JP2009197602A - Service life degree forecasting method of electronic component of vacuum pump device and vacuum pump device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum pump device having a function for appropriately forecasting a service life state and the replacing timing of electronic components such as a semiconductor power switching element and an electrolytic capacitor used for a controller for the motor drive of the vacuum pump device. <P>SOLUTION: The vacuum pump device is provided with temperature sensors 23-26 for always or regularly measuring surface temperatures of predetermined electronic components used for the controller 4 for motor drive, an elapsed time measuring means for measuring an operation time of the controller 4 for motor drive and a storing means for storing results measured by the temperature sensors 23-26 and the elapsed time measuring means. As for the electronic components of which temperatures are measured, the vacuum pump device has a function for recording the time when a predetermined temperature level state is maintained for each temperature level in the storing means and a function for forecasting the service life degree of the electronic components from the operation time of respective temperature levels recorded in the storing means. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a vacuum pump device in which a pump main body, a pump driving motor, and a motor driving control device are housed in a device outer box, and in particular, replacement of electronic components such as a power switching element and an electrolytic capacitor of the motor driving control device. The present invention relates to a prediction method for predicting the life degree of an electronic component in order to predict the time, and a vacuum pump apparatus having the prediction function.

  A vacuum pump device equipped with a dry vacuum pump has its maintenance time described in the instruction manual and enlightens the user that maintenance is carried out regularly. However, as a matter of fact, the vacuum pump device fails. In many cases, maintenance is carried out.

  The vacuum pump device includes a vacuum pump main body, a pump driving motor, and a motor driving control device housed in a casing (device outer box), and is assembled as an integral structure as a whole. For this reason, even if maintenance is performed only for the motor drive control unit including electronic components, maintenance work cannot be performed unless the vacuum pump body is once removed from the housing. It is rarely implemented.

  Furthermore, in a rolling bearing or the like, which is a typical example of mechanical parts that require periodic replacement, it is possible to estimate the damage state from the outside of the apparatus due to abnormal noise of the rotating body. In addition, since it is possible to indirectly determine the degree of deterioration due to a decrease in pump performance due to an increase in sliding frictional force, it is easy to perform maintenance at a relatively appropriate time. On the other hand, electronic components used in pump control devices often maintain their basic functions as vacuum pumps even when the performance of the components has deteriorated. There are few ways to assume performance degradation other than management.

  Among the electronic components constituting the pump control device for controlling the vacuum pump of the above vacuum pump device, particularly for electrolytic capacitors, inverter circuits, DC-DC converters, etc. used as smoothing capacitors whose life is clearly defined The semiconductor power switching element used (for example, IGBT (insulated gate type bipolar transistor)) is mentioned.

  The electrolytic capacitor sets the operating environment temperature of the device, calculates the component life based on the temperature information and the component manufacturer's reduction rate calculation data, and sets the maintenance cycle. For semiconductor power switching elements such as IGBTs, a maintenance cycle has been set based on the repeated life tolerance data of the component manufacturer and the expected usage of the device.

Further, in the magnetically levitated rotating apparatus described in Patent Literature 1, the digital processing means of the controller stores the history of operation of the apparatus and the history of occurrence of abnormality together with the time in a nonvolatile memory based on the real-time clock output. And a maintenance time is predicted from the history information stored in the history storage means. Further, in the magnetic bearing control device described in Patent Document 2, the digital processing means for controlling the magnetic bearing compares the cumulative working time of the managed component counted by the counter with the preset maintenance time, and the cumulative working time is When the maintenance time is reached, the start of maintenance work is instructed.
JP-A-11-210673 JP 2002-13533 A

  In any of the above maintenance cycle setting methods, the use state of the device is assumed at the design stage, and the maintenance cycle is set, and there are cases where it cannot be said that the maintenance cycle setting is suitable for changes in the use environment of the device and the actual usage. . As a result, even when there is no degradation, etc., it is used when replacing parts, or when maintenance is not planned even though a serious failure has already occurred. There was a case.

  The present invention has been made in view of the above points, and can appropriately predict the life state and replacement time of electronic components such as semiconductor power switching elements and electrolytic capacitors used in motor drive control devices of vacuum pump devices. An object of the present invention is to provide a method for predicting the lifetime of an electronic component of a vacuum pump device, and a vacuum pump device.

  In order to solve the above-mentioned problems, the present invention provides an electronic component used in the motor drive control device of a vacuum pump device in which a pump main body, a pump drive motor, and a motor drive control device are housed in an apparatus outer box. A method for predicting the life degree of an electronic component of a vacuum pump device for predicting the life degree, wherein the surface temperature of a predetermined electronic component used in a motor drive control device is constantly or periodically measured, and the motor drive The accumulated operation time of the control device for the vehicle is measured, and the time during which the predetermined temperature level state is maintained is recorded in the storage means for each temperature level for the electronic component that is the temperature measurement target, and the recorded The degree of life of the electronic component is predicted from the time for each temperature level.

  As described above, by predicting the lifetime of the electronic component from the time for each temperature level recorded in the storage means, the lifetime of the electronic component is accurately predicted. be able to.

  The present invention also provides a surface temperature of a predetermined electronic component used in a motor drive control device in a vacuum pump device in which a pump body, a pump drive motor, and a motor drive control device are housed in the device outer box. Temperature measuring means for constantly or periodically measuring, an integrated time measuring means for measuring the operating time of the motor drive control device, and a storage means for storing the results measured by the temperature measuring means and the integrated time measuring means. The motor drive control device has a function of recording the time during which a predetermined temperature level state is maintained for the electronic component that is the temperature measurement target by the temperature measurement unit, in the storage unit for each temperature level. The electronic device has a function of predicting the lifetime of the electronic component from the operation time for each temperature level recorded in the storage means.

  As described above, for the electronic component that is the target of temperature measurement, the operation time during which the predetermined temperature level state is maintained is recorded in the storage means for each temperature level, and the recorded operation time for each temperature level is recorded. By predicting the lifetime of the electronic component, it is possible to accurately predict the lifetime of the electronic component.

  Further, in the vacuum pump device according to the present invention, the motor drive control device sets an upper limit use time at the maximum temperature level for each electronic component for the temperature measurement target electronic component. When the accumulated operation time exceeds the upper limit use time, it has a function of outputting a failure prediction signal that prompts replacement of the part to the outside.

  For electronic components subject to temperature measurement as described above, if the upper limit usage time at the maximum temperature level is set for each electronic component and the temperature level condition and the total accumulated operating time exceeds the upper limit usage time, By outputting a failure prediction signal that prompts replacement to the outside, it is possible to know with high accuracy the component replacement time due to the progress of performance deterioration due to the temperature of the electronic component before the vacuum pump device fails.

  Further, according to the present invention, in the vacuum pump device described above, the motor drive control device sets a plurality of temperature ranges until the maximum temperature is reached based on the upper limit use time at the highest level for each electronic component to be temperature-measured. Divide into temperature levels, set the coefficient for the usage time at each temperature level from the calculation result of the upper limit usage time at each temperature level, calculate the coefficient for the usage time at each temperature level, and calculate the converted usage time It has a function to calculate the usage time at the maximum temperature level by calculating the total usage of the conversion usage time at each temperature level when calculating the total usage time at multiple temperature levels. To do.

  As described above, the converted usage time is calculated by calculating the coefficient for the usage time at each temperature level, and when the usage time at multiple temperature levels is combined, the conversion usage time at each temperature level is summed up. Thus, by calculating the usage time at the maximum temperature level, the usage time at the maximum temperature level of the corresponding electronic component can be obtained, and the lifetime of the electronic component can be accurately predicted.

  Further, the present invention predicts the life degree of electronic components used in the motor drive control device of a vacuum pump device in which a pump main body, a pump drive motor, and a motor drive control device are housed in the device outer box. A method for predicting the lifetime of an electronic component of a vacuum pump device that detects an output or input current of a power switching element that supplies power to a pump drive motor of a motor drive control device, and detects the detected output or input current Overload condition exceeding the maximum continuous load condition from the value, and determining the load condition occurrence with the duration as a threshold, integrating the number of occurrences of the overload condition, and exceeding the preset number of accumulations When this occurs, it is urged to replace the power switching element.

  The occurrence of a transient overcurrent state exceeding the maximum continuous load condition from the output or input current value detected as described above and its duration is determined as a threshold, and the number of occurrences of the overload state is integrated, When an overload state exceeding the preset number of times of integration occurs, replacement of the power switching element is urged, so that it is possible to know the replacement time according to the life of the power switching element with high accuracy.

  The present invention also relates to an output or input current of a power switching element that supplies power to a pump driving motor in a vacuum pump device in which a pump body, a pump driving motor, and a motor driving control device are housed in an apparatus outer box. The motor drive control device includes a transient overcurrent that exceeds the maximum continuous load condition of the power switching element from the output or input current value of the power switching element detected by the current detection means. The overload condition is determined using the occurrence and duration as a threshold, the number of occurrences of this overload condition is integrated, and if an overload condition that exceeds the preset number of occurrences occurs in advance, replace the power switching element. It is characterized by having a function for issuing prompting information.

  As described above, a transient overcurrent that exceeds the maximum continuous load condition of the power switching element is detected from the output or input current value of the power switching element detected by the current detection means, and the overload state is set as a threshold value. The number of occurrences of this overload condition is determined and the number of occurrences of the overload condition is accumulated. When an overload condition exceeding the preset number of accumulations occurs, information prompting the replacement of the power switching element is issued. You can know the time with high accuracy.

  Further, according to the present invention, in the vacuum pump device described above, the motor drive control device obtains an integrated value of the number of times of reaching an overload state and a life number upper limit value set in advance from the overload cycle life number data of the power switching element. In comparison, it has a function of calculating the life degree and replacement time of the power switching element at a ratio to the upper limit value of the life frequency.

  As described above, the integrated value of the number of times that an overload state has been reached is compared with the upper limit of the number of times of life set in advance from the overload cycle life number data of the power switching element, Since the life degree and replacement time are calculated, it is possible to calculate the life degree and replacement time with high accuracy of the power switching element.

  Further, the present invention provides the vacuum pump device with a display means for prompting a preventive action operation for replacing the power switching element based on the integrated value of the number of times the overload state is reached and the preset upper limit of the lifetime. It is characterized by.

  Preventive measures are taken at an appropriate time by providing a display means that prompts preventive measures for replacement of power switching elements based on the integrated value of the number of times that an overload condition has been reached and the preset number of times of life limit. Work can be encouraged.

  According to the present invention, since it is possible to accurately know the replacement time due to the lifetime of the electronic components of the vacuum pump device that has been performed based on the rule of thumb or the occurrence of failure in the past, about the maintenance inspection work of the motor drive control device, It becomes possible to construct maintenance work with high reliability.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a schematic configuration example of the inside of a vacuum pump device according to the present invention. As shown in the figure, the vacuum pump device includes a pump casing 2 in which a vacuum pump main body (not shown) is housed in an outer box (housing) 1 of the pump device, and a pump drive adjacent to the pump casing 2. A motor 3 is disposed, a motor driving control device 4 is disposed above the pump driving motor 3, an intake port 5 is disposed on the side of the exterior box 1, and an exhaust port 6 is disposed above the exterior box 1. In addition, an AC power connection 7 is disposed on the side of the outer box 1 opposite to the air inlet 5. The AC power supply connection unit 7 and the motor drive control device 4 are connected by a power wiring L1, and the motor drive control device 4 and the pump drive motor 3 are connected by a power wiring L2.

  Reference numeral 8 denotes a status display and operation panel, which is connected to the motor drive control device 4 by a remote wiring L3. Reference numeral 9 denotes a cooling unit (heat exchanger) for cooling the pump driving motor 3 and the motor driving control device 4.

  FIG. 2 is a block diagram showing a circuit configuration example of the motor drive control device 4, and FIG. 3 is a diagram showing an internal configuration example of the motor drive control device 4. The motor drive control device 4 includes a rectifier circuit 11 for supplying drive power to the pump drive motor 3, a smoothing circuit 12, a drive unit 17 including an inverter 13, and a gate control circuit 14 for controlling the inverter 13. And an operation control circuit 15 and a control unit 18 having an I / F circuit 16. An electronic circuit board 21 is disposed in the casing 20. The rectifier circuit 11 on which the rectifier element is mounted and the inverter 13 on which the IGBT which is a semiconductor power switching element is mounted are arranged at the bottom of the casing 20, and the electrolytic capacitors 12a and 12b and the gate control circuit 14 constituting the smoothing circuit 12 are operated. Various electronic components constituting the control circuit 15 and the I / F circuit 16 are mounted on the electronic circuit board 21.

  In the motor drive control device 4, the AC power input from the input terminal (AC power supply connection portion 7 in FIG. 1) 17 is converted into DC by the rectifier circuit 11, and the DC power smoothed by the smoothing circuit 12 is converted into an inverter. 13 is input. The DC power input to the inverter 13 is converted into AC power having a desired frequency under the control of the gate control circuit 14 and supplied to the pump driving motor 3. As a result, the pump driving motor 3 is activated to drive the vacuum pump body in the pump casing 2. Thereby, the gas sucked from the intake port 5 is discharged from the exhaust port 6.

  By the operation of the vacuum pump device, the rectifier element constituting the rectifier circuit 11, the electrolytic capacitors 12 a and 12 b constituting the smoothing circuit 12, the IGBT being the semiconductor power switching element constituting the inverter 13, and the electronic circuit board 21 were mounted. Each electronic component generates heat. The heat generated from each electronic component is cooled by a heat exchanger 9 provided in the casing 20. The temperature rise due to this heat generation affects the life of each component. For example, as will be described in detail later, the allowable use time, that is, the life of the electrolytic capacitor and IGBT of the smoothing circuit 12 is affected by the temperature used.

  Therefore, here, the temperature sensor 23 that detects the temperature of the rectifying element that constitutes the rectifying circuit 11 of the drive unit 17, the temperature sensor 24 that detects the temperature of the electrolytic capacitors 12 a and 12 b that constitute the smoothing circuit 12, and the IGBT of the inverter 13 A temperature sensor 25 for detecting the temperature and a temperature sensor 26 for detecting the temperature of the operation control circuit 15 are provided, and the operation control circuit 15 monitors the temperature of these electronic components. And about the electrolytic capacitors 12a and 12b, the lifetime degree is estimated in the following procedure.

  As shown in FIG. 4, the operation control circuit 15 includes a CPU 30, a RAM 31, a ROM 32, and a nonvolatile memory 33. Outputs of the temperature sensors 23, 24, 25, and 26 and outputs of current sensors 41, 42, 43, and 44, which will be described later, are input to the CPU 30 through the I / F circuit 34.

  As shown in FIG. 5, the allowable time of the electrolytic capacitor is determined by the use temperature. Here, an electrolytic capacitor having a use temperature of 105 ° C. and an allowable time of 2000 (H) is shown. At the same time when the motor drive control device 4 is activated, the CPU 30 starts integrating the operation time (energization time) of the motor drive control device 4 and stores the time integrated value in the nonvolatile memory 33. When the operating time is integrated by the CPU 30, a predetermined temperature coefficient as shown in FIG. 6 according to the operating temperature level of the electrolytic capacitors 12a and 12b of the smoothing circuit 12 detected by the temperature sensor 24 as shown in FIG. The converted operation time value calculated by multiplying is stored in the nonvolatile memory 33. 6 is stored in advance in the nonvolatile memory 33.

  The lifetime of the electrolytic capacitors 12a and 12b can be predicted by comparing the integrated value of the converted operation time calculated by multiplying the temperature coefficient with the total allowable time. The coefficient is determined by calculating the ratio between the temperature reduction rate conversion time and the specification time for each arbitrary temperature range based on the temperature reduction rate published by the electrolytic capacitor manufacturer and the specifications of the electrolytic capacitor.

  As the number of divisions in the temperature range increases, the ratio resolution becomes finer and a higher conversion rate becomes possible. However, in practice, it is set within a division range of about 10 ° C. as shown in FIG. In this case, the original purpose is fully achieved. It is possible to assume the lifetime of the electrolytic capacitors 12a and 12b of the smoothing circuit 12 based on the accumulated operation time converted by multiplying the temperature coefficient of the temperature level, and the accumulated operation time obtained by converting the temperature level. It is possible to assume the replacement time of the electrolytic capacitors 12a and 12b.

  FIG. 7 is a diagram showing a procedure for predicting the lifetime of the electrolytic capacitor from the operation time (energization time) at the above temperature. From the table of the temperature level and temperature coefficient (see FIG. 6) of the electrolytic capacitor stored in the nonvolatile memory 33 at the detected temperature (111) of the electrolytic capacitors 12a and 12b detected by the temperature sensor 24, the temperature of the detected temperature level. The coefficient (113) is searched (initial setting) and the temperature coefficient (113) is multiplied by the energization time (112) measured by the CPU 30 to calculate the operation time (114) after conversion to the temperature coefficient (total energization time = Σ ( Temperature coefficient at temperature level x energization time)).

  The operation accumulated time upper limit value (115) of the electrolytic capacitor is set (initial setting), and the operation time after the temperature coefficient conversion (operation time after calculation) is compared with the operation accumulated time upper limit value (116). The processing performs external display output and, in some cases, protection operation. That is, a maintenance time display, an error display exceeding the operation upper limit upper limit value, a countdown display (117), and the like are performed. In some cases, the protection operation (118) of the vacuum pump device is performed. The processing procedure is performed by the CPU 30 executing a program stored in the ROM 32.

  In order to measure the output current (AC) and the input current (DC) of the IGBT constituting the inverter 13 of the drive unit of the motor drive control device 4, a current sensor 41 (for detecting the U-phase current) as shown in FIG. ), Current sensor 42 (for V-phase current detection), current sensor 43 (for W-phase current detection), and current sensor 44 (for DC input current) are installed, and at the same time CPU 30 is activated, CPU 30 Then, monitoring of the output current and input current of the drive unit is started, and the current value flowing through the IGBT and the IGBT power cycle discrimination / number integration are performed in the following procedure.

  The CPU 30 presets a power cycle threshold current at which the internal temperature of the IGBT is expected to reach a predetermined temperature range with respect to the current detected by the current sensors 41, 42, 43, 44, and exceeds the threshold current. If this happens, count the number of power cycles.

The power cycle threshold is not based on the overcurrent protection setting value of the pump drive motor 3 calculated at the time of designing the motor drive control device 4, but from the current value at the time of design of the motor drive control device 4 and the measured current value. It is obtained from the determined IGBT internal temperature rise and the IGBT power cycle life curve announced by the device manufacturer. The upper limit number of power cycles is determined by the target life of the motor drive control device 4. That is, as a basic requirement specification of the vacuum pump device, when the power cycle upper limit value (upper limit value of the number of times of startup when the vacuum pump device is started from the atmosphere open state) is set to 10 ⁶ , the IGBT internal temperature rise value ΔTj 9 is determined to be Δ60 ° C. from the life curve announced by the device manufacturer as shown in FIG. 9, so that the current under the condition that ΔTj> 60 ° C. can be converted into the output current or input current of the IGBT and the duration. The value and its duration are measured in advance and set as a threshold value.

  For the power cycle count exceeding the above threshold, the number of times that the CPU 30 always integrated is stored in the nonvolatile memory 33, but the upper limit value of the power cycle is the upper limit number of power cycles determined at the time of designing the motor drive control device 4 Thus, the IGBT replacement time can be assumed by the upper limit value of the power cycle and the number of counted power cycles.

FIG. 10 is a diagram showing a change in the input current of the IGBT detected by the current sensor 44. The CPU 30 measures the occurrence and duration of a transient overcurrent in which the input current value of the IGBT detected by the current sensor 44 exceeds the maximum current setting value I ₁ and determines the overload state using this as a threshold value (maximum Current setting value I ₁ > IGBT input current and duration setting Δt 1> IGBT input current maximum value = one power cycle), and the number of occurrences of this overload state is integrated and stored in the nonvolatile memory 33. By comparing the integrated value of the number of occurrences of the overload state with a preset number of integrations, the lifetime of the IGBT can be predicted. Further, when the integrated value of the number of occurrences of the overload state exceeds a preset number of integrations, information for prompting replacement is issued as the IGBT replacement time.

FIG. 11 is a diagram showing the current value flowing through the IGBT and the procedure of the IGBT power cycle discrimination / number integration. Overcurrent setting data (maximum current setting value I _{1 in} FIG. 10) (123) is set (initial setting), and the current detection of the output current and input current of the IGBT detected by the current sensors 41, 42, 43, and 44 (121 ) And energization time (122), the IGBT power cycle life count threshold (124) is determined (power cycle count = (overcurrent set value> detection current) × duration), and the life cycle threshold based on the power cycle ( 125) Set (initial setting), compare the number of power cycle integrations with the power cycle integration upper limit value (126), and execute an external display output and possibly a protective operation by internal processing of the CPU 30. That is, a maintenance time display, an error display exceeding the operation upper limit upper limit value, a countdown display (127), and the like are performed. In some cases, the protection operation (128) of the vacuum pump device is performed. The above processing procedure is performed by executing a program stored in the ROM 32 by the CPU 30.

  In the above example, the example in which the lifetime of the electrolytic capacitor of the smoothing circuit 12 and the IGBT of the inverter 13 is predicted has been described. However, the present invention is not limited to this. With respect to an electronic component for which the upper limit of time is set or an electronic component for which the number of repeated operations has been determined, the replacement time can be assumed and externally displayed in the same manner.

    Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the technical idea described in the claims and the specification and drawings. Is possible.

It is a figure which shows the schematic structural example inside the vacuum pump apparatus which concerns on this invention. It is a figure which shows the circuit structural example of the motor drive control apparatus of the vacuum pump apparatus which concerns on this invention. It is a figure which shows the example of an internal structure of the motor drive control apparatus of the vacuum pump apparatus which concerns on this invention. It is a figure which shows the structure of the operation control circuit of the control apparatus for motor drive. It is a figure which shows the relationship between the use temperature of an electrolytic capacitor, and permissible time. It is a figure which shows the relationship between the temperature level of an electrolytic capacitor, and a temperature coefficient. It is a figure which shows the flow of the procedure which estimates the lifetime degree of the electrolytic capacitor which concerns on this invention. It is a figure which shows the circuit structural example of the motor drive control apparatus of the vacuum pump apparatus which concerns on this invention. It is a figure which shows the power cycle life of IGBT. It is a figure which shows the change of the input current of IGBT. It is a figure which shows the flow of the procedure of the electric current value which flows into IGBT which concerns on this invention, and IGBT power cycle discrimination | determination / frequency | count accumulation.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Exterior box 2 Pump casing 3 Pump drive motor 4 Motor drive control device 5 Intake port 6 Exhaust port 7 AC power supply connection part 8 Status display and operation panel 9 Cooling part (heat exchanger)
DESCRIPTION OF SYMBOLS 11 Rectification circuit 12 Smoothing circuit 13 Inverter 14 Gate control circuit 15 Operation control circuit 16 I / F circuit 17 Drive part 18 Control part 20 Casing 21 Electronic circuit board 23 Temperature sensor 24 Temperature sensor 25 Temperature sensor 26 Temperature sensor 30 CPU
31 RAM
32 ROM
33 Non-volatile memory 34 I / F circuit 41 Current sensor 42 Current sensor 43 Current sensor 44 Current sensor

Claims (8)

Electron of vacuum pump device for predicting life degree of electronic parts used in motor drive control device of vacuum pump device in which pump body, pump drive motor, and motor drive control device are housed in device outer box A method for predicting the lifetime of a component,
Measuring the surface temperature of a predetermined electronic component used in the motor drive control device constantly or periodically, and measuring the accumulated operation time of the motor drive control device,
For the electronic component that is the temperature measurement target, the time during which the predetermined temperature level state is maintained is recorded in the storage means for each temperature level, and the electronic component is recorded from the time for each recorded temperature level. A method for predicting the lifetime of an electronic component of a vacuum pump device, wherein the lifetime is predicted. In the vacuum pump device in which the pump body, the pump drive motor, and the motor drive control device are accommodated in the device outer box,
Temperature measuring means for constantly or periodically measuring the surface temperature of a predetermined electronic component used in the motor drive control device, integrated time measurement means for measuring the operation time of the motor drive control device, and A storage means for storing a result measured by the temperature measuring means and the integrated time measuring means;
The motor drive control device has a function of recording a time during which a predetermined temperature level state is maintained in the storage unit for each temperature level for an electronic component that is a temperature measurement target by the temperature measurement unit. And a function of predicting the lifetime of the electronic component from the operation time for each temperature level recorded in the storage means. The vacuum pump device according to claim 2,
The motor drive control device sets an upper limit use time at the maximum temperature level for each electronic component for the temperature measurement target electronic component, and sets the upper limit use time for the temperature level condition and the total accumulated operation time. A vacuum pump device having a function of outputting a failure prediction signal that prompts replacement of the component to the outside when exceeding the above. The vacuum pump device according to claim 3,
The motor drive control device divides the temperature range until reaching the maximum temperature into a plurality of temperature levels based on the upper limit use time at the maximum level for each electronic component to be temperature-measured. The coefficient for the usage time at each temperature level is set from the calculation result of the upper limit usage time for each temperature, and the conversion usage time is calculated by calculating the coefficient for the usage time at each temperature level. A vacuum pump device having a function of calculating the usage time at the maximum temperature level by calculating the total usage of the converted usage time at each temperature level when integrating the time. Electron of vacuum pump device for predicting life degree of electronic parts used in motor drive control device of vacuum pump device in which pump body, pump drive motor, and motor drive control device are housed in device outer box A method for predicting the lifetime of a component,
An output or input current of a power switching element that supplies power to the pump drive motor of the motor drive control device is detected, and a transient overcurrent state exceeding the maximum continuous load condition is detected from the detected output or input current value. The occurrence of a load condition is determined using the occurrence and its duration as a threshold, the number of occurrences of the overload condition is integrated, and if an overload condition exceeding the preset number of integrations occurs, the replacement of the power switching element is urged A method for predicting the degree of life of an electronic component of a vacuum pump. In the vacuum pump device in which the pump body, the pump drive motor, and the motor drive control device are accommodated in the device outer box,
A current detecting means for detecting an output or input current of a power switching element for supplying power to the pump driving motor;
The motor drive control device uses the output or input current value of the power switching element detected by the current detection means as a threshold value to generate a transient overcurrent exceeding the maximum continuous load condition of the power switching element and its duration. A function to determine the overload condition, integrate the number of occurrences of the overload condition, and issue information that prompts replacement of the power switching element when an overload condition exceeding the preset number of accumulations occurs A vacuum pump device characterized by. The vacuum pump device according to claim 6,
The motor drive control device compares the integrated value of the number of times the overload state has been reached with a life number upper limit value set in advance from the overload cycle life number data of the power switching element, and A vacuum pump device comprising a function of calculating the life degree and replacement time of a power switching element in proportion. The vacuum pump device according to claim 7,
A vacuum pump device comprising display means for prompting a preventive measure operation for replacement of a power switching element based on an integrated value of the number of times of reaching the overload state and a preset upper limit of the lifetime.

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