CN102020426B - 一种太阳能级直拉硅单晶埚底料清洗方法 - Google Patents
一种太阳能级直拉硅单晶埚底料清洗方法 Download PDFInfo
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- CN102020426B CN102020426B CN2010106152512A CN201010615251A CN102020426B CN 102020426 B CN102020426 B CN 102020426B CN 2010106152512 A CN2010106152512 A CN 2010106152512A CN 201010615251 A CN201010615251 A CN 201010615251A CN 102020426 B CN102020426 B CN 102020426B
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CN2010106152512A CN102020426B (zh) | 2010-12-30 | 2010-12-30 | 一种太阳能级直拉硅单晶埚底料清洗方法 |
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CN102020426A CN102020426A (zh) | 2011-04-20 |
CN102020426B true CN102020426B (zh) | 2012-07-04 |
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CN102832101B (zh) * | 2011-06-13 | 2016-06-01 | 浙江昱辉阳光能源有限公司 | 晶体硅清洗方法 |
CN102671885B (zh) * | 2012-05-18 | 2014-04-02 | 宁夏隆基硅材料有限公司 | 去除单晶硅埚底料中石英的装置及其方法 |
CN102730699A (zh) * | 2012-06-14 | 2012-10-17 | 马鞍山明鑫光能科技有限公司 | 一种单多晶电池片回收片的清洗方法 |
CN104593773A (zh) * | 2015-02-06 | 2015-05-06 | 晶科能源有限公司 | 一种物料清洗装置和物料清洗方法 |
CN112538653A (zh) * | 2020-12-08 | 2021-03-23 | 江苏神汇新材料科技有限公司 | 一种用于在线清理单晶炉内杂质底料的方法 |
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JP2002009035A (ja) * | 2000-06-26 | 2002-01-11 | Toshiba Corp | 基板洗浄方法及び基板洗浄装置 |
JP2005327807A (ja) * | 2004-05-12 | 2005-11-24 | Sony Corp | 枚葉式洗浄装置及びその洗浄方法 |
CN100424234C (zh) * | 2005-07-19 | 2008-10-08 | 上海九晶电子材料股份有限公司 | 一种太阳能级硅单晶的制备方法 |
CN1947869B (zh) * | 2006-05-12 | 2010-05-12 | 浙江昱辉阳光能源有限公司 | 一种硅料清洁方法 |
CN101695697A (zh) * | 2009-09-30 | 2010-04-21 | 常州天合光能有限公司 | 一种冶金级硅料清洁方法 |
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