CN203179852U - Bidirectionally-used graphite boat - Google Patents
Bidirectionally-used graphite boat Download PDFInfo
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- CN203179852U CN203179852U CN 201320012481 CN201320012481U CN203179852U CN 203179852 U CN203179852 U CN 203179852U CN 201320012481 CN201320012481 CN 201320012481 CN 201320012481 U CN201320012481 U CN 201320012481U CN 203179852 U CN203179852 U CN 203179852U
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- graphite boat
- boat
- bidirectionally
- graphite
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Abstract
A bidirectionally-used graphite boat comprises boat pieces arranged in array. The silicon chip sites and electrode slices are arranged on the boat pieces. Ceramic rods penetrate through the boat pieces. Left and right sides of the graphite boat are both provided with upper electrode holes and lower electrode holes which are connected with the electrode slices. The bidirectionally-used graphite boat provided by the utility model has characteristics of symmetrical structure, novel design and strong exploitativeness, and is convenient and reliable. Due to the upper and lower electrode holes which are symmetrically designed at two sides of the graphite boat, coating abnormality or coating failure caused by reverse installation of the graphite boat can be avoided. Irrespective of right or back side of the improved graphite boat, potential hidden danger of failure is eliminated, and qualified rate of the plated film product is raised. According to the utility model, poor coating caused by reverse installation of the graphite boat can be reduced, production cost is decreased to some extent, production efficiency is raised, and the bidirectionally-used graphite boat has good economic benefits and popularization value.
Description
Technical field
The utility model relates to a kind of frock clamp of producing solar cell, especially relates to a kind of graphite boat that can two-way use.
Background technology
Solar cell is called solar chip or photocell again, it is a kind of optoelectronic semiconductor thin slice that utilizes the sunlight direct generation of electricity, as long as the knot of the P-N on its silicon chip is arrived by solar irradiation, form new hole-duplet, under P-N knot effect of electric field, third contact of a total solar or lunar eclipse hole flows to the N district by the P district, electronics flows to the P district by the N district, connecting circuit has the formation electric current, is called photovoltaic in physics, is called for short photovoltaic.Silicon chip generally need pass through operations such as chemical cleaning, surface corrosion, diffusion knot processed, trimming, removal back of the body knot, making upper/lower electrode, surface plating antireflective film just can make solar cell.
In the solar cell preparation process, the plating antireflective film mostly adopts PECVD(plasma enhanced chemical vapor deposition method), it is to make the gas ionization that contains the film composed atom by microwave or radio frequency etc., form plasma in the part, active very strong plasma forms film in the silicon chip deposition.The slide glass device that plated film adopts is called graphite boat (as shown in Figure 1), the graphite boat that needs plated film in sending into the PECVD pipe after, the electrode of PECVD back can be inserted in two electrode holes of graphite boat back and switch on, and then carries out the plated film of silicon chip surface.In the actual coating operation, if counter the sending in the PECVD stove of direction dress with graphite boat, because the PECVD electrode does not insert graphite boat, can cause normally problem such as plated film or plated film failure because switching on, handling abnormal products need do over again, not only cause production cost to increase, also reduced production capacity.
Summary of the invention
The utility model purpose provides a kind of graphite boat that can two-way use, with solve in the prior art graphite boat have only a side be provided with electrode hole, misoperation may cause can't plated film or plated film failure, plated film failure product is done over again can increase enterprise's production cost, reduce problems such as production capacity.
In order to solve the problems of the technologies described above, the technical solution adopted in the utility model is: a kind of graphite boat that can two-way use, comprise the boat sheet that array arranges, described boat sheet is provided with silicon slice placed set and electrode slice, all places the fixedly ceramic rod of boat sheet on each boat sheet; The graphite boat left and right sides is provided with top electrode hole, the bottom electrode hole that is connected with electrode slice.
As preferably, described silicon slice placed set arranges horizontal by the inclination angle.
As preferably, also be arranged with porcelain bushing on the ceramic rod between the described adjacent boat sheet.
The utlity model has symmetrical configuration, modern design, convenient and reliable, characteristics that exploitativeness is strong, the top electrode hole of graphite boat left and right sides symmetric design and bottom electrode hole can be avoided adorning the anti-ballistic normally plated film that causes or plated film failure because of the graphite boat direction, graphite boat after the improvement is regardless of positive and negative, eliminate potential inefficacy hidden danger, improved the qualification rate of plated film product.The utility model can reduce that to adorn the anti-ballistic plated film that causes bad because of graphite boat, has reduced production cost to a certain extent, and raising rate production efficiency has good economic benefits and promotional value.
Description of drawings
Fig. 1 is the existing one-sided structural representation that is provided with the graphite boat of electrode hole;
Fig. 2 is structural representation of the present utility model;
Fig. 3 is the right view of Fig. 2.
Embodiment
Below in conjunction with the drawings and specific embodiments, the technical solution of the utility model is described in further detail.
Fig. 2 is structural representation of the present utility model, the right view of Fig. 3 Fig. 2.As seen from the figure, the graphite boat that this can two-way use comprises the boat sheet 1 that array arranges, and described boat sheet 1 is provided with silicon slice placed set 2 and electrode slice 11, and silicon slice placed set 2 arranges horizontal by the inclination angle.All place the fixedly ceramic rod 3 of boat sheet 1 on each boat sheet 1, also be arranged with porcelain bushing 4 on the ceramic rod 3 between the adjacent boat sheet 1, porcelain bushing 4 can guarantee that each boat sheet 1 spacing is even.The graphite boat left and right sides is provided with top electrode hole 5, the bottom electrode hole 6 that is connected with electrode slice 11.
This can two-way use graphite boat when using, earlier silicon chip is placed in the silicon slice placed set 2, then graphite boat is put into the process cavity of PECVD filming equipment, because the graphite boat both sides are provided with upper and lower electrode hole (5,6), so need not consider the positive and negative of graphite boat.Feed question response gas after the filming equipment inner vacuumization, question response gas forms plasma under the effect of microwave or radio frequency, after silicon chip deposits desired film, reaches certain thickness, namely finished the plated film operation of silicon chip.
At last, should be pointed out that above embodiment only is the more representational example of the utility model.Obviously, the utility model is not limited to above-mentioned embodiment, and many distortion can also be arranged.Any simple modification, equivalent variations and modification that every foundation technical spirit of the present utility model is done above embodiment all should be thought to belong to protection range of the present utility model.
Claims (3)
- One kind can two-way use graphite boat, comprise the boat sheet that array arranges, it is characterized in that described boat sheet is provided with silicon slice placed set and electrode slice, all place the fixedly ceramic rod of boat sheet on each boat sheet; The graphite boat left and right sides is provided with top electrode hole, the bottom electrode hole that is connected with electrode slice.
- 2. a kind of graphite boat that can two-way use according to claim 1 is characterized in that described silicon slice placed set arranges horizontal by the inclination angle.
- 3. a kind of graphite boat that can two-way use according to claim 1 is characterized in that also being arranged with porcelain bushing on the ceramic rod between the described adjacent boat sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320012481 CN203179852U (en) | 2013-01-10 | 2013-01-10 | Bidirectionally-used graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320012481 CN203179852U (en) | 2013-01-10 | 2013-01-10 | Bidirectionally-used graphite boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203179852U true CN203179852U (en) | 2013-09-04 |
Family
ID=49076515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320012481 Expired - Fee Related CN203179852U (en) | 2013-01-10 | 2013-01-10 | Bidirectionally-used graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203179852U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111979531A (en) * | 2020-08-20 | 2020-11-24 | 江西展宇新能科技有限公司 | Method for prolonging service life of graphite boat |
-
2013
- 2013-01-10 CN CN 201320012481 patent/CN203179852U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111979531A (en) * | 2020-08-20 | 2020-11-24 | 江西展宇新能科技有限公司 | Method for prolonging service life of graphite boat |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: HUBEI TRINA SOLAR CO., LTD. Free format text: FORMER NAME: HUBEI HONGYUAN PHOTOVOLTAIC TECHNOLOGY CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 433000, No. 1, Liu Mao Industrial Park, Hubei, Xiantao Patentee after: HUBEI TIANHE OPTICAL ENERGY CO., LTD. Address before: 433000, Hubei province directly under the administrative unit of Xiantao Liu Industrial Park Road 1 Patentee before: Hubei Hongyuan Photovoltaic Technology Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130904 Termination date: 20210110 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |