CN103949434A - Moving device for cleaning silicon wafers - Google Patents
Moving device for cleaning silicon wafers Download PDFInfo
- Publication number
- CN103949434A CN103949434A CN201410160310.XA CN201410160310A CN103949434A CN 103949434 A CN103949434 A CN 103949434A CN 201410160310 A CN201410160310 A CN 201410160310A CN 103949434 A CN103949434 A CN 103949434A
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- CN
- China
- Prior art keywords
- fixed
- substrate
- mobile device
- wafer cleaning
- cylinder
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
- B08B3/123—Cleaning travelling work, e.g. webs, articles on a conveyor
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention relates to a moving device for cleaning silicon wafers. The moving device comprises a frame and guide plates oppositely and horizontally arranged on the frame, a guide groove is formed in each guide plate in the length direction, the lower end of each guide plate is fixedly provided with a rack in the length direction, a bearing mechanism is arranged on the guide plates, the bearing mechanism comprises a substrate, a support shaft arranged on the substrate and rollers located at two ends of the support shaft, a cylinder is fixed on the substrate, a bearing plate is fixedly arranged on a cylinder arm of the cylinder, hooks are fixedly arranged on the periphery of the bearing plate, the rollers are located in the guide grooves, the lower end of the substrate is fixedly provided with a motor, the output shaft of the motor is fixedly provided with a gear, and the gear is meshed with the rack. The moving device is simple in structure, convenient to use, and stable in operation, the silicon wafers are prevented from shaking during a moving process, the quality of the silicon wafers is ensured, the resource loss is reduced, and the production cost is reduced.
Description
Technical field
The present invention relates to a kind of Wafer Cleaning mobile device.
Background technology
On fully-automatic supersonic cleaning equipment, be conventionally provided with mechanical arm, mechanical arm is used for cleaning workpiece to carry out station carrying.Because Wafer Cleaning need to pass through multiple working procedure, by mechanical arm, move, but existing machinery arm there will be and rocks in mobile process, cause rocking for carrying the cleaning basket of silicon chip, the silicon chip that makes to clean in basket there will be collision, thereby cause damage, affect the quality of silicon chip, increased the production cost of enterprise.
Summary of the invention
The present invention has overcome the deficiencies in the prior art, and a kind of Wafer Cleaning mobile device simple in structure is provided.
For achieving the above object, the technical solution used in the present invention is: a kind of Wafer Cleaning mobile device, comprise frame, be arranged in described frame and guide plate that relative level arranges, described guide plate is provided with gathering sill along its length, the side of described guide plate is fixed with tooth bar along its length, described guide plate is provided with load carrier, described load carrier comprises substrate, the roller that is arranged on the fulcrum on described substrate and is positioned at described fulcrum two ends, on described substrate, be fixed with cylinder, the cylinder arm of described cylinder is fixed with loading plate, the surrounding of described loading plate is fixed with hook, described roller is positioned at described gathering sill, the lower end of described substrate is fixed with motor, the output shaft of described motor is fixed with gear, described gear and described tooth bar are connected with a joggle.
In a preferred embodiment of the present invention, Wafer Cleaning further comprises on described substrate and is fixed with at least one guide post with mobile device, and on described loading plate, be fixed with at least one vertical rod, described vertical rod is partly inserted in described guide post.
In a preferred embodiment of the present invention, Wafer Cleaning further comprises that with mobile device the quantity of described guide post is two, and the quantity of described vertical rod is two, and two described guide posts, two described vertical rods are all diagonal angle setting.
In a preferred embodiment of the present invention, Wafer Cleaning further comprises that with mobile device the quantity of described load carrier is two.
In a preferred embodiment of the present invention, Wafer Cleaning further comprises that with mobile device the surrounding of described substrate is fixed with bearing block, in described bearing block, is provided with bearing, and described fulcrum is through described bearing.
In a preferred embodiment of the present invention, Wafer Cleaning further comprises that with mobile device described motor is stepper motor.
The invention solves the defect existing in background technology, the present invention is simple in structure, easy to use, operates steadily, and avoids silicon chip rocking in moving process, has guaranteed the quality of silicon chip, reduces resource loss, has reduced production cost.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the present invention is further described.
Fig. 1 is the structural representation of the preferred embodiments of the present invention;
Fig. 2 is the substrate of the preferred embodiments of the present invention, the top view of guide plate;
In figure: 2, frame, 4, guide plate, 6, gathering sill, 8, tooth bar, 10, substrate, 12, fulcrum, 14, roller, 16, cylinder, 18, cylinder arm, 20, loading plate, 22, hook, 24, motor, 26, output shaft, 28, gear, 30 guide posts, 32, vertical rod, 34, bearing block, 36, bearing.
The specific embodiment
The present invention is further detailed explanation in conjunction with the accompanying drawings and embodiments now, and these accompanying drawings are the schematic diagram of simplification, basic structure of the present invention is only described in a schematic way, so it only shows the formation relevant with the present invention.
As Fig. 1, shown in Fig. 2, a kind of Wafer Cleaning mobile device, comprise frame 2, be arranged in frame 2 and guide plate 4 that relative level arranges, guide plate 4 is provided with gathering sill 6 along its length, the side of guide plate 4 is fixed with tooth bar 8 along its length, guide plate 4 is provided with load carrier, load carrier comprises substrate 10, the roller 14 that is arranged on the fulcrum 12 on substrate 10 and is positioned at fulcrum 12 two ends, on substrate 10, be fixed with cylinder 16, the cylinder arm 18 of cylinder 16 is fixed with loading plate 20, the surrounding of loading plate 20 is fixed with hook 22, hook 22 is for hanging the cleaning basket of containing silicon slice, roller 14 is positioned at gathering sill 6, the quantity of the preferred load carrier of the present invention is two, four rolling 14 is all positioned at gathering sill 6, roller 14 is limited in gathering sill 6, and move along gathering sill 6, level run is steady, the lower end of substrate 10 is fixed with motor 24, the output shaft 26 of motor 24 is fixed with gear 28, gear 28 is connected with a joggle with tooth bar 8, when motor 24 starts, gear 28 rotations, because tooth bar 8 maintains static, gear 28 moves along the length direction of tooth bar 8, thereby substrate 10 is moved horizontally, drive loading plate 20 to move horizontally.
In preferable substrate 10 of the present invention, be fixed with at least one guide post 30, be fixed with at least one vertical rod 32 on loading plate 20, vertical rod 32 is inserted in guide post 30 through substrate 10 and part, and vertical rod 32 vertically moves up and down along guide post 30, operates steadily.Further preferably the quantity of guide post 30 is two, the quantity of vertical rod 32 is two, two guide posts 30, two vertical rods 32 are all diagonal angle setting, the cross section of guide post 30, vertical rod 32 is all rounded, further make loading plate 20 operating steadily vertically, avoid rocking of loading plate 20, thereby avoid rocking of silicon chip, guarantee the quality of silicon chip.
The surrounding of preferable substrate 10 of the present invention is fixed with bearing block 34, is provided with bearing 36 in bearing block 34, and fulcrum 12 is through bearing 36.
In order to move to another matting from a matting, the preferred motor 24 of the present invention is stepper motor.
Operation principle of the present invention is as follows:
Cylinder 16 starts, cylinder arm 18 promotes loading plate 20 and moves downward, the cleaning basket of hanging on hook 22 is moved downward in the first rinse bath, after Ultrasonic Cleaning, cylinder 16 resets, drive cleaning basket to leave first rinse bath, motor 24 starts, under the cooperation of gear 28 and tooth bar 8, drive and clean the top that basket moves to second rinse bath, cylinder starts, cylinder arm 18 promotes loading plate 20 and moves downward, the cleaning basket of hanging on hook 22 is moved downward in the second rinse bath, cleans, so circulation by ultrasonic wave.
Above foundation desirable embodiment of the present invention is enlightenment, and by above-mentioned description, related personnel can, within not departing from the scope of this invention technological thought, carry out various change and modification completely.The technical scope of this invention is not limited to the content on description, must determine technical scope according to claim scope.
Claims (6)
1. a Wafer Cleaning mobile device, it is characterized in that: comprise frame, be arranged in described frame and guide plate that relative level arranges, described guide plate is provided with gathering sill along its length, the side of described guide plate is fixed with tooth bar along its length, described guide plate is provided with load carrier, described load carrier comprises substrate, the roller that is arranged on the fulcrum on described substrate and is positioned at described fulcrum two ends, on described substrate, be fixed with cylinder, the cylinder arm of described cylinder is fixed with loading plate, the surrounding of described loading plate is fixed with hook, described roller is positioned at described gathering sill, the lower end of described substrate is fixed with motor, the output shaft of described motor is fixed with gear, described gear and described tooth bar are connected with a joggle.
2. Wafer Cleaning mobile device according to claim 1, is characterized in that: on described substrate, be fixed with at least one guide post, be fixed with at least one vertical rod on described loading plate, described vertical rod is partly inserted in described guide post.
3. Wafer Cleaning mobile device according to claim 2, is characterized in that: the quantity of described guide post is two, and the quantity of described vertical rod is two, and two described guide posts, two described vertical rods are all diagonal angle setting.
4. Wafer Cleaning mobile device according to claim 1, is characterized in that: the quantity of described load carrier is two.
5. Wafer Cleaning mobile device according to claim 4, is characterized in that: the surrounding of described substrate is fixed with bearing block, in described bearing block, is provided with bearing, and described fulcrum is through described bearing.
6. Wafer Cleaning mobile device according to claim 1, is characterized in that: described motor is stepper motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410160310.XA CN103949434A (en) | 2014-04-22 | 2014-04-22 | Moving device for cleaning silicon wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410160310.XA CN103949434A (en) | 2014-04-22 | 2014-04-22 | Moving device for cleaning silicon wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103949434A true CN103949434A (en) | 2014-07-30 |
Family
ID=51326859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410160310.XA Pending CN103949434A (en) | 2014-04-22 | 2014-04-22 | Moving device for cleaning silicon wafers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103949434A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105290047A (en) * | 2015-10-26 | 2016-02-03 | 佳马机械涂覆科技（苏州）有限公司 | Air shower of improved structure |
| CN105363733A (en) * | 2015-11-30 | 2016-03-02 | 苏州林信源自动化科技有限公司 | Ultrasonic washer |
| CN105363734A (en) * | 2015-11-30 | 2016-03-02 | 苏州林信源自动化科技有限公司 | Hanger mechanism in ultrasonic cleaner |
| CN105499208A (en) * | 2015-12-31 | 2016-04-20 | 浙江平湖华龙实业股份有限公司 | Ultrasonic washing device of high-performance storage battery plate grid |
| CN106423989A (en) * | 2016-11-15 | 2017-02-22 | 王虹 | Throwing mechanism for glasses automatic cleaning device |
Citations (7)
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| JPH07275810A (en) * | 1994-04-12 | 1995-10-24 | Hitachi Home Tec Ltd | Cleaning device |
| JP2009219966A (en) * | 2008-03-14 | 2009-10-01 | World Kiko:Kk | Sealed washing equipment |
| CN201755577U (en) * | 2010-06-30 | 2011-03-09 | 张家港市超声电气有限公司 | Automatic cleaning machine moving device based on tooling basket |
| CN102580971A (en) * | 2012-02-28 | 2012-07-18 | 张家港市超声电气有限公司 | Catching device for ultrasonic cleaning equipment |
| CN102716884A (en) * | 2012-06-22 | 2012-10-10 | 江苏港星方能超声洗净科技有限公司 | Double-span suspension arm device |
| CN202726916U (en) * | 2012-06-12 | 2013-02-13 | 常州市科沛达超声工程设备有限公司 | Front mechanical arm for cleaning silicon slice |
| CN203875062U (en) * | 2014-04-22 | 2014-10-15 | 苏州金牛精密机械有限公司 | Moving device for cleaning silicon wafer |
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2014
- 2014-04-22 CN CN201410160310.XA patent/CN103949434A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07275810A (en) * | 1994-04-12 | 1995-10-24 | Hitachi Home Tec Ltd | Cleaning device |
| JP2009219966A (en) * | 2008-03-14 | 2009-10-01 | World Kiko:Kk | Sealed washing equipment |
| CN201755577U (en) * | 2010-06-30 | 2011-03-09 | 张家港市超声电气有限公司 | Automatic cleaning machine moving device based on tooling basket |
| CN102580971A (en) * | 2012-02-28 | 2012-07-18 | 张家港市超声电气有限公司 | Catching device for ultrasonic cleaning equipment |
| CN202726916U (en) * | 2012-06-12 | 2013-02-13 | 常州市科沛达超声工程设备有限公司 | Front mechanical arm for cleaning silicon slice |
| CN102716884A (en) * | 2012-06-22 | 2012-10-10 | 江苏港星方能超声洗净科技有限公司 | Double-span suspension arm device |
| CN203875062U (en) * | 2014-04-22 | 2014-10-15 | 苏州金牛精密机械有限公司 | Moving device for cleaning silicon wafer |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105290047A (en) * | 2015-10-26 | 2016-02-03 | 佳马机械涂覆科技（苏州）有限公司 | Air shower of improved structure |
| CN105290047B (en) * | 2015-10-26 | 2017-05-10 | 张保山 | Air shower of improved structure |
| CN105363733A (en) * | 2015-11-30 | 2016-03-02 | 苏州林信源自动化科技有限公司 | Ultrasonic washer |
| CN105363734A (en) * | 2015-11-30 | 2016-03-02 | 苏州林信源自动化科技有限公司 | Hanger mechanism in ultrasonic cleaner |
| CN105499208A (en) * | 2015-12-31 | 2016-04-20 | 浙江平湖华龙实业股份有限公司 | Ultrasonic washing device of high-performance storage battery plate grid |
| CN106423989A (en) * | 2016-11-15 | 2017-02-22 | 王虹 | Throwing mechanism for glasses automatic cleaning device |
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| PB01 | Publication | ||
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| RJ01 | Rejection of invention patent application after publication | ||
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Application publication date: 20140730 |