CN102013407A - Film-coating hook and silicon wafer loader adopting same - Google Patents
Film-coating hook and silicon wafer loader adopting same Download PDFInfo
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- CN102013407A CN102013407A CN2010101981618A CN201010198161A CN102013407A CN 102013407 A CN102013407 A CN 102013407A CN 2010101981618 A CN2010101981618 A CN 2010101981618A CN 201010198161 A CN201010198161 A CN 201010198161A CN 102013407 A CN102013407 A CN 102013407A
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- hook
- silicon chip
- silicon wafer
- film
- coupler body
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention relates to the technical field of coating process equipment in the solar photovoltaic industry, in particular to a film-coating hook and a silicon wafer loader adopting the same. The film-coating hook comprises a hook body, wherein the side part of the hook body is provided with a silicon wafer supporting body with a certain downward inclining angle, the silicon wafer supporting body is in contact with the edge of a silicon wafer; and the silicon wafer loader comprises a graphite frame and the hook, wherein the graphite frame is provided with a plurality of frame grids used for placing the silicon wafer, and the periphery of each frame grid is provided with a plurality of hooks. The hook is assembled on the silicon wafer loader and is in contact with the edge of the silicon wafer, which plays a role of supporting the silicon wafer, and the surface of the silicon waster, which needs coating a film, is not in contact with the hook, thus the hook mark is reduced to be in a minimum degree even through without generating a hook mark.
Description
Technical field
The present invention relates to photovoltaic industry coating process equipment technical field, relate in particular to plated film with hook and adopt the silicon chip slide glass device of this hook.
Background technology
All need plate the film that one deck plays antireflective and passivation double action at battery surface in the crystal silicon solar energy battery technology, because numerous superiority of back side coating film, existing battery process all has the back side coating film step.As shown in Figure 1, all be to adopt U or similar U type hook to support silicon chip now with slide glass device coupler body in the technology, because its coupler body surface roughness is easy to scrape stress and micro-crack on 150-200um battery sheet, produce fragment.Bill since because of its covering part molecule can't or difficult deposition, hook seal that forms with this hook plated film not only influences the outward appearance of battery sheet, forms color sheet, and can influence the Rsh of battery sheet, and then influence the yields of battery sheet.A kind of improvement hook is disclosed in the patent of invention of publication number CN101634017A, change its bill into cone, though reduced the area of hook support zone clad battery sheet, this technology still can't be avoided linking up with and the contacting of battery sheet sensitive surface, and can't avoid linking up with the generation of seal.And it is more sharp-pointed to support the silicon chip part, stabs PN junction easily, and produces fragmentation.
Summary of the invention
Technical problem to be solved by this invention is: a kind of novel hook is provided, reduces or avoid linking up with the generation of seal, colored film, improve the Rsh of battery, and then improve the yields of battery, reduce cost.
The technical solution adopted for the present invention to solve the technical problems is: a kind of plated film comprises coupler body with hook, has the silicon chip supporter that has certain downtilt angles, the EDGE CONTACT of silicon chip supporter and silicon chip at the sidepiece of coupler body.
The silicon chip supporter has two, lays respectively at the both sides of coupler body.
The coupler body both sides are two support arms that extend downwards, and the silicon chip supporter is arranged on the support arm.
The angle α of the supporting surface of silicon chip supporter and horizontal plane is 0~90 degree.
A kind of silicon chip slide glass device comprises graphite frame and hook, and the graphite frame has a plurality of sashes that are used to place silicon chip, and a plurality of hooks are set around each sash.
The invention has the beneficial effects as follows: 1) this hook is assembled on the slide glass device, the EDGE CONTACT of hook and silicon chip, play the effect of supporting silicon chip, silicon chip needs the face of plated film not contact with hook, even can not produce the hook seal thereby tong mark is reduced to minimum level; 2) because of in existing technology, metal grid lines influences the Rsh of battery thereby may overlap or partially overlap with the hook seal in the silk screen printing step process, influence the electrical property yield, the average Rsh value of battery can improve 10 at least behind enforcement the present invention, the electrical property yield improves 0.1%, thereby improved battery sheet outward appearance, reduced production cost.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1 is the hook schematic diagram in the existing technology;
Fig. 2 is first kind of hook schematic diagram of the present invention;
Fig. 3 is second kind of hook schematic diagram of the present invention;
Fig. 4 is the third hook schematic diagram of the present invention;
Fig. 5 is the Position Design schematic diagram of hook on the slide glass device among the present invention;
Among the figure: 1. coupler body, 1-1. support arm, 2. silicon chip supporter, 3. silicon chip, 4. graphite frame, 4-1. sash, 5. hook.
Embodiment
The present invention includes plated film with hook and adopt the silicon chip slide glass device of this hook.This plated film comprises coupler body 1 with hook, has the silicon chip supporter 2 that has certain downtilt angles at the sidepiece of coupler body 1, the EDGE CONTACT of silicon chip supporter 2 and silicon chip 1.Silicon chip supporter 2 has two, lays respectively at the both sides of coupler body 1.Coupler body 1 both sides are two support arm 1-1 that extend downwards, and silicon chip supporter 2 is arranged on the support arm 1-1.The angle α of the supporting surface of silicon chip supporter 2 and horizontal plane is 0~90 degree.The link position of support arm 1-1 and silicon chip supporter 2 can be from arbitrary position at bottom to the top of support arm 1-1, as Fig. 2, Fig. 3 and shown in Figure 4.The shape facility of whole hook can be circle, ellipse or polygon.The Position Design of hook 5 on the slide glass device is characterised in that center symmetry or axisymmetric a plurality of hook 5 are fixed on the slide glass device, and silicon chip can steadily be supported on the hook 5.
The structure of graphite frame 4 as shown in Figure 5, he is a tabular gridiron structure, equidistantly on plate-shaped frame is provided with 25 or 36 sash 4-1, is separated by rib between sash 4-1 and the sash 4-1.Sash 4-1 is used to place silicon chip, is provided with in four sides of each sash 4-1 to have center symmetry or axisymmetric a plurality of hook 5, is used to place silicon chip 1.Have centrosymmetric a plurality of hook 5 that is fixed on the graphite frame 4, can guarantee that silicon chip 3 does not tilt, and does not fall sheet.And in coating process, have only silicon chip 3 EDGE CONTACT hook 5, thereby being reduced to minimum level, tong mark even can not produce hook seal, colored film.The average Rsh value of battery can improve 10 at least behind enforcement the present invention, the electrical property yield improves at least 0.1%, and because of sensitive surface all can plate satisfactory film, battery efficiency also has the lifting about 0.01%, thereby improved battery sheet outward appearance, reduced production cost.
Claims (5)
1. a plated film comprises coupler body (1) with hook, and it is characterized in that: the sidepiece at described coupler body (1) has the silicon chip supporter (2) that has certain downtilt angles, the EDGE CONTACT of silicon chip supporter (2) and silicon chip (3).
2. plated film according to claim 1 is with linking up with, and it is characterized in that: described silicon chip supporter (2) has two, lays respectively at the both sides of coupler body (1).
3. plated film according to claim 2 is characterized in that with linking up with: described coupler body (1) both sides are two support arms (1-1) that extend downwards, and silicon chip supporter (2) is arranged on the support arm (1-1).
4. plated film according to claim 3 is characterized in that with linking up with: the supporting surface of described silicon chip supporter (2) and the angle α of horizontal plane are 0~90 degree.
5. silicon chip slide glass device that adopts claim 1,2,3 or 4 described hooks, it is characterized in that: comprise graphite frame (4) and hook (5), graphite frame (4) has a plurality of sashes (4-1) that are used to place silicon chip, and a plurality of hooks (5) are set around each sash (4-1).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2010101981618A CN102013407A (en) | 2010-06-10 | 2010-06-10 | Film-coating hook and silicon wafer loader adopting same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN2010101981618A CN102013407A (en) | 2010-06-10 | 2010-06-10 | Film-coating hook and silicon wafer loader adopting same |
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CN102013407A true CN102013407A (en) | 2011-04-13 |
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CN2010101981618A Pending CN102013407A (en) | 2010-06-10 | 2010-06-10 | Film-coating hook and silicon wafer loader adopting same |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102703876A (en) * | 2012-06-28 | 2012-10-03 | 无锡绿波新能源设备有限公司 | Anti-drop coating-under-slice stop piece |
CN102709400A (en) * | 2012-06-28 | 2012-10-03 | 无锡绿波新能源设备有限公司 | Piece falling prevention lower coating hook |
CN106756874A (en) * | 2015-11-24 | 2017-05-31 | 上海神舟新能源发展有限公司 | A kind of device and method for solving double-sided solar battery silicon nitride plated film around plating |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5681929A (en) * | 1979-12-10 | 1981-07-04 | Hitachi Ltd | Plasma processing device |
CN201032628Y (en) * | 2007-01-29 | 2008-03-05 | 刘卓 | Carrier for silicon slice production |
CN201132851Y (en) * | 2007-11-13 | 2008-10-15 | 常州天合光能有限公司 | Hook of CVD film-plating machine |
-
2010
- 2010-06-10 CN CN2010101981618A patent/CN102013407A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5681929A (en) * | 1979-12-10 | 1981-07-04 | Hitachi Ltd | Plasma processing device |
CN201032628Y (en) * | 2007-01-29 | 2008-03-05 | 刘卓 | Carrier for silicon slice production |
CN201132851Y (en) * | 2007-11-13 | 2008-10-15 | 常州天合光能有限公司 | Hook of CVD film-plating machine |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102703876A (en) * | 2012-06-28 | 2012-10-03 | 无锡绿波新能源设备有限公司 | Anti-drop coating-under-slice stop piece |
CN102709400A (en) * | 2012-06-28 | 2012-10-03 | 无锡绿波新能源设备有限公司 | Piece falling prevention lower coating hook |
CN102709400B (en) * | 2012-06-28 | 2015-02-04 | 无锡绿波新能源设备有限公司 | Piece falling prevention lower coating hook |
CN106756874A (en) * | 2015-11-24 | 2017-05-31 | 上海神舟新能源发展有限公司 | A kind of device and method for solving double-sided solar battery silicon nitride plated film around plating |
CN106756874B (en) * | 2015-11-24 | 2018-12-18 | 上海神舟新能源发展有限公司 | It is a kind of solve double-sided solar battery silicon nitride plated film around plating device and method |
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Application publication date: 20110413 |