CN102136475B - Semiconductor encapsulation structure and manufacturing method thereof - Google Patents
Semiconductor encapsulation structure and manufacturing method thereof Download PDFInfo
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- CN102136475B CN102136475B CN2010101189718A CN201010118971A CN102136475B CN 102136475 B CN102136475 B CN 102136475B CN 2010101189718 A CN2010101189718 A CN 2010101189718A CN 201010118971 A CN201010118971 A CN 201010118971A CN 102136475 B CN102136475 B CN 102136475B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
Abstract
The invention relates to a semiconductor encapsulation structure and a manufacturing method thereof. The semiconductor encapsulation structure comprises a base material, a first capacitor, a first protective layer, a first metal layer and a second protective layer, wherein the base material is provided with at least one perforated pilot hole structure; the first capacitor is positioned on the first surface of the base material; the first capacitor is wrapped by the first protective layer; the first metal layer is positioned on the first protective layer and comprises a first inductor; and the first inductor is wrapped by the second protective layer. Therefore, the first inductor, the first capacitor and the perforated pilot hole structure can be integrated into the semiconductor encapsulation structure to reduce the sizes of products.
Description
Technical field
The present invention is about a kind of semiconductor package and manufacture method thereof, in detail, and about a kind of semiconductor package and manufacture method thereof of integrating passive component.
Background technology
With reference to figure 1, show the generalized section of known semiconductor encapsulating structure.This known semiconductor encapsulating structure 1 comprises a substrate 11, an encapsulation unit 12 and an adhesive body 13.This encapsulation unit 12 comprises several passive component (not shown).This encapsulation unit 12 is positioned on this substrate 11, and is electrically connected to this substrate 11.This adhesive body 13 coats this encapsulation unit 12.
The shortcoming of this known semiconductor encapsulating structure 1 is as follows.These passive components first via the semiconductor process integration in this encapsulation unit 12, then, this encapsulation unit 12 is again in the routing mode, or cover the crystal type (not shown), be electrically connected to this substrate 11, cause the technique that these passive components are integrated in this semiconductor package 1 complicated, and raise the cost.
Therefore, be necessary to provide a kind of semiconductor package and manufacture method thereof, to address the above problem.
Summary of the invention
The invention provides a kind of manufacture method of semiconductor package, it comprises the following steps: a base material (a) is provided, and this base material comprises at least one groove and at least one conductive hole structure, and this conductive hole structure is positioned at this groove; (b) form one first electric capacity on this base material, this first electric capacity comprises one first bottom electrode, one first dielectric layer and one first top electrode, this first bottom electrode is positioned on this base material, and this first dielectric layer is positioned on this first bottom electrode, and this first top electrode is positioned on this first dielectric layer; (c) form one first protective layer, to coat this first electric capacity, this first protective layer comprises several the first openings, and these first openings appear this conductive hole structure, this first bottom electrode of part and this first top electrode of part; (d) form a first metal layer on this first protective layer, this first metal layer comprises one first inductance, and this first metal layer directly contacts this conductive hole structure, this first bottom electrode and this first top electrode; Reach and (e) form one second protective layer, to coat this first inductance.
By this, can simplify the technique of this first inductance and this first electric capacity.
The present invention separately provides a kind of semiconductor package, and it comprises a base material, one first electric capacity, one first protective layer, a first metal layer and one second protective layer.This base material has a first surface, a second surface, at least one groove and at least one perforating holes structure, and this groove runs through this first surface and this second surface, and this perforating holes structure is positioned at this groove, and is revealed in first surface and the second surface of this base material.This first electric capacity is positioned at the first surface of this base material, and comprise one first bottom electrode, one first dielectric layer and one first top electrode, this the first bottom electrode is positioned at the first surface of this base material, and this first dielectric layer is positioned on this first bottom electrode, and this first top electrode is positioned on this first dielectric layer.This first protective layer coats this first electric capacity, and this first protective layer comprises several the first openings, and these first openings appear this perforating holes structure, this first bottom electrode of part and this first top electrode of part.This first metal layer is positioned on this first protective layer, and comprises that one first inductance, this first metal layer directly contact this perforating holes structure, this first bottom electrode and this first top electrode.This second protective layer coats this first inductance.
By this, this first inductance, this first electric capacity and this perforating holes structure can be integrated in this semiconductor package in the lump, with the reduction product size.
The accompanying drawing explanation
Fig. 1 shows the generalized section of known semiconductor encapsulating structure;
Fig. 2 to Figure 21 shows the schematic diagram of the first embodiment of the manufacture method of semiconductor package of the present invention;
Figure 22 shows the generalized section of the second embodiment of semiconductor package of the present invention;
Figure 23 shows the generalized section of the 3rd embodiment of semiconductor package of the present invention;
Figure 24 to Figure 31 shows the schematic diagram of the second embodiment of the manufacture method of semiconductor package of the present invention; And
Figure 32 to Figure 34 shows the schematic diagram of the 3rd embodiment of the manufacture method of semiconductor package of the present invention.
Embodiment
Referring to figs. 2 to Figure 21, the schematic diagram of the first embodiment of the manufacture method of demonstration semiconductor package of the present invention.With reference to figure 2, provide a base material 21.In the present embodiment, this base material 21 comprises a first surface 211, a lower surface 212, at least one groove 213 and at least one conductive hole structure 217.This groove 213 is opened on the first surface 211 of this base material 21.This conductive hole structure 217 is positioned at this groove 213, and is revealed in the first surface 211 of this base material 21.
In the present embodiment, the material of this base material 21 is non-insulating material, for example silicon or silica.This conductive hole structure 217 comprises an external insulation layer 2141, a conductor 2142 and an inner insulating layer 2143.This external insulation layer 2141 is positioned at the sidewall of this groove 213, defines one second central channel 2144, and this conductor 2142 is positioned at the sidewall of this second central channel 2144, defines one first central channel 2145, and this inner insulating layer 2143 fills up this first central channel 2145.Because the material of this base material 21 is non-insulating material, therefore this external insulation layer 2141 in order to isolated this base material 21 and this conductor 2142, avoids current distributing by this conductive hole structure 217 to this base material 21, and reduce the electrical effect of this conductive hole structure 217.
Yet, in other application, as shown in Figure 3, this conductive hole structure 217 can only comprise an external insulation layer 2141 and a conductor 2142, and do not comprise this inner insulating layer 2143 (Fig. 2), this external insulation layer 2141 is positioned at the sidewall of this groove 213, defines one second central channel 2144, and this conductor 2142 fills up this second central channel 2144.Moreover the material of this base material 21 can be insulating material, glass for example, and this conductive hole structure 217 can not comprise this external insulation layer 2141 (Fig. 2).Therefore, as shown in Figure 4, this conductive hole structure 217 can only comprise a conductor 2142 and an inner insulating layer 2143, and this conductor 2142 is positioned at sidewall and the bottom of this groove 213, define one first central channel 2145, this inner insulating layer 2143 fills up this first central channel 2145.Perhaps, as shown in Figure 5, this conductive hole structure 217 only comprises a conductor 2142, and this conductor 2142 fills up this groove 213.With reference to figure 6, form one first insulating bottom layer 22 on this base material 21.In the present embodiment, this first insulating bottom layer 22 is positioned at the first surface 211 of this base material 21, and has one first perforation 221, and this first perforation 221 appears this conductive hole structure 217.Yet, in other application, can not form this first insulating bottom layer 22.
Then, form one first electric capacity 23 (Figure 10) on this base material 21, this first electric capacity 23 comprises one first bottom electrode 231, one first dielectric layer 232 and one first top electrode 233, this first bottom electrode 231 is positioned on this base material 21, this first dielectric layer 232 is positioned on this first bottom electrode 231, and this first top electrode 233 is positioned on this first dielectric layer 232.In the present embodiment, this first electric capacity 23 is positioned on this first insulating bottom layer 22.In the present embodiment, form the step of this first electric capacity 23 as described below.With reference to figure 7, at first, form (for example sputter) one second metal level 234 on this base material 21.The material of this second metal level 234 is aluminum bronze (AlCu).Then, form (for example sputter) one the 3rd metal level on this second metal level 234, and the 3rd metal level is carried out to anodic oxidation, to form one first oxide layer 235.The material of the 3rd metal level is tantalum (Tantalum, Ta), and the material of this first oxide layer 235 is tantalum pentoxide (Tantalum Pentoxide, Ta
2O
5).Then, form (for example sputter) one the 4th metal level 236 on this first oxide layer 235.The material of the 4th metal level 236 is aluminum bronze (AlCu).Finally, form one first photoresistance 237 on the 4th metal level 236.With reference to figure 8, remove this first oxide layer 235 (Fig. 7) of part and part the 4th metal level 236 (Fig. 7), to form respectively this first dielectric layer 232 and this first top electrode 233, and remove this first photoresistance 237 (Fig. 7).With reference to figure 9, form one second photoresistance 238 on this second metal level 234, and coat this first dielectric layer 232 and this first top electrode 233.With reference to Figure 10, remove this second metal level 234 (Fig. 9) of part, to form this first bottom electrode 231, and remove this second photoresistance 238 (Fig. 9), form simultaneously this first electric capacity 23.With reference to Figure 11, form one first protective layer 24, to coat this first electric capacity 23.This first protective layer 24 comprises several the first openings 241, and these first openings 241 appear this conductive hole structure 217, this first bottom electrode 231 of part and this first top electrode 233 of part.
Then, form a first metal layer 25 (Figure 14) on this first protective layer 24.This first metal layer 25 comprises one first inductance 251, and preferably, this first metal layer 25 fills up these the first openings 241, to form one first interior connection metal 255, one second interior connection metal 256 and one the 3rd interior connection metal 257.This first interior connection metal 255 directly contacts this conductive hole structure 217, and this second interior connection metal 256 directly contacts the interior connection metal 257 of this first bottom electrode 231, the three and directly contacts this first top electrode 233.In the present embodiment, form the step of this first metal layer 25 as described below.With reference to Figure 12, form one first crystal seed layer 252 on this first protective layer 24.With reference to Figure 13, form one the 3rd photoresistance 253 on this first crystal seed layer 252, with this first crystal seed layer 252 of cover part, and appear this first crystal seed layer 252 of part, and form one first electrodeposited coating 254 on this first crystal seed layer 252 of the part that is appeared.With reference to Figure 14, remove the 3rd photoresistance 253 (Figure 13) and capped this first crystal seed layer 252 of part, this first electrodeposited coating 254 and part this this first crystal seed layer 252 form this first metal layer 25.With reference to Figure 15, form one second protective layer 26, to coat this first inductance 251.This second protective layer 26 comprises at least one the second opening 261, and this second opening 261 appears this first metal layer 25 of part.
Then, form at least one the first projection 27 (Figure 18) in the second opening 261 of this second protective layer 26.In the present embodiment, form the step of this first projection 27 as described below.With reference to Figure 16, form one second crystal seed layer 271 on this second protective layer 26.With reference to Figure 17, first form one the 4th photoresistance 272 on this second crystal seed layer 271, with this second crystal seed layer 271 of cover part, and appear this second crystal seed layer 271 of part, then form one second electrodeposited coating 273 on this second crystal seed layer 271 of the part that is appeared.With reference to Figure 18, remove the 4th photoresistance 272 (Figure 17) and capped this second crystal seed layer 271 of part, to form this first projection 27.
With reference to Figure 19, this base material 21 is set on a carrier 28, wherein the first surface 211 of this base material 21 is in the face of this carrier 28, and remove this base material 21 of part from the lower surface 212 (Figure 18) of this base material 21, to form a second surface 215, and appear the conductor 2142 of this conductive hole structure 217 (Figure 18) in this second surface 215, to form a perforating holes structure 214.Yet, in other application, can remove again this base material 21 of more parts, make the inner insulating layer 2143 of this conductive hole structure 217 (Figure 18) also be revealed in this second surface 215, to guarantee this conductor 2142, be revealed in this second surface 215.
With reference to Figure 20, form at least one electrical assembly in the second surface 215 of this base material 21.In the present embodiment, this electrical assembly is one second projection 31, and the manufacture method of this second projection 31, with the manufacture method of this first projection 27, therefore repeat no more.With reference to Figure 21, remove this carrier 28 (Figure 20), form the first embodiment of semiconductor package 2 of the present invention.Yet this electrical assembly can be one second inductance 32 and one second electric capacity 33, as shown in figure 22.The manufacture method of this second inductance 32 and this second electric capacity 33, manufacture method with this first inductance 251 and this first electric capacity 23, that is the technique that the technique of carrying out in the second surface 215 of this base material 21 can be carried out with the first surface 211 in this base material 21 is identical, therefore repeat no more.
By this, can simplify the technique of this first inductance 251 and this first electric capacity 23, and this first inductance 251, this first electric capacity 23 and this perforating holes structure 214 can be integrated in this semiconductor package 2 in the lump, with the reduction product size.
With reference to Figure 21, show the generalized section of the first embodiment of semiconductor package of the present invention again.This semiconductor package 2 comprises a base material 21, one first insulating bottom layer 22, one second insulating bottom layer 34, one first electric capacity 23, one first protective layer 24, a first metal layer 25, one second protective layer 26, at least one the first projection 27 and at least one electrical assembly.
This base material 21 has a first surface 211, a second surface 215, at least one groove 213 and at least one perforating holes structure 214.This groove 213 runs through this first surface 211 and this second surface 215, and this perforating holes structure 214 is positioned at this groove 213, and is revealed in this first surface 211 and this second surface 215.
In the present embodiment, the material of this base material 21 is non-insulating material, for example silicon or silica.This perforating holes structure 214 comprises an external insulation layer 2141, a conductor 2142 and an inner insulating layer 2143, this external insulation layer 2141 is positioned at the sidewall of this groove 213, define one second central channel 2144, this conductor 2142 is positioned at the sidewall of this second central channel 2144, define one first central channel 2145, this inner insulating layer 2143 fills up this first central channel 2145.Because the material of this base material 21 is non-insulating material, therefore this external insulation layer 2141 in order to isolated this base material 21 and this conductor 2142, avoids current distributing by this perforating holes structure 214 to this base material 21, and reduce the electrical effect of this perforating holes structure 214.
Yet, in other application, this perforating holes structure 214 can only comprise an external insulation layer 2141 and a conductor 2142, and do not comprise this inner insulating layer 2143, this external insulation layer 2141 is positioned at the sidewall of this groove 213, define one second central channel 2144, this conductor 2142 fills up this second central channel 2144.Moreover, the material of this base material 21 can be insulating material, glass for example, and this perforating holes structure 214 can not comprise this external insulation layer 2141, therefore, this perforating holes structure 214 can only comprise a conductor 2142 and an inner insulating layer 2143, and this conductor 2142 is positioned at the sidewall of this groove 213, defines one first central channel 2145, this inner insulating layer 2143 fills up this first central channel 2145, perhaps, this perforating holes structure 214 only comprises a conductor 2142, and this conductor 2142 fills up this groove 213.
This first insulating bottom layer 22 is positioned at the first surface 211 of this base material 21, and has one first perforation 221, and this first perforation 221 appears this perforating holes structure 214.This second insulating bottom layer 34 is positioned at the second surface 215 of this base material 21, and has one second perforation 341, and this second perforation 341 appears this perforating holes structure 214.This first electric capacity 23 is positioned on this first insulating bottom layer 22, and comprise one first bottom electrode 231, one first dielectric layer 232 and one first top electrode 233, this first bottom electrode 231 is positioned on this first insulating bottom layer, this first dielectric layer 232 is positioned on this first bottom electrode 231, and this first top electrode 233 is positioned on this first dielectric layer 232.In the present embodiment, the material of this first bottom electrode 231 and this first top electrode 233 is aluminum bronze (AlCu), and the material of this first dielectric layer 232 is tantalum pentoxide (Tantalum Pentoxide, Ta
2O
5).
This first protective layer 24 coats this first electric capacity 23.In the present embodiment, this first protective layer 24 comprises several the first openings 241, and these first openings 241 appear this perforating holes structure 214, this first bottom electrode 231 of part and this first top electrode 233 of part.This first metal layer 25 is positioned on the first protective layer 24; and comprise one first inductance 251; preferably, be positioned at these the first metal layer 25 formation one first connection metal 255, one second connection metal 256 and one the 3rd connection metals 257 of part of these the first openings 241.This first interior connection metal 255 directly contacts this perforating holes structure 214, and this second interior connection metal 256 directly contacts the interior connection metal 257 of this first bottom electrode 231, the three and directly contacts this first top electrode 233.This second protective layer 26 coats this first inductance 251.In the present embodiment, this second protective layer 26 comprises at least one the second opening 261, and this second opening 261 appears this first metal layer 25 of part.This first projection 27 is positioned at the second opening 261 of this second protective layer 26.This electrical assembly is positioned at the second surface 215 of this base material 21.This electrical assembly is one second projection 31.
By this, this first inductance 251, this first electric capacity 23 and this perforating holes structure 214 can be integrated in this semiconductor package 2 in the lump, with the reduction product size.
With reference to Figure 22, show the generalized section of the second embodiment of semiconductor package of the present invention.The semiconductor package 2 (Figure 21) of the semiconductor package 3 of the present embodiment and the first embodiment is roughly the same, and wherein identical assembly is given identical numbering.The present embodiment and the first embodiment different be in, in the present embodiment, the second surface 215 of this semiconductor package 3 comprises several electrical assemblies (for example one second inductance 32, one second electric capacity 33 and one second projection 31).
With reference to Figure 23, show the generalized section of the 3rd embodiment of semiconductor package of the present invention.The semiconductor package 2 (Figure 21) of the semiconductor package 4 of the present embodiment and the first embodiment is roughly the same, and wherein identical assembly is given identical numbering.The present embodiment and the first embodiment different be in, in the present embodiment, this semiconductor package 3 does not comprise this first insulating bottom layer 22 and this second insulating bottom layer 34, preferably, this first electric capacity 23 is positioned at the first surface 211 of this base material 21.
With reference to Figure 24 to Figure 31, the schematic diagram of the second embodiment of the manufacture method of demonstration semiconductor package of the present invention.With reference to Figure 24, provide a base material 21.In the present embodiment, this base material 21 has a upper surface 216 and a second surface 215, and this groove 213 is opened on the second surface 215 of this base material 21, and this conductive hole structure 217 is revealed in the second surface 215 of this base material 21.With reference to Figure 25, form one second insulating bottom layer 34 on this base material 21.In the present embodiment, this second insulating bottom layer 34 is positioned at the second surface 215 of this base material 21, and has one second perforation 341, and this second perforation 341 appears this conductive hole structure 217.Then, form at least one electrical assembly in the second surface 215 of this base material 21, preferably, be positioned on this second insulating bottom layer 34, in the present embodiment, this electrical assembly is one second projection 31.With reference to Figure 26, this base material 21 is set on a carrier 28, wherein the second surface 215 of this base material 21 is in the face of this carrier 28, and remove this base material 21 of part from the upper surface 216 (Figure 25) of this base material 21, to form a first surface 211, and appear this conductive hole structure 217 (Figure 25) in this first surface 211, to form a perforating holes structure 217.
With reference to Figure 27, form one first electric capacity 23 on this base material 21, this first electric capacity 23 comprises one first bottom electrode 231, one first dielectric layer 232 and one first top electrode 233, this first bottom electrode 231 is positioned on this base material 21, this first dielectric layer 232 is positioned on this first bottom electrode 231, and this first top electrode 233 is positioned on this first dielectric layer 232.In the present embodiment, this first electric capacity 23 is positioned on this first insulating bottom layer 22.With reference to Figure 28, form one first protective layer 24, to coat this first electric capacity 23.This first protective layer 24 comprises several the first openings 241, and these first openings 241 appear this first top electrode 233 of part.With reference to Figure 29, form a first metal layer 25 on this first protective layer 24.One first electrodeposited coating 254 and one first crystal seed layer 252 form this first metal layer 25.This first metal layer 25 comprises one first inductance 251, and preferably, this first metal layer 25 fills up these the first openings 241, to form one first interior connection metal 255, one second interior connection metal 256 and one the 3rd interior connection metal 257.This first interior connection metal 255 directly contacts this perforating holes structure 214, and this second interior connection metal 256 directly contacts the interior connection metal 257 of this first bottom electrode 231, the three and directly contacts this first top electrode 233.With reference to Figure 30, form one second protective layer 26, to coat this first inductance 251.This second protective layer 26 comprises at least one the second opening 261, and this second opening 261 appears this first metal layer 25 of part.With reference to Figure 31, form at least one the first projection 27 in the second opening 261 of this second protective layer 26, one second electrodeposited coating 273 and one second crystal seed layer 271 form this first projection 27.Then, remove this carrier 28, form the first embodiment of semiconductor package 2 of the present invention.
With reference to Figure 32 to Figure 34, the schematic diagram of the 3rd embodiment of the manufacture method of demonstration semiconductor package of the present invention.The manufacture method (Fig. 2 to Figure 21) of the semiconductor package of the manufacture method of the semiconductor package of the present embodiment and the first embodiment is roughly the same, and wherein identical assembly is given identical numbering.The present embodiment is different from the first embodiment be in, with reference to Figure 32, when a base material 21 is provided, this base material 21 has a first surface 211, a second surface 215, at least one groove 213 and at least one conductive hole structure, this groove 213 runs through this first surface 211 and this second surface 215, this conductive hole structure is positioned at this groove 213, and is revealed in this first surface 211 and this second surface 215, to form a perforating holes structure 214.Then, with reference to Figure 33, prior to first surface 211 formation one first inductance 251 and one first electric capacity 23 of this base material 21.With reference to Figure 34, then form at least one electrical assembly in the second surface 215 of this base material 21, and form simultaneously the first embodiment of semiconductor package of the present invention.Yet, in other application, also can form this electrical assembly prior to the second surface 215 of this base material 21, then form this first inductance 251 and this first electric capacity 23 in the first surface 211 of this base material 21.
Only above-described embodiment only is explanation principle of the present invention and effect thereof, but not in order to limit the present invention.Therefore, practise above-described embodiment being modified and changing in the personage of this technology and still do not take off spirit of the present invention.Interest field of the present invention should be as listed as claims.
Claims (21)
1. the manufacture method of a semiconductor package comprises:
(a) provide a base material, this base material comprises at least one groove and at least one conductive hole structure, and this conductive hole structure is positioned at this groove;
(b) form one first electric capacity on this base material, this first electric capacity comprises one first bottom electrode, one first dielectric layer and one first top electrode, this first bottom electrode is positioned on this base material, and this first dielectric layer is positioned on this first bottom electrode, and this first top electrode is positioned on this first dielectric layer;
(c) form one first protective layer, to coat this first electric capacity, this first protective layer comprises several the first openings, and this first opening appears this conductive hole structure, this first bottom electrode of part and this first top electrode of part;
(d) form a first metal layer on this first protective layer, this the first metal layer comprises one first inductance, one first interior connection metal, one second interior connection metal and one the 3rd interior connection metal, this first interior connection metal directly contacts this conductive hole structure, this second interior connection metal directly contacts this first bottom electrode, and the 3rd interior connection metal directly contacts this first top electrode; And
(e) form one second protective layer, to coat this first inductance.
2. method as claimed in claim 1, wherein in this step (a), this base material has a first surface and a second surface, this groove runs through first surface and the second surface of this base material, and this conductive hole structure display is exposed to first surface and the second surface of this base material, to form a perforating holes structure, in this step (b), this first electric capacity is positioned at the first surface of this base material.
3. method as claimed in claim 1, wherein in this step (a), this base material has a first surface and a lower surface, this groove opening is in the first surface of this base material, and this conductive hole structure display is exposed to the first surface of this base material, in this step (b), this first electric capacity is positioned at the first surface of this base material.
4. method as claimed in claim 3, wherein this step (e) afterwards, more comprises:
(f) this base material is set on a carrier, wherein the first surface of this base material is in the face of this carrier;
(g) from the lower surface of this base material, remove this base material of part, to form a second surface, and appear this conductive hole structure in this second surface, to form a perforating holes structure;
(h) form at least one electrical assembly in the second surface of this base material; And
(i) remove this carrier.
5. method as claimed in claim 1, wherein in this step (a), this base material has a upper surface and a second surface, and this groove opening is in the second surface of this base material, and this conductive hole structure display is exposed to the second surface of this base material.
6. method as claimed in claim 5, wherein this step (a) afterwards, more comprises:
(a1) form at least one electrical assembly in the second surface of this base material;
(a2) this base material is set on a carrier, wherein the second surface of this base material is in the face of this carrier; And
(a3) from the upper surface of this base material, remove this base material of part, to form a first surface, and appear this conductive hole structure in this first surface, to form a perforating holes structure.
7. method as claimed in claim 6, wherein this step (a) afterwards, comprise that more one forms the step of one first insulating bottom layer on this base material, this first insulating bottom layer has one first perforation, this first perforation appears this conductive hole structure, in this step (b), this first electric capacity is positioned on this first insulating bottom layer.
8. method as claimed in claim 6, wherein this step (e) afterwards, comprises that more one removes the step of this carrier.
9. method as claimed in claim 1, wherein this step (b) comprising:
(b1) form one second metal level on this base material;
(b2) form one the 3rd metal level on this second metal level, and the 3rd metal level is carried out to anodic oxidation, to form one first oxide layer;
(b3) form one the 4th metal level on this first oxide layer;
(b4) form one first photoresistance on the 4th metal level;
(b5) remove this first oxide layer of part and part the 4th metal level, to form respectively this first dielectric layer and this first top electrode;
(b6) remove this first photoresistance;
(b7) form one second photoresistance on this second metal level, and coat this first dielectric layer and this first top electrode;
(b8) remove this second metal level of part, to form this first bottom electrode; And
(b9) remove this second photoresistance.
10. method as claimed in claim 1, wherein this step (d) comprising:
(d1) form one first crystal seed layer on this first protective layer;
(d2) form one the 3rd photoresistance on this first crystal seed layer, with this first crystal seed layer of cover part, and appear this first crystal seed layer of part;
(d3) form one first electrodeposited coating on this first crystal seed layer of the part that is appeared; And
(d4) remove the 3rd photoresistance and capped this first crystal seed layer of part, this first electrodeposited coating and this first crystal seed layer of part form this first metal layer.
11. a semiconductor package comprises:
One base material, have a first surface, a second surface, at least one groove and at least one perforating holes structure, and this groove runs through this first surface and this second surface, and this perforating holes structure is positioned at this groove, and be revealed in first surface and the second surface of this base material;
One first electric capacity, be positioned at the first surface of this base material, and comprise one first bottom electrode, one first dielectric layer and one first top electrode, and this first dielectric layer is positioned on this first bottom electrode, and this first top electrode is positioned on this first dielectric layer;
One first protective layer, coat this first electric capacity, and this first protective layer comprises several the first openings, and this first opening appears this perforating holes structure, this first bottom electrode of part and this first top electrode of part;
One the first metal layer, be positioned on this first protective layer, and comprise one first inductance, one first interior connection metal, one second interior connection metal and one the 3rd interior connection metal, this first interior connection metal directly contacts this perforating holes structure, this second interior connection metal directly contacts this first bottom electrode, and the 3rd interior connection metal directly contacts this first top electrode; And
One second protective layer, coat this first inductance.
12. as the encapsulating structure of claim 11, wherein the material of this base material is glass, silicon or silica.
13. as the encapsulating structure of claim 11, wherein this perforating holes structure comprises a conductor, this conductor fills up this groove.
14. as the encapsulating structure of claim 11, wherein this perforating holes structure comprises a conductor and an inner insulating layer, this conductor is positioned at the sidewall of this groove, defines one first central channel, and this inner insulating layer fills up this first central channel.
15. as the encapsulating structure of claim 11, wherein this perforating holes structure comprises an external insulation layer and a conductor, this external insulation layer is positioned at the sidewall of this groove, defines one second central channel, and this conductor fills up this second central channel.
16. the encapsulating structure as claim 11, wherein this perforating holes structure comprises an external insulation layer, a conductor and an inner insulating layer, this external insulation layer is positioned at the sidewall of this groove, define one second central channel, this conductor is positioned at the sidewall of this second central channel, define one first central channel, this inner insulating layer fills up this first central channel.
17. as the encapsulating structure of claim 11, wherein this first bottom electrode directly contacts the first surface of this base material.
18. as the encapsulating structure of claim 11, more comprise one first insulating bottom layer, be positioned at the first surface of this base material, and has one first perforation, this first perforation appears this perforating holes structure, and this first electric capacity is positioned on this first insulating bottom layer, and this first bottom electrode is positioned on this first insulating bottom layer.
19. as the encapsulating structure of claim 11, wherein this second protective layer comprises at least one the second opening, this second opening appears this first metal layer of part.
20. as the encapsulating structure of claim 19, more comprise at least one the first projection, be positioned at the second opening of this second protective layer.
21., as the encapsulating structure of claim 11, more comprise at least one electrical assembly, be positioned at the second surface of this base material, wherein this electrical assembly is one second inductance, one second electric capacity or one second projection.
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