CN102169352A

CN102169352A - Exhaust velocity control method of electric vacuum valve, exhaust velocity control system and determining method of valve opening set point

Info

Publication number: CN102169352A
Application number: CN201010603574XA
Authority: CN
Inventors: 内藤正博; 西垣绿; 吉安一智; 伊藤慎; 梅泽俊祐
Original assignee: CKD Corp
Current assignee: CKD Corp
Priority date: 2009-12-25
Filing date: 2010-12-22
Publication date: 2011-08-31
Anticipated expiration: 2030-12-22
Also published as: TWI441001B; JP2011134164A; JP4914486B2; TW201128340A; KR101199945B1; CN102169352B; KR20110074688A

Abstract

The invention provides an exhaust velocity control method of an electric vacuum valve, an exhaust velocity control system and a determining method of a valve opening set point. The valve opening set point of the electric vacuum valve can be simply set and switched with low cost in a manner that the pressure of the cavity approaches to the drop-off rate of a target pressure. The valve opening of an electric vacuum valve (21) is controlled by stage based on an equal ratio multiple. Exhaust is conducted from a viscous flow area by means of a vacuum pump (13) under various valve openings/ The vacuum pressure of the cavity is measured by a pressure sensor (15) to actually measure a pressure declining curve (Y1, Y2, Y3, Y4) which offsets in a manner of being approximate to the drop-off rate of the target pressure. The intersection points of the pressure declining curve is determined as the set points (P11, P12, P13) of the valve opening to switch the electric vacuum valve (21). The valve opening of the electric vacuum valve (21) is switched based on the set points (P11, P12, P13), and the exhaust velocity in the viscous flow area.

Description

The exhaust velocity control method of Motorized vacuum valve, exhaust velocity control system and valve opening set point determining method

Technical field

The present invention relates to make the valve opening of the Motorized vacuum valve that is configured between chamber and the vacuum pump set to change, come exhaust velocity control method, the Motorized vacuum valve of Motorized vacuum valve that exhaust velocity is controlled the exhaust velocity control system, be used for the valve opening set point determining method of the Motorized vacuum valve of exhaust velocity control.

Background technology

So far, vacuum technique uses in many-side.For example in semiconductor manufacturing process, with the avoidance of particulate, polluter with prevent that the generation etc. of secondary product from being purpose, use vacuum technique that the vacuum pressure of chamber is managed.That is, the valve opening of the vacuum gas discharge valve that disposes between chamber and vacuum pump by slow expansion is controlled the exhaust velocity of discharging gas from chamber, controls extraction flow, discharge pressure from chamber in the mode that can not roll the deposit in the chamber.

For example in the exhaust velocity control method of putting down in writing in patent documentation 1, vacuum gas discharge valve uses main-valve that possesses the big flow of control and the valve of controlling the sub-valve of low discharge.In the method, as shown in figure 26, when exhaust begins to through the schedule time, close main-valve, open sub-valve, exhaust velocity thus slows down, carry out exhaust lentamente slightly,, be full-gear when exhaust begins, accelerate exhaust velocity and carry out exhaust with big flow by making main-valve to through after the schedule time.According to this method, and only compare by the situation of main-valve control exhaust velocity, can make vacuum pressure lentamente to descend near linear state.

In addition, for example in the exhaust velocity control method of in patent documentation 2, putting down in writing, by controller produce successively based on give from the outside or be set in advance in vacuum pressure value that the target vacuum rate of pressure change the controller calculates as built-in command, by changing the desired value of the built-in command of generation successively successively as FEEDBACK CONTROL, to compare by the vacuum pressure measured value and the desired value of determination of pressure sensor, carry out FEEDBACK CONTROL as following control.According to this method, R3 is controlled to be necessarily with vacuum pressure pace of change (exhaust velocity), in from atmospheric drag flow zone V1～V6, can make vacuum pressure change (for example with reference to patent documentation 2) linearly with desirable pressure rate of return of angle.

Patent documentation 1: Japanese kokai publication hei 11-166665 communique

Patent documentation 2: TOHKEMY 2000-163137 communique

Summary of the invention

But, because the exhaust velocity control method of patent documentation 1 record is the conduction (conductance) by sub-valve regulation and to make main-valve be these 2 states of conduction of full-gear just, so acquisition does not impact process in the drag flow zone vacuum pressure, exhaust velocity condition, and on the shortening evacuation time, there is the limit.

In addition, in the exhaust velocity control method of patent documentation 2 records,, need complicated control basal plate, control program etc., the cost installation cost in order to carry out FEEDBACK CONTROL.

In recent years, semiconductor is used in various fields, to the also variation of requirement of the control of the exhaust velocity in the chamber.Therefore, industrial community requires a kind of exhaust velocity control method than record in the patent documentation 2 more cheap, and the exhaust velocity control method of the control accuracy between the exhaust velocity control method of putting down in writing in the exhaust velocity control method that can realize record in patent documentation 1 and the patent documentation 2.But, on corresponding to this demand, what become problem is: control achievement (precision, response, stability etc.) difference according to the exhaust piping system, and might produce harmful effect to process (the rolling of deposit, to the influence of the film that forms in the work etc.) by exhaust velocity in the drag flow zone.The control achievement of exhaust piping system can only be surveyed affirmation at the scene.In addition, adjusting exhaust velocity at the scene needs professional knowledge with the harmful effect of discharging process, is not what who can simple realization.

The present invention finishes in order to address the above problem a little, its purpose is, provide a kind of can so that the approaching mode of the pressure of chamber and goal pressure rate of return of angle (gradient) is simple and qurer set the valve opening of switching the Motorized vacuum valve set point the Motorized vacuum valve the Motorized vacuum valve exhaust velocity control method, Motorized vacuum valve the exhaust velocity control system, be used for the valve opening set point determining method of the Motorized vacuum valve of exhaust velocity control.

In order to solve above-mentioned problem, the exhaust velocity control method of the Motorized vacuum valve of one aspect of the present invention is in the exhaust velocity control method of the valve opening of the Motorized vacuum valve in be provided in the exhaust piping system that chamber is connected with vacuum pump by control the Motorized vacuum valve of controlling exhaust velocity, comprise: pressure actual measurement operation, the valve opening of above-mentioned Motorized vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize above-mentioned vacuum pump to carry out exhaust, utilize the vacuum pressure of the above-mentioned chamber of determination of pressure sensor to fall curve with observed pressure from the drag flow zone; Exhaust velocity decision operation, make the above-mentioned pressure of distinguishing by valve opening of in above-mentioned pressure actual measurement operation, surveying fall curve, the curve set point of intersection point decision for the valve opening of above-mentioned Motorized vacuum valve is switched each other fallen in above-mentioned pressure to be offset in time with the approximate mode of goal pressure rate of return of angle; With vacuum pressure control operation, based on the above-mentioned set point that in above-mentioned exhaust velocity decision operation, determines the valve opening of above-mentioned Motorized vacuum valve is switched, control the above-mentioned exhaust velocity in the above-mentioned drag flow zone.

Said structure preferably includes the geometric ratio multiple of setting above-mentioned geometric ratio multiple and sets operation.

Said structure preferably includes the goal pressure rate of return of angle of setting above-mentioned goal pressure rate of return of angle and sets operation.

Said structure preferably in above-mentioned vacuum pressure control operation, makes the pressure of the above-mentioned chamber of above-mentioned determination of pressure sensor, when above-mentioned determination of pressure sensor arrives the vacuum pressure corresponding with above-mentioned set point, switches the valve opening of above-mentioned Motorized vacuum valve.

Said structure preferably has and is set up in parallel with above-mentioned Motorized vacuum valve and is connected with above-mentioned chamber, compare above-mentioned Motorized vacuum valve and can control the heavy caliber vacuum shut off valve of bigger flow, in above-mentioned vacuum pressure control operation, in above-mentioned drag flow zone, control above-mentioned exhaust velocity in that the valve opening of stating the Motorized vacuum valve is changed in the incision of above-mentioned heavy caliber vacuum shut off valve closing state, after breaking away from or in the valve opening that the viscosity step-down in above-mentioned drag flow zone is adjusted above-mentioned heavy caliber vacuum shut off valve later on, controlling above-mentioned exhaust velocity from above-mentioned drag flow zone.

Said structure preferably in above-mentioned vacuum pressure control operation, is adjusted the valve opening of above-mentioned Motorized vacuum valve and is controlled above-mentioned exhaust velocity after breaking away from from above-mentioned drag flow zone.

In order to solve above-mentioned problem, the exhaust velocity control system of one aspect of the present invention is that the valve opening of the Motorized vacuum valve in be provided in the exhaust piping system that chamber is connected with vacuum pump by control is controlled in the exhaust velocity control system of exhaust velocity and comprised: the pressure transducer that the pressure of chamber is measured; The valve opening of above-mentioned Motorized vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize above-mentioned vacuum pump to carry out exhaust, utilize the vacuum pressure of the above-mentioned chamber of determination of pressure sensor to survey the unit with the pressure that curve falls in observed pressure from the drag flow zone; The above-mentioned pressure of distinguishing by valve opening that makes that above-mentioned pressure actual measurement unit surveys falls curve being offset in time with the approximate mode of goal pressure rate of return of angle, and the exhaust velocity decision unit of curve intersection point decision each other for set point that the valve opening of above-mentioned Motorized vacuum valve is switched fallen in above-mentioned pressure; With above-mentioned set point the valve opening of above-mentioned Motorized vacuum valve is switched, controlled the vacuum pressure control module of the above-mentioned exhaust velocity in the above-mentioned drag flow zone based on above-mentioned exhaust velocity decision unit decision.

In said structure, preferably have and be set up in parallel with above-mentioned Motorized vacuum valve and be connected with above-mentioned chamber, compare above-mentioned Motorized vacuum valve and can control the heavy caliber vacuum shut off valve of bigger flow, above-mentioned vacuum pressure control module, in above-mentioned drag flow zone, control above-mentioned exhaust velocity in that the valve opening of stating the Motorized vacuum valve is changed in the incision of above-mentioned heavy caliber vacuum shut off valve closing state, after breaking away from or in the valve opening that the viscosity step-down in above-mentioned drag flow zone is adjusted above-mentioned heavy caliber vacuum shut off valve later on, controlling above-mentioned exhaust velocity from above-mentioned drag flow zone.

In order to solve above-mentioned problem, the valve opening set point determining method of one aspect of the present invention is the set point that decision is switched the valve opening of the described Motorized vacuum valve under the situation of controlling exhaust velocity by the valve opening of control Motorized vacuum valve, described Motorized vacuum valve is provided in the exhaust piping system that chamber is connected with vacuum pump, comprise: pressure actual measurement operation, the valve opening of above-mentioned Motorized vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize above-mentioned vacuum pump to carry out exhaust, obtain pressure according to the vacuum pressure of the above-mentioned chamber of determination of pressure sensor and fall curve from the drag flow zone; With exhaust velocity decision operation, make the above-mentioned pressure of in above-mentioned pressure actual measurement operation, obtaining of distinguishing by valve opening fall curve, the curve set point of intersection point decision for the valve opening of above-mentioned Motorized vacuum valve is switched each other fallen in above-mentioned pressure to be offset in time with the approximate mode of goal pressure rate of return of angle.

Foregoing invention directly is reflected on the exhaust velocity in order to make the control achievement based on vacuum pump, chamber, exhaust piping system, the valve opening of Motorized vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize vacuum pump to carry out exhaust, utilize the vacuum pressure of determination of pressure sensor chamber to fall curve with observed pressure from the drag flow zone.That is, use the object apparatus that is provided with of Motorized vacuum valve to fall curve by different valve opening observed pressures.Then, make the pressure of distinguishing by valve opening of surveying fall curve when being offset in time with the approximate mode of goal pressure rate of return of angle, pressure fall curve with tight before the pressure of valve opening curved intersection is fallen.Therefore, pressure is fallen the curve set point of intersection point decision for the valve opening of Motorized vacuum valve is switched each other.Like this, when valve opening is changed according to the geometric ratio multiple, because that curve falls in the pressure corresponding with each valve opening is not overlapping with the approximate part of goal pressure rate of return of angle, so set point can not set meaninglessly.When vacuum pressure is controlled, based on set point the valve opening of Motorized vacuum valve is switched, change the conduction of exhaust piping system thus, the exhaust velocity in the control drag flow zone.At this moment, because the Motorized vacuum valve only enlarges the geometric ratio multiple with valve opening when the pressure of chamber departs from the part that is similar to the goal pressure rate of return of angle, the pressure of chamber is descended near the goal pressure rate of return of angle once more, thus the pressure of chamber in the drag flow zone also to descend with the approximate state of goal pressure rate of return of angle.

Like this, in foregoing invention, use is fallen curve as the chamber that object is set, vacuum pump and the exhaust piping system of Motorized vacuum valve to the pressure in the drag flow zone and is surveyed, so can be with the control achievement that object is set of Motorized vacuum valve, the harmful effect of the process in the drag flow zone is reflected in the decision of the set point that the valve opening of Motorized vacuum valve is switched.And, even the people of the set point of decision valve opening does not have the dysgenic professional knowledge that is used to get rid of process, also can be only survey to make pressure fall curve and be offset in time, make the pressure of chamber and the set point that the goal pressure rate of return of angle closely determines valve opening with the approximate mode of goal pressure rate of return of angle by pressure being fallen curve.Its result, foregoing invention with in the drag flow zone, utilize main-valve and sub-valve that valve opening is carried out the situation that 2 sections controls control exhaust velocity to compare, can obtain vacuum pressure, exhaust controlled condition in the mode that in the drag flow zone, process is not impacted, shorten exhaust velocity.And, though foregoing invention can not make the pressure linearity of chamber descend as the situation of exhaust velocity being carried out FEEDBACK CONTROL, even but do not use complicated control basal plate, control program etc., also can make the pressure of chamber control exhaust velocity point-blank more than mode by sub-valve and main-valve control exhaust velocity with descending.

Thereby, according to foregoing invention, can be simply and qurer set set point that the valve opening of Motorized vacuum valve is switched so that the pressure of chamber and goal pressure rate of return of angle are approaching.

Foregoing invention can at random be set the geometric ratio multiple.Therefore,, then can increase the quantity of the set point that the valve opening of Motorized vacuum valve is switched, for the position approaching, the pressure of chamber be changed smoothly the set point decision with the goal pressure rate of return of angle if for example set the geometric ratio multiple less.On the other hand, if for example set the geometric ratio multiple bigger, then the quantity minimizing of curve falls in Shi Ce pressure, can shorten the time of the set point of decision valve opening.Thereby according to foregoing invention, setting value that can be by the geometric ratio multiple is adjusted degree that the pressure that makes chamber changes smoothly, is used to obtain the time that can guarantee of the set point of valve opening, and each requirement of user is reflected in the exhaust velocity control.

Foregoing invention can at random be set the goal pressure rate of return of angle.Therefore, for example under the situation of wanting to make evacuation time to shorten, the mode set target pressure rate of return of angle that Yi Shi tilt angle is big gets final product.On the other hand, wanting under the situation of slow exhaust, the mode set target pressure rate of return of angle that Yi Shi tilt angle is little gets final product.Thereby, according to foregoing invention,, can adjust the degree of the pressure variation of evacuation time, chamber by the setting of goal pressure rate of return of angle, each requirement of user is reflected in the exhaust velocity control.

Foregoing invention monitors the pressure of chamber with determination of pressure sensor under the situation of carrying out vacuum pressure control.In the piezometry of chamber is under the situation of the pressure corresponding with the set point of valve opening, and the valve opening of Motorized vacuum valve is switched.Therefore, foregoing invention is under the situation that causes the set point of valve opening to be offset in time because of external disturbance etc., even do not carry out the correction of the set point skew of the valve opening that the set point of this this valve opening is later, also can under the approximate state of the goal pressure rate of return of angle of pressure that makes chamber and linearity, control exhaust velocity in conjunction with this skew.

Foregoing invention is provided with the heavy caliber vacuum shut off valve side by side with the Motorized vacuum valve and is connected with chamber, the valve opening of switching the Motorized vacuum valve in the drag flow zone is controlled exhaust velocity, after surpassing the drag flow zone or after the viscosity step-down in above-mentioned drag flow zone, adjust and compare the Motorized vacuum valve and can control the valve opening of the heavy caliber vacuum shut off valve of bigger flow and control exhaust velocity.Like this, in rolling the drag flow zone of deposit easily, utilize Motorized vacuum to carry out exhaust lentamente, when surpassing the drag flow zone then during the rolling possibility and reduce of deposit, utilize the heavy caliber vacuum shut off valve to carry out quick exhaust, so can make the pressure of chamber arrive target vacuum pressure from atmospheric pressure at short notice.

In the invention of said structure, control exhaust velocity, so can more positively prevent the control exhaust velocity of deposit because after breaking away from, also adjust the valve opening of Motorized vacuum valve from the drag flow zone with rolling.

Description of drawings

Fig. 1 is the summary construction diagram of the exhaust velocity control system that relates to of the 1st embodiment of the present invention.

Fig. 2 is the sectional view of Motorized vacuum valve, the expression closed condition.

Fig. 3 is illustrated near the drag flow zone of atmospheric pressure, makes valve opening fall the figure of curve with the pressure under the situation of same ratio variation.The longitudinal axis is represented vacuum pressure, the transverse axis express time.

Fig. 4 is that expression makes pressure shown in Figure 3 fall the figure of the state that curve is offset in time in the mode that is similar to the goal pressure rate of return of angle.The longitudinal axis is represented vacuum pressure, the transverse axis express time.

Fig. 5 is illustrated near the drag flow zone of atmospheric pressure, makes valve opening fall the figure of curve according to the pressure under the situation of 2 times of geometric ratio multiples variations.The longitudinal axis is represented vacuum pressure, the transverse axis express time.

Fig. 6 is that expression makes pressure shown in Figure 5 fall the figure of the state that curve is offset in time in the mode that is similar to the goal pressure rate of return of angle.The longitudinal axis is represented vacuum pressure, the transverse axis express time.

Fig. 7 is illustrated near the drag flow zone of atmospheric pressure, makes valve opening fall the figure of curve according to the pressure under the situation of 2 times of geometric ratio multiples variations of √.The longitudinal axis is represented vacuum pressure, the transverse axis express time.

Fig. 8 is that expression makes pressure shown in Figure 7 fall the figure of the state that curve is offset in time in the mode that is similar to the goal pressure rate of return of angle.The longitudinal axis is represented vacuum pressure, the transverse axis express time.

Fig. 9 is the process flow diagram of the download action of exhaust velocity determination procedure.

Figure 10 is the figure that an example confirming picture is downloaded in expression.

Figure 11 is the figure that expression geometric ratio multiple is set an example of picture.

Figure 12 is the figure that expression goal pressure rate of return of angle is set an example of picture.

Figure 13 is the figure that the expression setting content is confirmed an example of picture.

Figure 14 is the figure that the expression USB storage is inserted an example of indication picture.

Figure 15 is the figure that an example of progress Zhuan Condition display frame is duplicated in expression.

Figure 16 is the figure that an example finishing the notice picture is duplicated in expression.

Figure 17 is the process flow diagram of exhaust velocity determination procedure.

Figure 18 is the process flow diagram of vacuum pressure control program.

Figure 19 is the summary construction diagram of the exhaust velocity control system that relates to of the 2nd embodiment of the present invention.

Figure 20 is the process flow diagram of exhaust velocity determination procedure.

Figure 21 is the figure of an example of expression pressure measured data input picture.

Figure 22 is the figure that expression exhaust velocity control data is confirmed an example of picture.

Figure 23 is the figure that the expression storage medium is provided with an example of indication picture.

Figure 24 is the figure that an example of picture is finished in the decision of expression exhaust velocity.

Figure 25 is the figure of the schematic configuration of expression decompression dry device.

Figure 26 is the figure of expression based on the exhaust velocity control method of 2 sections exhausts.

Figure 27 is the figure of expression based on the exhaust velocity control method of the Motorized vacuum valve of FEEDBACK CONTROL.

Embodiment

Below, with reference to accompanying drawing embodiments of the present invention are described.

(the 1st embodiment)

Figure 25 is the figure of the schematic configuration of expression decompression dry device 1.

The exhaust velocity control method of present embodiment is used in decompression dry device for example shown in Figure 25 1.Decompression dry device 1 is used for remaining the dried coating film that carries out substrate when decompression state is vacuum state in making chamber 10.Decompression dry device 1 is provided with exhaust piping system 16 between chamber 10 and vacuum pump 13.Exhaust piping system 16 is set side by side with Motorized vacuum valve 21 and heavy caliber vacuum shut off valve 12.Decompression dry device 1 increases and decreases the quantity that is provided with of exhaust piping system 16, heavy caliber vacuum shut off valve 12 and Motorized vacuum valve 21 according to the size of chamber 10.This decompression dry device 1 is controlled the extraction flow of discharging gas from chamber 10 to vacuum pump 13 by Motorized vacuum valve 21 and heavy caliber vacuum shut off valve 12.

The management of the vacuum pressure of chamber 10 mainly depends on the ability of vacuum pump 13.The ability of vacuum pump 13 is determined by the exhaust velocity S and the arrival vacuum pressure P of vacuum pump 13.Generally in the drag flow zone more than the following 100Pa of atmospheric pressure (105Pa), the exhaust velocity S of vacuum pump 13 is roughly certain, and the flow velocity of the gas in the chamber 10 is determined by the shape of chamber 10, the exhaust velocity S of vacuum pump 13 and the conduction C of exhaust piping system 16.In addition, when the nominal diameter with vacuum pump 13 was benchmark formation exhaust piping system 16, the actual effect exhaust velocity roughly approached the exhaust velocity S of vacuum pump 13.In other words, the conduction C of exhaust piping system 16 becomes big.

Therefore, in the decompression dry device 1 of present embodiment, exhaust piping system 16 is that benchmark constitutes with the nominal diameter of vacuum pump 13.And Motorized vacuum valve 21 is arranged in order to control the exhaust velocity S in the drag flow zone in chamber 10 and the exhaust piping system 16 that vacuum pump 13 is connected.In this case, the conductive size of Motorized vacuum valve 21 becomes the domination key element of the exhaust velocity S of vacuum pump 13.Particularly, the exhaust velocity S of the conduction C of exhaust piping system 16 and vacuum pump 13 is determined by the synthesis mode of said parallel resistance in the electric loop.Promptly, compare in the zone that the conduction C of exhaust piping system 16 fully dwindles in valve opening and to use under the situation of Motorized vacuum valve 21, the conduction C of exhaust piping system 16 is roughly determined by the conduction of Motorized vacuum valve 21, Motorized vacuum valve 21 is being used near the standard-sized sheet with under as situation near the condition of the conduction C of exhaust piping system 16, compare the conduction of Motorized vacuum valve 21, the conduction C of exhaust piping system 16 is lower state.

But, chamber 10 is evacuated to from atmospheric pressure (105Pa) low vacuum (not enough 105Pa but more than the 102Pa), when vacuum (not enough 102Pa but more than the 101Pa), high vacuum (not enough 101Pa), the gas flow that flows in the exhaust piping system 16 changes to drag flow, intermediate flow, molecular flow.The drag flow zone after just having begun to vacuumize (more than the following 100Pa of atmospheric pressure (105Pa)) from atmospheric pressure, when being controlled at the valve opening of Motorized vacuum valve 21, heavy caliber vacuum shut off valve 12 near the standard-sized sheet suddenly, might roll the deposit in the chamber 10, make it attached on the substrate, substrate itself is caused damage.On the other hand, enough hour of the valve opening that makes Motorized vacuum valve 21, heavy caliber vacuum shut off valve 12 in order not roll the deposit in the chamber 10, exhaust velocity was slack-off, and making vacuum pressures in the chamber 10 arrive the target vacuum pressure needs the long period.

Therefore, decompression dry device 1 shown in Figure 25 is according to before opening heavy caliber vacuum shut off valve 12, make the multistage variation of valve opening of Motorized vacuum valve 21 make the vacuum pressure in the chamber 10 drop to the mode of vacuum state with state, the exhaust velocity of discharging gases from chamber 10 is controlled near linear goal pressure rate of return of angle from atmospheric pressure state.Decompression dry device 1 utilizes pressure transducer 15 to measure the vacuum pressure of chamber 10, detect vacuum pressure in the chamber 10 when having reached predetermined pressure in piezometry result, open heavy caliber vacuum shut off valve 12 extraction flow is increased according to pressure transducer 15.By such exhaust velocity control, decompression dry device 1 makes when atmospheric pressure state becomes vacuum state, can not roll the deposit in the chamber 10, make it attached on the substrate and cause damage ground to carry out the adjusting of air capacity, and realize the shortening of evacuation time substrate itself.

The schematic configuration of＜exhaust velocity control system 〉

Fig. 1 is the summary construction diagram of the exhaust velocity control system 66 that relates to of the 1st embodiment of the present invention.

Exhaust velocity control system 66 shown in Figure 1 comprises that server 61, internet 62, personal computer are (hereinafter referred to as " computing machine ".) 63, controller 65, pressure transducer 15, Motorized vacuum valve 21 and the vacuum pump 13 of decompression dry device 1 and constitute.

Store the exhaust velocity determination procedure in the server 61 shown in Figure 1, this exhaust velocity determination procedure is used for the set point of making decision the valve opening of Motorized vacuum valve 21 is switched in the situation that the exhaust velocity of discharging gases from chamber 10 is controlled.Server 61 can be connected with computing machine 63 communicatedly by internet 62.

Computing machine 63 is known computer.Computing machine 63 is connected with server 61, downloads the exhaust velocity determination procedure.In addition, computing machine 63 is used for setting the goal pressure rate of return of angle of the valve opening geometric ratio multiple that changes and the pressure decline that makes chamber 10 that make Motorized vacuum valve 21 under the situation of control exhaust velocity.Computing machine 63 is stored in the USB storage 64 the exhaust velocity determination procedure of download, the geometric ratio multiple of setting and the goal pressure rate of return of angle of setting.

Controller 65 shown in Figure 1 is connected with USB storage 64, and the geometric ratio multiple of exhaust velocity determination procedure, setting and the goal pressure rate of return of angle of setting copy to the recording medium of controller 65 from USB storage 64.Be provided with the selected cell 65a that ready mode and execution pattern are selected in the controller 65, the set point that the ready mode decision is switched the valve opening of Motorized vacuum valve 21, execution pattern is controlled exhaust velocity based on the set point that determines in the ready mode, executive process.

Controller 65 is carried out the exhaust velocity determination procedure after selecting ready mode by selected cell 65a.In this case, controller 65 in the mode of the valve opening that is classified to control Motorized vacuum valve 21 according to the geometric ratio multiple to Motorized vacuum valve 21 delivery valve aperture control signals.Controller 65 drives vacuum pump 13 and carries out exhaust from the drag flow zone under each valve opening, obtain the piezometry data that pressure transducer 15 is measured.Thereafter, curve (for example with reference to Fig. 5 Y1, Y2, Y4, Y8) falls in the pressure that controller 65 is obtained the pressure of expression chamber 10 and time relation according to the piezometry data that obtain by different valve openings, make by valve opening distinguish pressure fall curve and be offset in time in the mode that is similar to goal pressure rate of return of angle (for example with reference to Fig. 6 X), the intersection point decision of pressure being fallen curve is set point that the valve opening of Motorized vacuum valve 21 is switched (for example with reference to Fig. 6 P11, P12, P13).

Then, controller 65 is after selecting execution pattern by selected cell 65a, the valve opening switching signal that to switch the valve opening of Motorized vacuum valve 21 based on the set point P11, the P12 that are determined, P13 (for example with reference to Fig. 6) exports Motorized vacuum valve 21 to, the exhaust velocity of the vacuum pump 13 in the control drag flow zone.

Sort controller 65 is equivalent to an example of " pressure actual measurement unit ", " exhaust velocity decision unit " and " vacuum pressure control module ".

The structure of＜Motorized vacuum valve 〉

Fig. 2 is the sectional view of Motorized vacuum valve 21, the expression closed condition.

Motorized vacuum valve 21 outward appearances are constructed as follows: valve body 24 and cylinder block 25 are integrated by bolt 55, and cylinder block 25, lid 26, stepper motor 27 is integrated by bolt 28.

In the valve portion 22, be communicated with by valve chamber 53 at the 1st port 51 of valve body 24 openings and the 2nd port 52.Valve chamber 53 flatly is provided with valve seat 54 in the peristome periphery of the 1st port 51 openings.Take in the valve chamber 53 and valve seat 54 butts or the spool 42 that separates.

In the valve portion 22, be communicated with by valve chamber 53 at the 1st port 51 of valve body 24 openings and the 2nd port 52.The peristome periphery at the 1st port 51 openings in the valve chamber 53 flatly is provided with valve seat 54.Take in the valve chamber 53 and valve seat 54 butts or the spool 42 that separates.

Drive division 23 is converted to rectilinear motion with rotatablely moving of stepper motor 27 and is delivered to spool 42.The output shaft 30 of stepper motor 27 to be formed on cover 26 and cylinder block 25 between accommodation space portion 31 outstanding.Clamping has bearing 32 between lid 26 and cylinder block 25, and this bearing 32 is keeping support 33 with rotating freely.Support 33 is connected with connector 58 by output shaft 30 in the upper end, by the fixing feed nut 34 of a plurality of gib screws 35, can utilize the rotation amount of the rotation amount control feed nut 34 of stepper motor 27 in the bottom.

Driving shaft 37 is inserted and is led to the retainer nut of being fixed by gib screw 39 on cylinder block 25 38.The hexagonal locking axial region 37a in cross section that is of driving shaft 37 inserts the hexagonal anti-porosity 38a that leads to formation on retainer nut 38, with the axially round rectilinear motion of the state of restriction rotation.Feed screw axle 36 screws togather with feed nut 34 and is engaged in the upper end of driving shaft 37, and the rectilinear motion that rotatablely moving of feed nut 34 changed into axially is delivered to driving shaft 37.

In the bottom of driving shaft 37, spool 42 connects by link 40.Spool 42 comprises bellows dish 47, valve disc 48 and edge 49, constitutes by its coincidence is fixed in link 40 integratedly by attaching nut 43.Annular seal parts 50 are formed by material that can elastic deformation, are installed in the ant groove that forms between bellows dish 47 and the valve disc 48.Return spring 44 shrink be arranged on and spring retainer 45 between, always spool 42 is applied acting force to valve seat 54 directions.Link 40 has axially clearance with respect to driving shaft 37, by connecting in conjunction with pin 41, utilizes the spring torque that returns spring 44 to apply seal load.Bellows 46, the upper end with by the holding part 46a of cylinder block 25 and valve body 24 clampings welding, weld with bellows dish 47 bottom.The particulate of the generations such as sliding part of driving shaft 37 stretches in valve chamber 53 corresponding to the moving up and down of spool 42, so that can not flow out in stream.

Be fixed with the scrambler 29 that is used for the swing offset amount of the machinery of not shown rotor is carried out instrumentation on the stepper motor 27 herein.Scrambler 29 can be connected communicatedly with the controller 65 of decompression dry device 1, and the instrumentation result is outputed to controller 65.Controller 65 is connected with the not shown coil of stepper motor 27, based on the instrumentation signal of scrambler 29 to not shown coil power supply (valve opening control signal), the valve opening of control Motorized vacuum valve 21.

In this Motorized vacuum valve 21, spool 42 and valve seat 54 butts will cut off between the 1st port 51 and the 2nd port 52 usually.From this state, when stepper motor 27 rotated to positive dirction, feed nut 34 rotated integratedly by support 33 and output shaft 30, and this rectilinear motion that is converted to last direction (valve opening position) in figure that rotatablely moves passes to feed screw axle 36.Driving shaft 37 rises integratedly with feed screw axle 36, by link 40 pull-up spools 42.Thus, spool 42 is communicated with the 1st and the

2nd port

51,52 from valve seat 54 separation.Motorized vacuum valve 21 can be controlled tiny flow quantity by escape of liquid in the zone that the elastic deformation amount who makes annular seal parts 50 changes, and then controls extraction flow corresponding to fractional dose at spool 42 from valve seat 54 separate areas.Its valve opening is controlled by the rotation amount of the not shown rotor of stepper motor 27.

On the other hand, when stepper motor 27 rotated to negative direction, feed nut 34 rotated to negative direction integratedly with output shaft 30, and feed screw axle 36 is descended.Driving shaft 37 descends integratedly with feed screw axle 36, makes spool 42 by link 40 and valve seat 54 butts.At this moment, after spool 42 and valve seat 54 butts, return spring 44 and spool 42 is pressed down so that annular seal parts 50 and valve seat 54 driving fits seal to valve seat 54 1 sides with link 40 with in conjunction with clearance amount between the pin 41.

Curve falls in＜pressure 〉

Fig. 3 is illustrated in to make valve opening fall the figure of curve Y1, Y2, Y3, Y4, Y5, Y6, Y7, Y8 with the pressure under the situation of same ratio variation near the drag flow zone (more than the following 100Pa of atmospheric pressure (105Pa)) of atmospheric pressure.The longitudinal axis is represented vacuum pressure (Pa), transverse axis express time (Sec).Fig. 4 is that expression makes pressure shown in Figure 3 fall curve Y1, Y2, Y3, Y4, Y5, Y6, Y7, the Y8 figure with the state that is offset in time with the approximate mode of goal pressure rate of return of angle X.The longitudinal axis is represented vacuum pressure, the transverse axis express time.

The vacuum pressure normalization of the longitudinal axis record of Fig. 3 and Fig. 4 (dimension is 1 change), 1.0 is atmospheric pressure, is 1.01325 * 105Pa.In addition, the numeral of the time of the transverse axis of Fig. 3 record is to mark for convenience, might not be defined in this time.Fig. 3 and Y1～Y8 shown in Figure 4 are illustrated in the valve opening that makes Motorized vacuum valve 21 and fall curve with the pressure of distinguishing by valve opening under the situation of certain expanded in size.The ability normalization expression of curve Y1～Y8 with Motorized vacuum valve 21 falls in pressure, and the size of the numeral that alphabetical Y added is represented the size of fluid ability.The X of Fig. 4 is the goal pressure rate of return of angle of target gradient of the pressure of expression chamber 10.X1～X8 of Fig. 3 and Fig. 4 represents to seek the result that the part that is similar to goal pressure rate of return of angle X among curve Y1～Y8 falls in pressure.

As shown in Figure 3, fall valve opening that curve Y8 makes Motorized vacuum valve 21 with certain size (for example every 1mm) when enlarging interimly to pressure falling curve Y1 from pressure, pressure falls among curve Y1～Y8 with the approximate approximate part X1～X8 of goal pressure rate of return of angle X and reduces along with the expansion of valve opening.This is because valve opening is big more, descends while the pressure of vacuum pressure is described bigger curve.

In addition, as shown in Figure 3, approximate part X1～X8 of curve Y1～Y8 falls in pressure, and valve opening enlarges more, and overlapping part increases more.That is, to pressure approximate part X2, the X3 of curve Y2, Y3, Y4 falls, when X4 compares, pressure the approximate part X3 of curve Y3 falls and approximate part X2 part that curve Y2 falls in pressure overlapping, and with pressure to fall the approximate part X4 part of curve Y4 overlapping.In addition, it is overlapped that approximate part X4～X8 of curve Y4～Y8 falls in pressure.

Therefore, as shown in Figure 4, make pressure fall curve Y2～Y8 with situation about moving along time shaft with the approximate mode of goal pressure rate of return of angle X under, with the valve opening of Motorized vacuum valve 21 from falling the corresponding valve opening of curve Y1 after expanding pressure to and falling the corresponding valve opening of curve Y2 with pressure, fall in the way of goal pressure rate of return of angle X2 of curve Y2 at pressure, the valve opening of Motorized vacuum valve 21 is expanded to pressure and falls the corresponding valve opening of curve Y3 from falling the corresponding valve opening of curve Y2 with pressure.Again thereafter, the valve opening of Motorized vacuum valve 21 is being expanded to and falls the corresponding valve opening of curve Y4 with pressure and immediately the valve opening of Motorized vacuum valve 21 is expanded to pressure and falls the corresponding valve opening of curve Y6 from falling the corresponding valve opening of curve Y5 with pressure later on from falling the corresponding valve opening of curve Y3 with pressure, immediately the valve opening of Motorized vacuum valve 21 is being expanded to pressure and falls the corresponding valve opening of curve Y7 from falling the corresponding valve opening of curve Y6 with pressure thereafter again.Further the valve opening of Motorized vacuum valve 21 is expanded to pressure and falls the corresponding valve opening of curve Y8 from falling the corresponding valve opening of curve Y7 with pressure then, chamber 10 is evacuated to complete vacuum.That is, as shown in Figure 4, under the situation of valve opening, produced several points must change to next valve opening immediately behind the set point of change valve opening set point with certain expanded in size with Motorized vacuum valve 21.Such set point need not be controlled with exhaust in fact, becomes meaningless set point.

＜vacuum pressure characteristic 〉

As mentioned above, pressure is fallen in the actual measurement that curve carries out in the valve opening of change Motorized vacuum valve 21, if the inventor has found valve opening is enlarged by the geometric ratio multiple, so that curve and the approximate mode of goal pressure rate of return of angle X fall in the pressure that obtains in each valve opening, set the timing that the valve opening of Motorized vacuum valve 21 is switched, then can control exhaust velocity and make pressure fall in the curve not make pressure in the chamber 10 overlappingly to descend with the approximate state of goal pressure rate of return of angle X with the approximate part of goal pressure rate of return of angle X.Below, describe particularly.

Fig. 5 is illustrated near the drag flow zone of atmospheric pressure, makes valve opening fall the figure of curve Y1, Y2, Y4, Y8 according to the pressure under the situation of 2 times of geometric ratio multiples variations.The longitudinal axis is represented vacuum pressure, the transverse axis express time.Fig. 6 is that expression makes pressure shown in Figure 5 fall curve Y1, Y2, Y4, the Y8 figure with the state that is offset in time with the approximate mode of goal pressure rate of return of angle X.The longitudinal axis is represented vacuum pressure, the transverse axis express time.

The Y1 of Fig. 5, Y2, Y4, Y8 are that expression is set the valve opening of Motorized vacuum valve 21 according to 2 times of geometric ratio multiples, and curve falls in the result's who measures with the pressure of 15 pairs of chambers 10 of pressure transducer pressure.The X of Fig. 6 is the goal pressure rate of return of angle of target gradient of the pressure of expression chamber 10.The X1 of Fig. 5, X2, X4, X8 represent to seek the result that the part that is similar to goal pressure slope X among curve Y1, Y2, Y4, the Y8 falls in pressure.Curve Y1, Y2 fall in pressure, Y4, Y8 represent that with the ability normalization of Motorized vacuum valve 21 size of the numeral that alphabetical Y adds is represented the size of fluid ability.

As shown in Figure 6, making pressure fall curve Y1, Y2, Y4, Y8 when being offset in time, do not make pressure shown in Figure 5 fall approximate part X1, the X2 of curve Y1, Y2, Y4, Y8, set point P 11, P12, the P13 that X4, X8 set valve opening overlappingly with the approximate mode of goal pressure rate of return of angle X.Promptly, if shown in the set point P11 of Fig. 6, vacuumize beginning back to time t11 process during (perhaps vacuum pressure drop to from atmospheric pressure pressure Q11 during) valve opening of Motorized vacuum valve 21 is set at pressure falls the corresponding valve opening of curve Y1, shown in the set point P12 of valve opening among the figure, from time t11 to time t12 process during (perhaps vacuum pressure drop to from pressure Q11 pressure Q12 during) valve opening of Motorized vacuum valve 21 is set at pressure falls the corresponding valve opening of curve Y2, shown in the set point P13 of valve opening among the figure, from time t12 to time t13 process during (perhaps vacuum pressure drop to from pressure Q12 pressure Q13 during) valve opening of Motorized vacuum valve 21 is set at pressure falls the corresponding valve opening of curve Y4, shown in the set point P14 of valve opening among the figure, (vacuum pressure drops to after the pressure Q13) is set at the valve opening of Motorized vacuum valve 21 with pressure and falls the corresponding valve opening of curve Y8 after time t13, then by the valve opening of Motorized vacuum valve 21 was enlarged by 4 stages, can be pressed onto complete vacuum so that vacuum pressure vacuumizes near the state of goal pressure rate of return of angle X from atmosphere.

Fig. 7 is illustrated near the drag flow zone of atmospheric pressure, makes valve opening fall the figure of curve Y1, Y1.41, Y2, Y2.82, Y4, Y5.64, Y8 according to the pressure under the situation of 2 times of geometric ratios variations of √.The longitudinal axis is represented vacuum pressure, the transverse axis express time.Fig. 8 is illustrated in to make pressure shown in Figure 7 fall curve Y1, Y1.41, Y2, Y2.82, Y4, Y5.64, the Y8 figure with the state that is offset in time with the approximate mode of goal pressure rate of return of angle.The longitudinal axis is represented vacuum pressure, the transverse axis express time.

The Y1 of Fig. 7, Y1.41, Y2, Y2.82, Y4, Y5.64, Y8 are that expression is set the valve opening of Motorized vacuum valve 21 according to 2 times of geometric ratio multiples of √, and curve falls in the result's who measures with the pressure of 15 pairs of chambers 10 of pressure transducer pressure.The X of Fig. 8 is the goal pressure rate of return of angle of target gradient of the pressure of expression chamber 10.The X1 of Fig. 7, X1.41, X2, X2.82, X4, X5.64, X8 represent to seek the result that the part that is similar to goal pressure slope X among curve Y1, Y1.41, Y2, Y2.82, Y4, Y5.64, the Y8 falls in pressure.Curve Y1, Y1.41, Y2, Y2.82, Y4, Y5.64, the Y8 ability normalization expression with Motorized vacuum valve 21 falls in the pressure of Fig. 7 and Fig. 8, and the size of the numeral that alphabetical Y adds is represented the size of fluid ability.

As shown in Figure 8, make pressure fall curve Y1, Y1.41, Y2, Y2.82, Y4, Y5.64, Y8 when being offset in time with the approximate mode of goal pressure rate of return of angle X, approximate part X1, X1.41, X2, X2.82, X4, X5.64, the X8 that does not make pressure shown in Figure 7 fall curve Y1, Y1.41, Y2, Y2.82, Y4, Y5.64, Y8 sets set point P21, P22, P23, P24, P25, the P26 of valve opening overlappingly.Promptly, if shown in the set point P21 of the valve opening of Fig. 8, vacuumize beginning back to time t21 process during (perhaps vacuum pressure drop to from atmospheric pressure pressure Q21 during) valve opening of Motorized vacuum valve 21 is set at pressure falls the corresponding valve opening of curve Y1, shown in the set point P22 of valve opening among the figure, from time t21 to time t22 process during (perhaps vacuum pressure drop to from pressure Q21 pressure Q22 during) valve opening of Motorized vacuum valve 21 is set at pressure falls the corresponding valve opening of curve Y1.41, shown in the set point P23 of valve opening among the figure, during from time t22 to time t23 (perhaps vacuum pressure drop to from pressure Q22 pressure Q23 during) valve opening of Motorized vacuum valve 21 is set at pressure falls the corresponding valve opening of curve Y2, shown in the set point P24 of valve opening among the figure, during from time t23 to time t24 (perhaps vacuum pressure drop to from pressure Q23 pressure Q24 during) valve opening of Motorized vacuum valve 21 is set at pressure falls the corresponding valve opening of curve Y2.82, shown in the set point P25 of valve opening among the figure, during from time t24 to time t25 (perhaps vacuum pressure drop to from pressure Q24 pressure Q25 during) valve opening of Motorized vacuum valve 21 is set at pressure falls the corresponding valve opening of curve Y4, shown in the set point P26 of valve opening among the figure, during from time t25 to time t26 (perhaps vacuum pressure drop to from pressure Q25 pressure Q26 during) valve opening of Motorized vacuum valve 21 is set at pressure falls the corresponding valve opening of curve Y5.64, (perhaps vacuum pressure drops to after the pressure Q26) is set at the valve opening of Motorized vacuum valve 21 with pressure and falls the corresponding valve opening of curve Y8 after time t26, then by the valve opening of Motorized vacuum valve 21 was enlarged by 7 stages, can be pressed onto complete vacuum so that vacuum pressure vacuumizes near the state of goal pressure rate of return of angle X from atmosphere.

Thereby as can be known, if as Fig. 6 and shown in Figure 8, the valve opening of Motorized vacuum valve 21 is set with the geometric ratio multiple, make the time shaft skew so that the approximate mode of curve and goal pressure rate of return of angle X falls in the pressure that is obtained by each valve opening of setting, then can not make pressure fall the set point that with overlapping determine transfer valve aperture approximate of curve with goal pressure rate of return of angle X.That is, the gas that makes chamber 10 approx with the goal pressure rate of return of angle X of straight line as can be known is to vacuum pump 13 exhausts, as long as the valve opening geometric ratio of Motorized vacuum valve 21 is set.And if determine geometric ratio multiple (perhaps valve opening being switched at some) as can be known, the set point of valve opening is to determine inevitably according to the goal pressure rate of return of angle X that sets, and does not need inadequate setting.

When Fig. 6 and chart shown in Figure 8 are compared, if set the value of geometric ratio multiple less as can be known, then shown in the set point P21～P26 of the set point P11～P13 of valve opening among the figure and valve opening, the part that links to each other that curve falls in pressure approaches goal pressure rate of return of angle X, and continuous the becoming of curve falls in pressure can not waste.That is, set the value of geometric ratio multiple less, make the number of times that the valve opening of Motorized vacuum valve 21 is switched many more, then the rectilinearity of decline that more can vacuum pressure is controlled exhaust velocity well.

In addition, as Fig. 6 and shown in Figure 8, if set the value of geometric ratio multiple bigger, then Shi Ce pressure the quantity of curve is fallen and can be less.Particularly, the geometric ratio multiple being set at pressure under 2 times the situation falls curve and needs 4, relative therewith, the geometric ratio multiple being set at pressure under the situation of 2 times of √ falls curve and needs 7, the geometric ratio multiple is set at 2 times situation and compares with the situation that the geometric ratio multiple is set at 2 times of √, the quantity that curve falls in pressure can reduce 3.Owing to curve negotiating falls in pressure the valve opening of Motorized vacuum valve 21 is set to be pressed onto complete vacuum from atmosphere according to the valve opening of geometric ratio multiple and vacuumize and obtain, so pressure falls obtaining of curve and needs the time as can be known.Thereby, if the pressure that the value of geometric ratio multiple is set greatly and minimizing should obtain is fallen the quantity of curve, then pressure time of obtaining of falling curve shortens, and can shorten the time that determines the valve opening of Motorized vacuum valve 21 in the mode that is similar to goal pressure rate of return of angle X.

The exhaust velocity control method of＜Motorized vacuum valve: the exhaust velocity control data generates action 〉

Exhaust velocity control method to the Motorized vacuum valve that utilizes above-mentioned vacuum pressure characteristic describes.Fig. 9 is the process flow diagram of the download action of exhaust velocity determination procedure.Figure 10～Figure 16 is the figure that expression display 63a goes up an example of picture displayed.Figure 17 is the process flow diagram of exhaust velocity determination procedure.Figure 18 is the process flow diagram of vacuum pressure control program.

Computing machine 63 is according to the requirement from the user, in the step 1 of Fig. 9 (hereinafter to be referred as " S1 ".) in, make the display 63a of computing machine 63 show download affirmation picture shown in Figure 10.Confirm to show on the picture in download and " download the exhaust velocity determination procedure, agree? " if, downloading, the user clicks the button B1 of "Yes" with mouse etc.So computing machine 63 is connected with server 61 by internet 62, begins to download the exhaust velocity determination procedure from server 61.Computing machine 63 standbies (S2:No of Fig. 9) till the download of finishing the exhaust velocity determination procedure.

When the download of exhaust velocity determination procedure is finished (S2:Yes), computing machine 63 shows geometric ratio multiple setting picture as shown in figure 11 in the S3 of Fig. 9 on display 63a.The geometric ratio multiple is set in the picture and is provided with geometric ratio multiple input field B3.The user (is 2 times herein from the keyboard of computing machine 63 with desirable geometric ratio multiple.) be input among the geometric ratio multiple input field B3, again with hit OK button B4 such as mouses.

Computing machine 63 judges that according to OK button B4 is clicked the geometric ratio multiple of valve opening sets (S4 of Fig. 9), in S5, makes as shown in figure 12 goal pressure rate of return of angle set picture and shows on display 63a.In the goal pressure rate of return of angle is set picture, be provided with to be used to import and be pressed onto the evacuation time input field B6 that complete vacuum makes the goal pressure rate of return of angle input field B5 of the goal pressure rate of return of angle X that vacuum pressure reduces with linearity and is used to import evacuation time from atmosphere.The user by in goal pressure rate of return of angle input field B5 with the manual desirable goal pressure rate of return of angle X of input such as mouse drag, perhaps the desirable evacuation time of input in evacuation time input field B6 decides goal pressure rate of return of angle X.For example, wishing under the short situation of evacuation time, shown in Xa among the figure, the goal pressure rate of return of angle X De Pour that shows among the goal pressure rate of return of angle input field B5 is tiltedly strengthened, on the other hand, wishing under the long situation of evacuation time, shown in XB among the figure, make that display-object pressure rate of return of angle X De Pour tiltedly reduces among the goal pressure rate of return of angle input field B5.In addition, for example, also can set the length of evacuation time according to the time of importing among the evacuation time input field B6.Under the situation of having imported evacuation time, the goal pressure rate of return of angle X that begins from atmospheric pressure is presented at the goal pressure rate of return of angle input field B5 automatically according to evacuation time.After the setting of goal pressure rate of return of angle X or evacuation time was finished, the user used click OK button B7.

Computing machine 63 judges that goal pressure rate of return of angle X sets (S6:Yes) when OK button B7 is clicked, in the S7 of Fig. 9, make setting content as shown in figure 13 confirm that picture shows on display 63a.Confirm in the picture at setting content, in setting expression hurdle B8, demonstrate the geometric ratio multiple of the valve opening that is set by the user and the goal pressure rate of return of angle X that is set by the user.The user confirm to set the displaying contents of expression hurdle B8 correct after, with the button B9 of click "Yes".Wherein, want change setting to represent under the situation of displaying contents of hurdle B8 the user, with the button B10 of click " change ".(S8 of Fig. 9: change), computing machine 63 turns back to the S3 of Fig. 9, shows geometric ratio multiple setting picture as shown in figure 11 once more in this case.

When setting content confirms that the button B9 of "Yes" of picture is clicked (S8:OK of Fig. 9), computing machine 63 makes as shown in figure 14 USB storage insert the indication picture to show on display 63a.Inserting the indication screen displayed in USB storage for example " copies to the geometric ratio multiple of exhaust velocity determination procedure, setting, the goal pressure rate of return of angle of setting in the USB storage, please USB storage is inserted USB port." indication.The user clicks the OK button B11 that USB storage is inserted the indication picture after as indicated USB storage 64 being inserted the USB port of computing machine 63.Computing machine 63 like this standby to detecting (S11:No of Fig. 9) till the USB storage 64.On the other hand, computing machine 63 is (S11:Yes) when detecting USB storage 64, and in the S 12 of Fig. 9, the geometric ratio multiple of valve opening of exhaust velocity determination procedure, setting and the goal pressure rate of return of angle X of setting are duplicated in beginning in USB storage 64.The progress Zhuan Condition that duplicates shows in the progress of duplicating Zhuan Condition display frame as shown in figure 15.Computing machine 63 is when duplicating when finishing, and in the S13 of Fig. 9, shows duplicating and finish the notice picture as shown in figure 16.Duplicate finish the notice screen displayed for example " duplicate and finish.Please USB storage is extracted from USB port.Then, please the USB storage of extracting is connected with the controller of the pressure of control chamber, the geometric ratio multiple of exhaust velocity determination procedure, setting and the goal pressure rate of return of angle of setting are copied in the controller.Please by the selected cell of controller select ready mode determined the set point of valve opening after, by selected cell select execution pattern executive process thereafter." indication.The user has understood according to displaying contents after the sequence of operation thereafter, clicks and duplicates the OK button B12 that finishes the notice picture.So computing machine 63 finishes the processing of Fig. 9, the display frame of display 63a is turned back to initial picture.

The user holds USB storage 64 and moves to place, controller 65 place.Then, the USB port of USB storage 64 with controller 65 is connected, duplicates the geometric ratio multiple of exhaust velocity control program, setting and the goal pressure rate of return of angle X of setting to controller 65 from USB storage 64.After duplicating end, ready mode is selected in user by selecting unit 65.So controller 65 is carried out the exhaust velocity determination procedure that duplicates.Figure 17 is the process flow diagram of exhaust velocity determination procedure.

Shown in the S15 of Figure 17, the processing that controller 65 will determine exhaust velocity just in commission this situation is reported the user by display lamp etc.Because reporting of this display lamp etc., the user recognizes and can't make decompression dry device 1 executive process.

Then, among the S16, controller 65 is read the geometric ratio multiple of the valve opening of setting, obtains pressure successively and falls curve and being stored.That is, controller 65 is obtained the valve opening of Motorized vacuum valve 21 according to the geometric ratio multiple that duplicates from USB storage 64.Particularly, be set at the geometric ratio multiple under 2 times the situation, the valve opening of Motorized vacuum valve 21 is tried to achieve and is 12.5%, 25%, 50%, 100% of the stroke from the off-position to the fully open position.Then, obtain pressure according to each valve opening of trying to achieve and fall curve.Promptly, 12.5% the valve opening steering order that controller 65 will be for example be set at stroke from the off-position to the fully open position with the valve opening of Motorized vacuum valve 21 is sent to Motorized vacuum valve 21, drives vacuum pump 13 and makes the pressure of chamber 10 drop to complete vacuum from atmospheric pressure.At this moment, controller 65 is from being used to measure the pressure transducer 15 input pressure determination datas of the pressure in the chamber 10.Then, controller 65 is shown in the Y1 of for example Fig. 5, according to the piezometry data of being imported, obtain the expression vacuum pressure of chamber 10 and the pressure of time relation and fall curve, and the valve opening 12.5% that curve and setting fall in the pressure of trying to achieve is associated with storing in storage area.Therewith in the same manner, controller 65 with the valve opening of Motorized vacuum valve 21 be set at respectively stroke from the off-position to the fully open position 25%, 50%, 100% and obtain the piezometry data, and the pressure of the Fig. 5 that will try to achieve according to the piezometry data that obtain falls curve Y2, Y4, Y8 and is associated with the valve opening 25%, 50%, 100% of setting and is stored in the storage area respectively.

Then, among the S17, fall curve based on the goal pressure rate of return of angle X that sets with the pressure of obtaining and generate exhaust velocity control data and storage.Herein, the exhaust velocity control data is meant that expression has determined result's the data of the set point of transfer valve aperture.The set point of valve opening is tried to achieve according to vacuum pressure and time relation.Generation method to the exhaust velocity control data further specifies.When falling curve Y1, Y2, Y4, Y8 according to the pressure of obtaining when seeking respectively, become shown in approximate part X1, X2 as Fig. 5, X4, the X8 with the approximate part of goal pressure rate of return of angle X.As shown in Figure 6, when to make pressure fall curve Y1, Y2, Y4, Y8 when being offset along time shaft with the approximate mode of goal pressure rate of return of angle X, begin back elapsed time t11 from vacuumizing, and drop to from atmospheric pressure under the situation of pressure Q11 at vacuum pressure, pressure falls curve Y1, Y2 and intersects.In addition, begin back elapsed time t12 from vacuumizing, and drop at vacuum pressure under the situation of pressure Q12, pressure falls curve Y2, Y4 and intersects.In addition, begin back elapsed time t13 from vacuumizing, and drop at vacuum pressure under the situation of pressure Q13, pressure falls curve Y4, Y8 and intersects.At this, the intersection point that curve Y1, Y2 are fallen in pressure is set at valve opening is switched to 25% set point P11 from 12.5%, the intersection point that curve Y2, Y4 are fallen in pressure is set at valve opening is switched to 50% set point P12 from 25%, and the intersection point that curve Y4, Y8 are fallen in pressure is set at valve opening is switched to 100% set point P13 from 50%.Then, will make as the exhaust velocity control data by set point P11, P12, the P13 that vacuum pressure and time are determined.

After the generation of exhaust velocity control data, storage finish, in S18, report exhaust velocity decision action and finish termination by display lamp being extinguished wait.Thus, the user can recognize can executive process.

The exhaust velocity control method of＜Motorized vacuum valve: vacuum pressure control action 〉

Figure 18 is the process flow diagram of the vacuum pressure control program of storage in controller 65.

When the user passes through the selected cell 65a selection execution pattern of controller 65, controller 65 startings vacuum pressure control program shown in Figure 180.Then, at first in S20, wafer is moved into chamber 10.Then, among the S21, (P11 of Fig. 6～P13) switches the valve opening of Motorized vacuum valve 21, makes the pressure of chamber 10 be decompressed to complete vacuum from atmospheric pressure according to the set point of the valve opening of being set by the exhaust velocity control data.Particularly, as shown in Figure 6, controller 65 makes the valve opening with Motorized vacuum valve 21 be set at 12.5% valve opening control signal and is sent to Motorized vacuum valve 21, makes Motorized vacuum valve 21 drive valve, begins to vacuumize from atmospheric pressure.After beginning to vacuumize during through valve opening t11 switching time, controller 65 makes the valve opening with Motorized vacuum valve 21 be set at 25% valve opening control signal and is sent to Motorized vacuum valve 21, expand the valve opening of Motorized vacuum valve 21 to valve opening before tight 2 times, make the conduction of exhaust system become big.Then, controller 65 is after beginning to vacuumize during through valve opening t12 switching time, make valve opening with Motorized vacuum valve 21 be set at 50% valve opening control signal and be sent to Motorized vacuum valve 21, before the valve opening of Motorized vacuum valve 21 expanded to 2 times of valve opening, make the conduction of exhaust system become big.Then, controller 65 is after beginning to vacuumize during through valve opening t13 switching time, make valve opening with Motorized vacuum valve 21 be set at 100% valve opening control signal and be sent to Motorized vacuum valve 21, before the valve opening of Motorized vacuum valve 21 expanded to 2 times of valve opening, make the conduction of exhaust system become big.Its result, the pressure of chamber 10 as shown in Figure 6, the state approximate with the goal pressure rate of return of angle X that sets with the user is decompressed to complete vacuum from atmospheric pressure.

Then, among the S22,, judge whether the pressure of chamber 10 surpasses the drag flow zone based on the piezometry data that pressure transducer 15 is measured.Before not surpassing the drag flow zone (S22:No), in S21, use Motorized vacuum valve 21 control exhaust velocities.On the other hand, the pressure at chamber 10 surpasses under the situation in drag flow zone (S22:Yes) the valve opening control exhaust velocity of adjustment heavy caliber vacuum shut off valve 12.Heavy caliber vacuum shut off valve 12 is compared Motorized vacuum valve 21, and seat diameter is big, can control big flow, therefore can carry out comparing exhaust faster with the situation of only utilizing Motorized vacuum valve 21 to carry out exhaust control.

When controller 65 finishes in the process (process) to the wafer in the chamber 10 (S24:Yes), in S25, wafer is taken out of from chamber 10.Then, controller 65 in S26, having imported the indication that vacuum pressure control is finished and judged whether to finish vacuum pressure control by the process conclusion button according to whether by inferior.In not input indication, proceed in S27, to make chamber 10 in S24, move into next wafer under the situation of vacuum pressure control (S26:No) for behind the atmospheric pressure.On the other hand, when making vacuum pressure, the input indication controls under the situation about finishing (S26:Yes) termination.

Wherein, controller 65 also can be reported this situation in the process of being in by display lamp etc. in above-mentioned vacuum pressure control action.

In addition, in the maximum progression (being under the situation of valve opening 100%) of the set point of valve opening, might enter into the zone (for example intermediate flow zone) of the conductive influence of the system of being subjected to herein.But in this case, fall shown in the curve Y4 as the pressure of Fig. 6, exhaust velocity can not surpass the goal pressure rate of return of angle X that sets and accelerate at least, only is that speed is offset to secure side.

In the above description, exemplified the user and the geometric ratio multiple has been set at 2 times situation, but the geometric ratio multiple of valve opening is set under the situation of 2 times of √ user for example, by processing same as described above, determine the set point P21～P26 of valve opening as shown in Figure 8, can control exhaust velocity more point-blank.

＜action effect 〉

Thereby the exhaust velocity control method of the Motorized vacuum valve of above-mentioned embodiment, exhaust velocity control system 66, valve opening determining method, valve opening determination procedure play following action effect.For the control achievement that makes vacuum pump 13, chamber 10, exhaust piping system 16 directly is reflected on the exhaust velocity, the valve opening of Motorized vacuum valve 21 is controlled according to the geometric ratio multiple interimly, by each valve opening, carry out exhaust by vacuum pump 13 from the drag flow zone, and obtain the piezometry data that the pressure of 15 pairs of chambers 10 of pressure transducer is measured.That is, use the device that object is set of Motorized vacuum valve 21 by different valve opening observed pressure determination datas.Obtain pressure according to the piezometry data of surveying and fall curve Y1, Y2, Y3, Y4 by different valve openings, make pressure fall curve Y1, Y2, Y3, Y4 when being offset in time with the approximate mode of goal pressure rate of return of angle X, curve Y1, Y2 fall in the pressure that curve Y2, Y3, Y4 and before valve opening fall in pressure, Y3 intersects respectively.At this, curve set point P11, P12, the P13 of intersection point decision for the valve opening of Motorized vacuum valve 21 is switched each other fallen in pressure.Like this, when valve opening was changed according to the geometric ratio multiple, what curve Y1, Y2, Y3, Y4 fell in the pressure corresponding with each valve opening can be not overlapping with the approximate part of goal pressure rate of return of angle X, so set point P11, P12, P13 can not set meaninglessly.When vacuum pressure is controlled, based on set point P11, P12, P13 the valve opening of Motorized vacuum valve 21 is switched, change the conduction of exhaust piping system 16 thus, the exhaust velocity in the control drag flow zone.At this moment, because Motorized vacuum valve 21 enlarges valve opening when the pressure of chamber 10 departs from the part that is similar to goal pressure rate of return of angle X by the geometric ratio multiple, the pressure of chamber 10 is descended near the goal pressure rate of return of angle once more, even so the pressure of chamber 10 in the drag flow zone, also descend with the state that is similar to goal pressure rate of return of angle X.

Like this, in the above-described embodiment, curve Y1, Y2, Y3, Y4 fall in the pressure that use is surveyed in the drag flow zone as the chamber that object is set 10, vacuum pump 13 and the exhaust piping system 16 of Motorized vacuum valve 21, so can will be reflected to the control achievement that object is set of Motorized vacuum valve 21, the harmful effect of process in the drag flow zone in the decision of set point P 11, P12 that the valve opening of Motorized vacuum valve 21 is switched, P13.Then, even the people of set point P11, P12, the P13 of decision valve opening do not have the dysgenic professional knowledge that is used to get rid of process also can be only by observed pressure curve Y1, Y2 fall, Y3, Y4 make pressure fall curve Y1, Y2, Y3, Y4 and goal pressure rate of return of angle X and are offset in time approx, so that the pressure of chamber 10 decides set point P11, P12, the P13 of valve opening near the mode of goal pressure rate of return of angle X.Its result, above-mentioned embodiment, compare in the drag flow zone and by main-valve and sub-valve valve opening to be carried out 2 sections controls and control the situation of exhaust velocity (Figure 26 with reference to), can in the drag flow zone, process not obtained vacuum pressure, exhaust controlled condition with impacting, shorten exhaust velocity.Then, above-mentioned embodiment, though can not as the situation (Figure 27 reference) of exhaust velocity being carried out FEEDBACK CONTROL, the pressure linearity of chamber be descended, even but do not use complicated control basal plate, control program etc., also can compare the mode (Figure 26 with reference to) of controlling exhaust velocity by sub-valve and main-valve and make the pressure rectilinearity of the chamber 10 ground control exhaust velocity that descends more.

Thereby, according to exhaust velocity control method, exhaust velocity control system 66, valve opening determining method, the valve opening determination procedure of the Motorized vacuum valve of above-mentioned embodiment, can so that the pressure of chamber 10 near the mode of goal pressure rate of return of angle X simple and qurer set set point P11, P12, the P13 that the valve opening of Motorized vacuum valve 21 is switched.

The exhaust velocity control method of the Motorized vacuum valve of above-mentioned embodiment can be set at the geometric ratio multiple and set the geometric ratio multiple on the picture.Therefore, for example setting at the geometric ratio multiple sets the geometric ratio multiple less (for example √ is 2 times) on the picture, then as shown in Figure 8, can increase the quantity of the set point that the valve opening of Motorized vacuum valve is switched, in position, the pressure of chamber is changed smoothly the set point decision near the goal pressure rate of return of angle.On the other hand, for example the geometric ratio multiple set on the picture geometric ratio multiple set big (for example 2 times), then as shown in Figure 6, the quantity of curve falls in the pressure that can reduce actual measurement, shortens the time of the set point of decision valve opening.Thereby, exhaust velocity control method according to the Motorized vacuum valve of above-mentioned embodiment, utilize the setting value of geometric ratio multiple, the degree that can change smoothly the pressure that makes chamber 10, the time that can guarantee that is used to obtain the set point of valve opening are adjusted, and each requirement of user is reflected in the exhaust velocity control.

The exhaust velocity control method of the Motorized vacuum valve of above-mentioned embodiment can be set set target pressure rate of return of angle X on the picture at the goal pressure rate of return of angle.Therefore, for example wanting to make under the short situation of evacuation time, the goal pressure rate of return of angle set in the picture ， Shi tilt angle significantly set target pressure rate of return of angle X get final product.On the other hand, wanting under the situation of slow exhaust, less ground of ， Shi tilt angle set target pressure rate of return of angle X gets final product in goal pressure rate of return of angle setting picture.Thereby, exhaust velocity control method according to the Motorized vacuum valve of above-mentioned embodiment, by the setting of goal pressure rate of return of angle X, the degree that can change the pressure of evacuation time, chamber 10 is adjusted, and each requirement of user is reflected in the exhaust velocity control.

The exhaust velocity control method of the Motorized vacuum valve of above-mentioned embodiment and exhaust velocity control system 66, heavy caliber vacuum shut off valve 12 is set up in parallel with Motorized vacuum valve 21 and is connected with chamber 10, the valve opening of switching Motorized vacuum valve 21 in the drag flow zone is controlled exhaust velocity, after surpassing the drag flow zone, can control the valve opening adjustment of the heavy caliber vacuum shut off valve 12 of big flow and control exhaust velocity comparing Motorized vacuum valve 21.Like this, in rolling the drag flow zone of deposit easily, utilize Motorized vacuum valve 21 to carry out exhaust lentamente, when surpassing the drag flow zone deposit roll may reduce the time, utilize heavy caliber vacuum shut off valve 12 to carry out quick exhaust, therefore can make the pressure of chamber 10 arrive target vacuum pressure from atmospheric pressure at short notice.This method and system 66 is particularly effective under the situation capacious of chamber 10.

(the 2nd embodiment)

Then, the 2nd embodiment of the present invention is described.Figure 19 is the summary construction diagram of the exhaust velocity control system 72 that relates to of the 2nd embodiment of the present invention.

The exhaust velocity control system 72 of present embodiment, the piezometry data of using controller 71 to be surveyed are asked for pressure and are fallen curve, use this pressure to fall curve, the set point of computing machine 63 decision valve openings, according to the set point that is determined, the vacuum pressure of 71 pairs of chambers 10 of controller is controlled.Under this implication, computing machine 63 and controller 71 are examples of " pressure actual measurement unit ", and computing machine 63 is examples of " exhaust velocity decision unit ", and controller 71 is examples of " vacuum pressure control module ".The exhaust velocity control system 72 of present embodiment, the method for the set point of decision valve opening is different with the 1st embodiment.At this, be that the center describes with difference with the 1st embodiment, for the point common, in accompanying drawing and explanation, adopt the symbol identical suitably to omit explanation with the 1st embodiment with the 1st embodiment.

As shown in figure 19, computing machine 63 is connected with server 61 by internet 62, downloads the exhaust velocity determination procedure from server 61.When the user carried out the exhaust velocity control program on computing machine 63, computing machine 63 was carried out processing shown in Figure 20, the set point of decision valve opening.Figure 20 is the process flow diagram of exhaust velocity determination procedure.

Computing machine 63 shows similarly that with the S3 of Fig. 9 the geometric ratio multiple sets picture (Figure 11) in S31, in S32, judge whether to set the geometric ratio multiple of valve opening.Input has the geometric ratio multiple in the geometric ratio multiple input field B3 of geometric ratio multiple setting picture, and during hit OK button B4, computing machine 63 judges that the geometric ratio multiple of valve opening is set (S32:Yes), in S33, shows pressure measured data input picture as shown in figure 21.The indication of for example " controller of the vacuum pressure of control chamber being set following valve opening and being checked the pressure variation of chamber, please import its measured result " in pressure measured data input screen displayed.Then, in pressure measured data input picture, show the valve opening 12.5%, 25%, 50%, 100% of trying to achieve based on the geometric ratio multiple of setting at S31 (being 2 times herein).Therefore, the user holds the place that is provided with that USB storage 64 is gone to controller 71, and USB storage 64 is connected in controller 71.Then, the user sets valve opening 12.5% to the valve opening setup unit 71a of controller 71.So controller 71 makes the pressure of chamber 10 be decompressed to complete vacuum from atmospheric pressure, make from pressure transducer 15 and be input to the piezometry data storage of controller 71 USB storage 64.Also similarly make the piezometry data storage respectively in USB storage 64 about valve opening 25%, 50%, 100% user.Like this, after the piezometry data of valve opening 12.5%, 25%, 50%, 100% are stored in USB storage 64, user's slave controller 71 is extracted USB storage 64 and is turned back to computing machine 63, and the piezometry data that USB storage 64 are connected in computing machine 63 and will be stored in USB storage 64 copy to computing machine 63.When duplicate finish after, the user clicks the load button B21 of pressure measured data input picture with mouse etc.

Computing machine 63 is when load button B21 is clicked, be judged as the measured value (S34:Yes) that falls curve according to the geometric ratio multiple input pressure of valve opening, in S35, similarly make the goal pressure rate of return of angle set picture (Figure 12 with reference to) with the S5 of Fig. 9 and on display 63a, show.When the user when the goal pressure rate of return of angle is set picture set target pressure rate of return of angle X (S36:Yes), computing machine 63 makes the exhaust velocity control data in S37.The creating method of exhaust velocity control data is identical with the S22 of Figure 17, therefore omits explanation.

Then, computing machine 63 confirms that with exhaust velocity control data for example shown in Figure 22 picture shows on display 63a in S38, make the user confirm the content of exhaust velocity control data.In the exhaust velocity control data is confirmed picture, show the chart B22 of the set point of valve opening and the duration of valve opening B23 under each valve opening as can be known.The user clicks change button B25 under the situation of the set point of wanting to change valve opening.(S39: change), computing machine 63 turns back to S31, makes the user set geometric ratio multiple and goal pressure rate of return of angle X more in this case.

On the other hand, the user does not have at the exhaust velocity control data to click the button B24 (S39:OK) of "Yes" under the situation of change.So computing machine 63 is provided with the indication picture with storage medium for example shown in Figure 23 and shows on display 63a in S40.At storage medium the indication that the indication screen displayed for example " is duplicated the set point of valve opening, after USB storage is inserted USB port, please be clicked " setting " " is set.Therefore, the user inserts the USB port of computing machines 63 with USB storage 64, and that clicks that storage medium is provided with the indication picture is provided with button B26.When computing machine 63 detects USB storage 64 (S41:Yes), in S42, the exhaust velocity control data is copied in the USB storage 64.Computing machine 63 duplicates when finishing the exhaust velocity control data being copied to USB storage 64, in S43, picture is finished in exhaust velocity decision for example shown in Figure 24 shown termination on display 63a.For example " set point of valve opening has copied to USB storage to finish screen displayed in the exhaust velocity decision.Please the set point of the valve opening of USB storage is copied to the controller of vacuum pressure control system, and the operation process begins switch " indication.Therefore, the user extracts USB storage 64 from computing machine 63, finishes the "Yes" button B27 of picture with the decision of click exhaust velocities such as mouse.Thus, computing machine 63 finishes processing shown in Figure 19.

Then, the user holds the USB storage 64 that stores exhaust velocity control data (set point of valve opening) and moves to the place that is provided with of controller 71.Then, USB storage 64 is connected in controller 71, exhaust velocity control data (set point of valve opening) is stored in the controller 71.Thereafter, the user begins switch 71B to the process of controller 71 and operates, the process that controller 71 is carried out based on the exhaust velocity control data.

＜action effect 〉

Thereby, the exhaust velocity control method of present embodiment, except that the action effect that in the 1st embodiment, illustrates, because the set point of the valve opening that will determine on computing machine 63 copies to controller 71, so controller 71 is automatically obtained the set point that the piezometry data do not need to determine valve opening, can be merely and qurer constitute the loop structure of controllers 71 by the controller 65 of the 1st embodiment.

(the 3rd embodiment)

Then, the 3rd embodiment of the present invention is described.

The exhaust velocity control method of the 3rd embodiment is except that vacuum pressure control operation, and is identical with the exhaust velocity control method of the 1st embodiment.Thereby, be that the center describes with difference with the 1st embodiment at this.

The exhaust velocity control method of present embodiment is different with the 1st embodiment on the timing this point of the valve opening of carrying out switching according to exhaust velocity control data (for example with reference to Fig. 6) Motorized vacuum valve 21 based on the piezometry data of pressure transducer 15.Promptly, controller 65 is using exhaust velocity control data for example shown in Figure 6 to carry out under the situation of vacuum pressure control, the valve opening with Motorized vacuum valve 21 be set at 12.5% begin to vacuumize in, from pressure transducer 15 input pressure determination datas, monitor the pressure of chamber 10.When the piezometry data that detect pressure transducer 15 when controller 65 become pressure Q11, the valve opening of Motorized vacuum valve 21 is switched to 25% from 12.5%.Then, when the piezometry data that detect pressure transducer 15 when controller 65 become pressure Q12, the valve opening of Motorized vacuum valve 21 is switched to 50% from 25%.Further, when the piezometry data that detect pressure transducer 15 when controller 65 become pressure Q13, the valve opening of Motorized vacuum valve 21 is switched to 100% from 50%.

＜action effect 〉

Above-mentioned exhaust velocity control method is switched the piezometry data and the exhaust velocity control data of pressure transducer 15 according to carrying out valve opening.Therefore, the set point P11 of the valve opening that above-mentioned exhaust velocity control method is set in the exhaust velocity control data is subjected to external interference (conductive synthetic etc.) and in time under the situation of skew, even do not carry out making accordingly the correction of set point P12, the P13 skew of the later valve opening of this set point P11, also can control exhaust velocity so that the pressure of chamber 10 is similar to the state of linear goal pressure rate of return of angle X with this skew.

Wherein, the present invention is not limited to above-mentioned embodiment, can realize various application.

(1) for example in the above-described embodiment, the exhaust velocity control method of Motorized vacuum valve is used in decompression dry device 1, but employed device in other the operational sequence such as the CVD device that also can use, plasma device, with the device of field of semiconductor manufacture different field (for example, edible bread is contained in make in the bag drying device of using for the device of vacuum or dried foods in the bag) etc. in field of semiconductor manufacture.

(2) for example in the above-described embodiment, the drive division 23 of Motorized vacuum valve 21 uses stepper motor 27, but drive division 23 also can be solenoid mode or pneumatic mode.

(3) for example in the above-described embodiment, obtain the exhaust velocity control data, but also can obtain exhaust velocity control data based on table, function as mapping (enum) data.

(4) for example in the above-described embodiment, use the exhaust velocity determination procedure to make computing machine 63 or controller 65 make the exhaust velocity control data.Relative therewith, the user also can make the exhaust velocity control data when seeing catalogue explanation etc.For example also can be that the user is switched the valve opening of Motorized vacuum valve 21 according to desirable geometric ratio multiple and curve falls in observed pressure, the pressure of obtaining is fallen curve and desirable goal pressure rate of return of angle X according to exploring approximate part, and the set point of setting valve opening by manual operation from the part of exploring makes the exhaust velocity control data.In this case, do not need the exhaust velocity determination procedure, can reduce cost.On the contrary, also can in advance the exhaust velocity determination procedure be stored in the controller 65, if the exhaust velocity control data of setting controller 65 is obtained pattern, then, make the exhaust velocity control data automatically according to the valve opening of geometric ratio multiple control Motorized vacuum valve 21 and obtain pressure and fall curve.In this case, the time that makes that is used to participate in the exhaust velocity control data shortens, and uses convenient.

(5) for example in the above-described embodiment, the exhaust velocity that Motorized vacuum valve 21 is carried out in the drag flow zone is controlled, and after surpassing the drag flow zone, controls exhaust velocity by heavy caliber vacuum shut off valve 12, realizes the shortening of evacuation time thus.Relative therewith, for example under the little situation of chamber capacity, Motorized vacuum valve 21 is connected with the chamber, only control exhaust velocity by Motorized vacuum valve 21.In this case, pressure that also can be by Motorized vacuum valve 21 control chambers 10 is so that it is pressed onto target vacuum pressure above the drag flow zone from atmosphere, and what can prevent deposit more reliably controls exhaust velocity with rolling.

(6) for example in the above-described embodiment, after breaking away from the drag flow zone, adjust the valve opening of heavy caliber vacuum shut off valve 12 with the control vacuum pressure.Relative therewith, because along with the viscosity in drag flow zone reduces, particulate becomes and is difficult to roll, so after also can reducing the valve opening adjustment of heavy caliber vacuum shut off valve 12 is controlled vacuum pressure in the viscosity in drag flow zone.In this case, compare, earlier use heavy caliber vacuum shut off valve 12, can further shorten exhaust velocity with the situation of after breaking away from the drag flow zone, controlling vacuum pressure by heavy caliber vacuum shut off valve 12.

Claims

1. the exhaust velocity control method of a Motorized vacuum valve, the valve opening that is provided in the Motorized vacuum valve in the exhaust piping system that chamber is connected with vacuum pump by control is controlled exhaust velocity, it is characterized in that, comprising:

Pressure actual measurement operation, the valve opening of described Motorized vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize described vacuum pump to carry out exhaust, utilize the vacuum pressure of the described chamber of determination of pressure sensor to fall curve with observed pressure from the drag flow zone;

Exhaust velocity decision operation, make the described pressure of distinguishing by valve opening of in described pressure actual measurement operation, surveying fall curve, the curve set point of intersection point decision for the valve opening of described Motorized vacuum valve is switched each other fallen in described pressure to be offset in time with the approximate mode of goal pressure rate of return of angle; With

Vacuum pressure control operation is switched the valve opening of described Motorized vacuum valve based on the described set point that determines in described exhaust velocity decision operation, controls the described exhaust velocity in the described drag flow zone.

2. the exhaust velocity control method of Motorized vacuum valve according to claim 1 is characterized in that, comprising:

Set the geometric ratio multiple of described geometric ratio multiple and set operation.

3. the exhaust velocity control method of Motorized vacuum valve according to claim 1 is characterized in that, comprising:

Set the goal pressure rate of return of angle of described goal pressure rate of return of angle and set operation.

4. the exhaust velocity control method of Motorized vacuum valve according to claim 1 is characterized in that:

In described vacuum pressure control operation, make the pressure of the described chamber of described determination of pressure sensor, when described determination of pressure sensor arrives the vacuum pressure corresponding with described set point, switch the valve opening of described Motorized vacuum valve.

5. the exhaust velocity control method of Motorized vacuum valve according to claim 1 is characterized in that:

Have be set up in parallel with described Motorized vacuum valve and be connected with described chamber, compare the heavy caliber vacuum shut off valve that described Motorized vacuum valve can be controlled bigger flow,

In described vacuum pressure control operation, the valve opening of switching described Motorized vacuum valve under with described heavy caliber vacuum shut off valve closing state in described drag flow zone is controlled described exhaust velocity, is controlling described exhaust velocity after breaking away from from described drag flow zone or in the valve opening that the viscosity step-down in described drag flow zone is adjusted described heavy caliber vacuum shut off valve later on.

6. the exhaust velocity control method of Motorized vacuum valve according to claim 1 is characterized in that:

In described vacuum pressure control operation, after breaking away from, adjust the valve opening of described Motorized vacuum valve and control described exhaust velocity from described drag flow zone.

7. exhaust velocity control system, the valve opening that is provided in the Motorized vacuum valve in the exhaust piping system that chamber is connected with vacuum pump by control is controlled exhaust velocity, it is characterized in that, comprising:

The pressure transducer that the pressure of chamber is measured;

The valve opening of described Motorized vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize described vacuum pump to carry out exhaust, utilize the vacuum pressure of the described chamber of determination of pressure sensor to survey the unit with the pressure that curve falls in observed pressure from the drag flow zone;

The described pressure of distinguishing by valve opening that makes that described pressure actual measurement unit surveys falls curve being offset in time with the approximate mode of goal pressure rate of return of angle, and the exhaust velocity decision unit of curve intersection point decision each other for set point that the valve opening of described Motorized vacuum valve is switched fallen in described pressure; With

Described set point based on described exhaust velocity decision unit decision switches the valve opening of described Motorized vacuum valve, controls the vacuum pressure control module of the described exhaust velocity in the described drag flow zone.

8. exhaust velocity control system according to claim 7 is characterized in that:

Described vacuum pressure control module, the valve opening of switching described Motorized vacuum valve under with described heavy caliber vacuum shut off valve closing state in described drag flow zone is controlled described exhaust velocity, is controlling described exhaust velocity after breaking away from from described drag flow zone or in the valve opening that the viscosity step-down in described drag flow zone is adjusted described heavy caliber vacuum shut off valve later on.

9. valve opening set point determining method, the set point that decision is switched the valve opening of the described Motorized vacuum valve under the situation of controlling exhaust velocity by the valve opening of control Motorized vacuum valve, described Motorized vacuum valve is provided in the exhaust piping system that chamber is connected with vacuum pump, it is characterized in that, comprising:

Pressure actual measurement operation, the valve opening of described Motorized vacuum valve is controlled according to the geometric ratio multiple interimly, under each valve opening, utilize described vacuum pump to carry out exhaust, obtain pressure according to the vacuum pressure of the described chamber of determination of pressure sensor and fall curve from the drag flow zone; With

Exhaust velocity decision operation, make the described pressure of in described pressure actual measurement operation, obtaining of distinguishing by valve opening fall curve, the curve set point of intersection point decision for the valve opening of described Motorized vacuum valve is switched each other fallen in described pressure to be offset in time with the approximate mode of goal pressure rate of return of angle.