CN101954790B - Cleaning unit, treatment solution coating apparatus having the same and cleaning method using the same - Google Patents
Cleaning unit, treatment solution coating apparatus having the same and cleaning method using the same Download PDFInfo
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- CN101954790B CN101954790B CN2010102296026A CN201010229602A CN101954790B CN 101954790 B CN101954790 B CN 101954790B CN 2010102296026 A CN2010102296026 A CN 2010102296026A CN 201010229602 A CN201010229602 A CN 201010229602A CN 101954790 B CN101954790 B CN 101954790B
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- scraper plate
- fixed part
- treatment fluid
- face
- fixed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
- B41J2/16517—Cleaning of print head nozzles
- B41J2/16535—Cleaning of print head nozzles using wiping constructions
- B41J2/16538—Cleaning of print head nozzles using wiping constructions with brushes or wiper blades perpendicular to the nozzle plate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
- B41J2/16517—Cleaning of print head nozzles
- B41J2/16552—Cleaning of print head nozzles using cleaning fluids
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
- B41J2/16517—Cleaning of print head nozzles
- B41J2/16552—Cleaning of print head nozzles using cleaning fluids
- B41J2002/16558—Using cleaning liquid for wet wiping
Abstract
The invention provides a cleaning unit, a treatment solution coating apparatus having the same and a cleaning method using the same. The cleaning unit is provided with a scraping plate and a fixed component. The scraping plate is plate-shaped for scraping treatment fluid remained on a treatment fluid ejecting surface of a nozzle ejecting the treatment fluid. The fixed component is connected with the scraping plate and is used for fixing the position of the scraping plate. The scraping plate is plate-shaped with an easily-changed shape, and the contact area of between the scraping plate and the treatment fluid remained on the ejecting surface is least. Thus, the cleaning unit can improve the cleaning efficiency and reduce the production cost.
Description
Technical field
The present invention relates to the treatment fluid applying device at the ink-jetting style of substrate coating liquid, in more detail, relate to the nozzle of cleaning ejection treatment fluid cleaning unit, have its treatment fluid applying device and utilize its cleaning method.
Background technology
The liquid crystal indicator of show image by evaporation multiple film two substrates and be clipped in two liquid crystal layers between the substrate and consist of.Usually, because the film that forms at each substrate has the pattern of various shape, so in order to guarantee the precision of pattern, form by evaporation operation and photo-mask process.In order to form in this wise a film, owing to utilize the photo-mask process that uses expensive mask, so improved manufacturing cost, increased the time of manufacturing process.
Recently, the scheme of instead such film forming method has been used the film forming method that utilizes the inkjet printing mode.The inkjet printing mode is owing to the ad-hoc location coating liquid at substrate forms film, so do not need other etching work procedure.Such inkjet printing mode can be used in the colored filter that forms liquid crystal indicator or oriented film etc.
Usually, inkjet-printing device has at the shower nozzle of substrate coating liquid and the first cleaning unit and second cleaning unit of cleaning shower nozzle.Shower nozzle have the ejection liquid a plurality of nozzles, liquid medicine coating on the ad-hoc location of substrate.Usually, the viscosity of the liquid that uses in inkjet-printing device is high, high volatility, solidifies easily.Particularly behind the coating liquid, liquid can remain in around the ejiction opening of nozzle, such residual liquor be set in ejiction opening around, ejiction opening that can plug nozzle perhaps when after this applying liquid, is coated on the substrate, thereby forms inhomogeneous film.
In order to prevent this situation, the first cleaning unit and the second cleaning unit clean a plurality of nozzles, thereby improve the yield rate of product.The first cleaning unit is wiped the liquid of the liquid medicine jet that remains in shower nozzle on appearing off, thereby removes the liquid of above-mentioned liquid medicine jet on appearing for the first time, and the second cleaning unit is appeared with the mode wiping liquid medicine jet of physics, removes the liquid of liquid medicine jet on appearing.Specifically, the first cleaning unit has scraper plate, and the liquid on scraper plate is appeared liquid medicine jet is wiped off.The second cleaning unit has polishing piece, and polishing piece contacts with liquid medicine jet, wipes liquid.
Particularly wiping off in the process of liquid when colliding with nozzle when scraper plate, in order to prevent defective nozzle, scraper plate will be made of flexible material.The skin-friction coefficient of such flexible material is high, is difficult to Surface Machining is become tabular surface.Therefore, even carried out the cleaning first time by the first cleaning unit after, on appearing, liquid medicine jet still has a lot of liquids, so when cleaning for the second time, increased the use amount of polishing piece.In addition, the liquid that is attached to the scraper plate upper end is difficult to flow to the bottom of scraper plate, and the increase of processing unit price, is difficult to change.
Patent documentation 1: Japanese Patent Publication communique JP 2006-248102 number
The stereogram of China ink printing section
[0009]In addition, the purpose of this invention is to provide a kind of liquid medicine coating apparatus with above-mentioned cleaning unit.
In addition, the purpose of this invention is to provide a kind of cleaning method that utilizes above-mentioned cleaning unit that the nozzle of liquid medicine coating apparatus is cleaned.
According to the cleaning unit of a feature that is used for realization the invention described above purpose, it has scraper plate and fixed component.
Scraper plate is plate shape, wipes the treatment fluid on the treatment fluid ejection face that remains in the shower nozzle that sprays treatment fluid off.Fixed component connects described scraper plate, the position of fixing described scraper plate.
Specifically, described fixed component comprises the first fixed part and the second fixed part.It is relative with a face of described scraper plate that the first fixed part is configured to.It is relative with described the first fixed part that the second fixed part is arranged to clip described scraper plate, is connected with described the first fixed part, and described scraper plate is fixed on described the first fixed part.
Described fixed component also comprises: at least one connecting elements, and insert described the second fixed part, and join with a face of described scraper plate, described scraper plate closely is fixed on described the first fixed part; Described the second fixed part is formed with patchhole, the corresponding formation with described connecting elements of this patchhole, and described connecting elements inserts described patchhole.
In addition, described scraper plate can also comprise coating.Coating is made of the synthetic resin material in the outside of described substrate plate.
On the other hand, described scraper plate comprises substrate plate, and this substrate plate is by compressed paper (Ya Shrink Paper) the material formation.
In addition, described scraper plate can also comprise coating.Coating is made of the synthetic resin material in the outside of described substrate plate.
In addition, according to the treatment fluid applying device of a feature that is used for realization the invention described above purpose, it has supporting member for substrate, at least one shower nozzle, the first cleaning unit and the second cleaning unit.
Object is placed on the supporting member for substrate.Shower nozzle applies treatment fluid at the object that is positioned on the described supporting member for substrate.The first cleaning unit is wiped the treatment fluid on the treatment fluid ejection face that remains in described shower nozzle off.The second cleaning unit is wiped the treatment fluid that remains on the described treatment fluid ejection face.
Specifically, described the first cleaning unit comprises scraper plate.Scraper plate is plate shape, wipes the treatment fluid that remains on the described treatment fluid ejection face off.
Described the first cleaning unit can also comprise fixed component.Fixed component is connected with described scraper plate, the position of fixing described scraper plate.
Described fixed component comprises: the first fixed part is configured to relative with a face of described scraper plate; And second fixed part, it is relative with described the first fixed part to be arranged to clip described scraper plate, is connected with described the first fixed part, and described scraper plate is fixed on described the first fixed part.
Described fixed component also comprises: at least one connecting elements, and insert described the second fixed part, and join with a face of described scraper plate, described scraper plate closely is fixed on described the first fixed part; Described the second fixed part is formed with patchhole, the corresponding formation with described connecting elements of this patchhole, and described connecting elements inserts described patchhole.
Described the first fixed part is made of the material that described magnetic is responded, and described connecting elements comprises: main body, and this main body has: supporting head, size is larger than described patchhole; And joint pin, prolong and be inserted into described inserting in the hole from described supporting head; And magnetic section, the inside of inserting described joint pin has magnetic, and a face of a face and described scraper plate joins, and the magnetic force that forms between utilization and described the first fixed part closely is fixed on described scraper plate on described the first fixed part.
In addition, as described below according to the cleaning method of the liquid medicine coating apparatus of a feature that be used for to realize the invention described above purpose.At first, use the scraper plate of fixed component fixed head shape.Then, the top of the showerhead configurations of ejection treatment fluid at described scraper plate.Then, described scraper plate is being configured to wipe the treatment fluid that remains on the described treatment fluid ejection face off under the state vertical with the treatment fluid ejection face of described shower nozzle.
Described fixed component comprises: the first fixed part is configured to relative with a face of described scraper plate; And second fixed part, it is relative with described the first fixed part to be arranged to clip described scraper plate, is connected with described the first fixed part, and described scraper plate is fixed on described the first fixed part.
Described fixed component also comprises: at least one connecting elements, and insert described the second fixed part, and join with a face of described scraper plate, described scraper plate closely is fixed on described the first fixed part; Described the second fixed part is formed with patchhole, the corresponding formation with described connecting elements of this patchhole, and described connecting elements inserts described patchhole.
Described the first fixed part is made of the material that described magnetic is responded, and described connecting elements comprises: main body, and this main body has: supporting head, size is larger than described patchhole; And joint pin, prolong and be inserted into described inserting in the hole from described supporting head; And magnetic section, the inside of inserting described joint pin has magnetic, and a face of a face and described scraper plate joins, and the magnetic force that forms between utilization and described the first fixed part closely is fixed on described scraper plate on described the first fixed part.
Thereby, in described step with fixed component fixed head shape scraper plate, under the state on the first fixed part that described scraper plate is configured in the fixing described fixed component in position, make the second fixed part of described fixed component clip described scraper plate and be connected with described the first fixed part in the mode that can install and remove, described scraper plate is fixed on described the first fixed part.
According to the present invention, because scraper plate is plate shape, its shape changes easily, so can make scraper plate and the contact area that remains in the treatment fluid on the ejection face minimum.Thus, cleaning unit can improve sweeping efficiency, and can reduce manufacturing cost.
Fig. 1 is the stereogram of the film forming device of schematic representation one embodiment of the present invention.
Fig. 2 is the stereogram of expression inkjet printing section shown in Figure 1.
Fig. 3 is the top view of expression inkjet printing section shown in Figure 2.
Fig. 4 is the exploded stereogram of expression the first cleaning unit shown in Figure 2.
Fig. 5 is the top view of expression the first cleaning unit shown in Figure 4.
Fig. 6 is expression fixed component shown in Figure 5 and the exploded stereogram of scraper plate.
Fig. 7 is the top view of expression scraper plate shown in Figure 6.
Fig. 8 is the cutaway view that the cutting line I-I ' along Fig. 7 dissects.
Fig. 9 is when being illustrated in Transformatin liquid, the side view of the position relationship of scraper plate shown in Figure 6 and the first shower nozzle.
Figure 10 is the figure of another example of expression scraper plate shown in Figure 6.
Figure 11 is when being illustrated in Transformatin liquid, the side view of the position relationship of scraper plate shown in Figure 10 and the first shower nozzle.
Figure 12 is the figure of another example of expression the first fixed part shown in Figure 6.
Figure 13 is that expression the first cleaning unit shown in Figure 2 cleans the flow chart of the process of the first nozzle component and the second nozzle component.
Figure 14 is when being illustrated in Transformatin liquid, the figure of the configuration relation of scraper plate shown in Figure 6 and the first shower nozzle.
Description of reference numerals
100 inkjet printing sections
200 treatment fluid supply units
300 charging sections
400 discharging sections
500 protractors (イ Application デ Network サ) section
600 oven dry sections
700 master control part
The specific embodiment
Below, with reference to accompanying drawing the preferred embodiment of the present invention is described in detail.Below, as the treatment fluid applying device, describe take the inkjet-printing device of the colored filter that is used to form liquid crystal indicator as an example, but the treatment fluid applying device also can form various films except colored filter, can be widely used in the film or the specific pattern that form in the liquid crystal indicator multiple device in addition.
Fig. 1 is the stereogram of the film forming device of schematic representation one embodiment of the present invention.
With reference to Fig. 1, film forming device 1000 can comprise inkjet printing section 100, treatment fluid supply unit 200, charging section 300, discharging section 400, protractor section 500, oven dry section 600 and master control part 700.
Described master control part 700 is arranged on a side of described inkjet printing section 100, controls the process conditions of described inkjet printing section 100, and described inkjet printing section 100 carries out working procedure of coating according to the control of described master control part 700.
Described treatment fluid supply unit 200 is arranged on a side of described inkjet printing section 100.Described treatment fluid supply unit 200 is stored the treatment fluid that applies at substrate with described inkjet printing section 100, and provides described treatment fluid to described inkjet printing section 100.In this embodiment, described treatment fluid supply unit 200 is stored respectively described RGB ink, and their color is not mixed mutually.
Opposite side in described inkjet printing section 100 has been arranged side by side: described charging section 300 provides and loads from the outside to be in the waiting substrate of operation; And described discharging section 400, be loaded in the substrate of having finished operation in the described film forming device 1000.
Described charging section 300 and described discharging section 400 are arranged on a side of described protractor section 500, and described charging section 300 and described discharging section 400 are relative with described inkjet printing section 100 across described protractor section 500.Described protractor section 500 and described inkjet printing section 100, described charging section 300, described discharging section 400 and oven dry section 600 are communicated with, and transmit substrate between described inkjet printing section 100, described charging section 300, described discharging section 400 and oven dry section 600.
Specifically, described protractor section 500 has the transfer robot (not expression among the figure) that transmits substrate, and described transfer robot is pulled out substrate from described charging section 300, sends described inkjet printing section 100 to.If finished to described coating of substrates RGB ink in described inkjet printing section 100, then described transfer robot is just pulled out the substrate that is formed with colored filter from described inkjet printing section 100, sends described oven dry section 600 to.600 pairs of substrates that are drawn into of described oven dry section heat, and make the film sclerosis that forms at described substrate, namely make the colored filter sclerosis, thus, utilize film forming device 1000 to finish film and form operation.Described transfer robot sends described discharging section 400 to after the substrate of having finished operation is pulled out from described oven dry section 600.Utilization is sent device back to the substrate that is loaded in the described discharging section 400 is transported to the outside.
Below briefly the structure of film forming device 1000 is illustrated, below, with reference to accompanying drawing described inkjet printing section 100 is specifically described.
Fig. 2 is the stereogram of expression inkjet printing section shown in Figure 1, and Fig. 3 is the top view of expression inkjet printing section shown in Figure 2.
With reference to Fig. 2 and Fig. 3, described inkjet printing section 100 can comprise objective table 110, substrate supporting section 120, portal frame (Gantry) 130, the first nozzle component 140a, the second nozzle component 140b, the first shower nozzle moving part 151, the second shower nozzle moving part 152, the first cleaning unit 160 and the second cleaning unit 170.
Be provided be used to the equipment that applies described treatment fluid at described objective table 110, that is, be provided with substrate supporting section 120, portal frame 130, the first nozzle component 140a, the second nozzle component 140b, the first shower nozzle moving part 151, the second shower nozzle moving part 152, the first cleaning unit 160 and the second cleaning unit 170.Be provided with the central guide rail 111 that prolongs along limit of described objective table 110 stating objective table 110, described substrate supporting section 120 is connected on the described central guide rail 111.The substrate of the described treatment fluid of described substrate supporting section's 120 supporting coatings can move along described central guide rail 111.In addition, described substrate supporting section 120 can be provided with supporting station, and described supporting station is placed described substrate, and is arranged to and can rotates, and when the operation of coating treatment fluid, described substrate is fixed on the described supporting station.
On the other hand, described objective table 110 can have the first guide rail 112a and the second guide rail 112b, and they are arranged to across described central guide rail 111 mutually relatively.Described the first guide rail 112a and the second guide rail 112b prolong and form at the first direction D1 identical with described central guide rail 111 respectively, have and a limit of the described objective table 110 that prolongs at described first direction D1 identical length substantially.
Described portal frame 130 is connected on described the first guide rail 112a and the second guide rail 112b.Two ends of described portal frame 130 are connected on described the first guide rail 112a and the second guide rail 112b, can move horizontally along described the first guide rail 112a and the second guide rail 112b.
Described the first nozzle component 140a and the second nozzle component 140b are fixedly installed on the described portal frame 130.When described portal frame 130 moves horizontally, the the first nozzle component 140a and the second nozzle component 140b that are arranged on the described portal frame 130 are also mobile together, thus, the position of described the first nozzle component 140a and the second nozzle component 140b is changed at described first direction D1.
Described the first nozzle component 140a and the second nozzle component 140b provide described treatment fluid by described treatment fluid supply unit 200, spray described treatment fluid to the substrate that is fixed on the described substrate supporting platform 120.In this embodiment, there are two nozzle component 140a, 140b in described inkjet printing section 100, but the number of described nozzle component 140a, 140b can increase according to the size of process efficiency and nozzle component 140a, 140b or reduce.
Described the first nozzle component 140a and the second nozzle component 140b are configured on the described first direction D1 side by side, are positioned on the position spaced apart from each other.In this embodiment, described the first nozzle component 140a has identical structure with the second nozzle component 140b.Therefore the structure to described the first nozzle component 140a below is specifically described, and omits specifying described the second nozzle component 140b.
Described the first nozzle component 140a has the first shower nozzle 141a, the second shower nozzle 142a and the 3rd shower nozzle 143a, described the first shower nozzle 141a, the second shower nozzle 142a and the 3rd shower nozzle 143a are on second direction D2 and row arrangement, described second direction D2 is vertical in the horizontal direction with described first direction D1, and described the first shower nozzle 141a, the second shower nozzle 142a and the 3rd shower nozzle 143a have respectively a plurality of nozzles of ejection treatment fluid.
In this embodiment, described the first nozzle component 140a has three shower nozzle 141a, 142a, 143a, but the number of described shower nozzle 141a, 142a, 143a can increase according to the kind of process efficiency and treatment fluid or reduce.
Described the first shower nozzle 141a, the second shower nozzle 142a and the 3rd shower nozzle 143a spray respectively the ink with mutual different colours, form colored filter at described substrate.Specifically, the red R ink of described the first shower nozzle 141a ejection, the green G ink of described the second shower nozzle 142a ejection, the blue B ink of described the 3rd shower nozzle 143a ejection.Wherein, the ink of described the first shower nozzle 141a, the second shower nozzle 142a and the 3rd shower nozzle 143a is arranged and can be changed according to the arrangement of the colored pixels of described colored filter.
Described each shower nozzle 141a, 142a, 143a can rotate take the central shaft of each shower nozzle 141a, 142a, 143a as benchmark.
When the operation of the described treatment fluid of coating, described the first shower nozzle 141a, the second shower nozzle 142a and the 3rd shower nozzle 143a can spray ink simultaneously, also can be once any one shower nozzle ejection ink only.In addition, described the first shower nozzle 141a, the second shower nozzle 142a and the 3rd shower nozzle 143a also can alternately spray ink.
In addition, when the operation of the described treatment fluid of coating, described the first nozzle component 140a and the second nozzle component 140b can drive simultaneously, spray simultaneously ink from described the first nozzle component 140a and the second nozzle component 140b, described the first nozzle component 140a and the second nozzle component 140b also can alternately spray ink.In addition, also can at first drive any one nozzle component coating ink among the first nozzle component 140a and the second nozzle component 140b after, all exhaust if offer the ink of this nozzle component, then drive again remaining nozzle component coating ink.
On the other hand, described the first nozzle component 140a and the second nozzle component 140b are fixedly installed on the first shower nozzle moving part 151, have the first moving guide rail that prolongs at described second direction D2 at described the first shower nozzle moving part 151.Described the first nozzle component 140a is connected on the first mutually different moving guide rails with the second nozzle component 140b, can move back and forth at described second direction D2 along the first moving guide rail that connects.Wherein, described the first nozzle component 140a be connected each shower nozzle of nozzle component 140b and can be separately move along the first moving guide rail that connects.
Described the first shower nozzle moving part 151 is fixedly installed on described the second shower nozzle moving part 152, is provided with the second moving guide rail (not expression among the figure) at described the second shower nozzle moving part 152.Described the second moving guide rail namely, prolongs at the third direction D3 vertical with the upper surface of described objective table 110 prolonging with the described first direction D1 third direction D3 vertical with second direction D2.Described the first shower nozzle moving part 151 is connected on described the second moving guide rail, can move back and forth in up/down direction (third direction D3) along described the second moving guide rail.Described the second shower nozzle moving part 152 is fixedly installed on the described portal frame 130.Be provided with the 3rd moving guide rail that prolongs along described second direction D2 at described portal frame 130.Described the second shower nozzle moving part 152 is connected on described the 3rd moving guide rail, can move back and forth at described second direction D2 along described the 3rd moving guide rail.
Like this, described the first nozzle component 140a and the second nozzle component 140b utilize described portal frame 130, described the first shower nozzle moving part 151 and the second shower nozzle moving part 152, can move along described first direction D1, second direction D2 and third direction D3.Namely, described the first nozzle component 140a and the second nozzle component 140b utilize moving horizontally of described portal frame 130, can be mobile at described first direction D1, utilize the movement of the second shower nozzle moving part 152, can be mobile at described second direction D2, utilize the movement of described the first shower nozzle moving part 151, can be mobile at described third direction D3.In addition, each shower nozzle of described the first nozzle component 140a and the second nozzle component 140b can be mobile at described second direction D2 along the first moving guide rail of correspondence.
When the operation of the described treatment fluid of coating, described the first nozzle component 140a and the second nozzle component 140b can move with described the first shower nozzle moving part 151, the second shower nozzle moving part 152 and described portal frame 130 by lateral dominance, and the limit is to described coating of substrates ink.In addition, also can be that described substrate supporting platform 120 is mobile at described first direction D1 along described central guide rail 111, described the first nozzle component 140a and the second nozzle component 140b are only mobile at described second direction D2 and third direction D3, apply ink.
On the other hand, the maintain and repair zone is provided with the first cleaning unit 160 and the second cleaning unit 170 in the maintain and repair zone between the described central guide rail 111 and described the second guide rail 112b of described objective table 110.
Described the first cleaning unit 160 is wiped the ink that remains on described the first nozzle component 140a and the second nozzle component 140b off.Explanation to described the first cleaning unit 160 structures will be specifically described by the Fig. 4 to Figure 12 that narrates later.
In described the first cleaning unit 160 1 sides described the second cleaning unit 170 is set.When described portal frame 130 was positioned at initial position, the second cleaning unit 170 was mutually relative with described portal frame 130 across described the first cleaning unit 160.Described the second cleaning unit 170 is wiped the ink on each nozzle that is attached to described the first nozzle component 140a and the second nozzle component 140b, improves the yield rate of product.Wherein, described the second cleaning unit 170 can the nozzle of cleaning carries out the cleaning second time to undertaken for the first time by described the first cleaning unit 160, also can the nozzle that was not cleaned by described the first cleaning unit 160 be cleaned.
Described the second cleaning unit 170 can comprise donor rollers, recycling roll and polishing piece (wiper).Specifically, described donor rollers be connected recycling roll and connect by described polishing piece.Described polishing piece is banded, and first end is fixed on the described donor rollers, and the second end is fixed on the described recycling roll.When described the first nozzle component 140a of cleaning and the second nozzle component 140b, described polishing piece contacts with ejection face from the ejection ink of described the first nozzle component 140a and each shower nozzle of the second nozzle component 140b, wipes the ink that remains on described each shower nozzle.Described polishing piece provides under the state that is twisted on the described donor rollers, is rolled on the described recycling roll because cleaning the contaminated part of described nozzle.That is, described donor rollers provides the polishing piece that does not have pollution, and described recycling roll reclaims contaminated polishing piece.
Below, be specifically described with reference to the structure of accompanying drawing to the first cleaning unit 160.
Fig. 4 is the exploded stereogram of expression the first cleaning unit shown in Figure 2, and Fig. 5 is the top view of expression the first cleaning unit shown in Figure 4.
With reference to Fig. 4 and Fig. 5, described the first cleaning unit 160 can comprise main frame 161, purge tank 162, upper frame 163, a plurality of scraper plate 164 and a plurality of fixed component 168.
Specifically, described main frame 161 is quadrangle, above opening, and a part of opening of side.Described purge tank 162 is arranged on the inside of described main frame 161, and described purge tank 162 reclaims the ink of being removed by described scraper plate 164.
Described upper frame 163 is arranged on the top of described main frame 161 and described purge tank 162.Described upper frame 163 is connected with the upper end of described main frame 161, is the such quadrangle of main frame 161 as described, above and lower aperture.
Described a plurality of scraper plate 164 separately is arranged on the inside of described upper frame 163 with the interval that equates, wipes the treatment fluid on the ejection face that remains in described each shower nozzle off, and described treatment fluid for example is ink.In this embodiment, described the first cleaning unit 160 has six scraper plates 164, but the number of described scraper plate 164 can increase according to the shower nozzle number that described the first nozzle component 140a and the second nozzle component 140b (with reference to Fig. 2) have.
Described a plurality of scraper plate 164 is configured to corresponding one by one with the shower nozzle of described the first nozzle component 140a and the second nozzle component 140b, and also the showerhead configurations with described the first nozzle component 140a and the second nozzle component 140b is identical in its configuration.Namely, described the first nozzle component 140a and the second nozzle component 140b be with mutual relative mode and row arrangement, the showerhead configurations of each nozzle component 140a, 140b with the direction of the configuration perpendicular direction of described the first nozzle component 140a and the second nozzle component 140b on.Equally, described scraper plate mode with three of every row on the configuration direction of described the first nozzle component 140a and the second nozzle component 140b is configured to two row.
In this embodiment, according to the isolated isolated distance apart from setting the scraper plate that is positioned at same row of described the first shower nozzle 141a, the second shower nozzle 142a and the 3rd shower nozzle 143a, described a plurality of scraper plates 164 can clean the first shower nozzle 141a, the second shower nozzle 142a and the 3rd shower nozzle 143a that the first nozzle component 140a has simultaneously.
Utilize described a plurality of fixed component 168 that described a plurality of scraper plates 164 are fixedly installed on the described upper frame 163.Described a plurality of fixed component 168 is configured to corresponding one by one with described a plurality of scraper plates 164, with corresponding scraper plate connection.Annexation between described scraper plate 164 and described fixed component 168 structure, described scraper plate 164 and the described fixed component 168 separately describes by the Fig. 6 to Figure 12 that narrates later.
Described the first cleaning unit 160 can also comprise washer jet 169, and this washer jet 169 cleans described purge tank 162.Described washer jet 169 is configured in the inboard, upper end of described purge tank 162 side by side, supplies with cleaning fluid by cleaning solution supplying mouth 162a, cleans the inside of described purge tank 162.That is, mobile along described purge tank 162 inwalls from the cleaning fluid of described washer jet 169 ejections, make the foreign matter that remains on described purge tank 162 inwalls be discharged to the outside, for example make the ink that flow into the described purge tank 162 from described scraper plate 164 be discharged to the outside.Wherein, can have exhaust outlet 162b in the bottom of described purge tank 162, this exhaust outlet 162b discharges the foreign matter that flows into described purge tank 162 inside to the outside, can be provided for the pressure at expulsion that foreign matter is sucked in described exhaust outlet 162b.
Below, with reference to accompanying drawing described scraper plate 164 and described fixed component 168 are specifically described.
Fig. 6 is expression fixed component shown in Figure 5 and the exploded stereogram of scraper plate, and Fig. 7 is the top view of expression scraper plate shown in Figure 6, and Fig. 8 is the cutaway view that the cutting line I-I ' along Fig. 7 dissects.
With reference to Fig. 6 to Fig. 8, described scraper plate 164 is plate shape, wipes the treatment fluid on the ejection face that remains in corresponding shower nozzle off, and described treatment fluid for example is ink.In this embodiment, described scraper plate 164 is quadrangle, but the shape of described scraper plate 164 is not limited to this, can be diversified shape.
Described scraper plate 164 can comprise: substrate plate 61; And coating 62, thereby described substrate plate 61 is protected on the surface that is coated in described substrate plate 61.Described substrate plate 61 keeps certain shape and the material that can bend to consist of by shape handling ease, total energy, for example is made of the compressed paper material.Like this because described scraper plate 164 is made of cheap compressed paper material, so can reduce cost, even and with the ejection face collision of corresponding shower nozzle, also can make the damage of corresponding described shower nozzle minimum.
The chemical stability of described coating 62 is good, has resistance fluidity energy, the synthetic resin material lower than described compressed paper by skin-friction coefficient consists of, and described synthetic resin for example is polypropylene (Polypropylene) or polyethylene (Polyethylene).Thus, the ink that is attached on the described scraper plate 164 flows downward along described scraper plate 164 easily, flows into easily described purge tank 162 (with reference to Fig. 4), so can improve sweeping efficiency.
As an example of the present invention, described scraper plate 164 can have about 0.2mm to the thickness of about 1mm.
In this embodiment, described scraper plate 164 is made of substrate plate 61 and coating 62, but also can only be made of described substrate plate 61.In the situation that described scraper plate 164 only is made of described substrate plate 61, can be reduced to little than in the situation with described coating 62 to the thickness of described scraper plate 164.
Fig. 9 is when being illustrated in Transformatin liquid, the side view of the position relationship of scraper plate shown in Figure 6 and the first shower nozzle.The first shower nozzle 141a of described the first nozzle component 140a (with reference to Fig. 2) and the position relationship between the scraper plate 164 corresponding with it in Fig. 9, have only been represented, each shower nozzle and identical therewith with position relationship between its corresponding scraper plate.
With reference to Fig. 9, when removal remained in ink on the ejection face of each shower nozzle, described the first shower nozzle 141a of described the first nozzle component 140a utilized the movement of described portal frame 130 (with reference to Fig. 2), is configured in the top of corresponding scraper plate 164.
Lower surface at described the first shower nozzle 141a is provided with a plurality of nozzles 41 that spray ink, and described scraper plate 164 is configured to vertical with the ejection face 41a of described nozzle 41.During ink 20 on removing described ejection face 41a, in order to prevent from causing because of described scraper plate 164 damage of described ejection face 41a, the first end of described scraper plate 164 is positioned at the position that separates with described ejection face 41a, contacts with ink 20 on remaining in described ejection face 41a.That is, described scraper plate 164 with the discontiguous state of described ejection face 41a under, only contact described ink 20, remove the ink 20 on the described ejection face 41a.
In this embodiment, described scraper plate 164 is that about 0.3mm is to about 0.1mm with the isolated of described ejection face 41a apart from T1.
In addition, in this embodiment, the first end of the described scraper plate 164 that contacts with described ink 20 is configured to vertical with described ejection face 41a.
Described scraper plate 164 comprises the first spigot surface 64a, the second spigot surface 64b and the face of removal 64c.Described the first spigot surface 64a is mutually relative with the second spigot surface 64b, and is configured to vertical with described ejection face 41a.Described removal face 64c is between described the first spigot surface 64a and the second spigot surface 64b, and is substantially vertical with the second spigot surface 64b with described the first spigot surface 64a, is made of smooth face.Described removal face 64c is positioned at the first end of described scraper plate 164, when removing described ink 20, contacts with the ink 20 of described ejection face 41a.
During ink 20 on removing described ejection face 41a, described the first shower nozzle 141a moves horizontally under described ink 20 and state that the first end of described scraper plate 164 contacts, ink 20 on the described ejection face 41a is removed from described ejection face 41a because surface tension is drawn by the first end of described scraper plate 164.At this moment, the direction of the direct of travel HD of described the first shower nozzle 141a for advancing from described the second spigot surface 64b of described the first spigot surface 64a one side direction one skidding.
Because described scraper plate 164 is plate shape, so can make with the contact area of described ink 20 minimum, thus, minimum with the contact area of described ink 20 in order to make described scraper plate 164, there is no need described removal face 64c is processed into the inclined plane, just can improve sweeping efficiency.
Figure 10 is the figure of another example of expression scraper plate shown in Figure 6, and Figure 11 is when being illustrated in Transformatin liquid, the side view of the position relationship of scraper plate shown in Figure 10 and the first shower nozzle.
With reference to Figure 10 and Figure 11, scraper plate 180 shown in Figure 10 except cleaning during described nozzle 41 with remain in described ejection face 41a on the shape of the first end 182 that contacts of ink 20, have structure and the shape identical with Fig. 6 scraper plate extremely shown in Figure 9 164.Therefore in the specifying of described scraper plate 180, omitted the explanation that repeats with scraper plate shown in Figure 6 164 below.
During described nozzle 41, described scraper plate 180 is configured to vertical with described ejection face 41a in cleaning, and described first end 182 is by a face bending to described scraper plate, arranges in the mode with respect to a face tilt of described scraper plate 180.In this embodiment, described first end 182 is greater than 90 degree and less than 180 degree with a face angulation CA of the described scraper plate 180 that is connected with described first end 182 on the overbending direction of described first end 182.
During ink 20 on removing described ejection face 41a, described the first shower nozzle 141a moves horizontally under described ink 20 and state that the first end 182 of described scraper plate 180 contacts, the ink 20 of described ejection face 41a is removed from described ejection face 41a because surface tension is drawn by the first end 182 of described scraper plate 180.At this moment, to be configured to the overbending direction of described first end 182 opposite with the direct of travel HD of described the first shower nozzle 141a for described scraper plate 180.Thus, when the described nozzle 41 of cleaning, the ink 20 that is attached on the described first end 182 separates with described scraper plate 180 by gravity, falls in the described purge tank 162 (with reference to Fig. 4).Can improve thus the sweeping efficiency of described scraper plate 180.
Refer again to Fig. 5 and Fig. 6, described scraper plate 164 is connected on the described fixed component 168, and the position of described scraper plate 164 is fixed.Described fixed component 168 is fixedly installed on the described upper frame 163, can comprise the first fixed part 165 and the second fixed part 166.Described the first fixed part 165 can be tabular, is configured to mutually relatively with described scraper plate 164, is fixedly installed on the described upper frame 163.In this embodiment, described the first fixed part 165 can be arranged to one with described upper frame 163, also can divide to be arranged.
It is mutually relative with described the first fixed part 165 that described the second fixed part 166 is configured to, and clips described scraper plate 164 and be connected with described the first fixed part 165, thereby described scraper plate 164 is fixed on described the first fixed part 165.Described fixed component 168 be connected scraper plate 164 when connecting, described scraper plate 164 is configured to first end and more projects upwards than the upper end of described the first fixed part 165 and the second fixed part 166.
Described the second fixed part 166 can also have guide post 166a, and this guide post 166a is arranged on two mutual relative in the horizontal ends.Described guide post 166a is outstanding from described the second fixed part 166, the link position of guiding and described the first fixed part 165 and described scraper plate 164.In this embodiment, described the second fixed part 166 has two guide post 165a, but the number of described guide post 165a can increase or reduce according to size and the joint efficiency of described fixed component 168.
Be formed with a plurality of through hole 164a at described scraper plate 164, described guide post 166a can insert this through hole 164a.Described a plurality of through hole 164a is configured to mutually separate in vertical direction, forms in two ends adjacent with the described first end of described scraper plate 164 respectively.In this embodiment, described scraper plate 164 forms respectively three through hole 164a in described two ends, but the number of described through hole 164a can increase or reduce according to size and the joint efficiency of described fixed component 168.
Described guide post 166a inserts in any one through hole in the through hole arranged vertically of described scraper plate 164, the position of the through hole that inserts according to described guide post 166a changes described scraper plate 164 with respect to the relative upright position of described the first fixed part 165 and the second fixed part 166.
On the other hand, be formed with connecting hole 165a at described the first fixed part 165, described guide post 166a can insert this connecting hole 165a, and described connecting hole 165a forms corresponding one by one with described guide post 166a.Described guide post 166a sequentially connects any one and the corresponding connecting hole 165a among described a plurality of through hole 164a, is inserted among this through hole 164a and the connecting hole 165a.
Described fixed component 168 can also comprise a plurality of connecting elements 167, and these a plurality of connecting elements 167 closely are fixed on described scraper plate 164 on described the first fixed part 165.In this embodiment, described fixed component 168 has two connecting elements 167, and the number of described connecting elements 167 can increase or reduce according to joint efficiency.
Described connecting elements 167 inserts in described the second fixed part 166, join with a face of described scraper plate 164, described the second fixed part 166 is formed with patchhole 166b, and this patchhole 166b is corresponding one by one with described connecting elements 167, and described connecting elements 167 can insert this patchhole 166b.
Specifically, described connecting elements 167 can comprise supporting head 167a, joint pin 167b and the 167c of magnetic section.The size of described supporting head 167a is larger than the size of described patchhole 166b, and described joint pin 167a prolongs from described supporting head 167a, is inserted among the described patchhole 166b.The described magnetic 167c of section is inserted into the inside of described joint pin 167b, has magnetic, and a face of face and described scraper plate 164 joins.The magnetic force that forms between the described magnetic 167c of section utilization and described the first fixed part 165 closely is fixed on described scraper plate 164 on described the first fixed part 165.In this embodiment, described the first fixed part 165 for and described connecting elements 167 between form magnetic force, consisted of by the material that magnetic is responded, for example consisted of by stainless steel material.
Like this, described fixed component 168 utilizes the magnetic of described connecting elements 167 that described the first fixed part 165 and the second fixed part 166 are interconnected, so easily assembling.
Screw thread can be formed on the surface of described joint pin 167b, on the inner peripheral surface of the described patchhole 166b of described the second fixed part 166, the screw thread corresponding with the screw thread of described joint pin 167b can be formed.Thus, the screw thread of described joint pin 167b is connected with the screw thread of described patchhole 166b is intermeshing.
Figure 12 is the figure of another example of expression the first fixed part shown in Figure 6.
With reference to Fig. 6 and Figure 12, the first fixed part 190 can comprise: stationary body 191 is connected with the second fixed part 166; And metal level 192, form at a face of described stationary body 191.Described metal level 192 is mutually relative with described scraper plate 164, is made of the metal material that described magnetic is responded, and for example is made of stainless steel material.Thus, between the 167c of magnetic section of described connecting elements 167 and described metal level 192, produce magnetic force.
In this embodiment, described metal level 192 forms at a face of described stationary body 191, exposes to the outside, but also can be contained in the inside of described stationary body 191.
Below, be specifically described with reference to the process of accompanying drawing to the ejection face of described the first cleaning unit 160 cleaning the first nozzle component 140a and the second nozzle component 140b.
Figure 13 is the flow chart of the process of expression the first cleaning unit 160 cleaning the first nozzle component 140a shown in Figure 2 and the second nozzle component 140b, and Figure 14 is when being illustrated in Transformatin liquid, the figure of the configuration relation of scraper plate shown in Figure 6 and the first shower nozzle.
With reference to Fig. 2, Fig. 5, Figure 13 and Figure 14, at first, described fixed component 168 is fixedly installed on described scraper plate 164 in the described upper frame 163 (S110).
After this, make described the first nozzle component 140a and the second nozzle component 140b be configured in the top (S120) of described the first cleaning unit 160.
Described the first nozzle component 140a and the second nozzle component 140b move horizontally, and follow therewith, and described scraper plate 164 is wiped the liquid (S130) on the ejection face that remains in corresponding shower nozzle off.At this moment, as shown in figure 14, described scraper plate 164 is configured to: the free-throw line angulation that described scraper plate 164 and length direction at corresponding shower nozzle prolong is for greater than 0 degree and less than 90 degree.
If finished the cleaning first time of being undertaken by described the first cleaning unit 160, then cleaned (S140) with 170 couples of described the first nozzle component 140a of described the second cleaning unit and the second nozzle component 140b.
In this embodiment, the cleaning of being undertaken by described the first cleaning unit 160 can be carried out after being coated in ink on the substrate having finished, in the situation of operation stand-by period length, also can carry out the cleaning undertaken by described the first cleaning unit 160, be used for removing the ink that solidifies in each nozzle interior.
On the other hand, if predefined number of times has been carried out in the cleaning of 164 couples of described the first nozzle component 140a of described scraper plate and the second nozzle component 140b repeatedly, then recycling (S150) because cleaning after the contaminated part of described ejection face is removed.That is, because the shape of described scraper plate 164 changes easily, and excises contaminated part easily, so can be re-using behind the contaminated Partial Resection.If excised described contaminated part, the height step-down of described scraper plate 164 then is so will change the through hole that described guide post 166a inserts.
More than, be illustrated with reference to embodiment, but be understandable that: those skilled in the art can carry out various modifications and changes to the present invention in the scope that does not break away from thought of the present invention that claim of the present invention puts down in writing and field.
Claims (21)
1. cleaning unit is characterized in that comprising:
Scraper plate is plate shape, wipes the treatment fluid on the treatment fluid ejection face that remains in the shower nozzle that sprays treatment fluid off; And
Fixed component is connected with described scraper plate, the position of fixing described scraper plate,
Described fixed component comprises:
The first fixed part is configured to relative with a face of described scraper plate;
The second fixed part, it is relative with described the first fixed part to be arranged to clip described scraper plate, is connected with described the first fixed part, and described scraper plate is fixed on described the first fixed part; And
At least one connecting elements inserts described the second fixed part, and joins with a face of described scraper plate, described scraper plate closely is fixed on described the first fixed part,
Wherein, described the second fixed part is formed with patchhole, the corresponding formation with described connecting elements of this patchhole, and described connecting elements inserts described patchhole,
Described the first fixed part is made of the material that magnetic is responded,
Described connecting elements comprises:
Main body, this main body has: supporting head, size is larger than described patchhole; And joint pin, prolong and be inserted into described inserting in the hole from described supporting head; And
Magnetic section, the inside of inserting described joint pin has magnetic, and a face of a face and described scraper plate joins, and the magnetic force that forms between utilization and described the first fixed part closely is fixed on described scraper plate on described the first fixed part.
2. cleaning unit according to claim 1 is characterized in that,
Described the first fixed part comprises:
Stationary body is connected with described the second fixed part; And
Metal level is connected on the described stationary body, and is relative with described scraper plate, is made of the metal material that described magnetic is responded.
3. cleaning unit according to claim 1 is characterized in that,
The surface of described joint pin is formed with screw thread,
Inner peripheral surface at described patchhole is formed with the screw thread corresponding with the screw thread of described joint pin.
4. cleaning unit according to claim 1 is characterized in that,
Described scraper plate has at least one through hole,
In described the first fixed part and described the second fixed part any one has connecting hole at least,
Remaining one comprises at least one guide part, and this guide part is outstanding from a face, and order connects described through hole and described connecting hole, and is inserted in described through hole and the described connecting hole.
5. cleaning unit according to claim 4 is characterized in that,
Described scraper plate has a plurality of described through holes,
A plurality of described through holes are configured to mutually separate in vertical direction.
6. cleaning unit according to claim 1 characterized by further comprising:
Upper frame is fixedly installed described the first fixed part; And
Purge tank is arranged under the described upper frame, reclaims the treatment fluid of removing with described scraper plate.
7. cleaning unit according to claim 1 is characterized in that, described scraper plate disposes in the modes that become larger than 0 degree and less than 90 degree angle to tilt with arbitrarily line that length direction at described shower nozzle prolongs.
8. each described cleaning unit in 7 according to claim 1 is characterized in that,
Described scraper plate comprises:
The first spigot surface and the second spigot surface, they are mutually relative, and are configured to vertical with the treatment fluid ejection face of described shower nozzle; And
Removal face, substantially vertical with described the second spigot surface with described the first spigot surface between described the first spigot surface and described the second spigot surface, consisted of by smooth face, during treatment fluid on removing described treatment fluid ejection face, contact with described treatment fluid.
9. each described cleaning unit in 7 according to claim 1, it is characterized in that, described scraper plate is configured to: wipe an end of the treatment fluid that remains on the described treatment fluid ejection face off to a face bending of described scraper plate, with respect to a described face tilt of described scraper plate.
10. each described cleaning unit in 7 according to claim 1 is characterized in that described scraper plate comprises substrate plate, and this substrate plate is made of the compressed paper material.
11. cleaning unit according to claim 10 is characterized in that, described scraper plate also comprises coating, and this coating is made of the synthetic resin material in the outside of described substrate plate.
12. cleaning unit according to claim 11 is characterized in that, described synthetic resin material is polypropylene or polyethylene.
13. a treatment fluid applying device is characterized in that comprising:
Supporting member for substrate, the placing objects thing;
At least one shower nozzle applies treatment fluid at the object that is positioned on the described supporting member for substrate;
The first cleaning unit is wiped the treatment fluid on the treatment fluid ejection face that remains in described shower nozzle off; And
The second cleaning unit is wiped the treatment fluid that remains on the described treatment fluid ejection face,
Wherein, described the first cleaning unit comprises
Scraper plate, this scraper plate are plate shape, and the treatment fluid that remains on the described treatment fluid ejection face is wiped off;
Fixed component is connected with described scraper plate, the position of fixing described scraper plate,
Described fixed component comprises:
The first fixed part is configured to relative with a face of described scraper plate;
The second fixed part, it is relative with described the first fixed part to be arranged to clip described scraper plate, is connected with described the first fixed part, described scraper plate is fixed on described the first fixed part, and
At least one connecting elements inserts described the second fixed part, and joins with a face of described scraper plate, described scraper plate closely is fixed on described the first fixed part,
Wherein, described the second fixed part is formed with patchhole, the corresponding formation with described connecting elements of this patchhole, and described connecting elements inserts described patchhole,
Described the first fixed part is made of the material that magnetic is responded,
Described connecting elements comprises:
Main body, this main body has: supporting head, size is larger than described patchhole; And joint pin, prolong and be inserted into described inserting in the hole from described supporting head; And
Magnetic section, the inside of inserting described joint pin has magnetic, and a face of a face and described scraper plate joins, and the magnetic force that forms between utilization and described the first fixed part closely is fixed on described scraper plate on described the first fixed part.
14. treatment fluid applying device according to claim 13 is characterized in that described scraper plate comprises substrate plate, this substrate plate is made of the compressed paper material.
15. treatment fluid applying device according to claim 14 is characterized in that described scraper plate also comprises coating, this coating is made of the synthetic resin material in the outside of described substrate plate.
16. the cleaning method of a treatment fluid applying device is characterized in that comprising:
Step with fixed component fixed head shape scraper plate;
Spray the step of the shower nozzle for the treatment of fluid in the configuration of the top of described scraper plate; And
Described scraper plate is being configured to wipe the step that remains in the treatment fluid on the described treatment fluid ejection face off under the state vertical with the treatment fluid ejection face of described shower nozzle,
Wherein, described fixed component comprises:
The first fixed part is configured to relative with a face of described scraper plate;
The second fixed part, it is relative with described the first fixed part to be arranged to clip described scraper plate, is connected with described the first fixed part, described scraper plate is fixed on described the first fixed part, and
At least one connecting elements inserts described the second fixed part, and joins with a face of described scraper plate, described scraper plate closely is fixed on described the first fixed part,
Wherein, described the second fixed part is formed with patchhole, the corresponding formation with described connecting elements of this patchhole, and described connecting elements inserts described patchhole,
Described the first fixed part is made of the material that magnetic is responded,
Described connecting elements comprises:
Main body, this main body has: supporting head, size is larger than described patchhole; And joint pin, prolong and be inserted into described inserting in the hole from described supporting head; And
Magnetic section, the inside of inserting described joint pin has magnetic, and a face of a face and described scraper plate joins, and the magnetic force that forms between utilization and described the first fixed part closely is fixed on described scraper plate on described the first fixed part,
Thereby, in described step with fixed component fixed head shape scraper plate, under the state on the first fixed part that described scraper plate is configured in the fixing described fixed component in position, make the second fixed part of described fixed component clip described scraper plate and be connected with described the first fixed part in the mode that can install and remove, described scraper plate is fixed on described the first fixed part.
17. the cleaning method for the treatment of fluid applying device according to claim 16 is characterized in that,
Be formed with through hole at described scraper plate,
In described the first fixed part and described the second fixed part any one is formed with connecting hole at least,
Be formed with at least one guide part at remaining one, this guide part is outstanding from a face,
Described guide part sequentially connects described through hole and described connecting hole, and inserts in described through hole and the described connecting hole, regulates the link position between described scraper plate and described the first fixed part and described the second fixed part.
18. the cleaning method for the treatment of fluid applying device according to claim 17 is characterized in that,
Be formed with a plurality of described through holes at described scraper plate, a plurality of described through holes are configured to mutually separate in vertical direction,
Described scraper plate be can recycling after cleaning the contaminated Partial Resection of described treatment fluid ejection face,
After excising described contaminated part, when the described scraper plate of recycling, the described through hole that inserts by changing described guide part keeps separating suitable distance between described treatment fluid ejection face and the described scraper plate.
19. the cleaning method of each described treatment fluid applying device in 18 according to claim 16, it is characterized in that described scraper plate is configured to: it is vertical with described treatment fluid ejection face to wipe the first end that remains in the treatment fluid on the described treatment fluid ejection face off.
20. the cleaning method of each described treatment fluid applying device in 18 according to claim 16, it is characterized in that, described scraper plate is configured to: wipe the first end that remains in the treatment fluid on the described treatment fluid ejection face off to a face bending of described scraper plate, with respect to a described face tilt of described scraper plate.
21. the cleaning method for the treatment of fluid applying device according to claim 20 is characterized in that,
When removing described treatment fluid, described shower nozzle moves at the upper level of described scraper plate,
When removing described treatment fluid, the overbending direction of described first end is opposite with the mobile direct of travel of described shower nozzle.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020090064157A KR101197590B1 (en) | 2009-07-14 | 2009-07-14 | Cleaning unit, treatment solution coating apparatus having the same and cleaning method using the same |
| KR10-2009-0064157 | 2009-07-14 |
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| Publication Number | Publication Date |
|---|---|
| CN101954790A CN101954790A (en) | 2011-01-26 |
| CN101954790B true CN101954790B (en) | 2013-05-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010102296026A Active CN101954790B (en) | 2009-07-14 | 2010-07-13 | Cleaning unit, treatment solution coating apparatus having the same and cleaning method using the same |
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| JP (1) | JP5167315B2 (en) |
| KR (1) | KR101197590B1 (en) |
| CN (1) | CN101954790B (en) |
| TW (1) | TWI419795B (en) |
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| TWI498228B (en) | 2012-07-09 | 2015-09-01 | Kinpo Elect Inc | Inkpot limiting device and multifunctional printer using the same |
| EP3107736B1 (en) * | 2014-02-18 | 2021-01-06 | Hewlett-Packard Development Company, L.P. | Printhead wiping |
| KR102379015B1 (en) * | 2014-05-30 | 2022-03-29 | 세메스 주식회사 | Ejection head and substrate treating apparatus including the same |
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| KR20080113680A (en) * | 2007-06-25 | 2008-12-31 | 삼성전자주식회사 | Ink jet image forming apparatus |
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- 2010-07-12 JP JP2010157696A patent/JP5167315B2/en active Active
- 2010-07-13 CN CN2010102296026A patent/CN101954790B/en active Active
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20110006500A (en) | 2011-01-20 |
| KR101197590B1 (en) | 2012-11-08 |
| CN101954790A (en) | 2011-01-26 |
| JP5167315B2 (en) | 2013-03-21 |
| TWI419795B (en) | 2013-12-21 |
| TW201107147A (en) | 2011-03-01 |
| JP2011020117A (en) | 2011-02-03 |
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