CN102049737A - 抛光垫修整器 - Google Patents
抛光垫修整器 Download PDFInfo
- Publication number
- CN102049737A CN102049737A CN2009102079144A CN200910207914A CN102049737A CN 102049737 A CN102049737 A CN 102049737A CN 2009102079144 A CN2009102079144 A CN 2009102079144A CN 200910207914 A CN200910207914 A CN 200910207914A CN 102049737 A CN102049737 A CN 102049737A
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- polishing pad
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- abrasive particles
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- abrasive
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- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
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Priority Applications (1)
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CN200910207914A CN102049737B (zh) | 2009-10-29 | 2009-10-29 | 抛光垫修整器 |
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CN200910207914A CN102049737B (zh) | 2009-10-29 | 2009-10-29 | 抛光垫修整器 |
Publications (2)
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CN102049737A true CN102049737A (zh) | 2011-05-11 |
CN102049737B CN102049737B (zh) | 2012-08-29 |
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CN200910207914A Active CN102049737B (zh) | 2009-10-29 | 2009-10-29 | 抛光垫修整器 |
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CN (1) | CN102049737B (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102248486A (zh) * | 2011-07-25 | 2011-11-23 | 清华大学 | 抛光垫修整方法 |
CN104972398A (zh) * | 2014-04-03 | 2015-10-14 | 深圳市平华兴科技有限公司 | 一种抛光垫修整器及其制造方法 |
CN105531082A (zh) * | 2013-10-17 | 2016-04-27 | 信越半导体株式会社 | 用于研磨的发泡聚胺酯垫的修整装置 |
CN106956213A (zh) * | 2017-02-24 | 2017-07-18 | 咏巨科技有限公司 | 组合式修整器及其制造方法 |
CN110052962A (zh) * | 2019-04-25 | 2019-07-26 | 西安奕斯伟硅片技术有限公司 | 一种抛光垫修整器、加工装置及方法 |
CN111203800A (zh) * | 2020-02-20 | 2020-05-29 | 长江存储科技有限责任公司 | 研磨垫修整器及化学机械研磨设备 |
CN113894703A (zh) * | 2021-10-29 | 2022-01-07 | 江苏韦尔博新材料科技有限公司 | 一种基于簇状单元的钎焊金刚石修整器的制备工艺 |
CN116619246A (zh) * | 2023-07-24 | 2023-08-22 | 北京寰宇晶科科技有限公司 | 一种具有金刚石柱状晶簇的cmp抛光垫修整器及其制备方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1938128A (zh) * | 2004-03-31 | 2007-03-28 | 三菱综合材料株式会社 | Cmp调节器 |
KR100693251B1 (ko) * | 2005-03-07 | 2007-03-13 | 삼성전자주식회사 | 연마 속도와 연마 패드의 조도를 향상시킬 수 있는 패드 컨디셔너 및 이를 이용하는 화학기계적 연마 장치 |
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2009
- 2009-10-29 CN CN200910207914A patent/CN102049737B/zh active Active
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102248486A (zh) * | 2011-07-25 | 2011-11-23 | 清华大学 | 抛光垫修整方法 |
CN105531082A (zh) * | 2013-10-17 | 2016-04-27 | 信越半导体株式会社 | 用于研磨的发泡聚胺酯垫的修整装置 |
US9981361B2 (en) | 2013-10-17 | 2018-05-29 | Shin-Etsu Handotai Co., Ltd. | Apparatus for dressing urethane foam pad for use in polishing |
CN104972398A (zh) * | 2014-04-03 | 2015-10-14 | 深圳市平华兴科技有限公司 | 一种抛光垫修整器及其制造方法 |
CN106956213A (zh) * | 2017-02-24 | 2017-07-18 | 咏巨科技有限公司 | 组合式修整器及其制造方法 |
CN106956213B (zh) * | 2017-02-24 | 2019-01-22 | 咏巨科技有限公司 | 组合式修整器及其制造方法 |
CN110052962A (zh) * | 2019-04-25 | 2019-07-26 | 西安奕斯伟硅片技术有限公司 | 一种抛光垫修整器、加工装置及方法 |
CN111203800A (zh) * | 2020-02-20 | 2020-05-29 | 长江存储科技有限责任公司 | 研磨垫修整器及化学机械研磨设备 |
CN111203800B (zh) * | 2020-02-20 | 2021-11-05 | 长江存储科技有限责任公司 | 研磨垫修整器及化学机械研磨设备 |
CN113894703A (zh) * | 2021-10-29 | 2022-01-07 | 江苏韦尔博新材料科技有限公司 | 一种基于簇状单元的钎焊金刚石修整器的制备工艺 |
CN116619246A (zh) * | 2023-07-24 | 2023-08-22 | 北京寰宇晶科科技有限公司 | 一种具有金刚石柱状晶簇的cmp抛光垫修整器及其制备方法 |
CN116619246B (zh) * | 2023-07-24 | 2023-11-10 | 北京寰宇晶科科技有限公司 | 一种具有金刚石柱状晶簇的cmp抛光垫修整器及其制备方法 |
Also Published As
Publication number | Publication date |
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CN102049737B (zh) | 2012-08-29 |
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Effective date of registration: 20211231 Address after: 64 Zhongshan Road, Yingge District, Xinbei, Taiwan, China Patentee after: Taiwan China grinding wheel Enterprise Co.,Ltd. Address before: Taipei County, Taiwan, China Patentee before: Song Jianmin Effective date of registration: 20211231 Address after: No. 3 Lane 7 Fu'an street, Yingge District, Taiwan, China Patentee after: Hongji Industry Co.,Ltd. Address before: 64 Zhongshan Road, Yingge District, Xinbei, Taiwan, China Patentee before: Taiwan China grinding wheel Enterprise Co.,Ltd. |