CN201069351Y - A plane capacitor sensor based on the capacitance measurement principle - Google Patents
A plane capacitor sensor based on the capacitance measurement principle Download PDFInfo
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- CN201069351Y CN201069351Y CNU2007201143262U CN200720114326U CN201069351Y CN 201069351 Y CN201069351 Y CN 201069351Y CN U2007201143262 U CNU2007201143262 U CN U2007201143262U CN 200720114326 U CN200720114326 U CN 200720114326U CN 201069351 Y CN201069351 Y CN 201069351Y
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- 239000003990 capacitor Substances 0.000 title claims abstract description 54
- 238000005259 measurement Methods 0.000 title abstract description 16
- 239000002184 metal Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 11
- 230000033001 locomotion Effects 0.000 abstract description 11
- 230000006698 induction Effects 0.000 description 5
- 125000004122 cyclic group Chemical group 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000005611 electricity Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
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Abstract
The utility model discloses a planar capacitance sensor based on capacitance measurement principle, which comprises a planar capacitor upper polar plate and a planar capacitor lower polar plate. Either of the upper polar plate or the lower polar plate is fixed; and the other one is movable. The relative displacement of the upper and the lower polar plates is calculated based on the change in capacitance caused by the relative movement thereof. The utility model employs only one device to measure the X-direction and the Y-direction displacements at the same time, and structurally decouples the measurement of the X-direction and the Y-direction displacements. The change in capacitance in the measurement direction reflects the change in position, but the overall capacitance in the non-measurement direction is kept unchanged without affecting on the change in capacitance in the measurement direction, thereby reducing the data processing time.
Description
Technical field
The utility model relates to sensor device, especially relates to a kind of planar capacitance sensor based on capacitive measuring principle.
Background technology
In numerous areas such as large scale integrated circuit, micromechanics, spationautics, measuring science and technology, optics and electronic engineering, precision engineering, biochip manufacturing, nanometer science and technology, press for high precision, large-scale measuring technique and device.Wherein the scope of measurement component and precision have determined the scope and the precision of measuring system to a great extent.In traditional high-accuracy position system, adopt two X, one-dimensional gratings on the Y direction that are vertically mounted on locating platform mutually to realize the displacement measurement on the both direction mostly.In this case, can obtain higher verticality, installation accuracy and machining precision that the parts of grating are installed have been proposed higher requirement in order to guarantee two one-dimensional gratings.Some external producers have made the plane grating chi that processes X, Y grid stroke on same plane, form lattice-shaped, but have also increased the complicacy that the optical information fetch unit is made simultaneously.
Summary of the invention
In order to overcome the deficiency of two-dimensional measurement technology and device in the existing positioning system, the purpose of this utility model is to provide a kind of planar capacitance sensor based on capacitive measuring principle, this sensor can not only be realized the measurement of X, the displacement of Y direction simultaneously, and on the structure to X to carrying out decoupling zero to displacement measurement with Y, reduced the time of data processing.
The technical scheme that its technical matters that solves the utility model adopts is:
It comprises plane capacitance top crown and plane capacitance bottom crown, the plane capacitance bottom crown is provided with the square capacitor plate that the length of side is a, and adjacent in twos square capacitor plate spacing is the square length of side, the plane capacitance top crown be provided with the four piece Xs identical with the capacitor plate shape of bottom crown to capacitor plate and four Y to capacitor plate, X comprises one group first to capacitor plate, second measuring pad and another organize the 3rd, the 4th measuring pad, and between two groups X make progress phase differential be 90 the degree, spacing is 1.5a, sideline alignment between every group of capacitor plate, spacing on the Y direction is 2a, organizes sideline with another for one group and aligns; Y comprises that to capacitor plate one group the 5th, the 6th measuring pad and another organize the 7th, the 8th measuring pad, and be 90 degree at the Y phase differential that makes progress between two groups, spacing is 1.5a, the sideline alignment between every group of capacitor plate, spacing on directions X is 2a, organizes sideline with another for one group and aligns.
Described capacitor plate is the pole plate that surface coverage has metal level.
The beneficial effect that the utlity model has is: adopt a device can realize simultaneously X to Y to displacement measurement; On the structure to X to carrying out decoupling zero to displacement measurement with Y, electric capacitance change on direction of measurement has reflected the variation of position, and the electric capacity total amount on non-direction of measurement remains unchanged, and can the electric capacitance change on the direction of measurement not exerted an influence, and has reduced the time of data processing.
Description of drawings
Fig. 1 is an one-piece construction principle schematic of the present utility model.
Fig. 2 is the partial enlarged drawing of Fig. 1.
Fig. 3 is a plane capacitance top crown synoptic diagram.
Fig. 4 is a plane capacitance bottom crown synoptic diagram.
Among the figure: 1. plane capacitance top crown, 2. plane capacitance bottom crown, 3. the capacitor plate of plane capacitance bottom crown, 4.X is to capacitor plate, and 4 ' .X is to capacitor plate, 5.X to capacitor plate, 5 ' .X is to capacitor plate, and 6.Y is to capacitor plate, and 6 ' .Y is to capacitor plate, 7.Y to capacitor plate, 7 ' .Y is to capacitor plate.
Embodiment
Below in conjunction with drawings and Examples the utility model is further specified.
As Fig. 1, shown in Figure 2, the utility model comprises plane capacitance top crown 1 and plane capacitance bottom crown 2, plane capacitance bottom crown 2 is provided with the square capacitor plate 3 that the length of side is a, and adjacent in twos square capacitor plate 3 spacings are the square length of side, plane capacitance top crown 1 is provided with the four piece Xs identical with the capacitor plate shape of bottom crown to capacitor plate 4,4 ' and 5,5 ', and four Y are to capacitor plate 6,6 ' and 7,7 ', X comprises one group first to capacitor plate, second measuring pad 4,4 ' and another organize the 3rd, the 4th measuring pad 5,5 ', and between two groups X make progress phase differential be 90 the degree, spacing is 1.5a, sideline alignment between every group of capacitor plate, spacing on the Y direction is 2a, organizes sideline with another for one group and aligns; Y to capacitor plate comprise one group the 5th, the 6th measuring pad 6,6 ' and another organize the 7th, the 8th measuring pad 7,7 ', and between two groups Y make progress phase differential be 90 the degree, spacing is 1.5a, sideline alignment between every group of capacitor plate, spacing on directions X is 2a, organizes sideline with another for one group and aligns;
Described capacitor plate is the pole plate that surface coverage has metal level.
As shown in Figure 1, the utility model comprises plane capacitance top crown 1 and plane capacitance bottom crown 2; Fixed pan electric capacity top crown 1 and bottom crown 2 one of them, move another, the relative displacement that the electric capacitance change that produces according to top crown 1 and bottom crown 2 relative motions is calculated both.
As Fig. 2, Fig. 3, shown in Figure 4, is example with one group of X to capacitor plate 4,4 ', when plane capacitance top crown 1 with bottom crown 2 during along the directions X relative motion, from X to the electric capacity sum variation curve of capacitor plate 4,4 ' induction be that two phase differential are 90 degree, are the triangular wave cyclic curve in cycle with 2a from X to the electric capacity sum variation curve of capacitor plate 5,5 ' induction; By two phase differential is that the triangular wave cyclic curves of 90 degree can be realized the calculating of the distinguishing of positive and negative direction of motion on the directions X, complete cycle issue and in the position segmentation of a triangular wave in the cycle; When plane capacitance top crown 1 with bottom crown 2 during along the relative motion of Y direction, X forms difference structure to capacitor plate 4,4 ', induced electricity capacity summation does not change in relative motion, guarantee that from structure X only reflects the relative displacement of directions X to the variation of capacitor plate 4,4 ' induced electricity capacity summation, irrelevant with the motion of Y direction; Another group X is identical to capacitor plate 4,4 ' with one group of X to capacitor plate 5,5 ' principle;
As Fig. 2, Fig. 3, shown in Figure 4, is example with one group of Y to capacitor plate 6,6 ', when plane capacitance top crown 1 with bottom crown 2 during along the relative motion of Y direction, from Y to the electric capacity sum variation curve of capacitor plate 5,5 ' induction be that two phase differential are the triangular wave cyclic curves of 90 degree from Y to the electric capacity sum variation curve of measuring pad 6,6 ' induction; By two phase differential is that the triangular wave cyclic curves of 90 degree can be realized the calculating of the distinguishing of positive and negative direction of motion on the Y direction, complete cycle issue and in the position segmentation of a triangular wave in the cycle; When plane capacitance top crown 1 with bottom crown 2 during along the directions X relative motion, Y forms differential pole plate to capacitor plate 6,6 ', the electric capacity summation of induction does not change at the volley, guarantee that from structure Y only reflects the relative displacement of Y direction to the variation of capacitor plate 6,6 ' induced electricity capacity summation, irrelevant with the directions X motion; Y is identical to capacitor plate 6,6 ' with one group of Y to electric capacity pole plate 7,7 ' principle for another group.
Claims (2)
1. planar capacitance sensor based on capacitive measuring principle, it is characterized in that: it comprises plane capacitance top crown (1) and plane capacitance bottom crown (2), plane capacitance bottom crown (2) is provided with the square capacitor plate (3) that the length of side is a, and adjacent in twos square capacitor plate (3) spacing is the square length of side, plane capacitance top crown (1) is provided with the four piece Xs identical with the capacitor plate shape of bottom crown to capacitor plate (4,4 ' and 5,5 '), and four Y are to capacitor plate (6,6 ' and 7,7 '), X comprises one group first to capacitor plate, second measuring pad (4,4 ') and another organize the 3rd, the 4th measuring pad (5,5 '), and between two groups X make progress phase differential be 90 the degree, spacing is 1.5a, sideline alignment between every group of capacitor plate, spacing on the Y direction is 2a, organizes sideline with another for one group and aligns; Y comprises that to capacitor plate one group the 5th, the 6th measuring pad (6,6 ') and another organize the 7th, the 8th measuring pad (7,7 '), and between two groups Y make progress phase differential be 90 the degree, spacing is 1.5a, sideline alignment between every group of capacitor plate, spacing on directions X is 2a, organizes sideline with another for one group and aligns.
2. a kind of planar capacitance sensor based on capacitive measuring principle according to claim 1 is characterized in that: described capacitor plate is the pole plate that surface coverage has metal level.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201143262U CN201069351Y (en) | 2007-09-06 | 2007-09-06 | A plane capacitor sensor based on the capacitance measurement principle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201143262U CN201069351Y (en) | 2007-09-06 | 2007-09-06 | A plane capacitor sensor based on the capacitance measurement principle |
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| Publication Number | Publication Date |
|---|---|
| CN201069351Y true CN201069351Y (en) | 2008-06-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007201143262U Expired - Lifetime CN201069351Y (en) | 2007-09-06 | 2007-09-06 | A plane capacitor sensor based on the capacitance measurement principle |
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| Country | Link |
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| CN (1) | CN201069351Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100487361C (en) * | 2007-09-06 | 2009-05-13 | 浙江大学 | Flat capacity transducer based on capacitor measurement principle |
| CN103140736A (en) * | 2011-08-26 | 2013-06-05 | 丰田自动车株式会社 | Displacement monitoring electrode structure |
| CN104956965A (en) * | 2015-07-28 | 2015-10-07 | 安徽工程大学 | Greenhouse cooling system |
| CN110207886A (en) * | 2019-07-03 | 2019-09-06 | 临沂大学 | It is a kind of can simultaneously dynamometry and direction two to formula capacitance sensor |
| CN115655094A (en) * | 2022-11-02 | 2023-01-31 | 北京工业大学 | Angular displacement measurement capacitance sensor with unequal polar plate areas |
-
2007
- 2007-09-06 CN CNU2007201143262U patent/CN201069351Y/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100487361C (en) * | 2007-09-06 | 2009-05-13 | 浙江大学 | Flat capacity transducer based on capacitor measurement principle |
| CN103140736A (en) * | 2011-08-26 | 2013-06-05 | 丰田自动车株式会社 | Displacement monitoring electrode structure |
| CN103140736B (en) * | 2011-08-26 | 2016-05-11 | 丰田自动车株式会社 | The structure of displacement monitoring electrode |
| CN104956965A (en) * | 2015-07-28 | 2015-10-07 | 安徽工程大学 | Greenhouse cooling system |
| CN110207886A (en) * | 2019-07-03 | 2019-09-06 | 临沂大学 | It is a kind of can simultaneously dynamometry and direction two to formula capacitance sensor |
| CN115655094A (en) * | 2022-11-02 | 2023-01-31 | 北京工业大学 | Angular displacement measurement capacitance sensor with unequal polar plate areas |
| CN115655094B (en) * | 2022-11-02 | 2024-03-29 | 北京工业大学 | Angular displacement measurement capacitance sensor with unequal polar plate areas |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20070906 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |