CN102169352B - Exhaust velocity control method of electric vacuum valve, exhaust velocity control system and determining method of valve opening set point - Google Patents

Exhaust velocity control method of electric vacuum valve, exhaust velocity control system and determining method of valve opening set point Download PDF

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Publication number
CN102169352B
CN102169352B CN 201010603574 CN201010603574A CN102169352B CN 102169352 B CN102169352 B CN 102169352B CN 201010603574 CN201010603574 CN 201010603574 CN 201010603574 A CN201010603574 A CN 201010603574A CN 102169352 B CN102169352 B CN 102169352B
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valve
pressure
valve opening
electric vacuum
exhaust velocity
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CN102169352A (en
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内藤正博
西垣绿
吉安一智
伊藤慎
梅泽俊祐
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CKD Corp
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CKD Corp
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Abstract

The invention provides an exhaust velocity control method of an electric vacuum valve, an exhaust velocity control system and a determining method of a valve opening set point. The valve opening set point of the electric vacuum valve can be simply set and switched with low cost in a manner that the pressure of the cavity approaches to the drop-off rate of a target pressure. The valve opening of an electric vacuum valve (21) is controlled by stage based on an equal ratio multiple. Exhaust is conducted from a viscous flow area by means of a vacuum pump (13) under various valve openings/ The vacuum pressure of the cavity is measured by a pressure sensor (15) to actually measure a pressure declining curve (Y1, Y2, Y3, Y4) which offsets in a manner of being approximate to the drop-off rate of the target pressure. The intersection points of the pressure declining curve is determined as the set points (P11, P12, P13) of the valve opening to switch the electric vacuum valve (21). The valve opening of the electric vacuum valve (21) is switched based on the set points (P11, P12, P13), and the exhaust velocity in the viscous flow area.

Description

The exhaust velocity control method of electric vacuum valve, exhaust velocity control system and valve opening set point determining method
Technical field
The present invention relates to make the valve opening that is configured in the electric vacuum valve between chamber and the vacuum pump set to change, come exhaust velocity control method, the electric vacuum valve of electric vacuum valve that exhaust velocity is controlled the exhaust velocity control system, be used for the valve opening set point determining method of the electric vacuum valve of exhaust velocity control.
Background technology
So far, vacuum technique uses in many-side.For example in semiconductor manufacturing process, take the avoidance of particulate, polluter and the generation etc. that prevents secondary product as purpose, use vacuum technique that the vacuum pressure of chamber is managed.That is, the valve opening of the vacuum gas discharge valve that disposes between chamber and vacuum pump by slow expansion is controlled from the exhaust velocity of chamber Exhaust Gas, controls extraction flow, discharge pressure from chamber in the mode that can not roll the deposit in the chamber.
In the exhaust velocity control method of for example putting down in writing in patent documentation 1, vacuum gas discharge valve uses the main-valve that possesses the large flow of control and the valve of controlling the sub-valve of low discharge.In the method, as shown in figure 26, when beginning from exhaust to through the schedule time, close main-valve, open sub-valve, exhaust velocity thus slows down, marginally carry out lentamente exhaust, to through after the schedule time, be full-gear by making main-valve when beginning from exhaust, accelerate exhaust velocity and carry out exhaust with large flow.According to this method, and only compare by the situation of main-valve control exhaust velocity, vacuum pressure is descended to approach linear state lentamente.
In addition, in the exhaust velocity control method of for example in patent documentation 2, putting down in writing, by controller produce successively based on give from the outside or be set in advance in vacuum pressure value that the target vacuum rate of pressure change the controller calculates as built-in command, by changing successively the built-in command of successively generation as the desired value of FEEDBACK CONTROL, to be compared by vacuum pressure measured value and the desired value of determination of pressure sensor, carry out FEEDBACK CONTROL as following control.According to the method, vacuum pressure pace of change (exhaust velocity) R3 is controlled to be necessarily, in from atmospheric drag flow zone V1～V6, can make vacuum pressure change linearly (for example with reference to patent documentation 2) with desirable Pressure Drop slope.
Patent documentation 1: Japanese kokai publication hei 11-166665 communique
Patent documentation 2: TOHKEMY 2000-163137 communique
Summary of the invention
But, because the exhaust velocity control method of patent documentation 1 record is the conduction (conductance) by sub-valve regulation and to make main-valve be these 2 states of conduction of full-gear just, so in the drag flow zone, obtain vacuum pressure, the exhaust velocity condition process is not impacted, and have the limit shortening evacuation time.
In addition, in the exhaust velocity control method of patent documentation 2 records, in order to carry out FEEDBACK CONTROL, need complicated control substrate, control program etc., the cost installation cost.
In recent years, semiconductor is used in various fields, to the also variation of requirement of the control of the exhaust velocity in the chamber.Therefore, industrial community requires a kind of exhaust velocity control method than record in the patent documentation 2 more cheap, and the exhaust velocity control method of the control accuracy between the exhaust velocity control method of putting down in writing in the exhaust velocity control method that can realize record in patent documentation 1 and the patent documentation 2.But, on corresponding to this demand, what become problem is: control achievement (precision, response, stability etc.) difference according to the exhaust piping system, and might produce harmful effect on process (the rolling of deposit, on the impact of the film that forms in the work etc.) by exhaust velocity in the drag flow zone.The control achievement of exhaust piping system can only be surveyed affirmation at the scene.In addition, adjusting at the scene exhaust velocity needs professional knowledge with the harmful effect of discharging process, is not what who can simple realization.
The present invention finishes in order to address the above problem a little, its purpose is, provide a kind of can so that the approaching mode of the pressure of chamber and goal pressure rate of return of angle (gradient) is simple and qurer set the valve opening of switching electric vacuum valve set point electric vacuum valve electric vacuum valve exhaust velocity control method, electric vacuum valve the exhaust velocity control system, be used for the valve opening set point determining method of the electric vacuum valve of exhaust velocity control.
In order to solve above-mentioned problem, the exhaust velocity control method of the electric vacuum valve of one aspect of the present invention is in the exhaust velocity control method of the valve opening of the electric vacuum valve in be provided in the exhaust piping system that chamber is connected with vacuum pump by control the electric vacuum valve of controlling exhaust velocity, comprise: pressure actual measurement operation, the valve opening of above-mentioned electric vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize above-mentioned vacuum pump to carry out exhaust from the drag flow zone, utilize the vacuum pressure of the above-mentioned chamber of determination of pressure sensor to fall curve with observed pressure; Exhaust velocity determines operation, make in above-mentioned pressure actual measurement operation actual measurement to the above-mentioned Pressure Drop curve of distinguishing by valve opening to be offset in time with the approximate mode of goal pressure rate of return of angle, above-mentioned Pressure Drop curve intersection point is each other determined the set point that switches for to the valve opening of above-mentioned electric vacuum valve; With vacuum pressure control operation, based on determining that in above-mentioned exhaust velocity the above-mentioned set point that determines in the operation switches the valve opening of above-mentioned electric vacuum valve, controls the above-mentioned exhaust velocity in the above-mentioned drag flow zone.
Said structure preferably includes the geometric ratio multiple of setting above-mentioned geometric ratio multiple and sets operation.
Said structure preferably includes the goal pressure rate of return of angle of setting above-mentioned goal pressure rate of return of angle and sets operation.
Said structure preferably in above-mentioned vacuum pressure control operation, makes the pressure of the above-mentioned chamber of above-mentioned determination of pressure sensor, when above-mentioned determination of pressure sensor arrives the vacuum pressure corresponding with above-mentioned set point, switches the valve opening of above-mentioned electric vacuum valve.
Said structure preferably has and is set up in parallel with above-mentioned electric vacuum valve and is connected with above-mentioned chamber, compare above-mentioned electric vacuum valve and can control the heavy caliber vacuum shut off valve of larger flow, in above-mentioned vacuum pressure control operation, in above-mentioned drag flow zone, change the valve opening of stating electric vacuum valve in the state incision that above-mentioned heavy caliber vacuum shut off valve is closed and control above-mentioned exhaust velocity, after breaking away from from above-mentioned drag flow zone or in the later valve opening of adjusting above-mentioned heavy caliber vacuum shut off valve of the viscosity step-down in above-mentioned drag flow zone, control above-mentioned exhaust velocity.
Said structure preferably in above-mentioned vacuum pressure control operation, is adjusted the valve opening of above-mentioned electric vacuum valve and is controlled above-mentioned exhaust velocity after breaking away from from above-mentioned drag flow zone.
In order to solve above-mentioned problem, the exhaust velocity control system of one aspect of the present invention is that the valve opening of the electric vacuum valve in be provided in the exhaust piping system that chamber is connected with vacuum pump by control is controlled in the exhaust velocity control system of exhaust velocity and comprised: the pressure transducer that the pressure of chamber is measured; The valve opening of above-mentioned electric vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize above-mentioned vacuum pump to carry out exhaust from the drag flow zone, utilize the vacuum pressure of the above-mentioned chamber of determination of pressure sensor to survey the unit with the pressure that curve falls in observed pressure; The above-mentioned Pressure Drop curve of distinguishing by valve opening that makes that above-mentioned pressure actual measurement unit surveys to be being offset in time with the approximate mode of goal pressure rate of return of angle, and above-mentioned Pressure Drop curve intersection point is each other determined exhaust velocity determining means for the set point that the valve opening of above-mentioned electric vacuum valve is switched; With the above-mentioned set point that determines based on above-mentioned exhaust velocity determining means the valve opening of above-mentioned electric vacuum valve is switched, controlled the vacuum pressure control module of the above-mentioned exhaust velocity in the above-mentioned drag flow zone.
In said structure, preferably have and be set up in parallel with above-mentioned electric vacuum valve and be connected with above-mentioned chamber, compare above-mentioned electric vacuum valve and can control the heavy caliber vacuum shut off valve of larger flow, above-mentioned vacuum pressure control module, in above-mentioned drag flow zone, change the valve opening of stating electric vacuum valve in the state incision that above-mentioned heavy caliber vacuum shut off valve is closed and control above-mentioned exhaust velocity, after breaking away from from above-mentioned drag flow zone or in the later valve opening of adjusting above-mentioned heavy caliber vacuum shut off valve of the viscosity step-down in above-mentioned drag flow zone, control above-mentioned exhaust velocity.
In order to solve above-mentioned problem, the valve opening set point determining method of one aspect of the present invention is the set point that decision is switched the valve opening of the described electric vacuum valve in the situation of controlling exhaust velocity by the valve opening of control electric vacuum valve, described electric vacuum valve is provided in the exhaust piping system that chamber is connected with vacuum pump, comprise: pressure actual measurement operation, the valve opening of above-mentioned electric vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize above-mentioned vacuum pump to carry out exhaust from the drag flow zone, obtain the Pressure Drop curve according to the vacuum pressure of the above-mentioned chamber of determination of pressure sensor; Determine operation with exhaust velocity, make the above-mentioned Pressure Drop curve of distinguishing by valve opening in above-mentioned pressure actual measurement operation, obtained to be offset in time with the approximate mode of goal pressure rate of return of angle, above-mentioned Pressure Drop curve intersection point is each other determined the set point that switches for to the valve opening of above-mentioned electric vacuum valve.
Foregoing invention is in order to make the control achievement based on vacuum pump, chamber, exhaust piping system directly be reflected on the exhaust velocity, the valve opening of electric vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize vacuum pump to carry out exhaust from the drag flow zone, utilize the vacuum pressure of determination of pressure sensor chamber to fall curve with observed pressure.That is, use the object apparatus that arranges of electric vacuum valve to fall curve by different valve opening observed pressures.Then, make actual measurement to the Pressure Drop curve of distinguishing by valve opening when being offset in time with the approximate mode of goal pressure rate of return of angle, the Pressure Drop curve with tight before the Pressure Drop curved intersection of valve opening.Therefore, Pressure Drop curve intersection point is each other determined to be the set point that the valve opening of electric vacuum valve is switched.Like this, when valve opening is changed according to the geometric ratio multiple, because the Pressure Drop curve corresponding with each valve opening is not overlapping with the approximate part of goal pressure rate of return of angle, so set point can not set meaninglessly.When vacuum pressure is controlled, based on set point the valve opening of electric vacuum valve is switched, change thus the conduction of exhaust piping system, the exhaust velocity in the control drag flow zone.At this moment, because electric vacuum valve only enlarges the geometric ratio multiple with valve opening when the pressure of chamber departs from the part that is similar to the goal pressure rate of return of angle, the pressure of chamber is descended near the goal pressure rate of return of angle again, thus the pressure of chamber in the drag flow zone also to descend with the approximate state of goal pressure rate of return of angle.
Like this, in foregoing invention, use is surveyed the Pressure Drop curve in the drag flow zone as the chamber that object is set, vacuum pump and the exhaust piping system of electric vacuum valve, so can be with the control achievement that object is set of electric vacuum valve, the harmful effect of the process in the drag flow zone is reflected in the decision of the set point that the valve opening of electric vacuum valve is switched.And, even determining the people of the set point of valve opening does not have for the dysgenic professional knowledge of getting rid of process, also can be only by the Pressure Drop curve being surveyed with the approximate mode of goal pressure rate of return of angle the Pressure Drop curve is offset in time, make the pressure of chamber and the set point that the goal pressure rate of return of angle closely determines valve opening.Its result, foregoing invention with in the drag flow zone, utilize main-valve and sub-valve that valve opening is carried out the situation that 2 sections controls control exhaust velocity to compare, can obtain in the mode that in the drag flow zone, process is not impacted vacuum pressure, exhaust controlled condition, shorten exhaust velocity.And, although foregoing invention can not make the pressure linearity of chamber descend as the situation of exhaust velocity being carried out FEEDBACK CONTROL, even but do not use complicated control substrate, control program etc., also more can make the pressure of chamber control point-blank exhaust velocity than the mode by sub-valve and main-valve control exhaust velocity with descending.
Thereby, according to foregoing invention, can be simply and qurer sets the set point that the valve opening of electric vacuum valve is switched so that the pressure of chamber and goal pressure rate of return of angle are approaching.
Foregoing invention can at random be set the geometric ratio multiple.Therefore, if for example set the geometric ratio multiple less, then can increase the quantity of the set point that the valve opening of electric vacuum valve is switched, set point is determined for the position approaching with the goal pressure rate of return of angle pressure of chamber to be changed smoothly.On the other hand, if for example set the geometric ratio multiple larger, then the quantity of the Pressure Drop curve of actual measurement reduces, and can shorten the time of the set point that determines valve opening.Thereby according to foregoing invention, setting value that can be by the geometric ratio multiple is adjusted degree that the pressure that makes chamber changes smoothly, is used for obtaining the time that can guarantee of the set point of valve opening, and each requirement of user is reflected in the exhaust velocity control.
Foregoing invention can at random be set the goal pressure rate of return of angle.Therefore, for example in the situation of wanting to make evacuation time to shorten, the mode set target pressure rate of return of angle that Yi Shi tilt angle is large gets final product.On the other hand, wanting in the situation of slow exhaust, the mode set target pressure rate of return of angle that Yi Shi tilt angle is little gets final product.Thereby, according to foregoing invention, by the setting of goal pressure rate of return of angle, can adjust the degree of the pressure variation of evacuation time, chamber, each requirement of user is reflected in the exhaust velocity control.
Foregoing invention monitors the pressure of chamber with determination of pressure sensor in the situation of carrying out vacuum pressure control.Be in the situation of the pressure corresponding with the set point of valve opening in the piezometry of chamber, the valve opening of electric vacuum valve is switched.Therefore, foregoing invention is in the situation that causes the set point of valve opening to be offset in time because of external disturbance etc., even do not carry out the correction of the set point skew of the valve opening that the set point of this this valve opening is later in conjunction with this skew, also can under the approximate state of the goal pressure rate of return of angle of the pressure that makes chamber and linearity, control exhaust velocity.
Foregoing invention arranges side by side the heavy caliber vacuum shut off valve with electric vacuum valve and is connected with chamber, the valve opening of switching electric vacuum valve in the drag flow zone is controlled exhaust velocity, after surpassing the drag flow zone or after the viscosity step-down in above-mentioned drag flow zone, adjust and compare electric vacuum valve and can control the valve opening of the heavy caliber vacuum shut off valve of larger flow and control exhaust velocity.Like this, in rolling easily the drag flow zone of deposit, utilize Motorized vacuum to carry out lentamente exhaust, when surpassing the drag flow zone then during the rolling possibility and reduce of deposit, utilize the heavy caliber vacuum shut off valve to carry out Quick air-discharge, so can make the pressure of chamber arrive target vacuum pressure from atmospheric pressure at short notice.
In the invention of said structure, control exhaust velocity because after breaking away from from the drag flow zone, also adjust the valve opening of electric vacuum valve, so can more positively prevent the control exhaust velocity of deposit with rolling.
Description of drawings
Fig. 1 is the summary construction diagram of the exhaust velocity control system that relates to of the 1st embodiment of the present invention.
Fig. 2 is the sectional view of electric vacuum valve, the expression closed condition.
Fig. 3 is illustrated near the drag flow zone of atmospheric pressure, makes valve opening with the figure of the Pressure Drop curve in the situation of same ratio variation.The longitudinal axis represents vacuum pressure, and transverse axis represents the time.
Fig. 4 is the figure that expression makes the state that Pressure Drop curve shown in Figure 3 is offset in time in the mode that is similar to the goal pressure rate of return of angle.The longitudinal axis represents vacuum pressure, and transverse axis represents the time.
Fig. 5 is illustrated near the drag flow zone of atmospheric pressure, makes valve opening according to the figure of the Pressure Drop curve in the situation of 2 times of geometric ratio multiples variations.The longitudinal axis represents vacuum pressure, and transverse axis represents the time.
Fig. 6 is the figure that expression makes the state that Pressure Drop curve shown in Figure 5 is offset in time in the mode that is similar to the goal pressure rate of return of angle.The longitudinal axis represents vacuum pressure, and transverse axis represents the time.
Fig. 7 is illustrated near the drag flow zone of atmospheric pressure, makes valve opening according to the figure of the Pressure Drop curve in the situation of 2 times of geometric ratio multiples variations of √.The longitudinal axis represents vacuum pressure, and transverse axis represents the time.
Fig. 8 is the figure that expression makes the state that Pressure Drop curve shown in Figure 7 is offset in time in the mode that is similar to the goal pressure rate of return of angle.The longitudinal axis represents vacuum pressure, and transverse axis represents the time.
Fig. 9 is the process flow diagram of the download action of exhaust velocity determination procedure.
Figure 10 is the figure that an example confirming picture is downloaded in expression.
Figure 11 is the figure that expression geometric ratio multiple is set an example of picture.
Figure 12 is the figure that expression goal pressure rate of return of angle is set an example of picture.
Figure 13 is the figure that the expression setting content is confirmed an example of picture.
Figure 14 is the figure that the expression USB storage is inserted an example of indication picture.
Figure 15 is the figure that expression copies an example of progress Zhuan Condition display frame.
Figure 16 is the figure that expression copies an example finishing the notice picture.
Figure 17 is the process flow diagram of exhaust velocity determination procedure.
Figure 18 is the process flow diagram of vacuum pressure control program.
Figure 19 is the summary construction diagram of the exhaust velocity control system that relates to of the 2nd embodiment of the present invention.
Figure 20 is the process flow diagram of exhaust velocity determination procedure.
Figure 21 is the figure of an example of expression pressure measured data input picture.
Figure 22 is the figure of an example of expression exhaust velocity control data validation picture.
Figure 23 is the figure that the expression storage medium arranges an example of indication picture.
Figure 24 is the figure that an example of picture is finished in the decision of expression exhaust velocity.
Figure 25 is the figure of the schematic configuration of expression decompression dry device.
Figure 26 is that expression is based on the figure of the exhaust velocity control method of 2 sections exhausts.
Figure 27 is that expression is based on the figure of the exhaust velocity control method of the electric vacuum valve of FEEDBACK CONTROL.
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.
(the 1st embodiment)
Figure 25 is the figure of the schematic configuration of expression decompression dry device 1.
The exhaust velocity control method of present embodiment is used in decompression dry device for example shown in Figure 25 1.Decompression dry device 1 is used for remaining the dried coating film that carries out substrate when decompression state is vacuum state in making chamber 10.Decompression dry device 1 is provided with exhaust piping system 16 between chamber 10 and vacuum pump 13.Exhaust piping system 16 is set side by side with electric vacuum valve 21 and heavy caliber vacuum shut off valve 12.Decompression dry device 1 increases and decreases the magnitude setting of exhaust piping system 16, heavy caliber vacuum shut off valve 12 and electric vacuum valve 21 according to the size of chamber 10.This decompression dry device 1 is controlled the extraction flow of 13 Exhaust Gas from chamber 10 to vacuum pump by electric vacuum valve 21 and heavy caliber vacuum shut off valve 12.
The management of the vacuum pressure of chamber 10 mainly depends on the ability of vacuum pump 13.The ability of vacuum pump 13 is determined by exhaust velocity S and the arrival vacuum pressure P of vacuum pump 13.Generally in the drag flow zone more than the following 100Pa of atmospheric pressure (105Pa), the exhaust velocity S of vacuum pump 13 is roughly certain, and the flow velocity of the gas in the chamber 10 is determined by the shape of chamber 10, the exhaust velocity S of vacuum pump 13 and the conduction C of exhaust piping system 16.In addition, when consisting of exhaust piping system 16 take the nominal diameter of vacuum pump 13 as benchmark, the actual effect exhaust velocity is roughly close to the exhaust velocity S of vacuum pump 13.In other words, the conduction C of exhaust piping system 16 becomes large.
Therefore, in the decompression dry device 1 of present embodiment, exhaust piping system 16 consists of take the nominal diameter of vacuum pump 13 as benchmark.And electric vacuum valve 21 is arranged in order to control the exhaust velocity S in the drag flow zone is connected chamber 10 in the exhaust piping system 16 that connects with vacuum pump.In this case, the conductive size of electric vacuum valve 21 becomes the domination key element of the exhaust velocity S of vacuum pump 13.Particularly, the exhaust velocity S of the conduction C of exhaust piping system 16 and vacuum pump 13 is determined by the synthesis mode of said parallel resistance in the electric loop.Namely, compare in the zone that the conduction C of exhaust piping system 16 fully dwindles in valve opening and to use in the situation of electric vacuum valve 21, the conduction C of exhaust piping system 16 is roughly determined by the conduction of electric vacuum valve 21, electric vacuum valve 21 is being used near the standard-sized sheet with in as the situation near the condition of the conduction C of exhaust piping system 16, compare the conduction of electric vacuum valve 21, the conduction C of exhaust piping system 16 is lower state.
But, chamber 10 is evacuated to from atmospheric pressure (105Pa) low vacuum (not enough 105Pa but more than the 102Pa), when vacuum (not enough 102Pa but more than the 101Pa), high vacuum (not enough 101Pa), flowing of the gas that flows in the exhaust piping system 16 changes to drag flow, intermediate flow, molecular flow.The drag flow zone (more than the following 100Pa of atmospheric pressure (105Pa)) after just having begun to vacuumize from atmospheric pressure, when being controlled at suddenly the valve opening of electric vacuum valve 21, heavy caliber vacuum shut off valve 12 near the standard-sized sheet, might roll the deposit in the chamber 10, it is attached on the substrate, to the injury of substrate own.On the other hand, enough hour of the valve opening that makes electric vacuum valve 21, heavy caliber vacuum shut off valve 12 in order not roll the deposit in the chamber 10, exhaust velocity was slack-off, and making vacuum pressures in the chamber 10 arrive the target vacuum pressure needs the long period.
Therefore, decompression dry device 1 shown in Figure 25 is according to before opening heavy caliber vacuum shut off valve 12, make the multistage variation of valve opening of electric vacuum valve 21 make the vacuum pressure in the chamber 10 drop to the mode of vacuum state from atmospheric pressure state with the state that approaches linear goal pressure rate of return of angle, to controlling from the exhaust velocity of chamber 10 Exhaust Gas.Decompression dry device 1 utilizes pressure transducer 15 to measure the vacuum pressure of chamber 10, when the piezometry result according to pressure transducer 15 detects vacuum pressure in the chamber 10 and reached predetermined pressure, open heavy caliber vacuum shut off valve 12 extraction flow is increased.By such exhaust velocity control, decompression dry device 1 makes when becoming vacuum state from atmospheric pressure state, can not roll the deposit in the chamber 10, it is attached on the substrate and to carrying out the adjusting of air capacity in the injury of substrate ground own, and the shortening of realization evacuation time.
The schematic configuration of＜exhaust velocity control system 〉
Fig. 1 is the summary construction diagram of the exhaust velocity control system 66 that relates to of the 1st embodiment of the present invention.
Exhaust velocity control system 66 shown in Figure 1 comprises that server 61, internet 62, personal computer are (hereinafter referred to as " computing machine ".) 63, controller 65, pressure transducer 15, electric vacuum valve 21 and the vacuum pump 13 of decompression dry device 1 and consist of.
Store the exhaust velocity determination procedure in the server 61 shown in Figure 1, this exhaust velocity determination procedure is used at the set point that situation about controlling from the exhaust velocity of chamber 10 Exhaust Gas is made decision the valve opening of electric vacuum valve 21 is switched.Server 61 can be connected with computing machine 63 communicatedly by internet 62.
Computing machine 63 is known computer.Computing machine 63 is connected with server 61, downloads the exhaust velocity determination procedure.In addition, computing machine 63 is used for setting valve opening the geometric ratio multiple that changes and the goal pressure rate of return of angle that makes the pressure drop of chamber 10 that makes electric vacuum valve 21 in the situation of control exhaust velocity.Computing machine 63 is stored in the USB storage 64 the exhaust velocity determination procedure of download, the geometric ratio multiple of setting and the goal pressure rate of return of angle of setting.
Controller 65 shown in Figure 1 is connected with USB storage 64, and the geometric ratio multiple of exhaust velocity determination procedure, setting and the goal pressure rate of return of angle of setting copy to the recording medium of controller 65 from USB storage 64.Be provided with the selected cell 65a that preparation pattern and execution pattern are selected in the controller 65, the set point that the ready mode decision is switched the valve opening of electric vacuum valve 21, execution pattern is controlled exhaust velocity based on the set point that determines in the ready mode, executive process.
Controller 65 is carried out the exhaust velocity determination procedure after selecting ready mode by selected cell 65a.In this case, controller 65 in the mode of the valve opening that is classified to control electric vacuum valve 21 according to the geometric ratio multiple to electric vacuum valve 21 delivery valve aperture control signals.Controller 65 drives vacuum pump 13 and carries out exhaust from the drag flow zone under each valve opening, obtain the piezometry data that pressure transducer 15 is measured.Thereafter, controller 65 is obtained the pressure of expression chamber 10 and the Pressure Drop curve of the relation of time (for example with reference to Fig. 5 Y1, Y2, Y4, Y8) according to the piezometry data that obtain by different valve openings, make by valve opening distinguish the Pressure Drop curve be offset in time in the mode that is similar to goal pressure rate of return of angle (for example with reference to Fig. 6 X), the intersection point of Pressure Drop curve is determined to be set point that the valve opening of electric vacuum valve 21 is switched (for example with reference to Fig. 6 P11, P12, P13).
Then, controller 65 is after selecting execution pattern by selected cell 65a, the valve opening switching signal that to switch the valve opening of electric vacuum valve 21 based on the set point P11, the P12 that determine, P13 (for example with reference to Fig. 6) exports electric vacuum valve 21 to, the exhaust velocity of the vacuum pump 13 in the control drag flow zone.
Sort controller 65 is equivalent to an example of " pressure actual measurement unit ", " exhaust velocity determining means " and " vacuum pressure control module ".
The structure of＜electric vacuum valve 〉
Fig. 2 is the sectional view of electric vacuum valve 21, the expression closed condition.
Electric vacuum valve 21 outward appearances are constructed as follows: valve body 24 and cylinder block 25 are integrated by bolt 55, and cylinder block 25, lid 26, stepper motor 27 is integrated by bolt 28.
In the valve section 22, be communicated with by valve chamber 53 at the 1st port 51 of valve body 24 openings and the 2nd port 52.Valve chamber 53 flatly is provided with valve seat 54 in the peristome periphery of the 1st port 51 openings.Take in the valve chamber 53 and valve seat 54 butts or the spool 42 that separates.
In the valve section 22, be communicated with by valve chamber 53 at the 1st port 51 of valve body 24 openings and the 2nd port 52.The peristome periphery at the 1st port 51 openings in the valve chamber 53 flatly is provided with valve seat 54.Take in the valve chamber 53 and valve seat 54 butts or the spool 42 that separates.
Drive division 23 is converted to rectilinear motion with rotatablely moving of stepper motor 27 and is delivered to spool 42.The output shaft 30 of stepper motor 27 to be formed on cover 26 and cylinder block 25 between accommodation space section 31 outstanding.Clamping has bearing 32 between lid 26 and cylinder block 25, and this bearing 32 is keeping support 33 with rotating freely.Support 33 is connected with connector 58 by output shaft 30 in the upper end, by the fixing feed nut 34 of a plurality of gib screws 35, can utilize the rotation amount of the rotation amount control feed nut 34 of stepper motor 27 in the bottom.
Driving shaft 37 is inserted through the retainer nut 38 of being fixed by gib screw 39 on cylinder block 25.The hexagonal locking axial region 37a in cross section that is of driving shaft 37 is inserted through on the retainer nut 38 the hexagonal anti-porosity 38a that forms, and axially comes and goes rectilinear motion with the state of restricting rotation.Feed screw axle 36 screws togather with feed nut 34 and is engaged in the upper end of driving shaft 37, and the rectilinear motion that rotatablely moving of feed nut 34 changed into axially is delivered to driving shaft 37.
In the bottom of driving shaft 37, spool 42 connects by link 40.Spool 42 comprises bellows dish 47, valve disc 48 and edge 49, consists of by its coincidence is fixed in link 40 integratedly by attaching nut 43.Annular seal parts 50 are formed by material that can elastic deformation, are installed in the ant groove that forms between bellows dish 47 and the valve disc 48.Return spring 44 shrink be arranged on and spring retainer 45 between, always spool 42 is applied acting force to valve seat 54 directions.Link 40 has axially clearance with respect to driving shaft 37, by connecting in conjunction with pin 41, utilizes the spring torque that returns spring 44 to apply seal load.Bellows 46, the upper end with by the holding part 46a of cylinder block 25 and valve body 24 clampings welding, weld with bellows dish 47 bottom.Interior flexible at valve chamber 53 corresponding to moving up and down of spool 42, so that the particulate of the generations such as sliding part of driving shaft 37 can not flow out in stream.
Herein, be fixed with on the stepper motor 27 for the scrambler 29 that the swing offset amount of the machinery of not shown rotor is carried out instrumentation.Scrambler 29 can be connected communicatedly with the controller 65 of decompression dry device 1, and the instrumentation result is outputed to controller 65.Controller 65 is connected with the not shown coil of stepper motor 27, based on the instrumentation signal of scrambler 29 to not shown coil power supply (valve opening control signal), the valve opening of control electric vacuum valve 21.
In this electric vacuum valve 21, spool 42 and valve seat 54 butts will cut off between the 1st port 51 and the 2nd port 52 usually.From this state, when stepper motor 27 rotated to positive dirction, feed nut 34 rotate integratedly by support 33 and output shaft 30, and this rotatablely moves and is converted to the rectilinear motion of going up direction (valve opening position) in the figure and passes to feed screw axle 36.Driving shaft 37 rises integratedly with feed screw axle 36, by link 40 pull-up spools 42.Thus, spool 42 is communicated with the 1st and the 2nd port 51,52 from valve seat 54 separation.Electric vacuum valve 21 can be controlled tiny flow quantity by fluid leakage in the zone that the elastic deformation amount who makes annular seal parts 50 changes, and then controls extraction flow corresponding to fractional dose at spool 42 from the zone that valve seat 54 separates.Its valve opening is controlled by the rotation amount of the not shown rotor of stepper motor 27.
On the other hand, when stepper motor 27 rotated to negative direction, feed nut 34 rotated to negative direction integratedly with output shaft 30, and feed screw axle 36 is descended.Driving shaft 37 descends integratedly with feed screw axle 36, makes spool 42 by link 40 and valve seat 54 butts.At this moment, after spool 42 and valve seat 54 butts, return spring 44 and with link 40 with in conjunction with clearance amount between the pin 41 spool 42 is pressed down so that annular seal parts 50 and valve seat 54 driving fits seal to valve seat 54 1 sides.
＜Pressure Drop curve 〉
Fig. 3 is illustrated near the drag flow zone (more than the following 100Pa of atmospheric pressure (105Pa)) of atmospheric pressure to make valve opening with the figure of the Pressure Drop curve Y1 in the situation of same ratio variation, Y2, Y3, Y4, Y5, Y6, Y7, Y8.The longitudinal axis represents vacuum pressure (Pa), and transverse axis represents the time (Sec).Fig. 4 is that expression makes Pressure Drop curve Y1 shown in Figure 3, Y2, Y3, Y4, Y5, Y6, Y7, Y8 with the figure of the state that is offset in time with the approximate mode of goal pressure rate of return of angle X.The longitudinal axis represents vacuum pressure, and transverse axis represents the time.
The vacuum pressure normalization of the longitudinal axis record of Fig. 3 and Fig. 4 (dimension is 1 change), 1.0 is atmospheric pressure, is 1.01325 * 105Pa.In addition, the numeral of the time of the transverse axis of Fig. 3 record is in order conveniently to mark, might not to be defined in this time.Fig. 3 and Y1～Y8 shown in Figure 4 are illustrated in the valve opening that makes electric vacuum valve 21 with the Pressure Drop curve of distinguishing by valve opening in the situation of certain expanded in size.Pressure Drop curve Y1～Y8 is with the ability normalization expression of electric vacuum valve 21, and the size of the numeral that alphabetical Y adds represents the size of fluid ability.The X of Fig. 4 is the goal pressure rate of return of angle of target gradient of the pressure of expression chamber 10.X1～X8 of Fig. 3 and Fig. 4 represents to seek the result of the part that is similar to goal pressure rate of return of angle X among Pressure Drop curve Y1～Y8.
As shown in Figure 3, with certain size (for example every 1mm) when enlarging interimly, the approximate part X1 approximate with goal pressure rate of return of angle X among Pressure Drop curve Y1～Y8～X8 reduces along with the expansion of valve opening in the valve opening that makes electric vacuum valve 21 from Pressure Drop curve Y1 to Pressure Drop curve Y8.This is because valve opening is larger, descends while the pressure of vacuum pressure is described larger curve.
In addition, as shown in Figure 3, the approximate part X1 of Pressure Drop curve Y1～Y8～X8, valve opening more enlarges, and overlapping part more increases.That is, to approximate part X2, the X3 of Pressure Drop curve Y2, Y3, Y4, when X4 compares, the approximate part X2 part of the approximate part X3 of Pressure Drop curve Y3 and Pressure Drop curve Y2 is overlapping, and overlapping with the approximate part X4 part of Pressure Drop curve Y4.In addition, the approximate part X4 of Pressure Drop curve Y4～Y8～X8 is overlapped.
Therefore, as shown in Figure 4, make Pressure Drop curve Y2～Y8 with situation about moving along time shaft with the approximate mode of goal pressure rate of return of angle X under, with the valve opening of electric vacuum valve 21 from the valve opening corresponding with Pressure Drop curve Y1 after expand valve opening corresponding to Pressure Drop curve Y2 to, in the way of the goal pressure rate of return of angle X2 of Pressure Drop curve Y2, expand the valve opening of electric vacuum valve 21 to the valve opening corresponding with Pressure Drop curve Y3 from the valve opening corresponding with Pressure Drop curve Y2.Again thereafter, with the valve opening of electric vacuum valve 21 from the valve opening corresponding with Pressure Drop curve Y3 expand to valve opening corresponding to Pressure Drop curve Y4 later on immediately with the valve opening of electric vacuum valve 21 from expanding the valve opening corresponding with Pressure Drop curve Y6 to valve opening corresponding to Pressure Drop curve Y5, expand the valve opening of electric vacuum valve 21 to the valve opening corresponding with Pressure Drop curve Y7 from the valve opening corresponding with Pressure Drop curve Y6 immediately thereafter again.Then further expand the valve opening of electric vacuum valve 21 to the valve opening corresponding with Pressure Drop curve Y8 from the valve opening corresponding with Pressure Drop curve Y7, chamber 10 is evacuated to complete vacuum.That is, as shown in Figure 4, in the situation of valve opening with certain expanded in size with electric vacuum valve 21, produced several points must change to next valve opening immediately behind the set point of change valve opening set point.Such set point need not be controlled with exhaust in fact, becomes meaningless set point.
＜vacuum pressure characteristic 〉
As mentioned above, in the actual measurement that the valve opening of change electric vacuum valve 21 is carried out the Pressure Drop curve, if the inventor has found valve opening is enlarged by the geometric ratio multiple, so that the mode that the Pressure Drop curve that obtains in each valve opening and goal pressure rate of return of angle X are similar to, set the timing that the valve opening of electric vacuum valve 21 is switched, then can control exhaust velocity so that do not make overlappingly pressure in the chamber 10 to descend with the approximate state of goal pressure rate of return of angle X with the approximate part of goal pressure rate of return of angle X in the Pressure Drop curve.Below, describe particularly.
Fig. 5 is illustrated near the drag flow zone of atmospheric pressure, makes valve opening according to the figure of the Pressure Drop curve Y1 in the situation of 2 times of geometric ratio multiples variations, Y2, Y4, Y8.The longitudinal axis represents vacuum pressure, and transverse axis represents the time.Fig. 6 is that expression makes Pressure Drop curve Y1 shown in Figure 5, Y2, Y4, Y8 with the figure of the state that is offset in time with the approximate mode of goal pressure rate of return of angle X.The longitudinal axis represents vacuum pressure, and transverse axis represents the time.
The Y1 of Fig. 5, Y2, Y4, Y8 are that expression is set the valve opening of electric vacuum valve 21 according to 2 times of geometric ratio multiples, the result's who measures with the pressure of 15 pairs of chambers 10 of pressure transducer Pressure Drop curve.The X of Fig. 6 is the goal pressure rate of return of angle of target gradient of the pressure of expression chamber 10.The X1 of Fig. 5, X2, X4, X8 represent to seek the result of the part that is similar to goal pressure slope X among Pressure Drop curve Y1, Y2, Y4, the Y8.Pressure Drop curve Y1, Y2, Y4, Y8 represent that with the ability normalization of electric vacuum valve 21 size of the numeral that alphabetical Y adds represents the size of fluid ability.
As shown in Figure 6, making Pressure Drop curve Y1, Y2, Y4, Y8 when being offset in time with the approximate mode of goal pressure rate of return of angle X, do not make approximate part X1, the X2 of Pressure Drop curve Y1 shown in Figure 5, Y2, Y4, Y8, set point P 11, P12, the P13 that X4, X8 set valve opening overlappingly.Namely, if shown in the set point P11 of Fig. 6, after vacuumizing beginning to time t11 process during (perhaps vacuum pressure drop to from atmospheric pressure pressure Q11 during) valve opening of electric vacuum valve 21 is set as the valve opening corresponding with Pressure Drop curve Y1, shown in the set point P12 of valve opening among the figure, from time t11 to time t12 process during (perhaps vacuum pressure drop to from pressure Q11 pressure Q12 during) valve opening of electric vacuum valve 21 is set as the valve opening corresponding with Pressure Drop curve Y2, shown in the set point P13 of valve opening among the figure, from time t12 to time t13 process during (perhaps vacuum pressure drop to from pressure Q12 pressure Q13 during) valve opening of electric vacuum valve 21 is set as the valve opening corresponding with Pressure Drop curve Y4, shown in the set point P14 of valve opening among the figure, (vacuum pressure drops to after the pressure Q13) is set as the valve opening corresponding with Pressure Drop curve Y8 with the valve opening of electric vacuum valve 21 after time t13, then by the valve opening of electric vacuum valve 21 was enlarged by 4 stages, can be pressed onto complete vacuum so that vacuum pressure vacuumizes near the state of goal pressure rate of return of angle X from atmosphere.
Fig. 7 is illustrated near the drag flow zone of atmospheric pressure, makes valve opening according to the figure of the Pressure Drop curve Y1 in the situation of 2 times of geometric ratios variations of √, Y1.41, Y2, Y2.82, Y4, Y5.64, Y8.The longitudinal axis represents vacuum pressure, and transverse axis represents the time.Fig. 8 is illustrated in to make Pressure Drop curve Y1 shown in Figure 7, Y1.41, Y2, Y2.82, Y4, Y5.64, Y8 with the figure of the state that is offset in time with the approximate mode of goal pressure rate of return of angle.The longitudinal axis represents vacuum pressure, and transverse axis represents the time.
The Y1 of Fig. 7, Y1.41, Y2, Y2.82, Y4, Y5.64, Y8 are that expression is set the valve opening of electric vacuum valve 21 according to 2 times of geometric ratio multiples of √, the result's who measures with the pressure of 15 pairs of chambers 10 of pressure transducer Pressure Drop curve.The X of Fig. 8 is the goal pressure rate of return of angle of target gradient of the pressure of expression chamber 10.The X1 of Fig. 7, X1.41, X2, X2.82, X4, X5.64, X8 represent to seek the result of the part that is similar to goal pressure slope X among Pressure Drop curve Y1, Y1.41, Y2, Y2.82, Y4, Y5.64, the Y8.The Pressure Drop curve Y1 of Fig. 7 and Fig. 8, Y1.41, Y2, Y2.82, Y4, Y5.64, Y8 represent that with the ability normalization of electric vacuum valve 21 size of the numeral that alphabetical Y adds represents the size of fluid ability.
As shown in Figure 8, making Pressure Drop curve Y1, Y1.41, Y2, Y2.82, Y4, Y5.64, Y8 when being offset in time with the approximate mode of goal pressure rate of return of angle X, do not make Pressure Drop curve Y1 shown in Figure 7, Y1.41, Y2, Y2.82, Y4, approximate part X1, the X1.41 of Y5.64, Y8, X2, X2.82, X4, X5.64, X8 set overlappingly set point P21, P22, P23, P24, P25, the P26 of valve opening.Namely, if shown in the set point P21 of the valve opening of Fig. 8, after vacuumizing beginning to time t21 process during (perhaps vacuum pressure drop to from atmospheric pressure pressure Q21 during) valve opening of electric vacuum valve 21 is set as the valve opening corresponding with Pressure Drop curve Y1, shown in the set point P22 of valve opening among the figure, from time t21 to time t22 process during (perhaps vacuum pressure drop to from pressure Q21 pressure Q22 during) valve opening of electric vacuum valve 21 is set as the valve opening corresponding with Pressure Drop curve Y1.41, shown in the set point P23 of valve opening among the figure, during from time t22 to time t23 (perhaps vacuum pressure drop to from pressure Q22 pressure Q23 during) valve opening of electric vacuum valve 21 is set as the valve opening corresponding with Pressure Drop curve Y2, shown in the set point P24 of valve opening among the figure, during from time t23 to time t24 (perhaps vacuum pressure drop to from pressure Q23 pressure Q24 during) valve opening of electric vacuum valve 21 is set as the valve opening corresponding with Pressure Drop curve Y2.82, shown in the set point P25 of valve opening among the figure, during from time t24 to time t25 (perhaps vacuum pressure drop to from pressure Q24 pressure Q25 during) valve opening of electric vacuum valve 21 is set as the valve opening corresponding with Pressure Drop curve Y4, shown in the set point P26 of valve opening among the figure, during from time t25 to time t26 (perhaps vacuum pressure drop to from pressure Q25 pressure Q26 during) valve opening of electric vacuum valve 21 is set as the valve opening corresponding with Pressure Drop curve Y5.64, (perhaps vacuum pressure drops to after the pressure Q26) is set as the valve opening corresponding with Pressure Drop curve Y8 with the valve opening of electric vacuum valve 21 after time t26, then by the valve opening of electric vacuum valve 21 was enlarged by 7 stages, can be pressed onto complete vacuum so that vacuum pressure vacuumizes near the state of goal pressure rate of return of angle X from atmosphere.
Thereby as can be known, if such as Fig. 6 and shown in Figure 8, the valve opening of electric vacuum valve 21 is set with the geometric ratio multiple, so that make the time shaft skew by the Pressure Drop curve of each valve opening acquisition of setting and the mode that goal pressure rate of return of angle X is similar to, then can not make the set point that with overlapping determine transfer valve aperture approximate with goal pressure rate of return of angle X of Pressure Drop curve.That is the gas that, makes approx chamber 10 with the goal pressure rate of return of angle X of straight line as can be known is to vacuum pump 13 exhausts, as long as the valve opening geometric ratio of electric vacuum valve 21 is set.And if determine as can be known geometric ratio multiple (perhaps valve opening being switched at some), the set point of valve opening is to determine inevitably according to the goal pressure rate of return of angle X that sets, and does not need inadequate setting.
When Fig. 6 and chart shown in Figure 8 are compared, if set the value of geometric ratio multiple less as can be known, then shown in the set point P21～P26 of the set point P11～P13 of valve opening among the figure and valve opening, the part that links to each other of Pressure Drop curve is close to goal pressure rate of return of angle X, and continuous the becoming of Pressure Drop curve can not wasted.That is, set the value of geometric ratio multiple less, make the number of times that the valve opening of electric vacuum valve 21 is switched more, the rectilinearity of decline that then more can vacuum pressure is controlled exhaust velocity well.
In addition, such as Fig. 6 and shown in Figure 8, if set the value of geometric ratio multiple larger, then the quantity of the Pressure Drop curve of actual measurement can be less.Particularly, the Pressure Drop curve that the geometric ratio multiple is set as in 2 times the situation needs 4, relative therewith, the Pressure Drop curve that the geometric ratio multiple is set as in the situation of 2 times of √ needs 7, the geometric ratio multiple is set as 2 times situation and compares with the situation that the geometric ratio multiple is set as 2 times of √, the quantity of Pressure Drop curve can reduce 3.Owing to the Pressure Drop curve negotiating is set as the valve opening of electric vacuum valve 21 to come to be pressed onto complete vacuum from atmosphere according to the valve opening of geometric ratio multiple and vacuumize and obtain, so obtaining of Pressure Drop curve needs the time as can be known.Thereby, reduce the quantity of the Pressure Drop curve that should obtain if set the value of geometric ratio multiple large, then the time of obtaining of Pressure Drop curve shortens, and the mode that can shorten to be similar to goal pressure rate of return of angle X determines the time of the valve opening of electric vacuum valve 21.
The exhaust velocity control method of＜electric vacuum valve: exhaust velocity control data generate action 〉
Exhaust velocity control method to the electric vacuum valve that utilizes above-mentioned vacuum pressure characteristic describes.Fig. 9 is the process flow diagram of the download action of exhaust velocity determination procedure.Figure 10～Figure 16 is the figure of an example of the upper picture that shows of expression display 63a.Figure 17 is the process flow diagram of exhaust velocity determination procedure.Figure 18 is the process flow diagram of vacuum pressure control program.
Computing machine 63 is according to the requirement from the user, in the step 1 of Fig. 9 (hereinafter to be referred as " S1 ".) in, make the display 63a of computing machine 63 show download affirmation picture shown in Figure 10.In that download confirms that picture shows " downloading the exhaust velocity determination procedure, agreement? " if, downloading, the user clicks the button B1 of "Yes" with mouse etc.So computing machine 63 is connected with server 61 by internet 62, begins to download the exhaust velocity determination procedure from server 61.Computing machine 63 standbies (S2:No of Fig. 9) till the download of finishing the exhaust velocity determination procedure.
When the download of exhaust velocity determination procedure is finished (S2:Yes), computing machine 63 makes geometric ratio multiple setting picture as shown in figure 11 show at display 63a in the S3 of Fig. 9.The geometric ratio multiple is set in the picture and is provided with geometric ratio multiple input field B3.The user (is 2 times herein from the keyboard of computing machine 63 with desirable geometric ratio multiple.) be input among the geometric ratio multiple input field B3, again with hit OK button B4 such as mouses.
Computing machine 63 judges that according to OK button B4 is clicked the geometric ratio multiple of valve opening sets (S4 of Fig. 9), in S5, makes as shown in figure 12 goal pressure rate of return of angle set picture and shows at display 63a.In the goal pressure rate of return of angle is set picture, be provided with for input and be pressed onto the evacuation time input field B6 that complete vacuum makes the goal pressure rate of return of angle input field B5 of the goal pressure rate of return of angle X that vacuum pressure reduces with linearity and is used for the input evacuation time from atmosphere.The user by in goal pressure rate of return of angle input field B5 with the manual desirable goal pressure rate of return of angle X of input such as mouse drag, perhaps the desirable evacuation time of input in evacuation time input field B6 decides goal pressure rate of return of angle X.For example, wishing in the short situation of evacuation time, shown in Xa among the figure, the goal pressure rate of return of angle X De Pour that shows among the goal pressure rate of return of angle input field B5 is tiltedly strengthened, on the other hand, wishing in the long situation of evacuation time, shown in XB among the figure, make that display-object Pressure Drop slope X De Pour tiltedly reduces among the goal pressure rate of return of angle input field B5.In addition, for example, also can set according to the time of inputting among the evacuation time input field B6 length of evacuation time.In the situation of having inputted evacuation time, the goal pressure rate of return of angle X that begins from atmospheric pressure is presented at the goal pressure rate of return of angle input field B5 automatically according to evacuation time.After the setting of goal pressure rate of return of angle X or evacuation time was finished, the user used mouse hit OK button B7.
Computing machine 63 judges that goal pressure rate of return of angle X sets (S6:Yes) when OK button B7 is clicked, in the S7 of Fig. 9, make setting content as shown in figure 13 confirm that picture shows at display 63a.Confirm in the picture at setting content, in setting expression hurdle B8, demonstrate the geometric ratio multiple of the valve opening that is set by the user and the goal pressure rate of return of angle X that is set by the user.The user confirm to set the displaying contents of expression hurdle B8 correct after, click the button B9 of "Yes" with mouse.Wherein, want change setting to represent to click the button B10 of " change " with mouse in the situation of displaying contents of hurdle B8 the user.(S8 of Fig. 9: change), computing machine 63 turns back to the S3 of Fig. 9, again shows geometric ratio multiple setting picture as shown in figure 11 in this case.
When setting content confirms that the button B9 of "Yes" of picture is clicked (S8:OK of Fig. 9), computing machine 63 makes as shown in figure 14 USB storage insert the indication picture to show at display 63a.Display case is as " copying to the geometric ratio multiple of exhaust velocity determination procedure, setting, the goal pressure rate of return of angle of setting in the USB storage, please USB storage is inserted USB port in USB storage insertion indication picture." indication.The user clicks the OK button B11 that USB storage is inserted the indication picture after as indicated USB storage 64 being inserted the USB port of computing machine 63.Computing machine 63 like this standby to detecting (S11:No of Fig. 9) till the USB storage 64.On the other hand, computing machine 63 is (S11:Yes) when detecting USB storage 64, and in the S 12 of Fig. 9, beginning copies the geometric ratio multiple of valve opening of exhaust velocity determination procedure, setting and the goal pressure rate of return of angle X of setting in the USB storage 64.The progress Zhuan Condition that copies shows in the progress that copies Zhuan Condition display frame as shown in figure 15.Computing machine 63 is when copying when finishing, and in the S13 of Fig. 9, shows copying and finish the notice picture as shown in figure 16.Copy finish the notice picture in display case as " copying and finish.Please USB storage is extracted from USB port.Then, please the USB storage of extracting is connected with the controller of the pressure of control chamber, the geometric ratio multiple of exhaust velocity determination procedure, setting and the goal pressure rate of return of angle of setting are copied in the controller.Please by the selected cell of controller select ready mode determined the set point of valve opening after, by selected cell select execution pattern executive process thereafter." indication.The user has understood according to displaying contents after the sequence of operation thereafter, clicks and copies the OK button B12 that finishes the notice picture.So computing machine 63 finishes the processing of Fig. 9, the display frame of display 63a is turned back to initial picture.
The user holds USB storage 64 and moves to place, controller 65 place.Then, the USB port of USB storage 64 with controller 65 is connected, 65 copy the geometric ratio multiple of exhaust velocity control program, setting and the goal pressure rate of return of angle X of setting from USB storage 64 to controller.After copying end, ready mode is selected in user by selecting unit 65.So controller 65 is carried out the exhaust velocity determination procedure that copies.Figure 17 is the process flow diagram of exhaust velocity determination procedure.
Shown in the S15 of Figure 17, the processing that controller 65 will determine exhaust velocity just in commission this situation is reported the user by display lamp etc.Because reporting of this display lamp etc., the user recognizes and can't make decompression dry device 1 executive process.
Then, among the S16, controller 65 is read the geometric ratio multiple of the valve opening of setting, obtains successively the Pressure Drop curve and is also stored.That is, controller 65 is obtained the valve opening of electric vacuum valve 21 according to the geometric ratio multiple that copies from USB storage 64.Particularly, be set at the geometric ratio multiple in 2 times the situation, the valve opening of electric vacuum valve 21 is tried to achieve and is 12.5%, 25%, 50%, 100% of the stroke from the off-position to the fully open position.Then, obtain the Pressure Drop curve according to each valve opening of trying to achieve.Namely, 12.5% the valve opening steering order that controller 65 will be for example be set as stroke from the off-position to the fully open position with the valve opening of electric vacuum valve 21 is sent to electric vacuum valve 21, drives vacuum pump 13 and makes the pressure of chamber 10 drop to complete vacuum from atmospheric pressure.At this moment, controller 65 is from being used for measuring the pressure transducer 15 input pressure determination datas of the pressure in the chamber 10.Then, controller 65 is shown in the Y1 of for example Fig. 5, according to the piezometry data of inputting, obtain the expression vacuum pressure of chamber 10 and the Pressure Drop curve of the relation of time, and the Pressure Drop curve of trying to achieve and the valve opening 12.5% of setting are associated with storing in storage area.Therewith in the same manner, controller 65 with the valve opening of electric vacuum valve 21 be set as respectively stroke from the off-position to the fully open position 25%, 50%, 100% and obtain the piezometry data, and Pressure Drop curve Y2, Y4, the Y8 of the Fig. 5 that will try to achieve according to the piezometry data that obtain are associated with the valve opening 25%, 50%, 100% of setting and are stored in the storage area respectively.
Then, among the S17, generate exhaust velocity control data and storage based on the goal pressure rate of return of angle X that sets with the Pressure Drop curve of obtaining.Herein, exhaust velocity control data refer to represent to determine result's the data of the set point of transfer valve aperture.The set point of valve opening is tried to achieve according to the relation of vacuum pressure and time.Generation method to exhaust velocity control data further specifies.When seeking respectively with the approximate part of goal pressure rate of return of angle X according to the Pressure Drop curve Y1, Y2, Y4, the Y8 that obtain, become shown in approximate part X1, X2 such as Fig. 5, X4, the X8.As shown in Figure 6, when with make Pressure Drop curve Y1, Y2, Y4 with the approximate mode of goal pressure rate of return of angle X, when Y8 is offset along time shaft, begin rear elapsed time t11 from vacuumizing, and drop to from atmospheric pressure in the situation of pressure Q11 at vacuum pressure, Pressure Drop curve Y1, Y2 intersect.In addition, begin rear elapsed time t12 from vacuumizing, and drop at vacuum pressure in the situation of pressure Q12, Pressure Drop curve Y2, Y4 intersect.In addition, begin rear elapsed time t13 from vacuumizing, and drop at vacuum pressure in the situation of pressure Q13, Pressure Drop curve Y4, Y8 intersect.At this, the intersection point of Pressure Drop curve Y1, Y2 is set as valve opening is switched to 25% set point P11 from 12.5%, the intersection point of Pressure Drop curve Y2, Y4 is set as valve opening is switched to 50% set point P12 from 25%, the intersection point of Pressure Drop curve Y4, Y8 is set as valve opening is switched to 100% set point P13 from 50%.Then, will make as exhaust velocity control data by set point P11, P12, the P13 that vacuum pressure and time are determined.
After the generation of exhaust velocity control data, storage finish, in S18, report exhaust velocity and determine to move and finished termination by display lamp being extinguished wait.Thus, the user can recognize can executive process.
The exhaust velocity control method of＜electric vacuum valve: vacuum pressure control action 〉
Figure 18 is the process flow diagram of the vacuum pressure control program of storage in controller 65.
When the user passes through the selected cell 65a selection execution pattern of controller 65, controller 65 startings vacuum pressure control program shown in Figure 180.Then, at first in S20, wafer is moved into chamber 10.Then, among the S21, according to (P11 of Fig. 6～P13) switches the valve opening of electric vacuum valve 21, makes the pressure of chamber 10 be decompressed to complete vacuum from atmospheric pressure by the set point of the valve opening of exhaust velocity control data setting.Particularly, as shown in Figure 6, controller 65 makes the valve opening with electric vacuum valve 21 be set as 12.5% valve opening control signal and is sent to electric vacuum valve 21, makes electric vacuum valve 21 drive valve, begins to vacuumize from atmospheric pressure.After beginning to vacuumize during through valve opening t11 switching time, controller 65 makes the valve opening with electric vacuum valve 21 be set as 25% valve opening control signal and is sent to electric vacuum valve 21, expand the valve opening of electric vacuum valve 21 to valve opening before tight 2 times, make the conduction of exhaust system become large.Then, controller 65 is after beginning to vacuumize during through valve opening t12 switching time, make valve opening with electric vacuum valve 21 be set as 50% valve opening control signal and be sent to electric vacuum valve 21, before the valve opening of electric vacuum valve 21 expanded to 2 times of valve opening, make the conduction of exhaust system become large.Then, controller 65 is after beginning to vacuumize during through valve opening t13 switching time, make valve opening with electric vacuum valve 21 be set as 100% valve opening control signal and be sent to electric vacuum valve 21, before the valve opening of electric vacuum valve 21 expanded to 2 times of valve opening, make the conduction of exhaust system become large.Its result, the pressure of chamber 10 as shown in Figure 6, the state approximate with the goal pressure rate of return of angle X that sets with the user is decompressed to complete vacuum from atmospheric pressure.
Then, among the S22, based on the piezometry data that pressure transducer 15 is measured, judge whether the pressure of chamber 10 surpasses the drag flow zone.Before not surpassing the drag flow zone (S22:No), in S21, use electric vacuum valve 21 control exhaust velocities.On the other hand, the pressure at chamber 10 surpasses in the situation in drag flow zone (S22:Yes) the valve opening control exhaust velocity of adjustment heavy caliber vacuum shut off valve 12.Heavy caliber vacuum shut off valve 12 is compared electric vacuum valve 21, and seat diameter is large, can control large flow, therefore can carry out comparing faster exhaust with the situation of only utilizing electric vacuum valve 21 to carry out exhaust control.
When controller 65 finishes in the process (process) to the wafer in the chamber 10 (S24:Yes), in S25, wafer is taken out of from chamber 10.Then, controller 65 in S26, having inputted the indication that vacuum pressure control is finished and judged whether to finish vacuum pressure control by inferior by the process conclusion button according to whether.In not input indication, proceed in S27, to make chamber 10 in S24, move into next wafer for behind the atmospheric pressure in the situation of vacuum pressure control (S26:No).On the other hand, when making vacuum pressure, the input indication controls in the situation about finishing (S26:Yes) termination.
Wherein, controller 65 also can be reported this situation in the process of being in by display lamp etc. in above-mentioned vacuum pressure control action.
In addition, in the maximum series (being in the situation of valve opening 100%) of the set point of valve opening, might enter into the zone (for example intermediate flow zone) of the conductive impact of the system of being subject to herein.Shown in the Pressure Drop curve Y4 of Fig. 6, exhaust velocity can not surpass the goal pressure rate of return of angle X that sets and accelerate at least, only is that speed is offset to secure side but in this case.
In the above description, exemplified the user and the geometric ratio multiple has been set as 2 times situation, but user for example the geometric ratio multiple of valve opening is set as in the situation of 2 times of √, by processing same as described above, determine as shown in Figure 8 the set point P21～P26 of valve opening, can control more point-blank exhaust velocity.
＜action effect 〉
Thereby the exhaust velocity control method of the electric vacuum valve of above-mentioned embodiment, exhaust velocity control system 66, valve opening determining method, valve opening determination procedure play following action effect.For the control achievement that makes vacuum pump 13, chamber 10, exhaust piping system 16 directly is reflected on the exhaust velocity, the valve opening of electric vacuum valve 21 is controlled according to the geometric ratio multiple interimly, by each valve opening, carry out exhaust by vacuum pump 13 from the drag flow zone, and obtain the piezometry data that the pressure of 15 pairs of chambers 10 of pressure transducer is measured.That is, use the device that object is set of electric vacuum valve 21 by different valve opening observed pressure determination datas.Obtain Pressure Drop curve Y1, Y2, Y3, Y4 according to the piezometry data of surveying by different valve openings, make Pressure Drop curve Y1, Y2, Y3, Y4 when being offset in time with the approximate mode of goal pressure rate of return of angle X, Pressure Drop curve Y2, Y3, Y4 and Pressure Drop curve Y1, Y2, the Y3 of before valve opening intersect respectively.At this, Pressure Drop curve intersection point is each other determined to be set point P11, P12, the P13 that the valve opening of electric vacuum valve 21 is switched.Like this, when valve opening was changed according to the geometric ratio multiple, the Pressure Drop curve Y1 corresponding with each valve opening, Y2, Y3, Y4's can be not overlapping with the approximate part of goal pressure rate of return of angle X, so set point P11, P12, P13 can not set meaninglessly.When vacuum pressure is controlled, based on set point P11, P12, P13 the valve opening of electric vacuum valve 21 is switched, change thus the conduction of exhaust piping system 16, the exhaust velocity in the control drag flow zone.At this moment, because electric vacuum valve 21 enlarges valve opening when the pressure of chamber 10 departs from the part that is similar to goal pressure rate of return of angle X by the geometric ratio multiple, the pressure of chamber 10 is descended near the goal pressure rate of return of angle again, even so the pressure of chamber 10 in the drag flow zone, also descend with the state that is similar to goal pressure rate of return of angle X.
Like this, in the above-described embodiment, with the Pressure Drop curve Y1, Y2, Y3, the Y4 that survey as the chamber that object is set 10, vacuum pump 13 and the exhaust piping system 16 of electric vacuum valve 21 in the drag flow zone, so can will be reflected to the control achievement that object is set of electric vacuum valve 21, the harmful effect of process in the drag flow zone in the decision of set point P 11, P12 that the valve opening of electric vacuum valve 21 is switched, P13.Then, even determine the people of set point P11, P12, the P13 of valve opening do not have for the dysgenic professional knowledge of getting rid of process also can be only by observed pressure curve Y1, Y2 fall, Y3, Y4 are offset Pressure Drop curve Y1, Y2, Y3, Y4 and goal pressure rate of return of angle X approx in time, so that the pressure of chamber 10 decides set point P11, P12, the P13 of valve opening near the mode of goal pressure rate of return of angle X.Its result, above-mentioned embodiment, compare in the drag flow zone and by main-valve and sub-valve valve opening to be carried out 2 sections controls and control the situation of exhaust velocity (Figure 26 with reference to), can in the drag flow zone, process not obtained vacuum pressure, exhaust controlled condition with impacting, shorten exhaust velocity.Then, above-mentioned embodiment, although can not as the situation (Figure 27 reference) of exhaust velocity being carried out FEEDBACK CONTROL, the pressure linearity of chamber be descended, even but do not use complicated control substrate, control program etc., also can compare the mode (Figure 26 with reference to) of controlling exhaust velocity by sub-valve and main-valve and more make the pressure rectilinearity of the chamber 10 ground control exhaust velocity that descends.
Thereby, according to exhaust velocity control method, exhaust velocity control system 66, valve opening determining method, the valve opening determination procedure of the electric vacuum valve of above-mentioned embodiment, can so that the pressure of chamber 10 near the mode of goal pressure rate of return of angle X simple and qurer set set point P11, P12, the P13 that the valve opening of electric vacuum valve 21 is switched.
The exhaust velocity control method of the electric vacuum valve of above-mentioned embodiment can be set picture at the geometric ratio multiple and set the geometric ratio multiple.Therefore, for example setting at the geometric ratio multiple sets the geometric ratio multiple less (for example √ is 2 times) on the picture, then as shown in Figure 8, can increase the quantity of the set point that the valve opening of electric vacuum valve is switched, set point is determined in the position near the goal pressure rate of return of angle, the pressure of chamber is changed smoothly.On the other hand, for example set on the picture at the geometric ratio multiple and the geometric ratio multiple set to get large (for example 2 times), then as shown in Figure 6, can reduce the quantity of the Pressure Drop curve of actual measurement, shorten the time of the set point that determines valve opening.Thereby, exhaust velocity control method according to the electric vacuum valve of above-mentioned embodiment, utilize the setting value of geometric ratio multiple, the degree that can change smoothly the pressure that makes chamber 10, the time that can guarantee that is used for obtaining the set point of valve opening are adjusted, and each requirement of user is reflected in the exhaust velocity control.
The exhaust velocity control method of the electric vacuum valve of above-mentioned embodiment can be set set target pressure rate of return of angle X on the picture at the goal pressure rate of return of angle.Therefore, for example wanting to make in the short situation of evacuation time, the goal pressure rate of return of angle set in the picture ， Shi tilt angle significantly set target pressure rate of return of angle X get final product.On the other hand, wanting in the situation of slow exhaust, less ground of ， Shi tilt angle set target pressure rate of return of angle X gets final product in goal pressure rate of return of angle setting picture.Thereby, exhaust velocity control method according to the electric vacuum valve of above-mentioned embodiment, by the setting of goal pressure rate of return of angle X, the degree that can change the pressure of evacuation time, chamber 10 is adjusted, and each requirement of user is reflected in the exhaust velocity control.
The exhaust velocity control method of the electric vacuum valve of above-mentioned embodiment and exhaust velocity control system 66, heavy caliber vacuum shut off valve 12 is set up in parallel with electric vacuum valve 21 and is connected with chamber 10, the valve opening of switching electric vacuum valve 21 in the drag flow zone is controlled exhaust velocity, after surpassing the drag flow zone, can control the valve opening adjustment of the heavy caliber vacuum shut off valve 12 of large flow to comparing electric vacuum valve 21 and control exhaust velocity.Like this, in rolling easily the drag flow zone of deposit, utilize electric vacuum valve 21 to carry out lentamente exhaust, when surpassing the drag flow zone deposit roll may reduce the time, utilize heavy caliber vacuum shut off valve 12 to carry out Quick air-discharge, therefore can make the pressure of chamber 10 arrive target vacuum pressure from atmospheric pressure at short notice.This method and system 66 is particularly effective in the situation capacious of chamber 10.
(the 2nd embodiment)
Then, the 2nd embodiment of the present invention is described.Figure 19 is the summary construction diagram of the exhaust velocity control system 72 that relates to of the 2nd embodiment of the present invention.
The exhaust velocity control system 72 of present embodiment, the piezometry data of using controller 71 to be surveyed are asked for the Pressure Drop curve, use this Pressure Drop curve, and computing machine 63 determines the set point of valve opening, according to the set point that determines, the vacuum pressure of 71 pairs of chambers 10 of controller is controlled.Under this implication, computing machine 63 and controller 71 are examples of " pressure actual measurement unit ", and computing machine 63 is examples of " exhaust velocity determining means ", and controller 71 is examples of " vacuum pressure control module ".The exhaust velocity control system 72 of present embodiment, the method for the set point of decision valve opening is different from the 1st embodiment.At this, by with the difference of the 1st embodiment centered by describe, for the point common with the 1st embodiment, suitably description thereof is omitted to adopt the symbol identical with the 1st embodiment in accompanying drawing and explanation.
As shown in figure 19, computing machine 63 is connected with server 61 by internet 62, downloads the exhaust velocity determination procedure from server 61.When the user when computing machine 63 is carried out the exhaust velocity control program, computing machine 63 is carried out processing shown in Figure 20, determines the set point of valve opening.Figure 20 is the process flow diagram of exhaust velocity determination procedure.
Computing machine 63 shows similarly that with the S3 of Fig. 9 the geometric ratio multiple sets picture (Figure 11) in S31, in S32, judge whether to set the geometric ratio multiple of valve opening.Input has the geometric ratio multiple in the geometric ratio multiple input field B3 of geometric ratio multiple setting picture, and during hit OK button B4, computing machine 63 judges that the geometric ratio multiple of valve opening is set (S32:Yes), in S33, shows pressure measured data input picture as shown in figure 21.Display case is such as the indication of " controller of the vacuum pressure of control chamber is set following valve opening and checked the pressure variation of chamber, please input its measured result " in pressure measured data input picture.Then, in pressure measured data input picture, show the valve opening 12.5%, 25%, 50%, 100% of trying to achieve based on the geometric ratio multiple (being 2 times herein) of setting at S31.Therefore, the user holds the place that arranges that USB storage 64 is gone to controller 71, and USB storage 64 is connected in controller 71.Then, the user sets valve opening 12.5% to the valve opening setup unit 71a of controller 71.So controller 71 makes the pressure of chamber 10 be decompressed to complete vacuum from atmospheric pressure, the piezometry data that are input to controller 71 from pressure transducer 15 are stored in the USB storage 64.About valve opening 25%, 50%, 100% user the piezometry data are stored in the USB storage 64.Like this, after valve opening 12.5%, 25%, 50%, 100% piezometry data are stored in USB storage 64, the user extracts USB storage 64 from controller 71 and turns back to computing machine 63, and USB storage 64 is connected in computing machine 63 and will be stored in the piezometry data Replica of USB storage 64 to computing machine 63.When copy finish after, the user clicks the load button B21 of pressure measured data input picture with mouse etc.
Computing machine 63 is when load button B21 is clicked, be judged as the measured value (S34:Yes) that falls curve according to the geometric ratio multiple input pressure of valve opening, in S35, similarly make the goal pressure rate of return of angle set picture (Figure 12 with reference to) with the S5 of Fig. 9 and show at display 63a.When the user when the goal pressure rate of return of angle is set picture set target pressure rate of return of angle X (S36:Yes), computing machine 63 makes exhaust velocity control data in S37.The creating method of exhaust velocity control data is identical with the S22 of Figure 17, and therefore description thereof is omitted.
Then, computing machine 63 shows exhaust velocity control data validation picture for example shown in Figure 22 in S38, makes the user confirm the content of exhaust velocity control data at display 63a.In exhaust velocity control data validation picture, show as can be known the chart B22 of the set point of valve opening and the duration of valve opening B23 under each valve opening.The user clicks change button B25 in the situation of the set point of wanting to change valve opening.(S39: change), computing machine 63 turns back to S31, makes the user set geometric ratio multiple and goal pressure rate of return of angle X again in this case.
On the other hand, the user does not have to click the button B24 (S39:OK) of "Yes" in the situation of change in exhaust velocity control data.So computing machine 63 arranges the indication picture with storage medium for example shown in Figure 23 and shows at display 63a in S40.Display case is set in the indication picture such as the indication of " copy the set point of valve opening, after USB storage is inserted USB port, please click " setting " " at storage medium.Therefore, the user inserts the USB port of computing machines 63 with USB storage 64, and that clicks that storage medium arranges the indication picture arranges button B26.When computing machine 63 detects USB storage 64 (S41:Yes), in S42, exhaust velocity is controlled data Replica in USB storage 64.Computing machine 63 copies when finishing to USB storage 64 exhaust velocity being controlled data Replica, in S43, exhaust velocity for example shown in Figure 24 is determined that finishing picture shows termination at display 63a.Determine to finish in the picture display case as " set point of valve opening has copied to USB storage in exhaust velocity.Please the set point of the valve opening of USB storage is copied to the controller of vacuum pressure control system, and the operation process begins switch " indication.Therefore, the user extracts USB storage 64 from computing machine 63, determines to finish the "Yes" button B27 of picture with click exhaust velocities such as mouses.Thus, computing machine 63 finishes processing shown in Figure 19.
Then, the user holds the USB storage 64 that stores exhaust velocity control data (set point of valve opening) and moves to the place that arranges of controller 71.Then, USB storage 64 is connected in controller 71, exhaust velocity control data (set point of valve opening) are stored in the controller 71.Thereafter, the user begins switch 71B to the process of controller 71 and operates, and makes controller 71 carry out process based on exhaust velocity control data.
＜action effect 〉
Thereby, the exhaust velocity control method of present embodiment, except the action effect that in the 1st embodiment, illustrates, because the set point of the valve opening that will determine at computing machine 63 copies to controller 71, so controller 71 is automatically obtained the set point that the piezometry data do not need to determine valve opening, can be merely and qurer consist of the loop structure of controllers 71 by the controller 65 of the 1st embodiment.
(the 3rd embodiment)
Then, the 3rd embodiment of the present invention is described.
The exhaust velocity control method of the 3rd embodiment is except vacuum pressure control operation, and is identical with the exhaust velocity control method of the 1st embodiment.Thereby, this by with the difference of the 1st embodiment centered by describe.
The exhaust velocity control method of present embodiment is different from the 1st embodiment on the timing this point of the valve opening of carrying out switching according to exhaust velocity control data (for example with reference to Fig. 6) electric vacuum valve 21 based on the piezometry data of pressure transducer 15.Namely, controller 65 is carrying out in the situation of vacuum pressure control with exhaust velocity control data for example shown in Figure 6, the valve opening with electric vacuum valve 21 be set as 12.5% begin to vacuumize in, from pressure transducer 15 input pressure determination datas, monitor the pressure of chamber 10.When the piezometry data that detect pressure transducer 15 when controller 65 become pressure Q11, the valve opening of electric vacuum valve 21 is switched to 25% from 12.5%.Then, when the piezometry data that detect pressure transducer 15 when controller 65 become pressure Q12, the valve opening of electric vacuum valve 21 is switched to 50% from 25%.Further, when the piezometry data that detect pressure transducer 15 when controller 65 become pressure Q13, the valve opening of electric vacuum valve 21 is switched to 100% from 50%.
＜action effect 〉
Above-mentioned exhaust velocity control method is carried out the valve opening switching with piezometry data and the exhaust velocity control data contrast of pressure transducer 15.Therefore, the set point P11 of the valve opening that above-mentioned exhaust velocity control method is set in exhaust velocity control data is subjected to external interference (conductive synthetic etc.) and in time in the situation of skew, even do not carry out making accordingly with this skew the correction of set point P12, the P13 skew of the later valve opening of this set point P11, also can control exhaust velocity so that the pressure of chamber 10 is similar to the state of linear goal pressure rate of return of angle X.
Wherein, the present invention is not limited to above-mentioned embodiment, can realize various application.
(1) for example in the above-described embodiment, the exhaust velocity control method of electric vacuum valve is used in decompression dry device 1, but employed device in other the operational sequence such as the CVD device that also can use in field of semiconductor manufacture, plasma device, with the device of field of semiconductor manufacture different field (for example, edible bread is contained in make in the bag drying device of using for the device of vacuum or dried foods in the bag) etc.
(2) for example in the above-described embodiment, the drive division 23 of electric vacuum valve 21 uses stepper motor 27, but drive division 23 also can be solenoid mode or pneumatic mode.
(3) for example in the above-described embodiment, obtain exhaust velocity control data as mapping (enum) data, but also can obtain the exhaust velocity control data based on table, function.
(4) for example in the above-described embodiment, use the exhaust velocity determination procedure to make computing machine 63 or controller 65 make exhaust velocity control data.Relative therewith, the user also can make exhaust velocity control data when seeing catalogue explanation etc.For example also can be that the user is switched the valve opening of electric vacuum valve 21 according to desirable geometric ratio multiple and curve falls in observed pressure, according to exploring approximate part, the set point of setting valve opening by manual operation from the part of exploring makes exhaust velocity control data with the Pressure Drop curve obtained and desirable goal pressure rate of return of angle X.In this case, do not need the exhaust velocity determination procedure, can reduce cost.On the contrary, also can in advance the exhaust velocity determination procedure be stored in the controller 65, if the exhaust velocity of setting controller 65 control data obtain pattern, then automatically control the valve opening of electric vacuum valve 21 and obtain the Pressure Drop curve according to the geometric ratio multiple, make exhaust velocity control data.In this case, the time that makes that is used for participation exhaust velocity control data shortens, and uses convenient.
(5) for example in the above-described embodiment, the exhaust velocity that electric vacuum valve 21 is carried out in the drag flow zone is controlled, and after surpassing the drag flow zone, controls exhaust velocity by heavy caliber vacuum shut off valve 12, realizes thus the shortening of evacuation time.Relative therewith, for example in the little situation of chamber capacity, electric vacuum valve 21 is connected with the chamber, only control exhaust velocity by electric vacuum valve 21.In this case, pressure that also can be by electric vacuum valve 21 control chambers 10 is so that it is pressed onto target vacuum pressure above the drag flow zone from atmosphere, and what can prevent more reliably deposit controls exhaust velocity with rolling.
(6) for example in the above-described embodiment, adjust afterwards the valve opening of heavy caliber vacuum shut off valve 12 with the control vacuum pressure in disengaging drag flow zone.Relative therewith, because along with the viscosity in drag flow zone reduces, particulate becomes and is difficult to roll, so after also can reducing in the viscosity in drag flow zone the valve opening adjustment of heavy caliber vacuum shut off valve 12 is controlled vacuum pressure.In this case, compare with the situation of after breaking away from the drag flow zone, controlling vacuum pressure by heavy caliber vacuum shut off valve 12, earlier use heavy caliber vacuum shut off valve 12, can further shorten exhaust velocity.

Claims (9)

1. the exhaust velocity control method of an electric vacuum valve, the valve opening that is provided in the electric vacuum valve in the exhaust piping system that chamber is connected with vacuum pump by control is controlled exhaust velocity, it is characterized in that, comprising:
Pressure actual measurement operation, the valve opening of described electric vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize described vacuum pump to carry out exhaust from the drag flow zone, utilize the vacuum pressure of the described chamber of determination of pressure sensor to obtain the Pressure Drop curve;
Exhaust velocity determines operation, make the described Pressure Drop curve of distinguishing by valve opening in described pressure actual measurement operation, obtained to be offset in time with the approximate mode of goal pressure rate of return of angle, described Pressure Drop curve intersection point is each other determined the set point that switches for to the valve opening of described electric vacuum valve; With
Vacuum pressure control operation is based on determining that in described exhaust velocity the described set point that determines in the operation switches the valve opening of described electric vacuum valve, controls the described exhaust velocity in the described drag flow zone.
2. the exhaust velocity control method of electric vacuum valve according to claim 1 is characterized in that, comprising:
Set the geometric ratio multiple of described geometric ratio multiple and set operation.
3. the exhaust velocity control method of electric vacuum valve according to claim 1 is characterized in that, comprising:
Set the goal pressure rate of return of angle of described goal pressure rate of return of angle and set operation.
4. the exhaust velocity control method of electric vacuum valve according to claim 1 is characterized in that:
In described vacuum pressure control operation, make the pressure of the described chamber of described determination of pressure sensor, when described determination of pressure sensor arrives the vacuum pressure corresponding with described set point, switch the valve opening of described electric vacuum valve.
5. the exhaust velocity control method of electric vacuum valve according to claim 1 is characterized in that:
Have be set up in parallel with described electric vacuum valve and be connected with described chamber, compare the heavy caliber vacuum shut off valve that described electric vacuum valve can be controlled larger flow,
In described vacuum pressure control operation, the valve opening of switching described electric vacuum valve in described drag flow zone under the state that described heavy caliber vacuum shut off valve is closed is controlled described exhaust velocity, controls described exhaust velocity after breaking away from from described drag flow zone or in the later valve opening of adjusting described heavy caliber vacuum shut off valve of the viscosity step-down in described drag flow zone.
6. the exhaust velocity control method of electric vacuum valve according to claim 1 is characterized in that:
In described vacuum pressure control operation, after breaking away from from described drag flow zone, adjust the valve opening of described electric vacuum valve and control described exhaust velocity.
7. exhaust velocity control system, the valve opening that is provided in the electric vacuum valve in the exhaust piping system that chamber is connected with vacuum pump by control is controlled exhaust velocity, it is characterized in that, comprising:
The pressure transducer that the pressure of chamber is measured;
The valve opening of described electric vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize described vacuum pump to carry out exhaust from the drag flow zone, utilize the vacuum pressure of the described chamber of determination of pressure sensor to obtain the pressure actual measurement unit of Pressure Drop curve;
The described Pressure Drop curve of distinguishing by valve opening that makes that described pressure actual measurement unit obtains to be being offset in time with the approximate mode of goal pressure rate of return of angle, and described Pressure Drop curve intersection point is each other determined exhaust velocity determining means for the set point that the valve opening of described electric vacuum valve is switched; With
The described set point that determines based on described exhaust velocity determining means switches the valve opening of described electric vacuum valve, controls the vacuum pressure control module of the described exhaust velocity in the described drag flow zone.
8. exhaust velocity control system according to claim 7 is characterized in that:
Have be set up in parallel with described electric vacuum valve and be connected with described chamber, compare the heavy caliber vacuum shut off valve that described electric vacuum valve can be controlled larger flow,
Described vacuum pressure control module, the valve opening of switching described electric vacuum valve in described drag flow zone under the state that described heavy caliber vacuum shut off valve is closed is controlled described exhaust velocity, controls described exhaust velocity after breaking away from from described drag flow zone or in the later valve opening of adjusting described heavy caliber vacuum shut off valve of the viscosity step-down in described drag flow zone.
9. valve opening set point determining method, the set point that decision is switched the valve opening of the described electric vacuum valve in the situation of controlling exhaust velocity by the valve opening of control electric vacuum valve, described electric vacuum valve is provided in the exhaust piping system that chamber is connected with vacuum pump, it is characterized in that, comprising:
Pressure actual measurement operation, the valve opening of described electric vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize described vacuum pump to carry out exhaust from the drag flow zone, obtain the Pressure Drop curve according to the vacuum pressure of the described chamber of determination of pressure sensor; With
Exhaust velocity determines operation, make the described Pressure Drop curve of distinguishing by valve opening in described pressure actual measurement operation, obtained to be offset in time with the approximate mode of goal pressure rate of return of angle, described Pressure Drop curve intersection point is each other determined the set point that switches for to the valve opening of described electric vacuum valve.
CN 201010603574 2009-12-25 2010-12-22 Exhaust velocity control method of electric vacuum valve, exhaust velocity control system and determining method of valve opening set point Expired - Fee Related CN102169352B (en)

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