CN102165562A - 半导体制造装置 - Google Patents
半导体制造装置 Download PDFInfo
- Publication number
- CN102165562A CN102165562A CN2008801312925A CN200880131292A CN102165562A CN 102165562 A CN102165562 A CN 102165562A CN 2008801312925 A CN2008801312925 A CN 2008801312925A CN 200880131292 A CN200880131292 A CN 200880131292A CN 102165562 A CN102165562 A CN 102165562A
- Authority
- CN
- China
- Prior art keywords
- laser
- core
- face
- semiconductor
- focal point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title abstract description 5
- 239000004065 semiconductor Substances 0.000 title abstract description 3
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- 230000000149 penetrating effect Effects 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 abstract description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 26
- 229910052710 silicon Inorganic materials 0.000 description 26
- 239000010703 silicon Substances 0.000 description 26
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 15
- 229920005591 polysilicon Polymers 0.000 description 15
- 239000011521 glass Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- 229910021417 amorphous silicon Inorganic materials 0.000 description 9
- 238000000034 method Methods 0.000 description 9
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- 239000010408 film Substances 0.000 description 8
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- 238000010521 absorption reaction Methods 0.000 description 4
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- 230000008859 change Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 210000002858 crystal cell Anatomy 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 241000931526 Acer campestre Species 0.000 description 2
- 241001270131 Agaricus moelleri Species 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000005224 laser annealing Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229920002457 flexible plastic Polymers 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
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- 238000007493 shaping process Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0732—Shaping the laser spot into a rectangular shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02678—Beam shaping, e.g. using a mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- High Energy & Nuclear Physics (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Optical Integrated Circuits (AREA)
- Recrystallisation Techniques (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2008/067684 WO2010035348A1 (ja) | 2008-09-29 | 2008-09-29 | 半導体製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102165562A true CN102165562A (zh) | 2011-08-24 |
CN102165562B CN102165562B (zh) | 2013-09-04 |
Family
ID=42059366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008801312925A Expired - Fee Related CN102165562B (zh) | 2008-09-29 | 2008-09-29 | 半导体制造装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8644665B2 (zh) |
KR (1) | KR101188417B1 (zh) |
CN (1) | CN102165562B (zh) |
WO (1) | WO2010035348A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116618836A (zh) * | 2023-07-21 | 2023-08-22 | 上海泽丰半导体科技有限公司 | 一种探针卡探针焊接方法及光束整形方法、光路 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8954170B2 (en) * | 2009-04-14 | 2015-02-10 | Digital Lumens Incorporated | Power management unit with multi-input arbitration |
US8669539B2 (en) * | 2010-03-29 | 2014-03-11 | Advanced Ion Beam Technology, Inc. | Implant method and implanter by using a variable aperture |
JP5853331B2 (ja) * | 2011-03-11 | 2016-02-09 | 株式会社ブイ・テクノロジー | レーザ照射装置及びそれを使用した液晶表示パネルの輝点修正方法 |
JP6328521B2 (ja) * | 2014-08-18 | 2018-05-23 | 株式会社ディスコ | レーザー光線のスポット形状検出方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1649081A (zh) * | 2004-01-30 | 2005-08-03 | 株式会社日立显示器 | 激光退火方法及激光退火装置 |
JP2007115729A (ja) * | 2005-10-18 | 2007-05-10 | Sumitomo Heavy Ind Ltd | レーザ照射装置 |
WO2007114031A1 (ja) * | 2006-03-30 | 2007-10-11 | Hitachi Computer Peripherals Co., Ltd. | レーザ照射装置及びレーザ照射方法及び改質された被対象物の製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2683241B2 (ja) | 1988-02-19 | 1997-11-26 | 富士通株式会社 | エネルギー・ビームを用いたアニール装置 |
JP2004064066A (ja) | 2002-06-07 | 2004-02-26 | Fuji Photo Film Co Ltd | レーザアニール装置 |
JP2004063879A (ja) | 2002-07-30 | 2004-02-26 | Sony Corp | レーザ加工装置およびレーザ加工方法 |
JP4772261B2 (ja) | 2002-10-31 | 2011-09-14 | シャープ株式会社 | 表示装置の基板の製造方法及び結晶化装置 |
JP4660074B2 (ja) | 2003-05-26 | 2011-03-30 | 富士フイルム株式会社 | レーザアニール装置 |
JP4628879B2 (ja) | 2005-06-13 | 2011-02-09 | 株式会社 日立ディスプレイズ | 表示装置の製造方法 |
-
2008
- 2008-09-29 WO PCT/JP2008/067684 patent/WO2010035348A1/ja active Application Filing
- 2008-09-29 US US13/059,297 patent/US8644665B2/en not_active Expired - Fee Related
- 2008-09-29 KR KR1020117003684A patent/KR101188417B1/ko active IP Right Grant
- 2008-09-29 CN CN2008801312925A patent/CN102165562B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1649081A (zh) * | 2004-01-30 | 2005-08-03 | 株式会社日立显示器 | 激光退火方法及激光退火装置 |
JP2007115729A (ja) * | 2005-10-18 | 2007-05-10 | Sumitomo Heavy Ind Ltd | レーザ照射装置 |
WO2007114031A1 (ja) * | 2006-03-30 | 2007-10-11 | Hitachi Computer Peripherals Co., Ltd. | レーザ照射装置及びレーザ照射方法及び改質された被対象物の製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116618836A (zh) * | 2023-07-21 | 2023-08-22 | 上海泽丰半导体科技有限公司 | 一种探针卡探针焊接方法及光束整形方法、光路 |
CN116618836B (zh) * | 2023-07-21 | 2023-10-17 | 上海泽丰半导体科技有限公司 | 一种探针卡探针焊接方法及光束整形方法、光路 |
Also Published As
Publication number | Publication date |
---|---|
CN102165562B (zh) | 2013-09-04 |
KR101188417B1 (ko) | 2012-10-08 |
US8644665B2 (en) | 2014-02-04 |
KR20110040935A (ko) | 2011-04-20 |
US20110140007A1 (en) | 2011-06-16 |
WO2010035348A1 (ja) | 2010-04-01 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: HITACHI INFORMATION COMMUNICATION ENGINEERING CO., Free format text: FORMER OWNER: HITACHI COMP PERIPHERALS CO. Effective date: 20131029 |
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C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: Kanagawa Patentee after: HITACHI INFORMATION & TELECOMMUNICATION ENGINEERING, LTD. Address before: Kanagawa Patentee before: Hitachi Information and Communication Engineering Co.,Ltd. |
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TR01 | Transfer of patent right |
Effective date of registration: 20131029 Address after: Kanagawa Patentee after: Hitachi Information and Communication Engineering Co.,Ltd. Address before: Kanagawa Patentee before: Hitachi Computer Peripherals Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130904 Termination date: 20160929 |
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CF01 | Termination of patent right due to non-payment of annual fee |