CN101997016B - 具有含多个沟道子区域的传输栅极的图像传感器 - Google Patents
具有含多个沟道子区域的传输栅极的图像传感器 Download PDFInfo
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- CN101997016B CN101997016B CN201010250961.XA CN201010250961A CN101997016B CN 101997016 B CN101997016 B CN 101997016B CN 201010250961 A CN201010250961 A CN 201010250961A CN 101997016 B CN101997016 B CN 101997016B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/14612—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor
- H01L27/14616—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor characterised by the channel of the transistor, e.g. channel having a doping gradient
Abstract
Description
Claims (18)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US23236909P | 2009-08-07 | 2009-08-07 | |
US61/232,369 | 2009-08-07 | ||
US12/710,267 US20110032405A1 (en) | 2009-08-07 | 2010-02-22 | Image sensor with transfer gate having multiple channel sub-regions |
US12/710,267 | 2010-02-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101997016A CN101997016A (zh) | 2011-03-30 |
CN101997016B true CN101997016B (zh) | 2013-03-27 |
Family
ID=42751793
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010250961.XA Active CN101997016B (zh) | 2009-08-07 | 2010-08-09 | 具有含多个沟道子区域的传输栅极的图像传感器 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20110032405A1 (zh) |
EP (1) | EP2282345B1 (zh) |
CN (1) | CN101997016B (zh) |
TW (1) | TWI416718B (zh) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5151375B2 (ja) * | 2007-10-03 | 2013-02-27 | ソニー株式会社 | 固体撮像装置およびその製造方法および撮像装置 |
US8441052B2 (en) * | 2009-10-21 | 2013-05-14 | Hiok Nam Tay | Color-optimized image sensor |
JP2011114292A (ja) * | 2009-11-30 | 2011-06-09 | Sony Corp | 固体撮像素子及びその製造方法、並びに撮像装置、並びに半導体素子及びその製造方法 |
TWI450389B (zh) * | 2011-06-21 | 2014-08-21 | Himax Imaging Inc | 背照式照明影像感測器以及製造背照式照明影像感測器之方法 |
JP2013012551A (ja) * | 2011-06-28 | 2013-01-17 | Sony Corp | 固体撮像装置、固体撮像装置の製造方法、及び電子機器 |
JP5508356B2 (ja) * | 2011-07-26 | 2014-05-28 | シャープ株式会社 | 固体撮像装置およびその駆動方法、固体撮像装置の製造方法、並びに電子情報機器 |
US9698185B2 (en) | 2011-10-13 | 2017-07-04 | Omnivision Technologies, Inc. | Partial buried channel transfer device for image sensors |
US8716768B2 (en) * | 2011-10-20 | 2014-05-06 | Omnivision Technologies, Inc. | Transistor with self-aligned channel width |
US8652868B2 (en) * | 2012-03-01 | 2014-02-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Implanting method for forming photodiode |
US8889461B2 (en) * | 2012-05-29 | 2014-11-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | CIS image sensors with epitaxy layers and methods for forming the same |
US8581307B1 (en) * | 2012-07-06 | 2013-11-12 | Omnivision Technologies, Inc. | Large CMOS image sensor pixel with improved performance |
US8809925B2 (en) * | 2012-10-11 | 2014-08-19 | Omnivision Technologies, Inc. | Partial buried channel transfer device in image sensors |
US8816415B2 (en) | 2012-11-29 | 2014-08-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photodiode with concave reflector |
US8921187B2 (en) * | 2013-02-26 | 2014-12-30 | Omnivision Technologies, Inc. | Process to eliminate lag in pixels having a plasma-doped pinning layer |
JP2014199898A (ja) * | 2013-03-11 | 2014-10-23 | ソニー株式会社 | 固体撮像素子および製造方法、並びに、電子機器 |
US9025266B2 (en) * | 2013-06-14 | 2015-05-05 | Rohm Co., Ltd. | Semiconductor integrated circuit device, magnetic disk storage device, and electronic apparatus |
CN103346162B (zh) * | 2013-07-03 | 2015-10-28 | 豪威科技(上海)有限公司 | 背照式cmos影像传感器及其制造方法 |
US9054007B2 (en) * | 2013-08-15 | 2015-06-09 | Omnivision Technologies, Inc. | Image sensor pixel cell with switched deep trench isolation structure |
CN103996688B (zh) * | 2014-06-16 | 2017-01-11 | 北京思比科微电子技术股份有限公司 | 图像传感器及其像素及其工作方法 |
US9591247B2 (en) | 2014-12-22 | 2017-03-07 | Google Inc. | Image sensor having an extended dynamic range upper limit |
FR3046495B1 (fr) * | 2015-12-30 | 2018-02-16 | Stmicroelectronics (Crolles 2) Sas | Pixel de detection de temps de vol |
TWI585962B (zh) * | 2016-04-18 | 2017-06-01 | 恆景科技股份有限公司 | 互補金屬氧化物半導體影像感測器及形成方法 |
US10672824B2 (en) * | 2016-11-30 | 2020-06-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Image sensor |
US20180294304A1 (en) * | 2017-04-05 | 2018-10-11 | Semiconductor Components Industries, Llc | Image sensors with vertically stacked photodiodes and vertical transfer gates |
JP2019176089A (ja) * | 2018-03-29 | 2019-10-10 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置、および電子機器 |
CN109216393B (zh) * | 2018-10-31 | 2023-05-19 | 锐芯微电子股份有限公司 | Cmos-tdi图像传感器及其形成方法 |
US20210399029A1 (en) * | 2018-11-06 | 2021-12-23 | Sony Semiconductor Solutions Corporation | Imaging element and electronic equipment |
KR20200085983A (ko) * | 2019-01-07 | 2020-07-16 | 삼성전자주식회사 | 이미지 센서 및 이의 제조 방법 |
US11121169B2 (en) * | 2019-06-25 | 2021-09-14 | Omnivision Technologies, Inc. | Metal vertical transfer gate with high-k dielectric passivation lining |
CN110797368A (zh) * | 2019-12-10 | 2020-02-14 | 上海微阱电子科技有限公司 | 图像传感器单元及其制备方法 |
US11282890B2 (en) * | 2020-01-21 | 2022-03-22 | Omnivision Technologies, Inc. | Shallow trench isolation (STI) structure for suppressing dark current and method of forming |
CN114335045B (zh) * | 2022-03-10 | 2022-06-03 | 合肥晶合集成电路股份有限公司 | 一种降低cmos图像传感器暗电流的方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101459188A (zh) * | 2008-12-25 | 2009-06-17 | 北京思比科微电子技术有限公司 | 像素单元的fd有源区结构及其制备方法及cmos图像传感器 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7078746B2 (en) * | 2003-07-15 | 2006-07-18 | Micron Technology, Inc. | Image sensor with floating diffusion gate capacitor |
JP2005217302A (ja) * | 2004-01-30 | 2005-08-11 | Sony Corp | 固体撮像装置 |
US20050274988A1 (en) * | 2004-06-01 | 2005-12-15 | Hong Sungkwon C | Imager with reflector mirrors |
US7259413B2 (en) * | 2004-09-28 | 2007-08-21 | Micron Technology, Inc. | High dynamic range image sensor |
KR100606910B1 (ko) * | 2004-12-29 | 2006-08-01 | 동부일렉트로닉스 주식회사 | Cmos 이미지 센서 및 그의 제조 방법 |
US20070267690A1 (en) * | 2006-05-19 | 2007-11-22 | Ho-Yuan Yu | DMOSFET with current injection |
US20080179369A1 (en) * | 2006-11-02 | 2008-07-31 | John Marques | Paintball pod belt |
US7528427B2 (en) * | 2007-01-30 | 2009-05-05 | International Business Machines Corporation | Pixel sensor cell having asymmetric transfer gate with reduced pinning layer barrier potential |
KR100880528B1 (ko) * | 2007-06-01 | 2009-01-28 | 매그나칩 반도체 유한회사 | Cmos 이미지 센서 |
-
2010
- 2010-02-22 US US12/710,267 patent/US20110032405A1/en not_active Abandoned
- 2010-06-28 EP EP10251166.4A patent/EP2282345B1/en active Active
- 2010-06-28 TW TW099121107A patent/TWI416718B/zh active
- 2010-08-09 CN CN201010250961.XA patent/CN101997016B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101459188A (zh) * | 2008-12-25 | 2009-06-17 | 北京思比科微电子技术有限公司 | 像素单元的fd有源区结构及其制备方法及cmos图像传感器 |
Also Published As
Publication number | Publication date |
---|---|
US20110032405A1 (en) | 2011-02-10 |
TW201112413A (en) | 2011-04-01 |
EP2282345A2 (en) | 2011-02-09 |
EP2282345A3 (en) | 2012-06-20 |
EP2282345B1 (en) | 2014-04-09 |
TWI416718B (zh) | 2013-11-21 |
CN101997016A (zh) | 2011-03-30 |
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