CN102121943A - Six-dimensional acceleration sensor based on minitype single-axis acceleration sensing element/sensor - Google Patents
Six-dimensional acceleration sensor based on minitype single-axis acceleration sensing element/sensor Download PDFInfo
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- CN102121943A CN102121943A CN 201010591755 CN201010591755A CN102121943A CN 102121943 A CN102121943 A CN 102121943A CN 201010591755 CN201010591755 CN 201010591755 CN 201010591755 A CN201010591755 A CN 201010591755A CN 102121943 A CN102121943 A CN 102121943A
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Abstract
The invention discloses a six-dimensional acceleration sensor based on a minitype single-axis acceleration sensing element/sensor, comprising a base, three sensor circuit boards, a data acquiring and processing circuit board and a cover plate, wherein the three sensor circuit boards have consistent characteristics and respectively provided with two minitype single-axis acceleration sensing elements/sensors; the cover plate is connected with the base; each sensor circuit board is provided with the two minitype single-axis acceleration sensing elements/sensors, the two minitype single-axis acceleration sensing elements/sensors positioned on each sensor circuit board are ensured to be symmetric relative to a central axis of the corresponding sensor circuit board and sensing axes are ensured to be mutually perpendicular; and the base is provided with three mutually perpendicular surfaces as installation base surfaces of the sensor circuit boards on a solid body. Because the minitype single-axis acceleration sensors are used as sensing devices and a data processing circuit board is organically integrated, the six-dimensional acceleration sensor provided by the invention has the advantages of compact structure, small size and high integration degree.
Description
Technical field
The present invention relates to a kind of six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor, gather the sensing that realizes the six-dimension acceleration of base motion with treatment circuit by six the miniature individual axis acceleration sensitive elements/sensor binding data that is installed on the base-plates surface, belong to inertial technology and sensor technical field.Sensitive element and sensor in the attribute of title of the present invention " based on the six-dimension acceleration sensor of miniature individual axis acceleration sensitive element/sensor " front are the notion of two equities.
Background technology
The motion conditions of robot and space mechanism can obtain by the sensing to its six-dimension acceleration (comprising three dimensional angular acceleration and three-dimensional line acceleration).Because traditional acceleration transducer can only be realized the sensing of three-dimensional line acceleration or single shaft angular acceleration, the research that can realize the three dimensional angular acceleration and the six-dimension acceleration sensor of three-dimensional line acceleration sensing has simultaneously just become a hot issue of inertial technology and sensor technical field research.
At present, utilize the displacement obtain the relative housing of single inertial mass or the strain of Flexible element to realize that the sensing principle people of six-dimension acceleration have studied multiple six-dimension acceleration sensor based on condenser type, pressure resistance type and photo-electric principle.As people such as Canavan (IEEE Transactions on Magnetics, Vol.27, No.2,3253-3256,1992) designed a kind of by obtaining the six-dimension acceleration sensor that the displacement that is suspended in the superconduction mass on the one group of superconducting coil that is connected with persistent current realizes the six-dimension acceleration sensing; People such as Amarasinghe (Sensors and Actuators A:Physical, Vol.134, No.2,310-320,2007) have proposed a kind of six-dimension acceleration sensor of realizing the six-dimension acceleration sensing by the strain of obtaining the semi-girder that supports inertial mass; People such as Chapsky (Sensors and Actuators A:Physical, Vol.135, No.2,558-569,2007) studied and a kind ofly adopt 6 optical displacement sensors to obtain the six-dimension acceleration sensor of realizing the six-dimension acceleration sensing by the displacement of 24 spring-supported cube inertial masses.Above-mentioned six-dimension acceleration sensor all exists complex structure and manufacture craft to require high shortcoming.
In addition, can also realize the six-dimension acceleration sensing by a plurality of individual axis acceleration sensing units are fixed together according to specific layout structure.Provided a kind of sensing unit layout method of the six-dimension acceleration sensor based on six individual axis acceleration sensing units as the patent of invention " a kind of layout method of sensitive element of six-axle acceleration sensor " (patent No.: ZL 200610095028.3) of inventor invention.The patent of invention of inventor invention " based on the layout method of the six-axle acceleration sensor of nine acceleration sensitive unit " (patent No.: ZL 200810237023.9) has provided a kind of sensing unit layout method of the six-dimension acceleration sensor based on nine individual axis acceleration sensing units.Above-mentioned two kinds of methods all can effectively be obtained six-dimension acceleration, have simple in structure, cost is low and be easy to advantages such as realization, but since its structures shape utilize the sensing unit size of six-dimension acceleration sensor of this layout method processing relatively large, be difficult to utilize existing miniature individual axis acceleration sensitive element/sensor to realize the microminiaturization of six-dimension acceleration sensor based on MEMS technology.
Summary of the invention
The object of the present invention is to provide a kind of compact conformation, volume is little, integrated level is high six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor.
Technical scheme of the present invention is as follows:
Six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor described in the present invention comprises three of pedestal, characteristic unanimity sensor circuit board, the data acquisitions and treatment circuit plate and the cover plate that links to each other with pedestal that two miniature individual axis acceleration sensitive element/sensors are installed respectively.Two miniature individual axis acceleration sensitive element/sensors and peripheral circuit thereof respectively are installed on three sensor circuit boards of characteristic unanimity, and guaranteeing that two miniature individual axis acceleration sensitive element/sensors are vertical mutually about sensor circuit board surface center line symmetry and responsive axis, responsive separately barycenter is l (scale parameter of six-dimension acceleration sensor) to the distance of intersection point; Three sensor circuit boards are separately fixed on three orthogonal surfaces of pedestal, by pilot hole or the face location vertical with mounting plane, guarantee on the different sensors circuit board and the mutual vertical and coplane of the responsive axis of adjacent two miniature individual axis acceleration sensing unit/sensors, responsive separately barycenter is l to the distance of intersection point simultaneously; Pedestal is by three orthogonal surfaces processing on rectangular solid installation base surface as sensor circuit board; Pedestal can be invaginating or raised type pedestal, and the entity of processing pedestal can be other axisymmetric shape; Data acquisition and treatment circuit plate directly are fixed on the housing, and link to each other with three sensor circuit boards by cable.When housing moves with testee, six miniature individual axis acceleration sensitive element/sensors are the outputs of six passage electric signal with the movement conversion of experiencing, data acquisition and treatment circuit plate to the output of six miniature individual axis acceleration sensitive element/sensors amplify, filtering, and be converted to digital signal and be read in the data processing chip and resolve, the six-dimension acceleration that obtains converts simulating signal output to or exports to external digital equipment by interfaces such as USB/ bluetooth/RS232 by the DA output module.
The present invention has following advantage:
1. three orthogonal surfaces processing on pedestal of the present invention are as the mounting plane of sensor circuit board, and make two miniature individual axis acceleration sensitive element/sensors on each sensor circuit board vertical mutually about sensor circuit board surface center line symmetry and responsive axis, responsive separately barycenter is l to the distance of intersection point, while is on the different sensors circuit board and the responsive axis of adjacent two miniature individual axis acceleration sensing unit sensors is vertical mutually and coplane, and responsive separately barycenter is l to the distance of intersection point, the mounting plane of this structure can make things convenient for the sensor installation circuit board, and realize organic layout of miniature individual axis acceleration sensitive element/sensor making the six-dimension acceleration sensor compact conformation, volume is little, the integrated level height.
2, utilize miniature individual axis acceleration sensitive element/sensor as sensing unit, have be easy to realize, volume is little and integrated level is high advantage.
3. base construction is simple, and is low to technological requirement and the production cost of making.
4. data acquisition and treatment circuit utilize digital signal processing chip to realize resolving of six-dimension acceleration, fast, accurately, real-time is good.
5. measurement result exports external unit to by USB/DA output/bluetooth/modes such as RS232, is easy to use and Convenient interface.
Description of drawings
The three-dimensional assembling synoptic diagram based on the six-dimension acceleration sensor of miniature individual axis acceleration sensitive element/sensor of Fig. 1 for relating among the present invention.
The three-dimensional structure synoptic diagram based on the pedestal of the six-dimension acceleration sensor of miniature individual axis acceleration sensitive element/sensor of Fig. 2 (a) for relating among the present invention.
The front view based on the pedestal of the six-dimension acceleration sensor of miniature individual axis acceleration sensitive element/sensor of Fig. 2 (b) for relating among the present invention.
The A-A cut-open view based on the pedestal of the six-dimension acceleration sensor of miniature individual axis acceleration sensitive element/sensor of Fig. 2 (c) for relating among the present invention.
The front view based on the sensor circuit board wiring layout of the six-dimension acceleration sensor of miniature individual axis acceleration sensitive element/sensor of Fig. 3 (a) for relating among the present invention.
The side view based on the sensor circuit board wiring layout of the six-dimension acceleration sensor of miniature individual axis acceleration sensitive element/sensor of Fig. 3 (b) for relating among the present invention.
Fig. 4 for relate among the present invention based on the data acquisition of miniature individual axis acceleration sensitive element/sensor and the schematic block circuit diagram of treatment circuit plate.
Fig. 5 adopts the three-dimensional assembling synoptic diagram of the embodiment of external data acquisition and treatment circuit plate for the six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor that relates among the present invention.
Fig. 6 adopts the three-dimensional assembling synoptic diagram of the embodiment of raised type pedestal for the six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor that relates among the present invention.
Fig. 7 (a) adopts the three-dimensional structure synoptic diagram of raised type pedestal among the embodiment of raised type pedestal for the six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor that relates among the present invention.
Fig. 7 (b) adopts the front view of raised type pedestal among the embodiment of raised type pedestal for the six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor that relates among the present invention.
Fig. 8 adopts the three-dimensional assembling synoptic diagram of the embodiment of raised type pedestal and external data acquisition and treatment circuit plate for the six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor that relates among the present invention.
Embodiment
Specify structure of the present invention below in conjunction with embodiment and accompanying drawing:
As shown in Figure 1, based on the six-dimension acceleration sensor of miniature individual axis acceleration sensitive element/sensor by cover plate 1, data acquisition and treatment circuit plate 2, three installations that characteristic is identical the sensor circuit board 3 and the pedestal 4 of two miniature individual axis acceleration sensitive element/sensors 9 form, wherein pedestal 4 is simultaneously as the housing of sensor.The sensor circuit board 3 that two miniature individual axis acceleration sensitive element/sensors 9 have been installed is adhesively fixed on three mounting planes of pedestal 4 by mounting hole 10 or glue, guarantee the location by pilot hole on the sensor circuit board or the face vertical, make the lower limb of sensor circuit board 3 overlap and placed in the middle in the horizontal direction of mounting plane with the lower plane of mounting plane with mounting plane.Data acquisition and treatment circuit plate 2 are made up of data processing circuit 6 and output interface 8, and are fixed on the pedestal 4 by screw, mounting hole 7 and 11.Be connected by lead between sensor circuit board 3 and data acquisition and the treatment circuit plate 2.
Shown in Fig. 2 (a) and 2 (b), pedestal 4 is the invaginating pedestal, by in the cross section be foursquare rectangular parallelepiped or cross section be keep on foursquare other cylinders column side face cut from end face towards column body three vertical mutually and obtain about the mounting plane 12,13 and 14 of rectangular parallelepiped central axis symmetry, three mounting planes 12,13 and 14 cave in respect to column side face.Shown in Fig. 2 (c), O is the intersection point on mounting plane 12,13 and plane, 14 place.Mounting plane 14 is 125.3 ° with the angle of rectangular parallelepiped one side, and the distance that its lower limb is ordered to O is c.The side central authorities of the bottom of pedestal 4 and two quadratures all are processed with installation base that is connected 15 and the mounting hole 16 that is used for measurand.
Shown in Fig. 3 (a), two miniature individual axis acceleration sensitive element/sensors 9 are about sensor circuit board 3 surperficial center line symmetry and the orthogonal upper surfaces that are fixed on sensor circuit board 3 of responsive axis, responsive separately barycenter is respectively l and h (shown in Fig. 3 (b)) to the distance of intersection point and sensor circuit board 3 lower surfaces, the intersection point of the responsive axis of two miniature individual axis acceleration sensitive element/sensors 9 is d to the distance of sensor circuit board 3 lower limbs, be positioned on the different sensors circuit board 3 simultaneously and the mutual vertical and coplane of the responsive axis of two adjacent miniature individual axis acceleration sensing unit sensors, and responsive separately barycenter is l to the distance of intersection point, satisfies
As shown in Figure 4, data acquisition and treatment circuit plate 2 are made up of data acquisition module, data processing module and output interface module three parts.Wherein data acquisition module is that digital signal is read in the data processing module by six tunnel A/D conversion with the analog signal conversion of miniature individual axis acceleration sensitive element/sensor 9 outputs, the data processing module utilization operates in six-dimension acceleration solver in DSP or the single-chip microcomputer and resolves and obtain six-dimension acceleration, and the DA output module by output interface module converts simulating signal output to or exports to external digital equipment by interfaces such as USB/ bluetooth/RS232.
As shown in Figure 5, can adopt outlet structure based on data acquisition in the six-dimension acceleration sensor of miniature individual axis acceleration sensitive element/sensor and treatment circuit plate.Interface board 17 is fixed on the pedestal 4 by screw, mounting hole 18 and 11, and the output of three sensor circuit boards 3 is drawn and links to each other with disposable plates 2 with external data acquisition by cable by interface 19.Data acquisition and disposable plates 2 are read in the output of three sensor circuit boards 3 and are handled.
Be illustrated in figure 6 as another kind of embodiment, form by cover plate 20, data acquisition and treatment circuit plate 2, the sensor circuit board 3 that two miniature individual axis acceleration sensitive element/sensors 9 have been installed and raised type pedestal 21 based on the six-dimension acceleration sensor of miniature individual axis acceleration sensitive element/sensor.The sensor circuit board 3 that two miniature individual axis acceleration sensitive element/sensors 9 have been installed is adhesively fixed on three mounting planes of raised type pedestal 21 by mounting hole or glue.Guarantee the location by the pilot hole on the sensor circuit board, make the lower limb of sensor circuit board 3 overlap and placed in the middle in the mounting plane horizontal direction with the coboundary of the mounting plane of raised type pedestal 21.It is on the housing that processes of foursquare rectangular parallelepiped that raised type pedestal 21 and data acquisition and treatment circuit plate 2 all are fixed on by the cross section by mounting hole.Be connected by lead between sensor circuit board 3 and data acquisition and the treatment circuit plate 2.
Shown in Fig. 7 (a), raised type pedestal 21 is processed with the pilot hole 22 that is used for sensor circuit board 3 installing and locating by being to cut out with 125.3 ° of angles of cross section folder and about axisymmetric three the orthogonal mounting planes 23,24 and 25 of rectangular parallelepiped to the center from column side face on the foursquare rectangular parallelepiped cylinder to obtain in a cross section on each mounting plane.On the sensor circuit board 3 on the installation of miniature individual axis acceleration sensitive element/sensor and each sensor circuit board 3 relation of adjacent miniature individual axis acceleration sensitive element/sensor and front embodiment require identical.Raised type pedestal 21 bottoms are processed with and are used for pilot hole and the installed surface 26 that tested carrier links to each other.
Shown in Fig. 7 (b), P is the intersection point on mounting plane 23,24 and plane, 25 place.The distance that mounting plane 23,24 and 25 coboundarys are ordered to P is e, satisfies
As shown in Figure 8, also can adopt outlet structure based on data acquisition and treatment circuit plate in the six-dimension acceleration sensor of the raised type pedestal of miniature individual axis acceleration sensitive element/sensor.Interface board 17 is fixed on the pedestal 21 by screw, mounting hole 18, and the output of three sensor circuit boards 3 is drawn and will link to each other with disposable plates 2 with external data acquisition by cable by interface 19.Data acquisition and disposable plates 2 are read in the output of three sensor circuit boards 3 and are handled.
Claims (10)
1. six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor, comprise three of pedestal (4), characteristic unanimity sensor circuit board (3), data acquisition and treatment circuit plate (2) and the cover plates (1) that two miniature individual axis acceleration sensitive element/sensors (9) are installed respectively, it is characterized in that: the mounting plane of three orthogonal surfaces as three sensor circuit boards (3) arranged on the pedestal (4); Every sensor circuit board (3) upper surface is installed two miniature individual axis acceleration sensitive element/sensors (9), and guarantee that two miniature individual axis acceleration sensitive element/sensors (9) are vertical mutually about surperficial center line symmetry of sensor circuit board (3) and responsive axis, responsive separately barycenter is l to the distance of intersection point, and l is the scale parameter of six-dimension acceleration sensor; Each sensor circuit board (3) is fixed on the described mounting plane and with described mounting plane and locatees, guarantee on the different sensors circuit board and the mutual vertical and coplane of the responsive axis of adjacent two miniature individual axis acceleration sensing unit/sensors, responsive separately barycenter is l to the distance of intersection point simultaneously.
2. the six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor according to claim 1 is characterized in that: described each sensor circuit board (3) passes through each sensor circuit board (3) pilot hole or the face assurance vertical with described mounting plane with the location of described mounting plane.
3. a kind of six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor according to claim 1 and 2 is characterized in that: described orthogonal mounting plane is by cutting on the pedestal (4) of an entity and base level bottom surface folder 125.3.Angle and obtain about axisymmetric three planes, entity center.
4. a kind of six-dimension acceleration sensor according to claim 3 based on miniature individual axis acceleration sensitive element/sensor, it is characterized in that: described cutting is cut from end face towards column body for keeping column side face, makes the plane of three mounting planes for caving in respect to column side face of formation.
5. a kind of six-dimension acceleration sensor according to claim 3 based on miniature individual axis acceleration sensitive element/sensor, it is characterized in that: described cutting makes three mounting planes of formation be the plane with respect to cylinder bottom surface evagination for from the cutting of column side face to the center.
6. according to the described a kind of six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor of one of claim 1-3, it is characterized in that: miniature individual axis acceleration sensitive element/sensor (9) is for based on the miniature individual axis acceleration sensitive element of MEMS technology or based on the micro-acceleration sensor of MEMS technology.
7. a kind of six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor according to claim 4 is characterized in that: miniature individual axis acceleration sensitive element/sensor (9) is for based on the miniature individual axis acceleration sensitive element of MEMS technology or based on the micro-acceleration sensor of MEMS technology.
8. a kind of six-dimension acceleration sensor based on miniature individual axis acceleration sensitive element/sensor according to claim 5 is characterized in that: miniature individual axis acceleration sensitive element/sensor (9) is for based on the miniature individual axis acceleration sensitive element of MEMS technology or based on the micro-acceleration sensor of MEMS technology.
9. according to claim 4 or 7 described a kind of six-dimension acceleration sensors based on miniature individual axis acceleration sensitive element/sensor, it is characterized in that: the responsive barycenter of described miniature individual axis acceleration sensitive element/sensor (9) is h to the distance of sensor circuit board (3) lower surface, the intersection point of the responsive axis of two miniature individual axis acceleration sensitive element/sensors (9) is d to the distance of sensor circuit board 3 lower limbs, the distance that the intersection point O of each mounting plane lower limb to three mounting plane is ordered is c, satisfies:
10. according to claim 5 or 8 described a kind of six-dimension acceleration sensors based on miniature individual axis acceleration sensitive element/sensor, it is characterized in that: the responsive barycenter of described miniature individual axis acceleration sensitive element/sensor (9) is h to the distance of sensor circuit board (3) lower surface, the intersection point of the responsive axis of two miniature individual axis acceleration sensitive element/sensors (9) is d to the distance of sensor circuit board 3 lower limbs, the distance that the intersection point P of each mounting plane coboundary to three mounting plane is ordered is e, satisfies
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| CN 201010591755 CN102121943B (en) | 2010-12-16 | 2010-12-16 | Six-dimensional acceleration sensor based on minitype single-axis acceleration sensing element/sensor |
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| CN 201010591755 CN102121943B (en) | 2010-12-16 | 2010-12-16 | Six-dimensional acceleration sensor based on minitype single-axis acceleration sensing element/sensor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103197098A (en) * | 2013-03-01 | 2013-07-10 | 中国科学院长春光学精密机械与物理研究所 | High-precision device of measuring angular acceleration of limited rotation shaft system |
| CN107930103A (en) * | 2017-12-18 | 2018-04-20 | 昆山市工研院智能制造技术有限公司 | A kind of dead reckoning device and dead reckoning method applied to human-computer interaction |
| CN108955985A (en) * | 2018-06-06 | 2018-12-07 | 成都科锐传感技术有限公司 | A kind of sensor structure that can test polyaxial mechanics physical quantity |
| CN110388911A (en) * | 2018-04-19 | 2019-10-29 | 上海亨通光电科技有限公司 | A kind of optical fibre gyro with covered detection function |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1908674A (en) * | 2006-08-13 | 2007-02-07 | 重庆大学 | Arrangement structure of sensing elements of six-axle acceleration transducer |
| CN101464472A (en) * | 2008-12-31 | 2009-06-24 | 重庆大学 | Layout method for six-shaft acceleration sensor based on nine-acceleration sensing unit |
| CN101858932A (en) * | 2010-05-17 | 2010-10-13 | 山东理工大学 | Six-dimensional acceleration transducer |
-
2010
- 2010-12-16 CN CN 201010591755 patent/CN102121943B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1908674A (en) * | 2006-08-13 | 2007-02-07 | 重庆大学 | Arrangement structure of sensing elements of six-axle acceleration transducer |
| CN101464472A (en) * | 2008-12-31 | 2009-06-24 | 重庆大学 | Layout method for six-shaft acceleration sensor based on nine-acceleration sensing unit |
| CN101858932A (en) * | 2010-05-17 | 2010-10-13 | 山东理工大学 | Six-dimensional acceleration transducer |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103197098A (en) * | 2013-03-01 | 2013-07-10 | 中国科学院长春光学精密机械与物理研究所 | High-precision device of measuring angular acceleration of limited rotation shaft system |
| CN107930103A (en) * | 2017-12-18 | 2018-04-20 | 昆山市工研院智能制造技术有限公司 | A kind of dead reckoning device and dead reckoning method applied to human-computer interaction |
| CN107930103B (en) * | 2017-12-18 | 2023-06-23 | 昆山市工研院智能制造技术有限公司 | Position estimation device and position estimation method applied to man-machine interaction |
| CN110388911A (en) * | 2018-04-19 | 2019-10-29 | 上海亨通光电科技有限公司 | A kind of optical fibre gyro with covered detection function |
| CN108955985A (en) * | 2018-06-06 | 2018-12-07 | 成都科锐传感技术有限公司 | A kind of sensor structure that can test polyaxial mechanics physical quantity |
| CN108955985B (en) * | 2018-06-06 | 2019-07-30 | 成都科锐传感技术有限公司 | A kind of sensor structure that can test polyaxial mechanics physical quantity |
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