EP2378122A3 - Dry vacuum pump apparatus and method of cooling the same - Google Patents

Dry vacuum pump apparatus and method of cooling the same Download PDF

Info

Publication number
EP2378122A3
EP2378122A3 EP11003266.1A EP11003266A EP2378122A3 EP 2378122 A3 EP2378122 A3 EP 2378122A3 EP 11003266 A EP11003266 A EP 11003266A EP 2378122 A3 EP2378122 A3 EP 2378122A3
Authority
EP
European Patent Office
Prior art keywords
dry vacuum
vacuum pump
enclosure
pump
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP11003266.1A
Other languages
German (de)
French (fr)
Other versions
EP2378122A2 (en
EP2378122B1 (en
Inventor
Kazuma Ito
Atsushi Oyama
Katsuaki Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2010096539A external-priority patent/JP2011226364A/en
Priority claimed from JP2010096540A external-priority patent/JP5373691B2/en
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP2378122A2 publication Critical patent/EP2378122A2/en
Publication of EP2378122A3 publication Critical patent/EP2378122A3/en
Application granted granted Critical
Publication of EP2378122B1 publication Critical patent/EP2378122B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/007—General arrangements of parts; Frames and supporting elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/025—Lubrication; Lubricant separation using a lubricant pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/047—Cooling of electronic devices installed inside the pump housing, e.g. inverters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing
    • F04C29/068—Silencing the silencing means being arranged inside the pump housing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressor (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

A dry vacuum pump apparatus is small in size as it includes a highly efficient cooling unit for cooling, with a coolant such as cooling water, large-current circuit components of high self-heating value, typically switching devices of an inverter. The dry vacuum pump apparatus includes a dry vacuum pump including a pump unit and a motor for actuating the pump unit, an inverter for converting AC power from an AC power supply into AC power having a predetermined frequency and supplying the AC power to the motor, an electric equipment enclosure accommodating therein a control electronic circuit assembly including the inverter, a pump enclosure accommodating therein the dry vacuum pump and an operation monitoring sensor of the dry vacuum pump, a liquid-cooled partition interposed between the electric equipment enclosure and the pump enclosure, and having a coolant circulating therein, and an external enclosure housing therein the electric equipment enclosure, the pump enclosure, and the liquid-cooled partition as an integral structure.
EP11003266.1A 2010-04-19 2011-04-18 Dry vacuum pump apparatus and method of cooling the same Active EP2378122B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010096539A JP2011226364A (en) 2010-04-19 2010-04-19 Cooling structure for dry vacuum pump device, and cooling method
JP2010096540A JP5373691B2 (en) 2010-04-19 2010-04-19 Dry vacuum pump device

Publications (3)

Publication Number Publication Date
EP2378122A2 EP2378122A2 (en) 2011-10-19
EP2378122A3 true EP2378122A3 (en) 2014-02-19
EP2378122B1 EP2378122B1 (en) 2017-09-27

Family

ID=44546296

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11003266.1A Active EP2378122B1 (en) 2010-04-19 2011-04-18 Dry vacuum pump apparatus and method of cooling the same

Country Status (4)

Country Link
EP (1) EP2378122B1 (en)
KR (1) KR101623823B1 (en)
CN (1) CN102220980B (en)
TW (1) TWI491804B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6050081B2 (en) * 2012-10-05 2016-12-21 株式会社荏原製作所 Dry vacuum pump device
DE102016011503A1 (en) * 2016-09-21 2018-03-22 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH System for a commercial vehicle comprising a screw compressor and an electric motor
BR112021021006A2 (en) 2019-04-23 2021-12-14 Atlas Copco Airpower Nv Compressor or vacuum pump device, liquid return system for such compressor or vacuum pump device, and method for draining liquid from a gearbox of such compressor or vacuum pump device
BE1027220B1 (en) * 2019-04-23 2020-11-25 Atlas Copco Airpower Nv A compressor and / or vacuum pump device, a liquid return system for such compressor and / or vacuum pump device and a method for discharging liquid from a gear box of such compressor and / or vacuum pump device
JP7261139B2 (en) * 2019-10-15 2023-04-19 株式会社荏原製作所 vacuum pump equipment

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19952902A1 (en) * 1998-11-04 2000-05-11 Toyoda Automatic Loom Works Electrically-operated fluid pump has common cooling circuit used for cooling pump unit, intermediate drive transmission, electric motor and current regulator
EP1138948A2 (en) * 2000-03-27 2001-10-04 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Cooling apparatus for vacuum pump
WO2009136277A1 (en) * 2008-05-09 2009-11-12 Refcomp Spa Cooling plate for a frequency converter and compressor using said cooling plate

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5164652A (en) 1989-04-21 1992-11-17 Motorola, Inc. Method and apparatus for determining battery type and modifying operating characteristics
JP3117365B2 (en) 1994-06-30 2000-12-11 三菱重工業株式会社 Scroll type vacuum pump
TW482878B (en) * 1997-10-28 2002-04-11 Coltec Ind Inc Compressor system and method and control for same.
JP3165857B2 (en) * 1997-12-10 2001-05-14 株式会社荏原製作所 Turbo molecular pump device
JP3024648B2 (en) 1999-04-27 2000-03-21 日本電気株式会社 Field electron emission device
JP2003269369A (en) 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd Vacuum pump
JP2006520873A (en) 2003-03-19 2006-09-14 株式会社荏原製作所 Positive displacement vacuum pump
GB0520470D0 (en) * 2005-10-07 2005-11-16 Boc Group Plc Method of operating a pumping system
JP2008180120A (en) * 2007-01-24 2008-08-07 Matsushita Electric Ind Co Ltd Motor driven compressor
JP2009197602A (en) * 2008-02-19 2009-09-03 Ebara Corp Service life degree forecasting method of electronic component of vacuum pump device and vacuum pump device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19952902A1 (en) * 1998-11-04 2000-05-11 Toyoda Automatic Loom Works Electrically-operated fluid pump has common cooling circuit used for cooling pump unit, intermediate drive transmission, electric motor and current regulator
EP1138948A2 (en) * 2000-03-27 2001-10-04 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Cooling apparatus for vacuum pump
WO2009136277A1 (en) * 2008-05-09 2009-11-12 Refcomp Spa Cooling plate for a frequency converter and compressor using said cooling plate

Also Published As

Publication number Publication date
KR20110116991A (en) 2011-10-26
CN102220980A (en) 2011-10-19
KR101623823B1 (en) 2016-05-24
TW201202555A (en) 2012-01-16
EP2378122A2 (en) 2011-10-19
TWI491804B (en) 2015-07-11
EP2378122B1 (en) 2017-09-27
CN102220980B (en) 2015-08-26

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