CN102087377A - 偏振元件及其制作方法 - Google Patents

偏振元件及其制作方法 Download PDF

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CN102087377A
CN102087377A CN2009103107620A CN200910310762A CN102087377A CN 102087377 A CN102087377 A CN 102087377A CN 2009103107620 A CN2009103107620 A CN 2009103107620A CN 200910310762 A CN200910310762 A CN 200910310762A CN 102087377 A CN102087377 A CN 102087377A
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骆世平
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Li Xianke
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Abstract

本发明提供一种偏振元件的制作方法，包括下列步骤：提供一支撑板；涂布一光阻于所述支撑板上；提供一碳纳米管膜于所述光阻上，部份的所述碳纳米管膜浸润于所述光阻中；沉积金属粒子或半金属粒子于所述碳纳米管膜与所述光阻上；去除所述光阻；及黏接所述附着有所述金属粒子或所述半金属粒子的所述碳纳米管膜于一基底形成所述偏振元件。

Description

偏振元件及其制作方法
技术领域
本发明涉及一种光学元件，尤其涉及一种偏振元件及其制作方法。
背景技术
偏光元件的一种重要的光学元件，被广泛应用于照相机、液晶显示器等光学装置中。目前普遍使用的偏光元件为一种吸收性偏光元件，其是藉由吸收一种偏振态的光，而让另一偏振态的光通过所述偏光元件，来达到让通过的光线仅具有单一偏振态。
具体来说，所述偏光元件通常的由二向色性分子溶于或吸收于高分子物质中(例如聚乙烯醇)形成一薄膜，并将所述薄膜以同一个方向拉伸以配列二向色性分子。此时，二向色性分子就会沿拉伸方向有规则排列起来，形成一条条长链。在入射光波中，光波的振动方向平行于长链方向的光会被吸收，而垂直于长链方向的光则能透过所述薄膜，从而使得透过所述薄膜的透射光成为线偏振光。
然而，由于此种将二向色性分子结合高分子聚合物作为偏光元件的制备过程较为复杂，且应用高分子聚合物作为材料的偏光元件于50℃以上使用一段时间后，偏光率会随的减小，甚至失去偏光作用。而且此类偏光元件对湿度要求也较高，一旦工作环境恶劣，湿度大，偏光元件将失去偏光作用。
发明内容
有鉴于此，如何提供一种制程简单且可靠度高的偏光元件及其制作方法，实为现今的重要课题的一。
一种偏振元件的制作方法，其包括下列步骤：提供一支撑板；涂布一光阻于所述支撑板上；提供一碳纳米管膜于所述光阻上，部份的所述碳纳米管膜浸润于所述光阻中；沉积金属粒子或半金属粒子于所述碳纳米管膜与所述光阻上；去除所述光阻；及黏接所述附着有所述金属粒子或所述半金属粒子的所述碳纳米管膜于一基底形成所述偏振元件。
一种偏光元件，其包括一基底、一碳纳米管膜以及金属粒子或半金属粒子。其中，所述碳纳米管膜的设置于所述基底，所述碳纳米管膜包括多根碳纳米管，所述碳纳米管的端部沿一方向相互连接，且所述碳纳米管实质上排列形成多个相互平行的碳纳米管丝；所述金属粒子或所述半金属粒子黏着于所述碳纳米管膜的所述碳纳米管。
承上所述，因依偏光元件及其制作方法是利用碳纳米管膜的多个碳纳米管规则性排列，来达到偏光元件的偏光作用，且金属粒子或半金属粒子的附着，更进而强化偏光效果；由于使用碳纳米管膜来制作偏光元件，可利用简单的半导体制程以及沉积方法来制作所述偏光元件，相较于习知技术，达到制程简单更进而降低了制作成本。
附图说明
图1是本技术方案较佳实施例的偏光元件的示意图。
图2是本技术方案较佳实施例的偏光元件的制作方法的流程图。
图3是本技术方案较佳实施例的偏光元件的制作方法的流程示意图。
图4是图3中去除相邻碳纳米管丝之间所述碳纳米管的示意图。
具体实施方式
以下将结合附图详细说明本发明实施例的偏光元件及其制作方法。
请参照图1所示，依据较佳实施例的一种偏光元件1包括一基底11、一碳纳米管膜12以及金属粒子13或半金属(semi-metal)粒子13’。所述碳纳米管膜12设置于所述基底11上，所述金属粒子13或所述半金属粒子13’附着于所述碳纳米管膜12上。
在本实施例中，所述基底11是构成一光学元件的基板，其可为一塑料板，或由一光固化胶例如紫外光固化胶制成。
所述碳纳米管膜12包括多根碳纳米管，所述碳纳米管的端部是沿一方向相互连接，且所述碳纳米管实质上排列形成多个相互平行的碳纳米管丝121，在本实施例中，所述碳纳米管丝121实质上等间距排列。即，所述碳纳米管是连续地以端部接合形成一定长度的碳纳米管丝121，多个碳纳米管丝121再相互平行排列形成一定宽度的碳纳米管膜12。藉由规则性排列的所述碳纳米管排列设置于所述基底11上，当一光线入射时，所述碳纳米管膜12对于特定波长的光线会有不同的透射率，而达到偏光的效果。
金属粒子13或半金属粒子13’以沉积方式黏着于所述碳纳米管膜12的所述碳纳米管，依据所述粒子13、13’材料的选择以及沉积的厚度，对不同波长入射光的偏振度也会不同。在本实施例中，所述金属粒子13可为金、银或铁，而所述半金属粒子13’则可为碘。
另，请参照图2至图3所示，依据较佳实施例的一种偏振元件2的制作方法包括以下步骤：提供一支撑板20，S1；涂布一光阻21于所述支撑板20上，S2；提供一碳纳米管膜23于所述光阻21上，部份的所述碳纳米管膜23浸润于所述光阻21中，S3；沉积金属粒子24或半金属粒子24’于所述碳纳米管膜23与所述光阻21上，S4；去除所述光阻21，S5；及，黏接所述附着有所述金属粒子24或半金属粒子24’的所述碳纳米管膜23于一基底30形成所述偏振元件2，S6。
于步骤S1，所述支撑板20为一具有平滑表面的基板，在本实施例中，所述支撑板20为一硅基板，并经过抛光处理而形成具有一光滑面201。
于步骤S2，所述光阻21是以涂布方式形成于所述支撑板20的光滑面201上，在本实施例中，所述光阻21为一正向光阻(positive photoresist)，于硅基板的表面形成约100微米的厚度，再经过适当强度的紫外光固化所述正向光阻使定型，但控制光照强度使所述光阻21保持未完全固化状态，并保持一定弹性。
于步骤S3，所述碳纳米管膜23铺设于所述光阻21上，由于所述碳纳米管膜23在所述光阻21并未完全固化时铺设，部份的所述碳纳米管膜23浸润于所述光阻21中。在本实施例中，所述碳纳米管膜23由一碳纳米管阵列中拉取而获得，具体来说，所述碳纳米管膜23包括多根碳纳米管丝231基本相互平行排列，且大致平行于所述碳纳米管膜23表面(如图4所示)，而所述碳纳米管丝231其中之一是由多个碳纳米管通过凡德瓦尔力首尾相连且基本沿同一方向择优取向排列构成。其中，相邻的所述碳纳米管丝231之间是由多个碳纳米管连接，即部份的多个碳纳米管搭接着相邻的碳纳米管丝231。
步骤S4，金属粒子24以蒸镀或溅镀方式沉积于所述碳纳米管膜23与所述光阻21上，可以理解的，所述碳纳米管膜23中，实质上平行排列的所述碳纳米管丝231之间是具有间隙，因此，于微观上，所述金属粒子24是可透过所述间隙沉积于所述碳纳米管膜23中所述碳纳米管的至少部分表面上，且所述金属粒子24亦会藉由所述间隙沉积于所述光阻21上。在本实施例中，所述金属粒子24是选自金、银或铁。
另外，若沉积的是所述半金属粒子24’，则可藉由将步骤S3完成的所述支撑板20，即将设置有所述光阻21以及所述碳纳米管膜23的所述支撑板20浸置于一半金属溶液中来达成，所述半金属溶液例如为碘溶液，藉由浸置的过程中，俾使所述半金属粒子24附着于所述碳纳米管膜23与所述光阻21上。
所述金属粒子24或所述半金属粒子24’可依据实际需求(例如选择不同电磁波的偏振程度)，选择不同的材料，以改善所述偏光元件2在各个波段电磁波的偏振性能。
于步骤S4后，在步骤S5利用显影液将所述光阻21去除，而留下附着所述金属粒子24或所述半金属粒子24’的所述碳纳米管膜23于所述支撑板20上。
于步骤S5的后，所述制作方法更包括一步骤，将连接相邻所述碳纳米管丝231的所述碳纳米管去除，在本实施例中，利用激光或刀具等方式将搭接的所述碳纳米管去除，并控制使所述碳纳米管丝231实质上等间距平行排列(如图4所示)，俾使所述碳纳米管膜23中的所述碳纳米管具有一规则性排列。举例来说，所述附着有所述金属粒子24或所述半金属粒子24’的所述碳纳米管膜23在利用刀具执行步骤S5之前，可先外加一保护膜层来增加所述碳纳米管膜23的强度后，再利用刀具去除搭接的所述碳纳米管。
于步骤S6，将附着有所述金属粒子24的所述碳纳米管膜23黏接于一基底30上，详细来说，步骤S6包括下列步骤：首先，涂布一紫外光固化胶于附着有所述金属粒子24的所述碳纳米管膜23上，即将所述紫外光固化胶涂布于去除所述光阻21后的所述支撑板20上，而使所述紫外光固化胶浸润所述碳纳米管膜23；之后，固化所述紫外光固化胶，使所述碳纳米管膜23固着于所述紫外光固化胶中；最后，去除所述支撑板20而形成所述偏光元件2，于此，所述紫外光固化胶即固化成为所述偏光元件2的所述基底30。
另外，于步骤S5的后，支撑所述碳纳米管膜23的所述支撑板20亦可藉由将附着有所述金属粒子24或所述半金属粒子24’的所述碳纳米管膜23贴附于一塑料板上，之后，再去除所述支撑板20来完成所述偏光元件2的制备。于此，所述塑料板是作为所述偏光元件2的所述基底30。
综上所述，依据本发明的偏光元件及其制作方法是利用碳纳米管膜的多个碳纳米管规则性排列，来达到偏光元件的偏光作用，且金属粒子或半金属粒子的附着，更进而强化偏光效果；由于使用碳纳米管膜来制作偏光元件，可利用简单的半导体制程以及沉积方法来制作所述偏光元件，相较于习知技术，制程简单更进而降低了制作成本。
另外，本领域技术人员还可在本发明精神内做其它变化，当然，这些依据本发明精神所做的变化，都应包含在本发明所要求保护的范围的内。

Claims (18)

1.一种偏振元件的制作方法，包括下列步骤：
提供一支撑板；
涂布一光阻于所述支撑板上；
提供一碳纳米管膜于所述光阻上，部份的所述碳纳米管膜浸润于所述光阻中；
沉积金属粒子或半金属粒子于所述碳纳米管膜与所述光阻上；
去除所述光阻；以及
黏接所述附着有所述金属粒子或所述半金属粒子的所述碳纳米管膜于一基底形成所述偏振元件。
2.如权利要求1所述的偏振元件的制作方法，其特征在于，所述碳纳米管膜包括多个碳纳米管，所述碳纳米管的端部沿一方向相互连接。
3.如权利要求2所述的偏振元件的制作方法，其特征在于，所述碳纳米管实质上排列形成多个相互平行的碳纳米管丝，相邻的所述碳纳米管丝之间是由多个碳纳米管连接。
4.如权利要求3所述的偏振元件的制作方法，其特征在于，于所述去除光阻步骤之后，更包括：去除连接所述碳纳米管丝的所述碳纳米管。
5.如权利要求4所述的偏振元件的制作方法，其特征在于，所述碳纳米管是使用激光或刀具去除。
6.如权利要求3所述的偏振元件的制作方法，其特征在于，所述碳纳米管丝实质上等间距排列。
7.如权利要求1所述的偏振元件的制作方法，其特征在于，黏接所述附着有所述金属粒子或所述半金属粒子的所述碳纳米管膜于所述基底的步骤包括：
涂布一紫外光固化胶于所述碳纳米管膜上；
固化所述紫外光固化胶，所述碳纳米管膜固着于所述紫外光固化胶中；以及
去除所述支撑板。
8.如权利要求1所述的偏振元件的制作方法，其特征在于，黏接所述附着有所述金属粒子或所述半金属粒子的所述碳纳米管膜于所述基底的步骤包括：
黏接所述附着有所述金属粒子或所述半金属粒子的所述碳纳米管膜于一塑料板；以及
去除所述支撑板。
9.如权利要求1所述的偏振元件的制作方法，其特征在于，所述支撑板为一硅基板。
10.如权利要求1所述的偏振元件的制作方法，其特征在于，所述光阻的材料为一正向光阻。
11.如权利要求1所述的偏振元件的制作方法，其特征在于，所述金属粒子以蒸镀或溅镀方式沉积于所述碳纳米管膜与所述光阻上。
12.如权利要求1所述的偏振元件的制作方法，其特征在于，设置有所述光阻与所述碳纳米管膜的所述支撑板浸置于一半金属溶液中，使所述半金属粒子沉积于所述碳纳米管膜与所述光阻上。
13.如权利要求12所述的偏振元件的制作方法，其特征在于，所述半金属溶液为碘溶液。
14.如权利要求1所述的偏振元件的制作方法，其特征在于，所述金属粒子为金、银或铁。
15.一种偏振元件，包括：
一基底；
一碳纳米管膜，其设置于所述基底，所述碳纳米管膜包括多个碳纳米管，所述碳纳米管的端部沿一方向相互连接，且所述碳纳米管实质上排列形成多个相互平行的碳纳米管丝；以及
金属粒子，黏着于所述碳纳米管膜的所述碳纳米管。
16.如权利要求15所述的偏振元件，其特征在于，所述基底的材料为塑料或光固化胶。
17.如权利要求15所述的偏振元件，其特征在于，所述碳纳米管丝实质上等间距排列。
18.如权利要求15所述的偏振元件，其特征在于，所述金属粒子为金、银或铁。
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