213834 A CN2011101213834 A CN 2011101213834A CN 201110121383 A CN201110121383 A CN 201110121383A CN 102220980 A CN102220980 A CN 102220980A
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- dry vacuum
- pump
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- electrical equipment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/007—General arrangements of parts; Frames and supporting elements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
- F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
- F04C29/025—Lubrication; Lubricant separation using a lubricant pump
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
- F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
- F04C29/047—Cooling of electronic devices installed inside the pump housing, e.g. inverters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/06—Silencing
- F04C29/068—Silencing the silencing means being arranged inside the pump housing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/30—Casings or housings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
- F04C2240/403—Electric motor with inverter for speed control
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Compressor (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
A dry vacuum pump apparatus is small in size as it includes a highly efficient cooling unit for cooling, with a coolant such as cooling water, large-current circuit components of high self-heating value, typically switching devices of an inverter. The dry vacuum pump apparatus includes a dry vacuum pump including a pump unit and a motor for actuating the pump unit, an inverter for converting AC power from an AC power supply into AC power having a predetermined frequency and supplying the AC power to the motor, an electric equipment enclosure accommodating therein a control electronic circuit assembly including the inverter, a pump enclosure accommodating therein the dry vacuum pump and an operation monitoring sensor of the dry vacuum pump, a liquid-cooled partition interposed between the electric equipment enclosure and the pump enclosure, and having a coolant circulating therein, and an external enclosure housing therein the electric equipment enclosure, the pump enclosure, and the liquid-cooled partition as an integral structure.
Description
Technical field
The present invention relates to a kind of dry vacuum pumping unit, and relate to a kind of method of cooling off the dry vacuum pumping unit, and relate more specifically to a kind of compact in size and have the dry vacuum pumping unit of high efficiency cooling structure, and relate to the method for cooling off this dry vacuum pumping unit particularly.
Background technique
In recent years, can obtain the vacuum environment that cleans easily being lower than the dry vacuum pump of operating under the atmospheric pressure, and this equipment has used in comprising the extensive use occasion of semiconductor manufacturing facility.The dry vacuum pumping unit has by motor-driven pump unit.Owing to multiple reason, be used for electric power provide to motor with the power supply means of the pump unit that drives this dry vacuum pumping unit usually in conjunction with or include frequency variator (inverter).One of them is former because this frequency variator can make the power frequency that is supplied to motor be higher than mains frequency, thereby increases rotating speed of motor to obtain higher vacuum pump exhaust capacity.Dry vacuum pumping unit by Frequency Converter Control can use less motor can obtain required degree of vacuum.
According to Another reason, when the degree of vacuum that makes that by operated vacuum pumps equipment chamber or similar spaces have been evacuated to be needed, and when this vaccum pump unit begins to turn round under very little load, for operating electrical machines expeditiously, frequency variator makes and easily its output end voltage and motor speed is controlled.
Frequency variator in conjunction with or include and be positioned at its inner semiconductor switch device, and export output voltage with such frequency by exchanging (AC)/direct current (DC)/interchanges (AC) converter unit, this frequency is different with the frequency of input voltage that puts on this frequency variator.This frequency variator need combine with suitable cooling equipment, and wherein cooling is used to change the semiconductor switch device of frequency, because this semiconductor switch device can be heated by its internal loss.
Traditional dry vacuum pumping unit is combined with the power supply means that comprises frequency variator, and has air cooling structure, and it uses natural air circulation or forced-air circulation to cool off the semiconductor switch device of this frequency variator.A kind of like this water-cooling structure of same proposition, the mode than the cooling tube of lower part of its fixing part by making the electric machine casing of circulate coolant by being installed in dry vacuum pump, come dry vacuum pump is cooled off, thereby the substrate in the dry vacuum pump can be cooled off effectively (referring to Japanese publication document: JP2003-269369).
In vacuum pump, the pump motor and the pump casing that include air cooling structure need have very large cooled region.Therefore, some vacuum pumps have water-cooled pump motor and the water-cooled pump case (referring to PC (WO) 2006-520873 and Japanese publication document JP 8-21392) that includes the circulate coolant structure.
Summary of the invention
It is bigger to use natural air circulation or forced-air circulation to cool off the inevitable size of cooling structure of semiconductor switch device (switching device) of frequency variator, because its cooling effectiveness is low, thereby and makes and himself become an obstacle of the overall dimensions that reduces the dry vacuum pumping unit.And water-cooling structure only cools off the part of dry vacuum pump, can not cool off the dry vacuum pump equipment integral effectively.
The present invention proposes in view of said circumstances.Therefore, one object of the present invention is for providing a kind of dry vacuum pumping unit, it comprises: frequency variator, be used for Ac is offered motor with the driven pump unit, and cooling structure efficiently, its use the spontaneous calorific value of coolant cools of cooling water for example high, the large-current electric circuit unit of the switching device of this frequency variator for example, thereby the size of this dry vacuum pumping unit is reduced; Another object of the present invention provides a kind of method of cooling off this dry vacuum pumping unit.
To achieve these goals, the invention provides a kind of dry vacuum pumping unit, comprising: dry vacuum pump comprises pump unit and the motor that is used to drive this pump unit; Frequency variator, the Ac that is used for coming from ac power supply is converted to the Ac with preset frequency, and this Ac is offered motor; Electrical equipment shell, portion is holding the control circuit assembly that comprises this frequency variator within it; Pump case, portion is holding the operation monitoring sensor of this dry vacuum pump and this dry vacuum pump within it; The liquid cooling divider be arranged between this electrical equipment shell and this pump case, and portion has coolant circulating within it; And shell, portion holds this electrical equipment shell, this pump case and this liquid cooling divider as integrative-structure within it.
Of the present invention one preferred aspect, this shell is included in its inner coolant channel that limits, be used for freezing mixture is supplied with this liquid cooling divider earlier, be supplied to motor from this freezing mixture divider then, and then be supplied to this pump unit, with adjoining land this liquid cooling divider, this motor and this pump unit are cooled off.
Of the present invention one preferred aspect, this control circuit assembly comprises the electric component that produces heat, this electric component comprises the switching device of this frequency variator, and this liquid cooling divider is provided for cooling off the cooling structure of this electric component.
Of the present invention one preferred aspect, this liquid cooling divider is not retained as and directly contacts with the pump unit of this dry vacuum pump, and is fixed on the framework that extends from the outer wall of pump unit.
Because above-mentioned setting, within it portion holding the electrical equipment shell of the control circuit assembly that comprises this frequency variator, within it portion holding this dry vacuum pump and this dry vacuum pump the operation monitoring sensor pump case and be arranged on this electrical equipment shell and this pump case between and make freezing mixture portion's circuit liquid cooling divider within it, be to be accommodated in this shell as integrative-structure.Coolant circulating absorbs the heat that the control circuit assembly in the electrical equipment shell produces effectively in this liquid cooling divider, thereby and the control circuit assembly in the electrical equipment shell cooled off efficiently.Thereby this dry vacuum pumping unit can have little cooling structure, thus and himself size decreases.
Be limited to its inside when shell has, be used for coolant channel freezing mixture elder generation this liquid cooling divider of supply, be supplied to motor from this freezing mixture divider then, and then be supplied to this pump unit, when this liquid cooling divider, this motor and this pump unit being cooled off with adjoining land, the control circuit assembly that comprises this frequency variator agent cooling that can be cooled earlier, this motor and this pump unit can be by this freezing mixture adjoining land coolings then.This makes the size of dry vacuum pumping unit to reduce, and can cool off as a whole.
Being used to cool off the cooling structure of the electric component (it comprises the switching device that is accommodated in the frequency variator in the electrical equipment shell) that produces heat, is can the liquid cooling divider of portion's coolant circulating provides by having within it.Thereby this electric component can effectively cool off by the coolant circulating in this liquid cooling divider.
The liquid cooling divider can not be retained as and directly contact with the pump unit of this vacuum pump, and can be fixed on the framework that extends from the outer wall of pump unit.This makes the heat that absorbs from the pump unit is minimized, and the sediments on the pump unit inner wall surface of minimizing dry vacuum pump.
The present invention also provides a kind of dry vacuum pumping unit, comprising: dry vacuum pump comprises pump unit and the motor that is used for the driven pump unit; Frequency variator, the Ac that is used for coming from ac power supply is converted to the Ac with preset frequency, and this Ac is offered motor; First electrical equipment shell, portion is holding the described frequency variator as the high-current circuit that produces heat within it; Second electrical equipment shell, portion is holding control circuit within it, and this control circuit comprises the CPU that is used for on-stream this dry vacuum pump of control; Shell, portion is holding this first electrical equipment shell and this second electrical equipment shell as integrative-structure within it; Cooling unit uses this first electrical equipment shell of coolant cools; And the air cooling structure, use natural air circulation or forced-air circulation to cool off this second electrical equipment shell.
Of the present invention one preferred aspect, this dry vacuum pump comprises gear unit, and this cooling unit comprise use cooling water as freezing mixture, be used for cooling off the motor of this dry vacuum pump or the cooling unit of gear unit.
The present invention also provides a kind of method of cooling off the dry vacuum pumping unit, and this dry vacuum pumping unit comprises: dry vacuum pump comprises pump unit and the motor that is used for this driven pump unit; Frequency variator, the Ac that is used for coming from ac power supply is converted to the Ac with preset frequency, and this Ac is offered motor; First electrical equipment shell, portion is holding as described frequency variator high spontaneous calorific value, that produce the high-current circuit of heat within it; Second electrical equipment shell, portion is holding control circuit within it, and this control circuit comprises the CPU that is used for on-stream this dry vacuum pump of control; And shell, portion is holding this first electrical equipment shell and this second electrical equipment shell as integrative-structure within it; This method comprises: use freezing mixture that this first electrical equipment is cooled off, and use natural air circulation or forced-air circulation that this second electrical equipment shell is cooled off.
Since within it portion to hold as first electrical equipment shell from the frequency variator of heat value high-current circuit high, that produce heat be to cool off efficiently by the cooling unit that uses freezing mixture, therefore the dry vacuum pumping unit can have little cooling structure, thus and self size decreases.
Description of drawings
Accompanying drawing 1 is the sketch according to the system layout of dry vacuum pumping unit of the present invention;
Accompanying drawing 2 is the schematic representation according to the structure setting of the dry vacuum pumping unit of an embodiment of the invention;
Accompanying drawing 3A is the side view of cooling structure, and it is used for cooling off electric component and electronic device in the electrical equipment shell that is contained in the dry vacuum pumping unit;
Accompanying drawing 3B is the plan view of accompanying drawing 3A;
Accompanying drawing 4 is the schematic representation according to the structure setting of the dry vacuum pumping unit of another embodiment of the present invention;
Accompanying drawing 5 is the schematic representation according to the structural setting of the dry vacuum pumping unit of another embodiment of the invention; And
Accompanying drawing 6 is the schematic representation according to the structural setting of the dry vacuum pumping unit of another other mode of execution of the present invention.
Embodiment
Describe preferred implementation of the present invention in detail below with reference to accompanying drawing.In the accompanying drawing below, use identical or corresponding fixed reference feature to represent identical or corresponding part, and, avoid as far as possible they are carried out unnecessary description for briefly.
Accompanying drawing 1 is the sketch according to the system layout of dry vacuum pumping unit of the present invention.As shown in Figure 1, the dry vacuum pumping unit comprises: power supply 10, it has rectifier (rectifier) 13, has direct current (DC) circuit 15 of filter capacitor (smoothing capacitor) 14, direct current (DC)/direct current (DC) conversion circuit 16 and frequency variator (inverter) 17; Dry vacuum pump 12, it has motor 12a and pump unit 12b; And control circuit 18.Power supply 10 and control circuit 18 also can be described as the control circuit assembly.Rectifier 13 is connected with ac power supply 19.Ac power supply 19 offers rectifier 13 with Ac, and this rectifier 13 is converted to direct current with Ac.Under the control of control circuit 18, the direct current that direct current (DC)/direct current (DC) conversion circuit 16 will come from rectifier 13 is converted to the direct current with predetermined voltage that is supplied to frequency variator 17.Under the control of control circuit 18, frequency variator 17 will be converted to the Ac with preset frequency of the motor 12a that is supplied to vacuum pump 12 by direct current (DC)/direct current that direct current (DC) conversion circuit 16 provides.Starting electrical machinery 12a is with driven pump unit 12b, thus operated vacuum pumps 12.
In dry vacuum pumping unit with said system configuration, when operated vacuum pumps 12, the filter capacitor 14 of the rectifying device of rectifier 13, DC circuit 15, direct current (the DC)/switching device of direct current (DC) conversion circuit 16 and the switching device of frequency variator 17 produce heat, because their output powers or power come starting electrical machinery 12a.The motor 12a of vacuum pump 12 and pump unit 12b also produce heat.Dry vacuum pumping unit according to the present invention includes small-sized cooling structure or the undersized cooling structure that is used for effectively absorbing by above-mentioned switching device and the electric component of dry vacuum pumping unit and heat that electronic device produces, thereby the dry vacuum pumping unit is cooled off.It is small-sized or undersized that the dry vacuum pumping unit that includes this small-sized cooling structure is similarly.
Accompanying drawing 2 is the schematic representation according to the structural configuration of the dry vacuum pumping unit 20 of one embodiment of the present invention.As shown in Figure 2, dry vacuum pumping unit 20 comprise electrical equipment shell 21, pump casing 22 and place electrical equipment shell 21 and pump casing 22 between liquid cooling divider 23.Electrical equipment shell 21, pump casing 22 and liquid cooling divider 23 are accommodated in the shell 24, to form integrative-structure or overall structure.
Dry vacuum pump 12-1 comprises motor 12-1a, pump unit 12-1b, and gear unit 12-1c.Similarly, dry vacuum pump 12-2 comprises motor 12-2a, pump unit 12-2b, and gear unit 12-2c.Motor 12-1a, the 12-2a of dry vacuum pump 12-1,12-2, pump unit 12-1b, 12-2b, and gear unit 12-1c, 12-2c also produce heat during operation.Dry vacuum pump 12-1 has the shell that comprises suction port 27, and dry vacuum pump 12-2 has the shell that comprises exhaust port 28.
Shell 24, perhaps more particularly, liquid cooling divider 23 and pump case 22 have the coolant channel 25 that is limited to wherein, pass through for the ANALYSIS OF COOLANT FLOW of cooling water (being cold water) for example being used for.Coolant channel 25 is arranged at first cooling water W be offered liquid cooling divider 23, be supplied to motor 12-1a, the 12-2a of dry vacuum pump 12-1,12-2 then from liquid cooling divider 23, and then be supplied to its pump unit 12-1b, 12-2b, when cooling water W flows, in succession electric component and the electronic device that produces heat cooled off.
As mentioned above, liquid cooling divider 23 places between electrical equipment shell 21 and the pump casing 22, and coolant channel 25 is arranged at first cooling water W be offered liquid cooling divider 23, be supplied to motor 12-1a, the 12-2a of dry vacuum pump 12-1,12-2 then from liquid cooling divider 23, and then be supplied to its pump unit 12-1b, 12-2b.Can may cause the electric component of fault and electronic device to cool off to being easy to produce a certain amount of heat effectively like this, and can carry out heat effectively to electrical equipment shell 21 that holds rectifier 13, DC circuit 15, direct current (DC)/direct current (DC) conversion circuit 16, frequency variator 17 and control circuit 18 and the pump casing 22 that is holding dry vacuum pump 12-1,12-2 and isolate.Thereby the overall volume that includes the dry vacuum pumping unit 20 of coolant channel 25 minimizes, and then size decreases.
Accompanying drawing 3A is the side view of cooling structure, and it is used for cooling off the rectifying device of the rectifier 13 that is accommodated in electrical equipment shell 21, filter capacitor 14, direct current (the DC)/switching device of direct current (DC) conversion circuit 16, the switching device of frequency variator 17 and the electric component of control circuit 18 of DC circuit 15.Accompanying drawing 3B is the plan view of accompanying drawing 3A.Shown in Fig. 3 A and 3B, belong to rectifier 13, DC circuit 15, direct current (DC)/direct current (DC) conversion circuit 16, frequency variator 17 and control circuit 18 and the electric component and the electronic device that produce heat be installed in cooling water W therein above the circuit liquid cooling divider 23.
In this embodiment, pump case 22 holds two dry vacuum pump 12-1,12-2 therein.But pump case 22 can hold a vacuum pump or three or more vacuum pumps therein.
As mentioned above, the vaccum pump unit 20 according to this mode of execution comprises: the electrical equipment shell 21 that holds control circuit assembly (being rectifier 13, DC circuit 15, direct current (DC)/direct current (DC) conversion circuit 16, frequency variator 17 and control circuit 18) therein; The pump case 22 that holds the operation monitoring sensor of dry vacuum pump 12-1,12-2 and dry vacuum pump 12-1,12-2 therein; And place between electrical equipment shell 21 and the pump case 22 and have the liquid cooling divider 23 that is used for the coolant channel 25 that circulating coolant passes through; Wherein, electrical equipment shell 21, pump case 22 and liquid cooling divider 23 place in the shell 24 as integrative-structure.Circulate coolant is by the coolant channel 25 in the liquid cooling divider 23, be accommodated in the heat that electric component in the electrical equipment shell 21 and electronic device produce with absorption, thereby expeditiously electric component and the electronic device that is contained in the electrical equipment shell 21 cooled off.The cooling structure size that comprises liquid cooling divider 23 is little, thereby and dry vacuum pumping unit 20 sizes that include this cooling structure also diminish.
Accompanying drawing 4 is the schematic representation that the structure of the dry vacuum pumping unit 20a of another mode of execution according to the present invention is provided with.As shown in Figure 4, in this dry vacuum pumping unit 20a, the pump unit 12b of dry vacuum pump 12 places the central authorities of shell 24, and motor 12a and gear unit 12c are arranged on the both sides of pump unit 12b.Portion's first electrical equipment shell 31 of holding frequency variator 17 (see figure 1)s and other electric components and electronic device is arranged on the side of motor 12a within it.For example using, the freezing mixture of water comes the efficient cooling unit 30 of the cooling motor 12a and first electrical equipment shell 31 to be placed between the motor 12a and first electrical equipment shell 31.Another the efficient cooling unit 32 that uses the freezing mixture of water for example to cool off gear unit 12c is arranged on the side of gear unit 12c.Second electrical equipment shell 33 that inside is holding control circuit 18 (see figure 1)s with the electric component that comprises pump control CPU is arranged on pump unit 12b and above the motor 12a.Pump unit 12b has the shell that comprises inlet 27 and outlet 28.
When motor 12a energising drove, its motor stator produced heat.The heat transfer that is produced causes its temperature to increase to the motor casing of motor 12a.Along with two rotating shaft rotations, the gear of gear unit 12c also produces heat.The heat transfer that is produced causes its temperature to increase to the gear hub of gear unit 12c.Motor casing is cooled off by the freezing mixture of for example water of efficient cooling unit 30, and gear hub is cooled off by the freezing mixture of for example water of efficient cooling unit 32.
As mentioned above, between the on-stream period of dry vacuum pumping unit 20a, the heat that the temperature of motor casing is come from the motor stator of motor 12a increases, and the temperature of gear hub is come from the heat of the swing pinion of gear unit 12c and raises.According to this mode of execution, use general 30, the 32 pairs of motor casings of efficient cooling unit (cooling structure) and the gear hub of constituent of adopting to cool off.Frequency variator 17 (see figure 1)s that driving power or electric power offered motor 12a are to comprise for example switching device of IGBTs.Owing to the electric current of these switching devices of flowing through and the handoff loss that is produced by these switching devices, these switching devices of frequency variator 17 produce high relatively heat.Therefore, frequency variator 17 needs cooling.According to this mode of execution, the efficient cooling unit 30 that is used for the cooling motor shell is used to cool off frequency variator 17.
Control circuit 18 (see figure 1)s that are used to control dry vacuum pumping unit 20a operation have electric component.The electric component of control circuit 18 (comprising pump control CPU), the heat that himself produces is not high.Therefore as long as control circuit 18 is arranged on the position of the external temperature that the electric component that remains control circuit 18 usually can use, control circuit 18 does not need to have special radiating structure, but suppose that dry vacuum pumping unit 20a may use surpassing under the condition of normal operation range, it combines or makes up with comprising the air cooling structure of forcing air cooling system.
As mentioned above, the efficient cooling unit 30 that is used for cooling motor 12a uses for example constituent, and the cooling unit of the heat that produces as the switching device that absorbs by frequency variator 17 and using, and the air cooling structure that comprises the forced air-cooling system is used as the cooling unit of the heat electric component not high, control circuit 18 that cooling himself produces and uses.Therefore, dry vacuum pumping unit 20a has minimum, simple and efficient cooling structure.
Accompanying drawing 5 is the schematic representation according to the structure setting of the dry vacuum pumping unit 20b of another embodiment of the invention.Dry vacuum pumping unit 20b that accompanying drawing 5 shows and the difference of the dry vacuum pumping unit 20a shown in the accompanying drawing 4 are, portion's first electrical equipment shell 31 of holding frequency variator 17 (see figure 1)s and other electric components and electronic device is set at the side of gear unit 12c within it, and the efficient cooling unit 32 that is used to cool off the gear hub of gear unit 12c is set between the gear unit 12c and first electrical equipment shell 31.The dry vacuum pumping unit 20a's that the CONSTRUCTED SPECIFICATION of other of the dry vacuum pumping unit 20b of accompanying drawing 5 expression and accompanying drawing 4 are represented is identical.
As mentioned above, the efficient cooling unit 32 that is used to cool off the gear hub of gear unit 12c is used as the cooling unit of the heat that absorption produces by the switching device of frequency variator 17, and the air cooling structure that comprises the forced air-cooling system is used as the cooling unit of the heat electric component not high, control circuit 18 that cooling himself produces.Therefore, dry vacuum pumping unit 20a has minimum, simple and efficient cooling structure.
Accompanying drawing 6 is the schematic representation according to the structure setting of the dry vacuum pumping unit 20c of another other mode of execution of the present invention.Dry vacuum pumping unit 20c that accompanying drawing 6 shows and the difference of the dry vacuum pumping unit 20a shown in the accompanying drawing 4 are, control circuit cooling fan 34 is set at control circuit 18 side (see figure 1)s, and control circuit 18 and control circuit cooling fan 34 are accommodated in second electrical equipment shell 33, thereby dissipate by the force air that control circuit cooling fan 34 transmits by the heat that control circuit 18 produces, with cooling control circuit 18.The dry vacuum pumping unit 20a's that the CONSTRUCTED SPECIFICATION of other of the dry vacuum pumping unit 20c of accompanying drawing 6 expression and accompanying drawing 4 are represented is identical.
As mentioned above, the efficient cooling unit 30 that is used for the motor casing of cooling motor 12a is used as the cooling unit of absorption by the heat of the switching device generation of frequency variator 17, and the control circuit cooling fan 34 on control circuit 18 sides is used as the cooling unit that the heat electric component not high, control circuit 18 that himself produces is carried out forced air-cooling.Therefore, dry vacuum pumping unit 20c has minimum, simple and efficient cooling structure.
In dry vacuum pumping unit 20a, 20b, 20c, power supply 10 (see figure 1)s and comprise that the dry vacuum pump 12 of motor 12a, pump unit 12b, gear unit 12c is accommodated in the shell 24 as integrative-structure.Each dry vacuum pumping unit 20a, 20b, 20c include first electrical equipment shell 31 and second electrical equipment shell 33, wherein first electrical equipment shell 31 within it portion holding from heat value high, be the high-current circuit of representative with frequency variator 17, and second electrical equipment 33 within it portion holding control circuit 18, it is the electric component of representative that control circuit 18 has with pump control CPU, and the heat that these electric components self produce is not high.Each includes the 3rd electrical equipment shell in formula vaccum pump unit 20a, 20b, 20c, and the 3rd electrical equipment shell portion is within it holding the operation monitoring sensor of dry vacuum pump 12.Within it portion holding from heat value high, be first electrical equipment shell 31 of the high-current circuit of representative with frequency variator 17, be the efficient cooling unit that motor 12a or gear unit 12c use the freezing mixture of water for example to cool off to be cooled off by being used for, to have with pump control CPU be that second electrical equipment shell 33 of control circuit 18 of the electric component of representative is to cool off by the air cooling structure of using natural air circulation or forced-air circulation and its inside is holding.
As mentioned above, dry vacuum pumping unit according to the present invention comprises first electrical equipment shell 31 and second electrical equipment shell 33, wherein first electrical equipment shell 31 within it portion holding from heat value high, be the high-current circuit of representative with frequency variator 17, and second electrical equipment 33 within it portion to hold with pump control CPU be the control circuit 18 of representative.First electrical equipment shell 31 cools off by the efficient cooling unit with freezing mixture, and second electrical equipment shell 33 is by having the air cooling structure cooling of natural air circulation or forced-air circulation.Portion is holding from heat value first electrical equipment shell 31 high, that with frequency variator 17 be the high-current circuit of representative and is being cooled off efficiently within it, so the size of dry vacuum pumping unit can reduce.
In the above-described embodiment, cooling water is used as by coolant channel 25 flowing coolant.Yet, in coolant channel 25, can use any other freezing mixture.In addition, can use any other freezing mixture in the efficient cooling unit 30,32.
Although some of the preferred embodiment of the invention has been carried out detailed expression and description, be understandable that those skilled in the art can carry out variations and modifications in these mode of executions, these variations and modification all drop in the scope of accessory claim.
Claims (7)
1. dry vacuum pumping unit comprises:
Dry vacuum pump, the motor that it comprises the pump unit and is used to drive this pump unit;
Frequency variator, its Ac that is used for coming from ac power supply is converted to the Ac with preset frequency, and this Ac is offered motor;
Electrical equipment shell, its within it portion holding the control circuit assembly that comprises this frequency variator;
Pump case, its within it portion holding the operation monitoring sensor of this dry vacuum pump and this dry vacuum pump;
The liquid cooling divider, it is arranged between this electrical equipment shell and this pump case, and portion has coolant circulating within it; And
Shell, its within it portion holding this electrical equipment shell, this pump case and this liquid cooling divider as integrative-structure.
2. dry vacuum pumping unit according to claim 1, wherein: shell is included in its inner coolant channel that limits, be used for freezing mixture is supplied with this liquid cooling divider earlier, be supplied to motor from this freezing mixture divider then, and then be supplied to this pump unit, with adjoining land this liquid cooling divider, this motor and this pump unit are cooled off.
3. dry vacuum pumping unit according to claim 1, wherein: this control circuit assembly comprises the electric component that produces heat, this electric component comprises the switching device of frequency variator, and this liquid cooling divider is provided for cooling off the cooling structure of this electric component.
4. dry vacuum pumping unit according to claim 1, wherein: this liquid cooling divider is not retained as and directly contacts with the pump unit of this dry vacuum pump, and is fixed on the framework that extends from the outer wall of pump unit.
5. dry vacuum pumping unit comprises:
Dry vacuum pump, the motor that it comprises the pump unit and is used for this driven pump unit;
Frequency variator, its Ac that is used for coming from ac power supply is converted to the Ac with preset frequency, and this Ac is offered motor;
First electrical equipment shell, its within it portion holding described frequency variator as the high-current circuit that produces heat;
Second electrical equipment shell, its within it portion holding control circuit, this control circuit comprises the on-stream CPU that is used to control this dry vacuum pump;
Shell, its within it portion holding as this first electrical equipment shell of integrative-structure and this second electrical equipment shell;
Cooling unit, it uses this first electrical equipment shell of coolant cools; And
The air cooling structure, it uses natural air circulation or forced-air circulation to cool off this second electrical equipment shell.
6. dry vacuum pumping unit according to claim 5, wherein: this dry vacuum pump comprises gear unit, and this cooling unit comprises that the use cooling water is used for cooling off the motor of this dry vacuum pump or the cooling unit of gear unit as freezing mixture.
7. method of cooling off the dry vacuum pumping unit, this dry vacuum pumping unit comprises: dry vacuum pump, the motor that it comprises the pump unit and is used for this driven pump unit; Frequency variator, its Ac that is used for coming from ac power supply is converted to the Ac with preset frequency, and this Ac is offered motor; First electrical equipment shell, its within it portion holding described frequency variator as high-current circuit high spontaneous calorific value, that produce heat; Second electrical equipment shell, its within it portion holding control circuit, this control circuit comprises the CPU that is used to control this dry vacuum pump running; And shell, its within it portion holding as this first electrical equipment shell of integrative-structure and this second electrical equipment shell; This method comprises:
Use freezing mixture that this first electrical equipment is cooled off, and
Use natural air circulation or forced-air circulation that this second electrical equipment shell is cooled off.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP096539/2010 | 2010-04-19 | ||
| JP096540/2010 | 2010-04-19 | ||
| JP2010096539A JP2011226364A (en) | 2010-04-19 | 2010-04-19 | Cooling structure for dry vacuum pump device, and cooling method |
| JP2010096540A JP5373691B2 (en) | 2010-04-19 | 2010-04-19 | Dry vacuum pump device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102220980A true CN102220980A (en) | 2011-10-19 |
| CN102220980B CN102220980B (en) | 2015-08-26 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110121383.4A Active CN102220980B (en) | 2010-04-19 | 2011-04-19 | The method of dry vacuum pumping unit and cooling dry vacuum pumping unit |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP2378122B1 (en) |
| KR (1) | KR101623823B1 (en) |
| CN (1) | CN102220980B (en) |
| TW (1) | TWI491804B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109906319A (en) * | 2016-09-21 | 2019-06-18 | 克诺尔商用车制动系统有限公司 | The system for commercial vehicle of the screw compressor and motor that are cooled down jointly including band |
| CN112664453A (en) * | 2019-10-15 | 2021-04-16 | 株式会社荏原制作所 | Vacuum pump device |
| CN117581030A (en) * | 2021-09-07 | 2024-02-20 | 大金工业株式会社 | Hydraulic unit |
| CN117581030B (en) * | 2021-09-07 | 2024-07-09 | 大金工业株式会社 | Hydraulic unit |
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| JP6050081B2 (en) * | 2012-10-05 | 2016-12-21 | 株式会社荏原製作所 | Dry vacuum pump device |
| BR112021021006A2 (en) | 2019-04-23 | 2021-12-14 | Atlas Copco Airpower Nv | Compressor or vacuum pump device, liquid return system for such compressor or vacuum pump device, and method for draining liquid from a gearbox of such compressor or vacuum pump device |
| BE1027220B1 (en) * | 2019-04-23 | 2020-11-25 | Atlas Copco Airpower Nv | A compressor and / or vacuum pump device, a liquid return system for such compressor and / or vacuum pump device and a method for discharging liquid from a gear box of such compressor and / or vacuum pump device |
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Also Published As
| Publication number | Publication date |
|---|---|
| EP2378122A3 (en) | 2014-02-19 |
| KR20110116991A (en) | 2011-10-26 |
| KR101623823B1 (en) | 2016-05-24 |
| TW201202555A (en) | 2012-01-16 |
| EP2378122A2 (en) | 2011-10-19 |
| TWI491804B (en) | 2015-07-11 |
| EP2378122B1 (en) | 2017-09-27 |
| CN102220980B (en) | 2015-08-26 |
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