CN102023620B - 用于对半导体制造工艺线中的机台采样率进行控制的方法 - Google Patents
用于对半导体制造工艺线中的机台采样率进行控制的方法 Download PDFInfo
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- CN102023620B CN102023620B CN2009101962648A CN200910196264A CN102023620B CN 102023620 B CN102023620 B CN 102023620B CN 2009101962648 A CN2009101962648 A CN 2009101962648A CN 200910196264 A CN200910196264 A CN 200910196264A CN 102023620 B CN102023620 B CN 102023620B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
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CN2009101962648A CN102023620B (zh) | 2009-09-22 | 2009-09-22 | 用于对半导体制造工艺线中的机台采样率进行控制的方法 |
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CN2009101962648A CN102023620B (zh) | 2009-09-22 | 2009-09-22 | 用于对半导体制造工艺线中的机台采样率进行控制的方法 |
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CN102023620A CN102023620A (zh) | 2011-04-20 |
CN102023620B true CN102023620B (zh) | 2012-10-31 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103219258B (zh) * | 2013-04-03 | 2015-11-25 | 无锡华润上华科技有限公司 | 晶圆缺陷抽样检测系统及其方法 |
CN103559566B (zh) * | 2013-06-04 | 2017-07-07 | 上海华力微电子有限公司 | 一种缺陷扫描结果控制制程机台的派工方法 |
CN103681402B (zh) * | 2013-11-29 | 2016-04-27 | 上海华力微电子有限公司 | 一种自动跳货检测系统 |
CN105549553B (zh) * | 2015-12-08 | 2018-06-26 | 成都海威华芯科技有限公司 | 生产机台的生产控制方法 |
CN108805302B (zh) * | 2018-06-14 | 2020-07-17 | 合肥工业大学 | 一种制造设备预测性维护方法及系统 |
CN109190822A (zh) * | 2018-09-03 | 2019-01-11 | 苏州通富超威半导体有限公司 | 机器维修控制系统及其方法、存储介质、终端 |
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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Effective date: 20121219 |
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Effective date of registration: 20121219 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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