CN102183466A - Time resolution elliptical polarization spectrum measuring system - Google Patents
Time resolution elliptical polarization spectrum measuring system Download PDFInfo
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- CN102183466A CN102183466A CN2011100420413A CN201110042041A CN102183466A CN 102183466 A CN102183466 A CN 102183466A CN 2011100420413 A CN2011100420413 A CN 2011100420413A CN 201110042041 A CN201110042041 A CN 201110042041A CN 102183466 A CN102183466 A CN 102183466A
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Abstract
The invention belongs to the technical field of an optical electronic device and particularly relates to a time resolution elliptical polarization spectrum measuring system. The measuring system provided by the invention comprises a laser device, a beam splitter, reflectors, a delayer, a beam expander, a sample, a polarizer, a multi-channel analyzer, a CCD (charge coupled device) detector, a computer system, a stepper motor and the like, wherein the laser device adopts a tunable femtosecond ultrafast laser light source; the pulse light which is emitted from the light source is divided into pump light and detection light through the beam splitter; the pump light is vertically irradiated to the sample after passing through the delayer, the two reflectors and the beam expander; the detection light is irradiated to the sample after passing through the beam expander and the polarizer; the light passes through the multi-channel analyzer after being reflected by the sample and detected by the CCD surface array detector; and a computer computes the corresponding time resolution optical constant spectrum. The time resolution elliptical polarization spectrum measuring system provided by the invention has wide application prospects in multiple fields of physics, chemistry, biomedicine, environmental science and the like.
Description
Technical field
The invention belongs to optical electron device technology field, be specifically related to a kind of time resolution elliptically polarized light spectral measurement system.
Background technology
The interaction of light and material relates to many transient processes, as the electronic transition in the solid, and the fluorescent emission of biological and chemical material etc., interior conversion process etc.By material back reflection rate, transmissivity or polarization state evolution in time, study the dynamic process of material inside by measuring light, can obtain molecule or electron motion state in the material, as important informations such as electron level, electronic state pairing situations.When light and matter interaction, light field causes the polarization of molecule or electronics, the distribution that causes molecule or electronics with and distribution function evolution in time, make the specific inductive capacity of material
ε(ω
, t)
=ε
0(ω)
+Δ ε (ω
, t) become the function of time, wherein ε
0(ω) be the specific inductive capacity of material when not having the pump light irradiation, Δ ε (ω
, t) variation of the substance dielectric constant that causes for pump light irradiation, and
ε(ω
, t) with the various optical constants of material, relevant as refractive index, absorptivity, transmitance and reflectivity etc.
Elliptic polarization spectrometer is a kind of effective and reliable spectral measurement instrument that obtains various material optical constants and film thickness, can record the optical property and the optical constant of various materials delicately, and then can analyze in the characteristic that different spectrum segment had material, its physical essence is understood, thereby made material obtain important application.Developed multiple spectroscopic ellipsometry measurement pattern at present, as extinction type pattern and luminosity classes pattern etc.But present elliptic polarization Technical Board is limited to the optical constant of measuring material under the stable situation, and energy measurement transient optical state constant not.For this reason, the present invention combines femtosecond laser technology, hyperchannel optics detection technique with polarization state parallel measurement pattern ellipsometric measurement technology, realize time-resolved elliptically polarized light spectrometry, to obtain the transient optical state constant of material.This invention will help to deepen the understanding to the exciting of material, relaxation process, for excitation power of research atom, molecule and condensed state matter, luminescence kinetics etc. provide effective means.Time resolution elliptically polarized light spectral technology may be used on various fields such as physics, chemistry, biomedicine, environmental science, has important fundamental research meaning and application prospects.
Summary of the invention
The objective of the invention is to propose a kind of energy and realize time-resolved elliptically polarized light spectral measurement system, so that can obtain the transient optical state constant of material.
What the present invention proposed can realize time-resolved elliptically polarized light spectral measurement system, comprise connection successively as lower member: laser instrument, beam splitter, first catoptron, delayer, second catoptron, the 3rd catoptron, first beam expanding lens, sample, second beam expanding lens, the polarizer, hyperchannel analyzer, ccd detector, computer control system, step motor etc.Wherein, laser instrument adopts tunable altra-fast fs laser as light source; The pulsed light of described light source outgoing is divided into two bundles through beam splitter, and a branch of is pump light, and is a branch of for surveying light.Pump light intensities generally is taken as the several times of surveying light intensity, for example is 4-20 times.Pump light through first mirror reflects after successively by behind chronotron, second catoptron, the 3rd catoptron and first beam expanding lens, impinge perpendicularly on the sample.Described detection light is successively through inciding on the sample at a certain angle behind second beam expanding lens, the polarizer.After surveying the reflection of light process sample, surveyed by ccd detector behind the reflected light process hyperchannel analyzer.Measuring system is controlled by computer control system.Synchronous and the delay of surveying between light and the pump light is passed through a step motor control by computer control system.Sample is installed in to have on the adsorbing specimen holder of negative pressure of vacuum, realizes harmless spectral detection.
The present invention adopts folded optical path to carry out the light collimation.
The method that the present invention allows laser repeatedly come and go between two mirror surfaces has prolonged the several times light path in limited space, to improve the collimation precision of sample.Light passes through a hyperchannel analyzer through sample reflection back.Described hyperchannel analyzer by
mIndividual miniature analyzer constitutes, and establishes this
mThe position angle of individual miniature analyzer is
θ 1,
θ 2,
θ m , and the position angle
θ 1~
θ m Between 0 ~ π, evenly distribute.
mBe generally 5-15 integer.Reflected light by the hyperchannel analyzer is surveyed by the zones of different of CCD area array detector.The electric signal that is received by detector is transfused to computing machine after the AD conversion, after machine analysis and the processing, calculate corresponding optical constant as calculated.
In actual measurement, the polarizer is fixed on certain optimum azimuth.As order
P=45
o, after analyzing angle A is done Fast Fourier Transform (FFT), close with the analyzer azimuthal variation from the light intensity of analyzer outgoing and to be:
Wherein
I 0It is light intensity
IDC component, all the other are AC compounent.Can get through calculating:
(2)
I BIt is DC component
I 0In background signal, come from the dark current of detector, in the formula
Be the constant relevant with system source.Can calculate ellipsometric parameter according to three coefficients in (2) formula
r 0And cosD, both are expressed as:
(3)
Pass through light intensity
IThe numerical value Fourier transform is made at position angle to analyzer in (2) formula, and the value that can try to achieve each light intensity is:
In the formula
I i Be that the analyzer position angle is
A i The time ccd detector received light intensity signal,
lBe corresponding wavelength,
MBe the twice of analyzer group unit analyzer number, press in the one-period
A i Value is made the number of times that data are gathered.Ellipsometric parameter
r 0With cosD determined after, can calculate the specific inductive capacity of sample and other optical constant.The optics complex permittivity
e=
e 1+ i
e 2Can be calculated, that is:
And then obtain other optical constant, as complex index of refraction
N, absorption coefficient
aAnd reflectivity
RDeng:
Wherein
nBe refractive index
, kBe extinction coefficient.More than calculate and finish by computing machine.
Description of drawings
Fig. 1 is a kind of time resolution elliptically polarized light spectral measurement system diagram.
Fig. 2 hyperchannel analyzer synoptic diagram.Described hyperchannel analyzer by
mIndividual miniature analyzer constitutes, and establishes this
mThe position angle of individual miniature analyzer is
θ 1,
θ 2...,
θ m , and the position angle
θ 1~
θ m Between 0 ~ π, evenly distribute.
Number in the figure: (1) laser instrument, (2) beam splitter, (3) first catoptrons, (4) delayer, (5) second catoptrons, (6) the 3rd catoptrons, (7) first beam expanding lenss, (8) sample, (9) second beam expanding lenss, (10) polarizer, (11) hyperchannel analyzer, (12) ccd detector, (13) computer control system, (14) step motor.
Embodiment
Below by an example specific embodiment of the invention is described:
1, the pulsed light by tunable altra-fast fs LASER Light Source 1 outgoing is divided into two bundles through beam splitter 2, and a branch of is pump light, and is a branch of for surveying light.Pump light intensities generally is taken as the several times of surveying light intensity, and for example ratio between two is 10:1-4:1.
2, successively by behind chronotron 4, catoptron 5, catoptron 6 and the beam expanding lens 7, impinge perpendicularly on the sample 8 after pump light reflects through catoptron 3.
3, survey light successively through inciding at a certain angle on the sample 8 behind beam expanding lens 9, the polarizer 10.
4, after detection light reflected through sample 8, reflected light was surveyed by a ccd detector 12 through a hyperchannel analyzer 11.
5, measuring system is by computer control system 13 controls.Synchronous and the delay of surveying between light and the pump light is passed through step motor 14 controls by computer control system.
6, sample is installed on the specimen holder with vacuum suction effect, has realized harmless spectral detection.
7, adopt folded optical path to carry out the light collimation.The method that allows laser repeatedly come and go between two mirror surfaces has prolonged the several times light path in limited optical space, make the collimation precision of sample reach 0.01 degree.
8, by hyperchannel analyzer 11, the hyperchannel analyzer is made of 12 miniature analyzers light through sample reflection back, and the plane of polarization of these miniature analyzers is evenly configuration in 0 ~ π scope.It is 9.5 mm that 12 the 1.5 square miniature analyzers of mm * 1.5 mm are installed in a diameter, on the stainless steel stent of thick about 2 mm, the position angle of these 12 miniature analyzers is followed successively by 0o, 16o, 33o, 49o, 66o, 82o, 90o, 98o, 114o, 131o, 147o, 164o.
9, surveyed by the zones of different of 2 dimension CCD face arrays 12 respectively through the light of 12 miniature analyzers.
10, the electric signal that is received by detector is transfused to computing machine after the AD conversion, after machine analysis and the processing, calculates corresponding optical constant as calculated.
In the middle of design of the present invention, incident angle continuous variable, automatic data collection, analysis and calculating.System has realized time resolution elliptically polarized light spectrometry.This invention may be used on various fields such as physics, chemistry, biomedicine, environmental science, and application prospect is extensive.
Claims (3)
1. time resolution elliptically polarized light spectral measurement system, it is characterized in that comprising connect successively as lower member: laser instrument, beam splitter, first catoptron, delayer, second catoptron, the 3rd catoptron, first beam expanding lens, sample, second beam expanding lens, the polarizer, hyperchannel analyzer, ccd detector, computer system, step motor; Wherein, laser instrument adopts tunable altra-fast fs laser as light source; The pulsed light of described light source outgoing is divided into two bundles through beam splitter, and a branch of is pump light, and is a branch of for surveying light; Pump light intensities is taken as 4-20 times that survey light intensity, pump light through first mirror reflects after successively by chronotron, second catoptron, the 3rd catoptron and first beam expanding lens, impinge perpendicularly on the sample; Described detection light is successively through inciding on the sample at a certain angle behind second beam expanding lens, the polarizer; After surveying the reflection of light process sample, reflected light is surveyed by ccd detector through the hyperchannel analyzer; Measuring system is by computer system control; Synchronous and the delay of surveying between light and the pump light is passed through a step motor control by computer system; Sample is installed in to have on the adsorbing specimen holder of negative pressure of vacuum, realizes harmless spectral detection.
2. time resolution elliptically polarized light spectral measurement system according to claim 1, it is characterized in that described hyperchannel analyzer by
mIndividual miniature analyzer constitutes, and establishes this
mThe position angle of individual miniature analyzer is
θ 1,
θ 2,
θ m , and the position angle
θ 1~
θ m Between 0 ~ π, evenly distribute;
mIt is 5-15 integer.
3. time resolution elliptically polarized light spectral measurement system according to claim 2 is characterized in that described computer system calculates relevant optical constant by following formula:
By analyzing angle A is done Fast Fourier Transform (FFT), close with the analyzer azimuthal variation from the light intensity of analyzer outgoing and to be:
Wherein
I 0It is light intensity
IDC component, all the other are AC compounent; Relation is arranged:
(2)
I BIt is DC component
I 0In background signal, come from the dark current of detector,
Be the constant relevant with system source; Go out ellipsometric parameter according to three coefficient calculations in (2) formula
r 0And cosD, both are expressed as:
Pass through light intensity
IThe numerical value Fourier transform is made at position angle to analyzer in (2) formula, and the value of trying to achieve each light intensity is:
In the formula
I i Be that the analyzer position angle is
A i The time ccd detector received light intensity signal,
lBe corresponding wavelength,
MBe the twice of analyzer group unit analyzer number, press in the one-period
A i Value is made the number of times that data are gathered; Ellipsometric parameter
r 0With cosD determined after, can calculate the specific inductive capacity of sample and other optical constant, wherein, the optics complex permittivity
e=
e 1+ i
e 2Can be calculated, that is:
And then obtain other optical constant: complex index of refraction
N, absorption coefficient
aAnd reflectivity
R:
Wherein
nBe refractive index,
kBe extinction coefficient, more than calculate and finish by computing machine.
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|---|---|---|---|
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103048047A (en) * | 2011-10-11 | 2013-04-17 | 中国科学院微电子研究所 | Vertical incidence broadband polarization spectrometer and optical measurement system comprising a phase element |
| CN103190886A (en) * | 2013-03-28 | 2013-07-10 | 四川大学 | Novel optical method detection system for biological tissue pathological changes |
| CN103217387A (en) * | 2013-03-22 | 2013-07-24 | 清华大学 | Method for measuring high temperature optical constant of metal oxide layer |
| CN103868595A (en) * | 2014-03-06 | 2014-06-18 | 湖南大学 | Spatially-separated pump-probe transient absorption spectrograph and realization method |
| TWI464387B (en) * | 2012-12-21 | 2014-12-11 | Univ Nan Kai Technology | Heterodyne interferometer based on the subtraction between optical interference signals designed for measuring the ellipsometric parameters of thin films |
| CN105092036A (en) * | 2014-05-04 | 2015-11-25 | 睿励科学仪器（上海）有限公司 | Synchronous trigger calibrating method and device in rotary device type spectroscopic ellipsometer |
| CN105158165A (en) * | 2015-06-26 | 2015-12-16 | 华中科技大学 | Ultrafast ellipsometer and measuring method |
| CN109374134A (en) * | 2018-10-30 | 2019-02-22 | 北京工业大学 | Superfast time resolution transient state reflectance spectrum imaging system |
| CN110411952A (en) * | 2019-07-15 | 2019-11-05 | 复旦大学 | The spectroscopic ellipsometry of more channel of polarization faces array detection obtains system and method |
| CN111665222A (en) * | 2020-07-17 | 2020-09-15 | 中国科学院长春光学精密机械与物理研究所 | Femtosecond pumping detection system and method |
| CN112630146A (en) * | 2020-11-26 | 2021-04-09 | 北京交通大学 | Space-time pumping detection control system and method |
| CN116930092A (en) * | 2023-07-20 | 2023-10-24 | 华东师范大学 | Broadband femtosecond time resolution circular dichroscope |
| CN117129426A (en) * | 2023-08-08 | 2023-11-28 | 华东师范大学 | Ultrafast time-resolved circular polarization emission spectrometer |
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Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103048047B (en) * | 2011-10-11 | 2015-01-07 | 中国科学院微电子研究所 | Vertical incidence broadband polarization spectrometer and optical measurement system comprising a phase element |
| CN103048047A (en) * | 2011-10-11 | 2013-04-17 | 中国科学院微电子研究所 | Vertical incidence broadband polarization spectrometer and optical measurement system comprising a phase element |
| TWI464387B (en) * | 2012-12-21 | 2014-12-11 | Univ Nan Kai Technology | Heterodyne interferometer based on the subtraction between optical interference signals designed for measuring the ellipsometric parameters of thin films |
| CN103217387A (en) * | 2013-03-22 | 2013-07-24 | 清华大学 | Method for measuring high temperature optical constant of metal oxide layer |
| CN103190886A (en) * | 2013-03-28 | 2013-07-10 | 四川大学 | Novel optical method detection system for biological tissue pathological changes |
| CN103868595B (en) * | 2014-03-06 | 2016-03-02 | 湖南大学 | The pumping-detection transient state absorption spectrometer that a kind of space is separated and implementation method |
| CN103868595A (en) * | 2014-03-06 | 2014-06-18 | 湖南大学 | Spatially-separated pump-probe transient absorption spectrograph and realization method |
| CN105092036A (en) * | 2014-05-04 | 2015-11-25 | 睿励科学仪器（上海）有限公司 | Synchronous trigger calibrating method and device in rotary device type spectroscopic ellipsometer |
| CN105092036B (en) * | 2014-05-04 | 2017-10-13 | 睿励科学仪器（上海）有限公司 | Synchronous triggering calibrating method and device in rotary device type spectroscopic ellipsometers |
| CN105158165A (en) * | 2015-06-26 | 2015-12-16 | 华中科技大学 | Ultrafast ellipsometer and measuring method |
| CN105158165B (en) * | 2015-06-26 | 2017-08-18 | 华中科技大学 | A kind of ultrafast ellipsometer device and measuring method |
| CN109374134A (en) * | 2018-10-30 | 2019-02-22 | 北京工业大学 | Superfast time resolution transient state reflectance spectrum imaging system |
| CN110411952A (en) * | 2019-07-15 | 2019-11-05 | 复旦大学 | The spectroscopic ellipsometry of more channel of polarization faces array detection obtains system and method |
| CN110411952B (en) * | 2019-07-15 | 2022-05-20 | 复旦大学 | Elliptical polarization spectrum acquisition system and method for multi-polarization channel surface array detection |
| CN111665222A (en) * | 2020-07-17 | 2020-09-15 | 中国科学院长春光学精密机械与物理研究所 | Femtosecond pumping detection system and method |
| CN112630146A (en) * | 2020-11-26 | 2021-04-09 | 北京交通大学 | Space-time pumping detection control system and method |
| CN116930092A (en) * | 2023-07-20 | 2023-10-24 | 华东师范大学 | Broadband femtosecond time resolution circular dichroscope |
| CN116930092B (en) * | 2023-07-20 | 2024-08-23 | 华东师范大学 | Broadband femtosecond time resolution circular dichroscope |
| CN117129426A (en) * | 2023-08-08 | 2023-11-28 | 华东师范大学 | Ultrafast time-resolved circular polarization emission spectrometer |
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Application publication date: 20110914 |