CN102054903A - Automatic tank replacing type cleaning device for solar battery silicon wafer cleaning machine - Google Patents

Automatic tank replacing type cleaning device for solar battery silicon wafer cleaning machine Download PDF

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Publication number
CN102054903A
CN102054903A CN2010105866322A CN201010586632A CN102054903A CN 102054903 A CN102054903 A CN 102054903A CN 2010105866322 A CN2010105866322 A CN 2010105866322A CN 201010586632 A CN201010586632 A CN 201010586632A CN 102054903 A CN102054903 A CN 102054903A
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China
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electromagnet
solar cell
silicon chip
cleaning device
magnetic
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CN2010105866322A
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Chinese (zh)
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CN102054903B (en
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王伟兵
陈敏智
赵东
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Zhejiang Perlight Solar Co Ltd
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Zhejiang Perlight Solar Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The invention provides an automatic tank replacing type cleaning device for a solar battery silicon wafer cleaning machine, belonging to the technical field of solar battery silicon wafer cleaning machines. The invention solves the problem of large noise of the solar battery silicon wafer cleaning machine in the prior art. The device provided by the invention comprises a cleaning tank stand and a portal bracket, wherein sliding sleeves are respectively arranged on two upright posts of the portal bracket; a spring is sleeved on each upright post; the sliding sleeves are fixedly connected through a lifting rod; a plurality of hooks are arranged on the lifting rod; a magnetic pushing mechanism capable of pushing each sliding sleeve to slide upward through magnetic force is arranged between each upright post and each sliding sleeve; a magnetic driving mechanism capable of pushing the portal bracket to move to the next level of cleaning tank through magnetic force is arranged between each upright post and the cleaning tank stand; and the magnetic pushing mechanism and the magnetic driving mechanism are respectively connected to a control circuit. By using the automatic tank replacing type cleaning device, a basket loaded with a solar battery silicon wafer can be automatically transferred to the next level of cleaning tank to be cleaned, and no noise is generated in the tank replacing and cleaning processes.

Description

A kind of being used for moved the groove cleaning device on the silicon chip of solar cell cleaning machine certainly
Technical field
The invention belongs to solar cell manufacturing equipment technical field, relate to a kind of automatic flushing device, particularly a kind of being used for moved the groove cleaning device on the silicon chip of solar cell cleaning machine certainly.
Background technology
Silicon chip of solar cell must be through repeatedly cleaning, to remove the mortar attached to silicon chip surface after cutting.Used cleaning equipment is multistage groove-type cleaning machine at present, contains rinse bath more than three grades usually, and silicon chip to be cleaned is placed in the basket and shifts out after first order rinse bath begins to clean step by step.
This cleaning equipment all is to adopt artificial mode that silicon chip to be cleaned is mentioned the rinse bath of upper level from the next stage rinse bath.For automaticity is provided, also the someone designs common lifting cleaning device, promptly adopt schemes such as motor, cam mechanism to realize promoting automatically, but because silicon chip of solar cell is in preparation process, must in the environment of dustless no static, produce, therefore its workshop is the space of a sealing, and the staff puts on special clothes.In the space of this sealing, very big of the noise that motor, cam mechanism produced, thus the staff can't stay in the workshop for a long time, so, this cleaning equipment all is manually to clean silicon chip of solar cell, has hindered the automaticity of cleaning equipment.
Summary of the invention
The present invention is directed to prior art and have the problems referred to above, having proposed a kind of being used for moves the groove cleaning device on the silicon chip of solar cell cleaning machine certainly, this is moved the groove cleaning device certainly and can automatically the basket that silicon chip of solar cell is housed be changed in the next stage rinse bath and clean, and noiselessness produces in changing the groove cleaning process.
The present invention realizes by following technical proposal: a kind of being used for moved the groove cleaning device on the silicon chip of solar cell cleaning machine certainly, the rinse bath frame and the gantry support that is positioned at rinse bath frame top that comprise the silicon chip of solar cell cleaning machine, it is characterized in that, be respectively equipped with slip cap on two columns of described gantry support, on column, be with a spring, described spring one end is connected on the slip cap, the other end is fixed on the column, affixed between the described slip cap by an elevating lever, on elevating lever, be provided with some hooks, between column and slip cap, be provided with by magnetic force and promote the magnetic pushing machine structure that slip cap upwards slides, be provided with between column and rinse bath frame by magnetic force and promote gantry support to the magnetic drive mechanism that the next stage rinse bath moves, described magnetic pushing machine structure and magnetic drive mechanism are connected to one and can control on the control circuit that magnetic force produces.
Because spring is below slip cap, slip cap is at the effect lower compression spring of gravity, make spring be in poised state, after colluding the basket that silicon chip of solar cell is housed at hook, under the control of control circuit, the magnetic pushing machine structure promotes the slip cap segment distance recession demagnetization force of upwards sliding, and slip cap can produce reciprocal damping vibration under the effect of gravity and spring, and simulation hand tremor basket shakes out basket with the mortar in the basket.The magnetic pushing machine structure can repeatedly carry out, and thoroughly mortar is shaked out.After this, under the effect of magnetic drive mechanism, gantry support can be moved in the next stage rinse bath, repeat said process and finish cleaning.Because this device is to adopt magneticaction power, the collision of no any part, so can not produce noise.
Certainly move the groove cleaning device in above-mentioned being used on the silicon chip of solar cell cleaning machine, described magnetic pushing machine structure comprises first electromagnet that is fixed on the slip cap and second electromagnet that is fixed on the column, first electromagnet and second electromagnet are oppositely arranged and spacing one segment distance, and first electromagnet and second electromagnet are connected with above-mentioned control circuit respectively.Under the control of control circuit, first electromagnet end relative with second electromagnet produces identical magnetic force,, promotes slip cap and moves up from down in the effect of homopolar-repulsion, cut off the circuit of first electromagnet and second electromagnet over time, make slip cap produce reciprocal damping vibration.
Certainly move the groove cleaning device in above-mentioned being used on the silicon chip of solar cell cleaning machine, the upper end of described second electromagnet is lined with sheet rubber.When first electromagnet and second electromagnet bumped, the existence of sheet rubber also can reduce the generation of noise, also can be used for buffering.
Certainly move the groove cleaning device in above-mentioned being used on the silicon chip of solar cell cleaning machine, described magnetic drive mechanism comprises guide rail that is arranged at rinse bath frame both sides and the drive rod that be arranged in parallel with guide rail, on guide rail, be with slide block, above-mentioned column is fixed on the slide block, described drive rod is formed by several electromagnet unit cell arrangement, outside drive rod, be with and produce unidirectional magnetic force and the affixed electromagnetism sleeve of above-mentioned slide block, the length of electromagnetism sleeve is slightly larger than the length of an electromagnet unit, and described electromagnet unit and electromagnetism sleeve all are connected with above-mentioned control circuit.
Control circuit control electromagnetism sleeve produces magnetic force, the electromagnet unit close with electromagnetism sleeve left end produces the magnetic force that repels each other and is used to promote the electromagnetism sleeve, the electromagnet unit close with electromagnetism sleeve right-hand member produces the magnetic force of inhaling mutually and is used to spur the electromagnetism sleeve, after crossing an electromagnet unit, the adjacent next electromagnet unit of control circuit control produces magnetic force, cut off original electromagnet unit magnetic force, promote the electromagnetism sleeve once more and move.When needs stopped the electromagnetism sleeve, the electromagnet unit that control circuit control is positioned at the electromagnetic sleeve tube produced the magnetic force of inhaling mutually, and the electromagnetism sleeve is adsorbed on this electromagnet unit.
Certainly move the groove cleaning device in above-mentioned being used on the silicon chip of solar cell cleaning machine, described electromagnetism sleeve is the iron core of a tubular, coiling on outer peripheral face unshakable in one's determination.After giving coil electricity, can produce magnetic force along the direction of axis line of iron core.
Certainly move the groove cleaning device in above-mentioned being used on the silicon chip of solar cell cleaning machine, described control circuit comprises PLC controller and several relay circuits that are connected with the PLC controller, the first above-mentioned electromagnet, second electromagnet, several electromagnet unit and electromagnetism sleeve are connected on separately the relay circuit, the PLC controller is used to control two electromagnet unit and produces opposite magnetic force, control electromagnetism sleeve produces magnetic force repels each other electromagnetism sleeve and one of them electromagnet unit, inhale mutually with another one electromagnet unit, and after the electromagnetism sleeve is crossed an electromagnet unit, control adjacent next electromagnet unit and produce magnetic force, cut off original electromagnet unit magnetic force, and control first electromagnet and second electromagnet and produce and repel each other.
Certainly move the groove cleaning device in above-mentioned being used on the silicon chip of solar cell cleaning machine, described guide rail and drive rod are obliquely installed.Because three rinse baths of silicon chip of solar cell cleaning machine are stepped increasing progressively, guide rail and drive rod are obliquely installed, slip cap moves up and can drive whole gantry support rising, and hook is moved in the next rinse bath.
Certainly move the groove cleaning device in above-mentioned being used on the silicon chip of solar cell cleaning machine, described gantry support, elevating lever, hook and slide block all adopt aluminum material to make.Making with aluminum can weight reduction.
Certainly move the groove cleaning device in above-mentioned being used on the silicon chip of solar cell cleaning machine, be connected with hook spring between described elevating lever and the hook.
Certainly move the groove cleaning device in above-mentioned being used on the silicon chip of solar cell cleaning machine, the lower end of described guide rail is provided with rubber sheet gasket.
Compared with prior art, originally the groove cleaning device of moving certainly that is used on the silicon chip of solar cell cleaning machine uses magnetic force as power, move and drive and do not have noise when gantry support moves and produce promoting slip cap, can be applicable to the dustless no static workshop of silicon chip of solar cell, promote automatization level.
Description of drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is the schematic diagram that magnetic pushing machine structure of the present invention is in initial condition.
Fig. 3 is the schematic diagram that magnetic pushing machine structure of the present invention is in the state of drawing high.
Fig. 4 is the schematic diagram that magnetic drive of the present invention mechanism is in initial condition.
Fig. 5 is the schematic diagram that magnetic drive of the present invention mechanism is in propradation.
Among the figure, 1, the rinse bath frame; 2, gantry support; 021, column; 022, crossbeam; 3, slip cap; 4, spring; 5, elevating lever; 6, hook; 7, hook spring; 8, magnetic pushing machine structure; 081, first electromagnet; 082, second electromagnet; 083, sheet rubber; 9, magnetic drive mechanism; 091, guide rail; 092, drive rod; 0921, electromagnet unit; 093, slide block; 094, rubber sheet gasket; 095, electromagnetism sleeve.
Embodiment
Below be specific embodiments of the invention and in conjunction with the accompanying drawings, technical scheme of the present invention is further described, but the present invention be not limited to these embodiment.
As shown in Figure 1, this is from moving the gantry support 2 that the groove cleaning device comprises the rinse bath frame 1 of silicon chip of solar cell cleaning machine and is positioned at rinse bath frame 1 top, gantry support 2 is made of with the crossbeam 022 that is connected two root posts 021 two root posts 021, be respectively equipped with slip cap 3 on two columns 021 of gantry support 2, on column 021, be with a spring 4, spring 4 one ends are connected on the slip cap 3, the other end is fixed on column 021 bulge loop, affixed between the slip cap 3 by an elevating lever 5, on elevating lever 5, be provided with four the hook 6, elevating lever 5 and link up with 6 between coupling hook spring 7.Between column 021 and slip cap 3, be provided with by magnetic force and promote the magnetic pushing machine structure 8 that slip cap 3 upwards slides.Between column 021 and rinse bath frame 1, be provided with by magnetic force and promote gantry support 2 to magnetic drive mechanism 9 that the next stage rinse bath moves.Magnetic pushing machine structure 8 and magnetic drive mechanism 9 are connected to one and can control on the control circuit that magnetic force produces.
As shown in Figure 2, magnetic pushing machine structure 8 comprises first electromagnet 081 and second electromagnet that is fixed on the column 021 that is fixed on the slip cap 3, first electromagnet 081 and second electromagnet 082 are oppositely arranged and spacing one segment distance, the upper end of second electromagnet 082 is lined with sheet rubber 083, the first electromagnet 081 and is connected with control circuit respectively with second electromagnet 082.Magnetic pushing machine structure 8 among Fig. 2 is in initial condition, slip cap 3 is at the effect lower compression spring 4 of gravity, make spring 4 be in poised state, first electromagnet 081 and second electromagnet 082 distance apart are more bigger than the amplitude of spring 4 vibrations, and first electromagnet 081 and second electromagnet 082 can not produce collision in spring 4 vibrations like this.
As shown in Figure 3, under the control of control circuit, first electromagnet 081 and second electromagnet 082 produce the active force that repels each other, second electromagnet 082 promotes first electromagnet 081 and is being with slip cap 3 segment distance that upwards slides, when being in extended state, spring 4 generations remove the magnetic force of first electromagnet 081 and second electromagnet 082, slip cap 3 can produce reciprocal damping vibration under the effect of gravity and spring 4, simulation hand tremor basket shakes out basket with the mortar in the basket.
As shown in Figure 4, magnetic drive mechanism 9 comprises guide rail 091 that is arranged at rinse bath frame 1 both sides and the drive rod 092 that be arranged in parallel with guide rail 091, and guide rail 091 and drive rod 092 are obliquely installed.Be with slide block 093 on guide rail 091, the lower end of guide rail 091 is provided with rubber sheet gasket 094, and column 021 is fixed on the slide block 093.Drive rod 092 is arranged by several electromagnet unit 0921 and is formed, electromagnet unit 0921 is formed with the coil that is wrapped on the iron core for the solid iron core of bar shaped, outside drive rod 092, be with the electromagnetism sleeve 095 that can produce unidirectional magnetic force, electromagnetism sleeve 095 is affixed with slide block 093, electromagnetism sleeve 095 is the iron core of a tubular, coiling on the iron core outer peripheral face, the length of electromagnetism sleeve 095 is slightly larger than the length of an electromagnet unit 0921, and electromagnet unit 0921 all is connected with control circuit with electromagnetism sleeve 095.Magnetic drive mechanism 9 is in initial condition among Fig. 4, and slide block 093 is resisted against on the rubber sheet gasket 094, and electromagnetism sleeve 095 is positioned on second electromagnet unit 0921 of drive rod 092.Under the control of control circuit, first electromagnet unit 0921 and the 4th electromagnet unit 0921 produce opposite magnetic force, among Fig. 4, the right-hand member of first electromagnet unit 0921 is the N utmost point, the left end of the 4th electromagnet unit 0921 is the N utmost point, the left end of electromagnetism sleeve 095 is the N utmost point, right-hand member is the S utmost point, the left end homopolar-repulsion of the right-hand member of first electromagnet unit 0921 and electromagnetism sleeve 095, promoting electromagnetism sleeve 095 moves, the left end of the 4th electromagnet unit 0921 is inhaled mutually with the right-hand member homopolarity of electromagnetism sleeve 095, and pulling electromagnetism sleeve 095 moves.
As shown in Figure 5, after electromagnetism sleeve 095 is crossed second electromagnet unit 0921, control circuit is controlled first and four electromagnet unit 0921 remove magnetic force, and second and the 5th the opposite magnetic force of electromagnet unit 0921 generation continue to drive electromagnetism sleeve 095 and moves.After electromagnetism sleeve 095 moves to the precalculated position, at needs electromagnetism sleeve 095 is stopped the location, the electromagnet unit 0921 that control circuit control is positioned at electromagnetic sleeve tube 095 produces the magnetic force of inhaling mutually, remove the magnetic force of original electromagnet unit 0921, electromagnetism sleeve 095 is adsorbed on this electromagnet unit 0921.
Control circuit comprises PLC controller and several relay circuits that are connected with the PLC controller, first electromagnet 081, second electromagnet 082, several electromagnet unit 0921 and electromagnetism sleeve 095 are connected on separately the relay circuit, the PLC controller is used to control two electromagnet unit 0921 and produces opposite magnetic force, control electromagnetism sleeve 095 produces magnetic force repels each other electromagnetism sleeve 095 and one of them electromagnet unit 0921, inhale mutually with another one electromagnet unit 0921, and after electromagnetism sleeve 095 is crossed an electromagnet unit 0921, control adjacent next electromagnet unit 0921 and produce magnetic force, cut off original electromagnet unit 0921 magnetic force, and control first electromagnet 081 and second electromagnet 082 and produce and repel each other.
The course of work of this device is as follows: after hook 6 colludes the basket that silicon chip of solar cell is housed, under the control of control circuit, magnetic pushing machine structure 8 promotes slip caps 3 segment distance recession demagnetization force of upwards sliding, slip cap 3 can produce reciprocal damping vibration under the effect of gravity and spring 4, simulation hand tremor basket shakes out basket with the mortar in the basket.Cleaning an end after the time, control circuit control magnetic drive mechanism 9 promotes electromagnetism sleeves 095 and moves and drive gantry support 2 and move, after gantry support 2 moves to the next stage rinse bath, control circuit control electromagnetism sleeve 095 is adsorbed on the drive rod 092, control magnetic pushing machine structure 8 once more, make slip cap 3 up-down vibration, cleaning an end after the time, continue said process and finish until cleaning.After having cleaned, remove all magnetic force, slide block 093 automatically resets under the effect of gravity.

Claims (10)

1. one kind is used for moving the groove cleaning device certainly on the silicon chip of solar cell cleaning machine, comprise the rinse bath frame (1) of silicon chip of solar cell cleaning machine and be positioned at the gantry support (2) of rinse bath frame (1) top, it is characterized in that, be respectively equipped with slip cap (3) on two columns (021) of described gantry support (2), on column (021), be with a spring (4), described spring (4) one ends are connected on the slip cap (3), the other end is fixed on the column (021), affixed between the described slip cap (3) by an elevating lever (5), on elevating lever (5), be provided with some hooks (6), between column (021) and slip cap (3), be provided with by magnetic force and promote the magnetic pushing machine structure (8) that slip cap (3) upwards slides, be provided with between column (021) and rinse bath frame (1) by magnetic force and promote gantry support (2) to the magnetic drive mechanism (9) that the next stage rinse bath moves, described magnetic pushing machine structure (8) and magnetic drive mechanism (9) are connected on the control circuit that can control the magnetic force generation.
2. according to claim 1 being used for moved the groove cleaning device on the silicon chip of solar cell cleaning machine certainly, it is characterized in that, described magnetic pushing machine structure (8) comprises first electromagnet (081) that is fixed on the slip cap (3) and is fixed in second electromagnet (082) on the column (021), first electromagnet (081) and second electromagnet (082) are oppositely arranged and spacing one segment distance, and first electromagnet (081) and second electromagnet (082) are connected with above-mentioned control circuit respectively.
3. according to claim 2 being used for moved the groove cleaning device on the silicon chip of solar cell cleaning machine certainly, it is characterized in that the upper end of described second electromagnet (082) is lined with sheet rubber (083).
4. move the groove cleaning device according to claim 2 or 3 described being used for certainly on the silicon chip of solar cell cleaning machine, it is characterized in that, described magnetic drive mechanism (9) comprises guide rail (091) that is arranged at rinse bath frame (1) both sides and the drive rod (092) that be arranged in parallel with guide rail (091), on guide rail (091), be with slide block (093), above-mentioned column (021) is fixed on the slide block (093), described drive rod (092) is arranged by several electromagnet unit (0921) and is formed, outside drive rod (092), be with and produce unidirectional magnetic force and the affixed electromagnetism sleeve (095) of above-mentioned slide block (093), the length of electromagnetism sleeve (095) is slightly larger than the length of an electromagnet unit (0921), and described electromagnet unit (0921) and electromagnetism sleeve (095) all are connected with above-mentioned control circuit.
5. according to claim 4 being used for moved the groove cleaning device on the silicon chip of solar cell cleaning machine certainly, it is characterized in that described electromagnetism sleeve (095) is the iron core of a tubular, coiling on outer peripheral face unshakable in one's determination.
6. according to claim 5 being used for moved the groove cleaning device on the silicon chip of solar cell cleaning machine certainly, it is characterized in that described guide rail (091) and drive rod (092) are obliquely installed.
7. according to claim 6 being used for moved the groove cleaning device on the silicon chip of solar cell cleaning machine certainly, it is characterized in that, described control circuit comprises PLC controller and several relay circuits that are connected with the PLC controller, above-mentioned first electromagnet (081), second electromagnet (082), several electromagnet unit (0921) and electromagnetism sleeve (095) are connected on separately the relay circuit, the PLC controller is used to control two electromagnet unit (0921) and produces opposite magnetic force, control electromagnetism sleeve (095) produces magnetic force repels each other electromagnetism sleeve (095) and one of them electromagnet unit (0921), inhale mutually with another one electromagnet unit (0921), and after electromagnetism sleeve (095) is crossed an electromagnet unit (0921), control adjacent next electromagnet unit (0921) and produce magnetic force, cut off original electromagnet unit (0921) magnetic force, and control first electromagnet (081) and repel each other with second electromagnet (082) generation.
8. according to claim 7 being used for moved the groove cleaning device on the silicon chip of solar cell cleaning machine certainly, it is characterized in that described gantry support (2), elevating lever (5), hook (6) and slide block (093) all adopt aluminum material to make.
9. according to claim 8 being used for moved the groove cleaning device on the silicon chip of solar cell cleaning machine certainly, it is characterized in that, is connected with hook spring (7) between described elevating lever (5) and the hook (6).
10. according to claim 9 being used for moved the groove cleaning device on the silicon chip of solar cell cleaning machine certainly, it is characterized in that the lower end of described guide rail (091) is provided with rubber sheet gasket (094).
CN2010105866322A 2010-12-14 2010-12-14 Automatic tank replacing type cleaning device for solar battery silicon wafer cleaning machine Active CN102054903B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107314004A (en) * 2017-09-06 2017-11-03 汤明明 A kind of hydraulic system combination sealing pad mechanization recycling and processing device
CN107991162A (en) * 2017-12-26 2018-05-04 苏州市华测检测技术有限公司 Particle analyte detection pre-processing device
CN108007729A (en) * 2017-12-26 2018-05-08 华测检测认证集团股份有限公司 The equipment for making atmospheric sampling filter membrane attaching particles thing float again
CN108014647A (en) * 2017-12-26 2018-05-11 苏州市华测检测技术有限公司 The ultrasonic cleaning apparatus of bioxin sampling membrane

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CN101773916A (en) * 2010-01-20 2010-07-14 常州亿晶光电科技有限公司 Stepped multi-stage silicon material cleaning equipment
CN101773915A (en) * 2010-01-20 2010-07-14 常州亿晶光电科技有限公司 Multistage circulating cleaning equipment for solar cell silicon wafers
CN101786089A (en) * 2010-02-05 2010-07-28 深圳市新产业生物医学工程有限公司 Automatic cleaning device and cleaning method thereof
CN201887070U (en) * 2010-12-14 2011-06-29 浙江宝利特新能源股份有限公司 Automatic tank changing and cleaning device for solar battery silicon wafer cleaner

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6506260B1 (en) * 1999-07-29 2003-01-14 Kaneka Corporation Method for cleaning photovoltaic module and cleaning apparatus
CN101773916A (en) * 2010-01-20 2010-07-14 常州亿晶光电科技有限公司 Stepped multi-stage silicon material cleaning equipment
CN101773915A (en) * 2010-01-20 2010-07-14 常州亿晶光电科技有限公司 Multistage circulating cleaning equipment for solar cell silicon wafers
CN101786089A (en) * 2010-02-05 2010-07-28 深圳市新产业生物医学工程有限公司 Automatic cleaning device and cleaning method thereof
CN201887070U (en) * 2010-12-14 2011-06-29 浙江宝利特新能源股份有限公司 Automatic tank changing and cleaning device for solar battery silicon wafer cleaner

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107314004A (en) * 2017-09-06 2017-11-03 汤明明 A kind of hydraulic system combination sealing pad mechanization recycling and processing device
CN107314004B (en) * 2017-09-06 2019-03-01 兴化市永盛电力器材有限公司 A kind of hydraulic system combination sealing pad mechanization recycling and processing device
CN107991162A (en) * 2017-12-26 2018-05-04 苏州市华测检测技术有限公司 Particle analyte detection pre-processing device
CN108007729A (en) * 2017-12-26 2018-05-08 华测检测认证集团股份有限公司 The equipment for making atmospheric sampling filter membrane attaching particles thing float again
CN108014647A (en) * 2017-12-26 2018-05-11 苏州市华测检测技术有限公司 The ultrasonic cleaning apparatus of bioxin sampling membrane

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Denomination of invention: Automatic tank replacing type cleaning device for solar battery silicon wafer cleaning machine

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