CN102029552B - 长度测量装置 - Google Patents
长度测量装置 Download PDFInfo
- Publication number
- CN102029552B CN102029552B CN201010298542.3A CN201010298542A CN102029552B CN 102029552 B CN102029552 B CN 102029552B CN 201010298542 A CN201010298542 A CN 201010298542A CN 102029552 B CN102029552 B CN 102029552B
- Authority
- CN
- China
- Prior art keywords
- engineer
- scale
- length
- hollow profile
- seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004020 conductor Substances 0.000 claims abstract description 9
- 238000005259 measurement Methods 0.000 claims description 12
- 229920003051 synthetic elastomer Polymers 0.000 claims description 7
- 239000005061 synthetic rubber Substances 0.000 claims description 7
- 239000012780 transparent material Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- 229920000459 Nitrile rubber Polymers 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 210000004276 hyalin Anatomy 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 150000002505 iron Chemical class 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000005060 rubber Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229920002943 EPDM rubber Polymers 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 229920001897 terpolymer Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
- G01D5/34761—Protection devices, e.g. caps; Blowing devices
- G01D5/34769—Sealing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
- G01D5/34761—Protection devices, e.g. caps; Blowing devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
- G01D2205/50—Grounding or electrostatically shielding a position sensor or encoder
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Length-Measuring Instruments Using Mechanical Means (AREA)
- Optical Transform (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
本发明涉及长度测量装置，它由一个外壳组成，比例尺(1)置于其中，以免受环境影响。外壳包括一个空心型材(21)，其两端分别用一个盖(22)密封。在盖(22)和空心型材(21)之间布置一个用导电材料制成的密封件(4)。连接元件(41)一体成型在密封件(4)上，该连接元件接触比例尺(1)并由此导电连接比例尺(1)和空心型材(21)。
Description
技术领域
本发明涉及一种按权利要求1前序部分所述的长度测量装置。
背景技术
DE19746532A1描述了这种长度测量装置。这类长度测量装置用于测量长度和行程，特别是在机床加工时用于测量刀具相对于被加工的工件的相对运动、用于坐标测量仪，而且也扩大应用在半导体工业中。
这种熟知的长度测量装置由一个保护比例尺不受环境影响的外壳组成，为此，该外壳具有伸直的管形轮廓，其两端分别用一个盖封闭。在至少一个盖上用螺钉拧上弹性铁片，该铁片弹性地接触比例尺并由此在比例尺的分度与盖之间建立电连接。
这种铁片是难处理的零件，其制作和安装都相当费事。
发明内容
本发明的目的在于提出一种结构简单而又便于安装的抗干扰的长度测量装置。
根据本发明，这个目的是通过权利要求1的特征来实现的。
本发明的诸多有利方案可从各项从属权利要求中得知。
根据本发明，长度测量装置具有一个外壳，该外壳由一个伸长的空心型材和至少一个布置在其端部的盖组成；在空心型材的内腔中布置一个带分度的比例尺，在测量位置时，其分度可由一个在测量方向内相对于该外壳运动的扫描装置扫描；在比例尺的表面并沿比例尺延伸设置有一个放电元件来泄放聚积在该表面上的电荷；导电连接元件建立比例尺这个放电元件与至少一个外壳部分即空心型材和盖之间的电接触，该导电元件是密封地嵌在空心型材和盖之间的密封件的组成部分。按本发明实施的这种电泄放至少在空心型材的一端上实现，但最好在两端上进行。
如果该连接元件用导电的合成橡胶制成，则是特别有利的。此外，该连接元件最好与该密封件一体成型，这样，该密封件和连接元件就可用合成橡胶借助喷射成型在一个共同的制作方法中制成。
该密封件优先做成板形并紧贴在空心型材的一端上，用盖把它压紧。这种板形的密封件具有至少一个凸起部，该凸起部构成连接元件并弹性地接触比例尺。
分度尤其被设计成可用于光电扫描并由在测量方向相隔一定间隔布置的用导电材料制作的标记组成，这些标记在比例尺的整个导电涂层上相互电连接。该涂层一直延伸到空心型材的两端并构成放电元件，在该处，放电元件与连接元件电连接。
密封件材料的弹性性能通过本发明以有利的方式附加地用于比例尺放电元件的弹性接触。通过密封件的材料也用导电的材料，确保了放电元件的良好的电接触以及与至少一个外壳部分即空心型材和盖的电连接。至少这个外壳部分是为了与基准电位产生电接触成为可能，所以该外壳部分优先用导电材料制成，以便在安装到机床上时与机床产生电接触并由此只通过例如螺丝安装上即可与基准电位连接。
附图说明
下面结合实施例来详细说明本发明。
其中，附图表示：
图1组装之前的长度测量装置；
图2组装完成状态内的图1长度测量装置的视图；
图3该长度测量装置的比例尺的俯视图。
具体实施方式
本发明借助于光电长度测量装置来进行详细说明。这种长度测量装置由在测量方向X内可进行相对运动的基本部件比例尺1和扫描装置组成。扫描装置在位置测量时扫描比例尺1的分度11并从中得出位置测量值。由于本发明不涉及扫描装置，为清晰起见，在附图中未示出它。
为了进行分度11的光电扫描，这些分度用涂层形式的不透明标记111、112(图3)制成，而比例尺1则用透明的材料制成。此外，比例尺1用电绝缘材料尤其是用玻璃或微晶玻璃制成，其上镀覆分度11。
比例尺1放置在保护外壳中，该外壳由一个在测量方向X内延伸的空心型材21组成，空心型材21具有密封唇3，通过后者以熟知的方式卡上一个卡头来固定扫描装置。空心型材21的两端分别用盖22密封。在空心型材21和盖22之间放一个密封件4。
比例尺1放置在空心型材21的内部并用弹性粘结层12固定。所以比例尺1在温度变化时几乎可以自由膨胀而与空心型材21无关。
由于例如外电场或扫描装置用辊或滑块在比例尺1上进行导向的各种影响，可能引起比例尺1的表面充电，从而相对于长度测量装置的其他导电部分尤其是相对于到比例尺1很小距离进行导向的扫描装置产生电位差。这种电位差可导致脉冲式放电，这种放电叠加电扫描信号，从而导致测量误差。
为了把比例尺1表面的这种充电尽可能导出比例尺1的整个长度，最好在比例尺1的表面设置一个伸展比例尺1的整个长度的放电元件13。放电元件13最好是在比例尺1表面上用导电材料涂覆的一层在测量方向X内连续贯通的镀层。其中，分度11和构成放电元件13的镀层用共同的镀膜方法镀覆在比例尺1的表面。如果分度11做成导电膜的形式，则该镀层相互电连接分度11的单个标记111、112，并至少延伸到比例尺11的两端之一。另一种或附加的方案-如图3所示-是，与分度11隔开的并相隔一定距离的放电元件13可用导电材料制成在分度11旁边沿测量方向X延伸的条的形式。
另一种方案是，放电元件13可以是一条滚压到比例尺1的表面的或与比例尺表面紧密接触的金属条。
也可不用金属层而按未示出的方式用一层电透明层来构成放电元件13。其优点是，这层透明层在光学上不干扰分度11的标记111、112，并因而可大面积地镀覆-尤其是蒸镀-在标记111、112的上面或下面。
导电连接元件41就这样接触放电元件13即导电层，并由此与外壳即外壳部分空心型材21和/或盖22建立电连接。这个外壳部分空心型材21和/或盖22是导电的，特别是用导电金属例如铝或钢制成。由于外壳和扫描装置在测量过程中通常是安装在机床的导电部件上，所以在安装好的状态中，外壳像扫描装置那样与相同的基准电位连接，因而不会产生电位差。
导电连接元件41是密封地嵌在空心型材21和盖22之间的密封件4的组成部分。密封件4布置在空心型材21的端面和盖22之间并密封空心型材21的端面。而盖22则用螺钉5拧紧在空心型材21上并把密封件4挤压到空心型材21的端面。为此，密封件4设计成板形，从而可在端部区域紧贴在空心型材21上。密封件4的其他区域则具有凸起部，该凸起部构成连接元件41，以便弹性地接触比例尺1的放电元件13。特别如图2所示，该凸起部在安装时紧贴到作为导电层构成的放电元件13上。通过这种弹性结构，确保了可靠的机械接触和电接触。
特别是例如丁二烯-丙烯腈橡胶(NBR)、乙烯-丙烯三聚物橡胶(EPDM)或乙烯腈-2-氯乙烯醚橡胶(ACM)这类导电的合成橡胶适合作密封件4及其上构成整体的尤其是通过喷射成型的连接元件41的材料。这类合成橡胶由于导电填料尤其是碳基填料而具有优异的电导率。
图3表示比例尺1的放大俯视图。分度11在此例中由一个带有等距离标记111序列的增量标量和一个位于旁边的带不规则排列的另一个标记112的绝对标量组成。标记111和112都由一层导电材料例如铬层组成并借助作为导电层构成的放电元件13相互电连接。另一种或补充的方案是，作为放电元件13可以是在分度11旁边并与之相隔一定距离布置的条形式的层，如图3所示。连接元件41连接放电元件13即连接至少一层在测量方X内延伸的导电层并因此建立与基准电位的导电连接。
如图3所示，用本发明构成的连接元件41可实现相当宽的分度11的电接触。合成橡胶最佳地匹配比例尺1并补偿误差，保证了可靠的接触。此外，合成橡胶具有这样的特性，即使在振动时也能保持接触，而不引起作为层构成的放电元件13的磨损。
Claims (5)
1.长度测量装置，包括：
一个由延伸的空心型材(21)和至少一个布置在其端部的盖(22)组成的外壳；
一个由非导电材料制成的、布置在该外壳内并具有分度(11)的比例尺(1)，该分度可由一个在测量方向(X)内相对于该外壳运动的扫描装置进行扫描；
一个镀覆在比例尺(1)上并在测量方向(X)内延伸的用导电材料制成的放电元件(13)；
一个在放电元件(13)与至少一个外壳部分即空心型材(21)和盖(22)之间建立电连接的导电连接元件(41)；
其特征为，
导电连接元件(41)是密封件(4)的组成部分，该密封件密封地布置在空心型材(21)和盖(22)之间，
其中，密封件(4)做成板形并紧贴在空心型材(21)的一端上，且具有至少一个凸起部，该凸起部构成连接元件(41)并弹性地接触放电元件(13)。
2.按权利要求1的长度测量装置，其特征为，连接元件(41)一体成型在密封件(4)上，且连接元件(41)和密封件(4)共同用一种导电的合成橡胶制成。
3.按前述权利要求任一项的长度测量装置，其特征为，放电元件(13)是一层镀覆在比例尺(1)上的导电层。
4.按权利要求1的长度测量装置，其特征为，分度(11)由在测量方向(X)内相隔一定距离布置的用导电材料制作的标记(111，112)组成，这些标记通过构成放电元件(13)的一层导电层相互电连接，其中，连接元件(41)接触该导电层。
5.按权利要求1的长度测量装置，其特征为，比例尺(1)用透明的材料制成，分度(11)以不透明的标记(111、112)的形式镀覆在比例尺上。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102009043293A DE102009043293A1 (de) | 2009-09-29 | 2009-09-29 | Längenmesseinrichtung |
| DE102009043293.0 | 2009-09-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102029552A CN102029552A (zh) | 2011-04-27 |
| CN102029552B true CN102029552B (zh) | 2015-11-25 |
Family
ID=43480842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010298542.3A Active CN102029552B (zh) | 2009-09-29 | 2010-09-29 | 长度测量装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8234792B2 (zh) |
| EP (1) | EP2306157B1 (zh) |
| JP (1) | JP5449101B2 (zh) |
| CN (1) | CN102029552B (zh) |
| DE (1) | DE102009043293A1 (zh) |
| ES (1) | ES2641457T3 (zh) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2533018B1 (de) * | 2011-06-10 | 2014-05-07 | Schneeberger Holding AG | Lineares Wegmesssystem |
| DE102012203193A1 (de) * | 2012-03-01 | 2013-09-05 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
| DE102012203220A1 (de) * | 2012-03-01 | 2013-09-05 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
| JP6300431B2 (ja) * | 2012-04-27 | 2018-03-28 | キヤノン株式会社 | エンコーダ、レンズ装置、および、カメラ |
| JP6225078B2 (ja) * | 2014-07-10 | 2017-11-01 | オークマ株式会社 | リニアエンコーダ |
| US9739642B2 (en) | 2015-04-24 | 2017-08-22 | Mitutoyo Corporation | Encoder scale and manufacturing and attaching method thereof |
| CN105033861B (zh) * | 2015-07-09 | 2017-10-24 | 江门市亚泰机电科技有限公司 | 一种行程检测装置 |
| ES2701307T3 (es) | 2016-06-07 | 2019-02-21 | Heidenhain Gmbh Dr Johannes | Medida materializada así como dispositivo de medición de posición |
| EP3276310B1 (de) * | 2016-07-27 | 2018-09-19 | Dr. Johannes Heidenhain GmbH | Längenmesseinrichtung |
| EP3290871B1 (en) | 2016-09-01 | 2019-01-09 | KappaSense Ltd | Linear encoder |
| ES2700616T3 (es) * | 2016-09-12 | 2019-02-18 | Heidenhain Gmbh Dr Johannes | Dispositivo de medición de longitud y procedimiento para su montaje |
| US10077841B2 (en) * | 2016-09-13 | 2018-09-18 | KappaSense Ltd. | Linear encoder with improved sealing |
| ES2956874T3 (es) * | 2020-04-29 | 2023-12-29 | Heidenhain Gmbh Dr Johannes | Dispositivo de medición de posición |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5832616A (en) * | 1996-11-11 | 1998-11-10 | Dr. Johannes Heindenhain Gmbh | Length measuring device and method of mounting a length measuring device |
| CN1536339A (zh) * | 2003-04-11 | 2004-10-13 | Լ����˹���Ǻ�����ʿ�ɷ�����˾ | 位置测量装置 |
| CN101316461A (zh) * | 2007-06-01 | 2008-12-03 | 财团法人工业技术研究院 | 微机电系统麦克风封装体及其封装组件 |
| CN101344380A (zh) * | 2007-07-10 | 2009-01-14 | 约翰尼斯海登海恩博士股份有限公司 | 长度测量装置 |
| CN101349534A (zh) * | 2007-07-19 | 2009-01-21 | 约翰尼斯海登海恩博士股份有限公司 | 长度测量装置 |
| CN101387509A (zh) * | 2007-09-15 | 2009-03-18 | 约翰尼斯海登海恩博士股份有限公司 | 长度测量装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3708681A (en) * | 1971-04-01 | 1973-01-02 | Dynamics Res Corp | Position and velocity sensor |
| US3816002A (en) * | 1972-10-10 | 1974-06-11 | H Wieg | Apparatus for measuring displacement between two relatively movable members |
| US4586260A (en) * | 1984-05-29 | 1986-05-06 | The L. S. Starrett Company | Capacitive displacement measuring instrument |
| DE4333651A1 (de) * | 1993-10-02 | 1995-04-06 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
| DE19746532A1 (de) | 1996-04-26 | 1999-04-29 | Heidenhain Gmbh Dr Johannes | Lichtelektrische Positionsmeßeinrichtung |
| DE29624420U1 (de) * | 1996-04-26 | 2003-05-15 | Dr. Johannes Heidenhain Gmbh, 83301 Traunreut | Lichtelektrische Positionsmeßeinrichtung |
| DE19616707A1 (de) * | 1996-04-26 | 1997-10-30 | Heidenhain Gmbh Dr Johannes | Lichtelektrische Positionsmeßeinrichtung |
| DE19922363A1 (de) * | 1999-05-14 | 2000-11-23 | Rexroth Star Gmbh | Einrichtung zur Ermittlung der Relativposition zweier relativ zueinander beweglicher Körper und Verfahren zur Herstellung einer solchen Einrichtung |
| DE102005043433A1 (de) * | 2005-09-13 | 2007-03-15 | Dr. Johannes Heidenhain Gmbh | Abtasteinheit einer optischen Positionsmesseinrichtung und optische Positionsmesseinrichtung |
| US7596880B2 (en) * | 2005-09-13 | 2009-10-06 | Dr. Johannes Heidenhain Gmbh | Scanning unit of an optical position measuring device and optical position measuring device |
-
2009
- 2009-09-29 DE DE102009043293A patent/DE102009043293A1/de not_active Withdrawn
-
2010
- 2010-05-19 ES ES10163232.1T patent/ES2641457T3/es active Active
- 2010-05-19 EP EP10163232.1A patent/EP2306157B1/de active Active
- 2010-09-28 US US12/924,446 patent/US8234792B2/en active Active
- 2010-09-28 JP JP2010216383A patent/JP5449101B2/ja active Active
- 2010-09-29 CN CN201010298542.3A patent/CN102029552B/zh active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5832616A (en) * | 1996-11-11 | 1998-11-10 | Dr. Johannes Heindenhain Gmbh | Length measuring device and method of mounting a length measuring device |
| CN1536339A (zh) * | 2003-04-11 | 2004-10-13 | Լ����˹���Ǻ�����ʿ�ɷ�����˾ | 位置测量装置 |
| CN101316461A (zh) * | 2007-06-01 | 2008-12-03 | 财团法人工业技术研究院 | 微机电系统麦克风封装体及其封装组件 |
| CN101344380A (zh) * | 2007-07-10 | 2009-01-14 | 约翰尼斯海登海恩博士股份有限公司 | 长度测量装置 |
| CN101349534A (zh) * | 2007-07-19 | 2009-01-21 | 约翰尼斯海登海恩博士股份有限公司 | 长度测量装置 |
| CN101387509A (zh) * | 2007-09-15 | 2009-03-18 | 约翰尼斯海登海恩博士股份有限公司 | 长度测量装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102029552A (zh) | 2011-04-27 |
| EP2306157B1 (de) | 2017-09-06 |
| JP5449101B2 (ja) | 2014-03-19 |
| JP2011075557A (ja) | 2011-04-14 |
| EP2306157A3 (de) | 2017-04-12 |
| US8234792B2 (en) | 2012-08-07 |
| ES2641457T3 (es) | 2017-11-10 |
| EP2306157A2 (de) | 2011-04-06 |
| DE102009043293A1 (de) | 2011-03-31 |
| US20110072676A1 (en) | 2011-03-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102029552B (zh) | 长度测量装置 | |
| EP3401658B1 (en) | Temperature sensor | |
| US11422039B2 (en) | Sensor unit | |
| RU2011140014A (ru) | Емкостной сенсорный элемент, способ его изготовления и емкостное устройство обнаружения прикосновения | |
| CN106461476B (zh) | 具有弹性体的负荷传感器 | |
| US20140352429A1 (en) | Electrostatic capacitance fluid level sensor | |
| CN101849173A (zh) | 用于检测车辆的有雾气的窗户的设备 | |
| JP5819096B2 (ja) | 接触端子装置 | |
| JP6582249B2 (ja) | 静電検出センサ | |
| GB2406381B (en) | Sensors | |
| CN108168438B (zh) | 一种封闭式光栅 | |
| US12523544B2 (en) | Temperature measurement device | |
| US11243111B2 (en) | Integrated physiological signal detection sensor | |
| CN119394483B (zh) | 弹性体、多维力传感器及自动绑线方法 | |
| CN105827229A (zh) | 一种压力感应模组、压力感应系统及电子设备 | |
| CN207825467U (zh) | 3d打印头组件以及3d打印机 | |
| JP4691208B1 (ja) | 微小電流測定装置及び線間非接触電圧計測装置 | |
| CN209342126U (zh) | 一种传感器检测单元和金属外壳的连接结构 | |
| JP3060823U (ja) | 検出素子の構造 | |
| CN110542384A (zh) | 一种光栅尺 | |
| CN204184281U (zh) | 用于无接触地操作可调整的车辆部件的传感器模块 | |
| EP4628836A1 (en) | Normal interface surface mating sensor | |
| JP5912069B2 (ja) | 物理量センサ装置及びその製造方法 | |
| CN216350993U (zh) | 数据线生产用导电性检测装置 | |
| CN102828196A (zh) | 可测电解电压的水电解制氢塑料极框电极板及其制法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: German Te Rauen Rohit Applicant after: John Nei Si Heidenhain doctor company limited Address before: German Te Rauen Rohit Applicant before: Dr. Johannes Heidenhain GmbH |
|
| CB02 | Change of applicant information | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: APPLICANT; FROM: DR. JOHANNES HEIDENHAIN GMBH TO: HEIDENHAIN GMBH. DOCTOR JOHANNES |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |