TWI419795B - Cleaning unit, processing liquid coating apparatus having the same, and cleaning method thereof - Google Patents

Description

Cleaning unit, processing liquid coating device having the unit, and treatment liquid coating Cloth device cleaning method

The present invention relates to a treatment liquid application device capable of coating a liquid medicine on a substrate, and more particularly, a cleaning unit capable of cleaning a nozzle for discharging a treatment liquid, and having the same A cleaning solution for a processing liquid coating device and a processing liquid coating device.

A liquid crystal display device capable of displaying an image is composed of a liquid crystal layer existing between two substrates on which a plurality of thin films are vapor-deposited and two substrates. Generally, the film formed on each substrate has a plurality of shapes, and thus a film is formed by a vapor deposition process and a photolithography process to obtain the precision of the pattern. As described above, in order to form a thin film, a photolithography process using a high-priced photomask is employed, so that the manufacturing cost is increased and the manufacturing process time is also increased.

Recently, a method of forming a film by ink jet printing has been employed as an alternative to the above film forming method. In the inkjet printing method, a chemical solution is applied to a specific position of a substrate to form a film, so that an etching process is not required. The ink jet printing method described above can be used to form a color filter layer, an alignment film, or the like of a liquid crystal display device.

In general, an inkjet printing apparatus includes a coating head that can apply a chemical solution on a substrate, and first and second cleaning units that can clean the coating head. The coating head includes a plurality of nozzles for discharging the liquid medicine, and the liquid medicine can be applied to a specific position of the substrate. In general, the liquid medicine used in the ink jet printing apparatus has high viscosity and volatility, and is easy to solidify. In particular, after the application of the chemical solution, the chemical solution may remain around the discharge port of the nozzle, and the residual chemical solution may be solidified at the periphery of the discharge port to block the discharge port of the nozzle, or may be applied to the substrate when the chemical solution is applied. A non-uniform film layer is formed.

In order to avoid the above situation, the first and second cleaning units can clean a plurality of nozzles to improve the yield of the product. The first cleaning unit can scrape the chemical liquid remaining on the discharge surface of the coating liquid of the coating head and remove it once, and the second cleaning unit can physically wipe the chemical liquid discharge surface to remove the medicine on the liquid discharge surface. liquid. Specifically, the first cleaning unit includes a scraper, and the scraper scrapes the chemical liquid on the chemical discharge surface. The second cleaning unit includes a wiping tape, and the wiping tape can be wiped with the liquid discharging surface to wipe the liquid.

In particular, the doctor blade is soft to avoid breakage of the nozzle when it collides with the nozzle during scraping of the chemical solution. The above soft surface has a high coefficient of friction, and it is difficult to process the surface into a flat shape. Therefore, after the first cleaning of the first cleaning unit, a large amount of the chemical solution adheres to the liquid discharging surface, so that the amount of the wiping tape is increased during the second cleaning. Further, the chemical solution attached to the upper end portion of the blade does not easily flow to the lower end portion of the blade, and the processing unit cost is increased, and it is not easy to replace.

Advanced technical literature

Patent literature

Patent Document 1 Japanese Laid-Open Patent Publication No. 2006-248102

SUMMARY OF THE INVENTION An object of the present invention is to provide a cleaning unit which can improve the cleaning efficiency of a nozzle for discharging a treatment liquid.

Further, an object of the present invention is to provide a chemical liquid application device having the above-described cleaning unit.

Further, it is an object of the present invention to provide a method of cleaning a nozzle of a chemical solution applying apparatus by the above-described cleaning unit.

A cleaning unit that achieves one of the above-described objects of the present invention includes a doctor blade and a fixing member.

The doctor blade has a sheet shape and can be scraped off to remove the treatment liquid remaining on the discharge surface of the treatment liquid from which the discharge head of the treatment liquid can be discharged. The fixing member can be combined with the aforementioned scraper to fix the position of the scraper.

Specifically, the fixing member includes first and second fixing portions. The first fixing portion is disposed to face one surface of the scraper. The second fixing portion is provided to face the first fixing portion so as to be opposed to the first fixing portion, and is coupled to the first fixing portion to fix the blade to the first fixing portion.

In addition, the scraper includes a bottom plate made of a compressed paper material.

Further, the scraper may further include a coating layer. The coating layer is applied to the outer surface of the bottom plate and is made of a synthetic resin material.

Further, the processing liquid coating apparatus which can achieve the above-described object of the present invention includes a substrate supporting member, at least one ejection head, and first and second cleaning units.

The object can be placed on the substrate supporting member. The discharge head can apply a treatment liquid to an object placed on the substrate supporting member. The first cleaning unit can scrape off and remove the treatment liquid remaining on the discharge surface of the treatment liquid of the discharge head. The second cleaning unit can wipe the treatment liquid remaining on the discharge surface of the treatment liquid.

Specifically, the first cleaning unit includes a scraper. The doctor blade has a sheet shape and can scrape off the treatment liquid remaining on the discharge surface of the treatment liquid.

The first cleaning unit may further include a fixing member. The fixing member can be combined with the aforementioned scraper to fix the position of the scraper.

Further, a cleaning method of the chemical solution coating apparatus which can realize one of the above-described objects of the present invention will be described below. First, a blade having a sheet shape is fixed by a fixing member. Further, a discharge head for discharging the treatment liquid is disposed on the upper portion of the scraper. In the above-described doctor blade, the treatment liquid remaining on the discharge surface of the treatment liquid is scraped off while the discharge surface of the treatment liquid of the discharge head is vertically disposed.

According to the present invention, the doctor blade is formed into a sheet shape, and the shape thereof is changed easily, so that the contact area with the treatment liquid remaining on the discharge surface can be minimized. Therefore, the cleaning efficiency of the cleaning unit can be improved, and the manufacturing cost can be reduced.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the accompanying drawings. Hereinafter, an ink jet printing apparatus capable of forming a color filter layer of a liquid crystal display device will be described as an example of a processing liquid coating apparatus. However, the processing liquid coating apparatus can form a plurality of thin films in addition to the color filter layer, and has a liquid crystal. A variety of uses other than display devices to form a film or to form a particular pattern.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view schematically showing a film forming apparatus according to an embodiment of the present invention.

Referring to Fig. 1, film forming apparatus 1000 may include inkjet printing unit 100, processing liquid supply unit 200, loading unit 300, unloading unit 400, index unit 500, baking unit 600, and main control unit 700.

The inkjet printing unit 100 may apply a processing liquid such as RGB ink on the substrate 10 to form a color filter layer on the substrate 10. In the present embodiment, the inkjet printing unit 100 may apply RGB ink to form a color filter layer. Of course Further, the inkjet printing unit 100 can apply a plurality of types of processing liquids in addition to the RGB ink, whereby a plurality of films such as a film corresponding to the processing liquid such as an alignment film can be formed on the substrate 10.

The main control unit 700 provided on the inkjet printing unit 100 side can control the program conditions of the inkjet printing unit 100, and the inkjet printing unit 100 is subjected to a coating process under the control of the main control unit 700.

The processing liquid supply unit 200 is provided on one side of the inkjet printing unit 100. The processing liquid supply unit 200 can store the processing liquid for applying the substrate 10 to the inkjet printing unit 100, and supply the processing liquid to the inkjet printing unit 100. In the present embodiment, the processing liquid supply unit 200 stores the RGB inks individually without mixing them.

The other side of the inkjet printing unit 100 is provided with the loading unit 300 that can be externally supplied to the substrate 10 in standby mode for storage, and the substrate 10 for storing the processing procedure of the thin film forming apparatus 1000. The unloading unit 400 described above.

The loading unit 300 and the unloading unit 400 are provided on one side of the index unit 500, and the loading unit 300 and the unloading unit 400 are opposed to the inkjet printing unit 100 with the index unit 500 interposed therebetween. The index unit 500 communicates with the inkjet printing unit 100, the loading unit 300, the unloading unit 400, and the firing unit 600, and may be in the inkjet printing unit 100, the loading unit 300, the unloading unit 400, and the baking unit 600. The substrate 10 is transferred between.

Specifically, the index unit 500 includes a transfer robot (not shown) that can transfer the substrate 10, and the transfer robot can take out the substrate 10 from the loading unit 300 and transfer it to the inkjet printing unit 100. . The inkjet printing unit 100 described above completes the aforementioned substrate 10 After the RGB ink is applied, the transfer robot automatically takes out the substrate 10 on which the color filter layer has been formed from the inkjet printing unit 100, and transfers it to the baking unit 600. The baking unit 600 heats the substrate 10 placed thereon to cure the color filter layer formed on the substrate 10, thereby completing the film forming process of the film forming apparatus 1000. The transfer robot is taken out from the baking unit 600 and then transferred to the unloading unit 400. The substrate 10 stored in the unloading unit 400 is carried out to the outside by the returning device.

The outline of the structure of the film forming apparatus 1000 has been described above. Hereinafter, the ink jet printing unit 100 will be specifically described with reference to the drawings.

Fig. 2 is a perspective view showing the ink jet printing portion shown in Fig. 1, and Fig. 3 is a plan view showing the ink jet printing portion shown in Fig. 2.

2 and 3, the inkjet printing unit 100 may include a gantry 110, a substrate supporting portion 120, a gantry 130, first and second ejection head assemblies 140a and 140b, and first and second ejection head moving portions. 151, 152, first cleaning unit 160, and second cleaning unit 170.

The gantry 110 is provided with a device for applying the processing liquid, that is, a substrate supporting portion 120, a holder (Gantry) 130, first and second ejection head units 140a and 140b, and first and second ejection head moving units 151 and 152. The first cleaning unit 160 and the second cleaning unit 170. The gantry 110 is provided with a central rail portion 111 extending along one side of the gantry 110, and the central rail portion 111 is coupled to the substrate supporting portion 120. The substrate supporting portion 120 can support the substrate 10 to which the processing liquid is applied, and move along the central rail portion 111. Moreover, the substrate supporting portion 120 may be disposed to be rotatably disposed to mount the substrate 10 The support table is fixed to the support table when the liquid coating process is performed.

Further, the gantry 110 may include first and second guide rails 112a and 112b which are provided to face each other with the central rail portion 111 interposed therebetween. Each of the first and second rails 112a and 112b is formed to extend in the first direction D1 which is the same as the center rail portion 111, and has substantially the same length as one side of the gantry 110 extending in the first direction D1.

The first and second guide rails 112a and 112b are coupled to the bracket 130. Both ends of the bracket 130 are coupled to the first and second guide rails 112a and 112b, respectively, and are horizontally movable along the first and second guide rails 112a and 112b.

The first and second discharge head assemblies 140a and 140b are fixed to the holder 130. When the holder 130 is horizontally moved, the first and second ejection head units 140a and 140b provided in the holder 130 are moved together, whereby the first and second ejection head units 140a can be changed in the first direction D1. , 140b location.

The first and second discharge head units 140a and 140b are supplied with the treatment liquid by the treatment liquid supply unit 200, and discharge the treatment liquid onto the substrate 10 fixed to the substrate support unit 120. In the present embodiment, the ink jet printing unit 100 includes two discharge head units 140a and 140b. However, the number of the discharge head units 140a and 140b may be increased or decreased depending on the program efficiency and the size of the discharge head units 140a and 140b.

The first and second discharge head assemblies 140a and 140b are arranged side by side in the first direction D1, and the positions are separated from each other. In this embodiment, the first and second ejection head assemblies 140a, 140b are identical to each other. Construction. Therefore, the first discharge head unit 140a will be specifically described below, and the description of the second discharge head unit 140b will be omitted.

The first discharge head unit 140a includes the first, second, and third discharge heads 141a, 142a, and 143a arranged in parallel in the second direction D2 perpendicular to the first direction D1 in the horizontal direction, and the first Each of the second and third discharge heads 141a, 142a, and 143a includes a plurality of nozzles that can discharge the processing liquid.

In the present embodiment, the first discharge head unit 140a includes three discharge heads 141a, 142a, and 143a. However, the number of the discharge heads 141a, 142a, and 143a may be increased or decreased depending on the program efficiency and the number of types of the processing liquid.

The first, second, and third discharge heads 141a, 142a, and 143a can discharge ink of different colors to form a color filter layer on the substrate 10. Specifically, the first discharge head 141a can discharge red R ink, the second discharge head 142a can discharge green G ink, and the third discharge head 143a can discharge blue B ink. Here, the ink set of the first, second, and third discharge heads 141a, 142a, and 143a may be changed depending on the color pixel group of the color filter layer.

Each of the discharge heads 141a, 142a, and 143a is rotatable with respect to the central axis of each of the discharge heads 141a, 142a, and 143a.

In the processing liquid application procedure, the first, second, and third discharge heads 141a, 142a, and 143a may simultaneously eject ink or discharge ink from only one of the discharge heads at a time. Further, the first, second, and third discharge heads 141a, 142a, and 143a may alternately discharge ink.

Further, when the processing liquid coating program is used, the foregoing 1 and the second discharge head units 140a and 140b, the first and second discharge head units 140a and 140b simultaneously discharge ink, or the first and second discharge head units 140a and 140b alternately discharge ink. Further, after the ink is applied by driving any one of the first and second discharge head units 140a and 140b and the ink is supplied to the discharge head unit, the remaining discharge head unit is driven and coated. ink.

Further, the first and second discharge head units 140a and 140b are fixed to the first discharge head moving unit 151, and the first discharge head moving unit 151 is provided with a first moving rail extending in the second direction D2. The first and second discharge head assemblies 140a and 140b are coupled to the mutually different first moving rails, and are movable back and forth along the first moving rails in the second direction D2. Here, each of the discharge heads of the first and second discharge head units 140a and 140b can be individually moved along the first moving rail to be coupled.

The first discharge head moving portion 151 is fixed to the second discharge head moving portion 152, and the second discharge head moving portion 152 is provided with a second moving rail (not shown in the drawings). The second moving rail extends in a direction D3 perpendicular to the first and second directions D1 and D2, that is, in a third direction D3 perpendicular to the upper surface of the gantry 110. The first discharge head moving portion 151 is coupled to the second moving rail, and is movable back and forth along the second moving rail in the up/down direction D2. The second ejection head moving portion 152 is fixed to the holder 130. The bracket 130 is provided with a third moving rail that extends in the second direction D2. The second discharge head moving unit 152 is coupled to the third moving rail, and is movable back and forth in the second direction D2 along the third moving rail.

As described above, the first and second ejection head units 140a and 140b can be moved in the first to third directions D1, D2, and D3 by the holder 130 and the first and second ejection head moving units 151 and 152. . In other words, the first and second discharge head units 140a and 140b can be moved in the first direction D1 by the horizontal movement of the holder 130, and can be moved in the second direction D2 by the second discharge head moving unit 152. Further, the first discharge head moving unit 151 moves in the third direction D3. Further, each of the discharge heads of the first and second discharge head units 140a and 140b is movable in the second direction D2 along the corresponding first movement rail.

In the processing liquid application procedure, the first and second ejection head units 140a and 140b are movable by the first and second ejection head moving units 151 and 152 and the holder 130, and the substrate 10 is coated with ink. Further, the substrate supporting portion 120 may move in the first direction D1 along the center rail portion 111, and the first and second ejection head assemblies 140a and 140b move only in the second and third directions D2 and D3. And the ink is applied.

Further, the first and second cleaning units 160 and 170 are provided in the maintenance repair area between the center rail portion 111 and the second rail 112b of the gantry 110.

The first cleaning unit 160 scrapes off the ink remaining on the first and second discharge head units 140a and 140b. The description of the structure of the first cleaning unit 160 will be described later with reference to FIG. 4 to FIG. 12 which will be described later.

The second cleaning unit 170 is provided on one side of the first cleaning unit 160. When the aforementioned bracket 130 is at the starting position, the second cleaning unit 170 is opposed to the holder 130 by sandwiching the first cleaning unit 160. The second cleaning unit 170 can wipe the ink adhering to the nozzles of the first and second discharge head assemblies 140a and 140b to increase the yield of the product. Here, the second cleaning unit 170 may perform cleaning twice for the nozzle that has been washed once by the first cleaning unit 160, or clean the nozzle that has not been cleaned by the first cleaning unit 160.

The second cleaning unit 170 may include a supply roller, a recovery roller, and a wiper. Specifically, the supply roller and the recovery roller are coupled via the wiping tape. The wiping tape has a belt shape, and the first end portion is fixed to the supply roller, and the second end portion is fixed to the recovery roller. When the first and second discharge head units 140a and 140b are cleaned, the wiping tape comes into contact with the discharge surface from which the ejection heads of the first and second discharge head units 140a and 140b discharge ink, and wipes the discharge heads. Residual ink. The wiping tape is supplied while being wound up in the supply roller, and the portion contaminated by the cleaning of the nozzle is wound into the recovery roller. That is, the supply roller can provide an uncontaminated wiping tape, and the recycling roller can recover the contaminated wiping tape.

Hereinafter, the structure of the first cleaning unit 160 will be specifically described with reference to the drawings.

Fig. 4 is a partially exploded perspective view showing the first cleaning unit shown in Fig. 2, and Fig. 5 is a plan view showing the first cleaning unit shown in Fig. 4.

4 and 5, the first cleaning unit 160 may include a main frame 161, a drain groove 162, an upper frame 163, a plurality of scrapers 164, and a plurality of fixing members 168.

Specifically, the aforementioned main frame 161 has a quadrangular shape, the upper surface is open, and the side surface is partially open. The inside of the main frame 161 is provided inside The cleaning groove 162 and the cleaning groove 162 can recover the ink that has been removed by the scraper 164.

The upper frame 163 is provided on the upper portion of the main frame 161 and the cleaning groove 162. The upper frame 163 may be combined with the upper end portion of the aforementioned main frame 161, and has a quadrangular shape like the aforementioned main frame 161, and is opened at both the upper and lower sides.

The plurality of scrapers 164 are provided at equal intervals inside the upper frame 163, and can be scraped off to remove a treatment liquid such as ink remaining on the discharge surface of each of the discharge heads. In the present embodiment, the first cleaning unit 160 includes six doctor blades 164. However, the number of the doctor blades 164 is based on the discharge heads included in the first and second discharge head units 140a and 140b (see FIG. 2). Increase in number.

The plurality of scrapers 164 are disposed in a one-to-one correspondence with the discharge heads of the first and second discharge head assemblies 140a and 140b, and are disposed in the same manner as the discharge heads of the first and second discharge head assemblies 140a and 140b. . In other words, the first and second discharge head units 140a and 140b are arranged in parallel with each other, and the discharge heads of the discharge head units 140a and 140b are disposed perpendicular to the arrangement direction of the first and second discharge head units 140a and 140b. In the direction. Similarly, the scraper is arranged in two rows of three in the arrangement direction of the first and second discharge head assemblies 140a and 140b.

In the present embodiment, the distance between the doctor blades in the same row is set according to the distance between the first and third discharge heads 141a, 142a, and 143a, and the plurality of blades 164 can be simultaneously cleaned and disposed on a single discharge head. The first to third discharge heads 141a, 142a, and 143a on the module.

The plurality of scrapers 164 are fixed to the upper frame 163 by a plurality of the fixing members 168. The plurality of fixing members 168 are arranged in a one-to-one correspondence with the plurality of scrapers 164, and are coupled to the corresponding scrapers. The individual structure of the scraper 164 and the fixing member 168, and the coupling relationship between the scraper 164 and the fixing member 168 will be described later with reference to FIGS. 6 to 12 to be described later.

The first cleaning unit 160 may further include a cleaning nozzle 169 that can clean the cleaning tank 162. The cleaning nozzles 169 are arranged side by side on the inner side of the upper end of the cleaning groove 162, and are supplied with the cleaning liquid through the cleaning liquid supply port 162a, so that the inside of the cleaning groove 162 can be cleaned. That is, the cleaning liquid sprayed by the cleaning nozzle 169 flows along the inner wall of the cleaning groove 162, and the foreign matter remaining on the inner wall of the cleaning groove 162, such as the ink flowing into the cleaning groove 162 by the scraper 164, Externally discharged. Here, the lower end portion of the draining groove 162 may be provided with an exhaust port 162b that discharges foreign matter that has flowed into the inside of the draining groove 162 toward the outside, and provides an exhaust pressure for sucking foreign matter toward the exhaust port.

Hereinafter, the scraper 164 and the fixing member 168 will be specifically described with reference to the drawings.

6 is a partially exploded perspective view showing the fixing member and the doctor blade shown in FIG. 5, FIG. 7 is a plan view showing the doctor blade shown in FIG. 6, and FIG. 8 is cut along the cutting line I-I' of FIG. Surface map.

Referring to Fig. 6 through Fig. 8, the doctor blade 164 has a sheet shape and is scraped to remove a treatment liquid such as ink remaining on the discharge surface of the corresponding discharge head. In the present embodiment, the scraper 164 has a square shape, but the shape of the scraper 164 is not limited thereto, and may have various shapes.

The scraper 164 may include a bottom plate 61 coated on the bottom plate 61 The coating layer 62 of the aforementioned bottom plate 61 can be protected on the surface. The bottom plate 61 is made of a material that can be easily processed, can be maintained in a constant shape, and can be bent, such as a compressed paper material. As described above, the scraper 164 is composed of a cheap compression paper material, so that cost can be saved, and the damage of the corresponding discharge head can be minimized even if it collides with the corresponding discharge head.

The coating layer 62 is composed of a synthetic resin material such as polypropylene or polyethylene which has chemical stability and is resistant to a surface friction coefficient lower than that of the above-mentioned compressed paper material. Thereby, the ink adhering to the scraper 164 can easily flow downward along the scraper 164, and can easily flow into the draining groove 162 (see FIG. 4), so that the cleaning efficiency can be improved.

The aforementioned doctor blade 164 of one embodiment of the present invention may have a thickness of about 0.2 mm or even about 1 mm.

In the present embodiment, the scraper 164 is composed of the bottom plate 61 and the coating layer 62, but may be constituted only by the bottom plate 61. When the scraper 164 is constituted only by the bottom plate 61, the thickness of the scraper 164 can be made smaller than when the coating layer 62 is included.

Fig. 9 is a side view showing the positional relationship between the doctor blade and the first discharge head shown in Fig. 6 when the treatment liquid is removed. For reference, only the positional relationship between the first discharge head 141a of the first discharge head unit 140a (see Fig. 2) and the corresponding blade 164 is shown in Fig. 9, but the discharge head and the corresponding blade are provided. The positional relationship between them is the same.

Referring to Fig. 9, when the ink remaining on the discharge surface of each discharge head is removed, the first discharge head 141a of the first discharge head unit 140a is placed in the corresponding scraper by the movement of the holder 130 (see Fig. 2). The upper part of the knife 164.

A plurality of nozzles 41 capable of discharging ink are provided on the lower surface of the first discharge head 141a, and the scraper 164 is disposed perpendicularly to the discharge surface 41a of the nozzle 41. When the ink 20 of the discharge surface 41a is removed, the first end portion of the scraper 164 prevents the scraping blade 164 from being damaged by the discharge surface 41a, and is separated from the discharge surface 41a and remains on the discharge surface 41a. The ink 20 is in contact. In other words, the doctor blade 164 is only in contact with the ink 20 in a state of not contacting the discharge surface 41a, and the ink 20 on the discharge surface 41a is removed.

In the present embodiment, the distance T1 between the scraper 164 and the discharge surface 41a is about 0.3 mm or even 0.1 mm.

Further, in the present embodiment, the first end portion of the scraper 164 that is in contact with the ink 20 is disposed perpendicular to the discharge surface 41a.

The scraper 164 includes first and second guide faces 64a and 64b and a removal face 64c. The first and second guide faces 64a and 64b are disposed perpendicular to the discharge surface 41a and face each other. The removal surface 64c is located between the first and second guide surfaces 64a and 64b, and is formed in a substantially vertical state with respect to the first and second guide surfaces 64a and 64b, and is formed of a flat surface. The removal surface 64c is located at the first end of the scraper 164, and is in contact with the ink 20 on the discharge surface 41a when the ink 20 is removed.

When the ink 20 on the discharge surface 41a is removed, the first discharge head 141a horizontally moves in a state where the ink 20 is in contact with the first end portion of the doctor blade 164, and the discharge surface 41a is placed on the discharge surface 41a by surface tension. The ink 20 is led to the first end of the scraper 164 and removed on the discharge surface 41a. At this time, the first discharge head 141a The traveling direction HD is a direction in which the first guiding surface 64a side travels toward the second guiding surface 64b side.

The doctor blade 164 has a sheet shape, so that the contact area with the ink 20 can be minimized, whereby the doctor blade 164 does not need to minimize the contact area of the ink 20, and the removal surface 64c is processed into an inclined surface. , can improve cleaning efficiency.

Fig. 10 is a view showing another example of the doctor blade shown in Fig. 6. Fig. 11 is a side view showing the positional relationship between the doctor blade and the first discharge head shown in Fig. 10 when the treatment liquid is removed.

Referring to Fig. 10 and Fig. 11, the blade 180 shown in Fig. 10 is the same as the shape of the first end portion 182 which is in contact with the ink 20 remaining on the discharge surface 41a when the nozzle 41 is cleaned, and is similar to Fig. 6 to Fig. 9 The doctor blade 164 has the same configuration and shape. Therefore, hereinafter, the description of the scraper 164 shown in FIG. 6 will be omitted in the detailed description of the scraper 180.

In the cleaning of the nozzle 41, the scraper 180 is disposed perpendicular to the discharge surface 41a, and the first end portion 182 is bent toward one surface of the scraper and is provided to be inclined with respect to one surface of the scraper 180. In the present embodiment, the angle CA formed by the first end portion 182 and one surface of the scraper 180 that is in contact with the first end portion 182 in the bending direction of the first end portion 182 is greater than 90 degrees and less than 180. degree.

When the ink 20 of the discharge surface 41a is removed, the first discharge head 141a horizontally moves in a state where the ink 20 is in contact with the first end portion 182 of the blade 180, and the ink of the discharge surface 41a is applied by surface tension. 20 leads to the first end portion 182 of the scraper 180 and is removed from the discharge surface 41a. At this time, the aforementioned scraper 180 is equipped with The bending direction of the first end portion 182 is opposite to the traveling direction HD of the first discharge head 141a. Thereby, during the cleaning of the nozzle 41, the ink 20 adhering to the first end portion 182 is separated from the blade 180 by gravity and falls into the drain groove 162 (see FIG. 4). Therefore, the cleaning efficiency of the aforementioned scraper 180 can be improved.

Referring again to FIGS. 5 and 6, the scraper 164 can be coupled to the fixing member 168 to fix its position. The fixing member 168 is fixed to the upper frame 163 and may include first and second fixing portions 165 and 166. The first fixing portion 165 may have a plate shape and be disposed to face the scraper 164 and be fixed to the upper frame 163. In the present embodiment, the first fixing portion 165 may be integrally provided with the upper frame 163 or may be detachable.

The second fixing portion 166 is disposed to face the first fixing portion 165, and is coupled to the first fixing portion 165 with the scraper 164 interposed therebetween to fix the scraper 164 to the first fixing portion 165. When the fixing member 168 is coupled to the scraper 164, the scraper 164 is disposed such that the first end portion protrudes upward from the first and second fixing portions 165 and 166.

The second fixing portion 166 may further include guide bars 166a at both ends facing each other in the lateral direction. The guide rod 166a protrudes from the second fixing portion 166, and can be guided to a position where it is coupled to the first fixing portion 165 and the scraper 164. In the present embodiment, the second fixing portion 166 includes two guide bars 166a. However, the number of the guide bars 166a may be increased or decreased depending on the size and coupling efficiency of the fixing member 168.

The scraper 164 is formed with a plurality of through holes 164a into which the guide bars 166a are inserted. The plurality of through holes 164a are configured to be suspended They are separated from each other in the straight direction, and are respectively formed at both end portions of the scraper 164 adjacent to the first end portion. In the present embodiment, the scraper 164 has three through holes 164a formed in the both end portions, but the number of the through holes 164a may be increased or decreased depending on the size and the coupling efficiency of the fixing member 168.

The guide rod 166a is inserted into any one of the through holes vertically arranged in the scraper 164, and the relative vertical position of the scraper 164 to the first and second fixing portions 165 and 166 is changed to be inserted into the guide rod. The position of the through hole of 166a.

Further, the first fixing portion 165 is formed with a coupling hole 165a into which the guide rod 166a can be inserted, and the coupling hole 165a is formed in a one-to-one correspondence with the guide rod 166a. The guide rod 166a is inserted through any one of the plurality of through holes 164a and the corresponding coupling hole 165a, and inserted into the corresponding through hole and the coupling hole 165a.

The fixing member 168 may further include a plurality of coupling members 167 that can fasten and fix the blade 164 to the first fixing portion 165. In the present embodiment, although the fixing member 168 includes two coupling members 167, the number of the coupling members 167 may increase or decrease depending on the efficiency of the bonding.

The coupling member 167 can be inserted into the second fixing portion 166 to be in contact with one surface of the scraper 164, and the second fixing portion 166 is formed in a one-to-one correspondence with the coupling member 167, and the coupling member 167 can be used. The insertion hole 166b is inserted.

Specifically, the coupling member 167 may include a support head 167a, a coupling post 167b, and a magnetic portion 167c. The support head 167a has a larger size than the insertion hole 166b, and the aforementioned coupling post 167b can be from the foregoing The support head 167a extends to be inserted into the aforementioned insertion hole 166b. The magnetic portion 167c is insertable into the inside of the coupling post 167b, has magnetic properties, and is in contact with one surface of the scraper 164 on one surface. The magnetic portion 167c can closely fix the blade 164 to the first fixing portion 165 by a magnetic force formed between the first fixing portion 165. In the present embodiment, the first fixing portion 165 is made of a material that can react with the magnetic member and form a magnetic force with the coupling member 167, such as a stainless steel material.

As described above, the fixing member 168 can bond the first and second fixing portions 165 and 166 to each other by the magnetic properties of the coupling member 167, so that assembly is easy.

The outer surface of the coupling post 167b may be formed with a thread, and the surface of the second fixing portion 166 for defining the insertion hole 166b may form a thread corresponding to the thread of the coupling post 167b. Thereby, the threads of the coupling post 167b and the threads of the insertion hole 166b can be engaged with each other.

Fig. 12 is a view showing another example of the first fixing portion shown in Fig. 6.

Referring to FIGS. 6 and 12 , the first fixing portion 190 may include a fixing body 191 that can be coupled to the second fixing portion 166 , and a metal layer 192 formed on one surface of the fixing body 191 . The metal layer 192 is opposed to the scraper 164 and is made of a metal material such as stainless steel which can react to the magnetic properties. Thereby, a magnetic force can be formed between the magnetic portion 167c of the coupling member 167 and the metal layer 192.

In the present embodiment, the metal layer 192 is formed on one surface of the fixed body 191 and exposed to the outside, but may be provided inside the fixed body 191.

Hereinafter, the first cleaning unit 160 is cleaned with reference to the drawings. The process of the discharge surfaces of the first and second discharge head assemblies 140a and 140b will be specifically described.

Fig. 13 is a flow chart showing the process of cleaning the first and second discharge head assemblies by the first cleaning unit shown in Fig. 2, and Fig. 14 is a view showing the blade and the first discharge head shown in Fig. 6 when the treatment liquid is removed. Configure the relationship.

Referring to FIGS. 2, 5, 13, and 14, first, the scraper 164 is fixed in the upper frame 163 by the fixing member 168 (S110).

Then, the first and second discharge head assemblies 140a and 140b are disposed on the upper portion of the first cleaning unit 160 (S120).

The first and second discharge head units 140a and 140b are horizontally moved, and the doctor blade 164 scrapes off the chemical liquid remaining on the discharge surface of the corresponding discharge head (S130). At this time, as shown in FIG. 14, the scraper 164 is disposed to form an angle of more than 0 degrees and less than 90 degrees with respect to an arbitrary line extending in the longitudinal direction of the corresponding discharge head.

After the first cleaning of the first cleaning unit 160 is completed, the first and second ejection head assemblies 140a and 140b are washed by the second cleaning unit 170 (S140).

In the present embodiment, the cleaning of the first cleaning unit 160 may be performed after the ink application is completed on one of the substrates 10. When the program standby time is long, the ink may be removed by removing the solidified ink inside each nozzle.

Further, if the scraper 164 is repeatedly washed for the predetermined number of times of the first and second discharge head assemblies 140a and 140b, the scraper 164 can be reused after removing the portion contaminated by the washing of the discharge surface (S150). . That is, the shape of the scraper 164 is relatively easy to change, and it is easy to cut the contaminated portion, so that the contaminated portion can be cut and then re-submitted. use. When the contaminated portion is cut, the height of the scraper 164 is lowered, so that the through hole into which the guide rod 166a is inserted is changed.

The present invention has been described with reference to the embodiments, and various modifications and changes can be made to the present invention within the scope of the invention as disclosed in the following claims.

10‧‧‧Substrate

20‧‧‧Ink

41‧‧‧Nozzles

41a‧‧‧ spit out

61‧‧‧floor

62‧‧‧ coating

64a, 64b‧‧‧1st and 2nd guiding surfaces

64c‧‧‧ Remove face

100‧‧‧Inkjet Printing Department

110‧‧‧ 台台

111‧‧‧Central Rail Department

112a, 112b‧‧‧1st and 2nd rails

120‧‧‧Substrate Support Department

130‧‧‧ bracket

140a, 140b‧‧‧1st and 2nd spit head assemblies

141a, 142a, 143a‧‧‧1st, 2nd and 3rd spit heads

151, 152‧‧‧1st and 2nd ejection head moving parts

160‧‧‧1st cleaning unit

161‧‧‧ main structure

162‧‧‧ clean slot

162a‧‧‧cleaning fluid supply埠

162b‧‧‧Exhaust gas

163‧‧‧ upper frame

164‧‧‧ scraper

164a‧‧‧through hole

165, 166‧‧‧1st and 2nd fixed parts

165a‧‧‧bond hole

166a‧‧‧guides

166b‧‧‧ insertion hole

167‧‧‧Combined components

167a‧‧‧Support head

167b‧‧‧ binding column

167c‧‧ Magnetic Department

168‧‧‧Fixed components

169‧‧‧ cleaning nozzle

170‧‧‧2nd cleaning unit

180‧‧‧ scraper

182‧‧‧1st end

190‧‧‧1st fixed department

191‧‧‧ fixed ontology

192‧‧‧metal layer

200‧‧‧Processing Liquid Supply Department

300‧‧‧Loading Department

400‧‧‧Unloading Department

500‧‧‧ Index Department

600‧‧‧Decoction Department

700‧‧‧Main Control Department

1000‧‧‧film forming device

CA‧‧‧ angle

D1‧‧‧1st direction

D2‧‧‧2nd direction

D3‧‧‧3rd direction

HD‧‧‧direction of travel

T1‧‧‧ separation distance

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view schematically showing a film forming apparatus according to an embodiment of the present invention.

Fig. 2 is a perspective view showing the ink jet printing portion shown in Fig. 1.

Fig. 3 is a plan view showing the ink jet printing portion shown in Fig. 2.

Fig. 4 is a partially exploded perspective view showing the first cleaning unit shown in Fig. 2;

Fig. 5 is a plan view showing the first cleaning unit shown in Fig. 4.

Fig. 6 is a partially exploded perspective view showing the fixing member and the doctor blade shown in Fig. 5.

Figure 7 is a plan view showing the doctor blade shown in Figure 6.

Fig. 8 is a cross-sectional view taken along the cutting line I-I' of Fig. 7.

Fig. 9 is a side view showing the positional relationship between the doctor blade and the first discharge head shown in Fig. 6 when the treatment liquid is removed.

Fig. 10 is a view showing another example of the doctor blade shown in Fig. 6.

Fig. 11 is a side view showing the positional relationship between the doctor blade and the first discharge head shown in Fig. 10 when the treatment liquid is removed.

Fig. 12 is a view showing another example of the first fixing portion shown in Fig. 6.

Fig. 13 is a flow chart showing the process of cleaning the first and second discharge head assemblies by the first cleaning unit shown in Fig. 2;

Fig. 14 is a view showing the relationship between the blade and the first discharge head shown in Fig. 6 when the treatment liquid is removed.

164‧‧‧ scraper

164a‧‧‧through hole

165, 166‧‧‧1st and 2nd fixed parts

165a‧‧‧bond hole

166a‧‧‧guides

166b‧‧‧ insertion hole

167‧‧‧Combined components

167a‧‧‧Support head

167b‧‧‧ binding column

167c‧‧ Magnetic Department

Claims (22)

A cleaning unit comprising: a doctor blade having a sheet shape, scraping and removing a treatment liquid remaining on a discharge surface of a treatment liquid of a discharge head capable of discharging a treatment liquid; and a fixing member which can be coupled with the scraper to fix the scraper The fixing member includes: a first fixing portion disposed to face one surface of the scraper; and a second fixing portion disposed to face the first fixing portion with the scraper interposed therebetween, and the first fixing portion And fixing the scraper to the first fixing portion; and at least one coupling member is insertable into the second fixing portion to be in contact with one surface of the scraper, and the scraper is closely attached to the first fixing portion The second fixing portion is formed corresponding to the coupling member, and is formed with an insertion hole through which the coupling member is inserted, the coupling member includes: a body, and a support head having a size larger than the insertion hole and the support head a binding post that can be inserted into the insertion hole; and a magnetic portion that can be inserted into the inside of the coupling column, has magnetic properties, and one surface is in contact with one surface of the scraping blade, Which the magnetically formed between the first and the fixing portion fixed to the blade against the first fixing portion. In the cleaning unit of the first aspect of the patent application, the first fixing portion is made of a material that can react to the magnetic properties. For example, in the cleaning unit of claim 1, the first fixed part includes: The fixing body is coupled to the second fixing portion, and the metal layer is coupled to the fixing body and opposed to the blade, and is made of a metal material capable of reacting to the magnetic force. The cleaning unit of claim 1, wherein the binding post has a threaded outer surface, and the surface defining the insertion hole is formed with a thread corresponding to the thread of the coupling post. In the cleaning unit of the first aspect of the invention, the scraper may provide at least one through hole, and at least one of the first fixing portion and the second fixing portion may provide a coupling hole, and the others include protruding from one side, in order The through hole and the coupling hole are inserted through the through hole and the at least one guiding portion of the through hole and the coupling hole. In the cleaning unit of claim 5, the scraper can provide a plurality of the through holes, and the plurality of through holes are disposed to be separated from each other in the vertical direction. The cleaning unit of claim 1, further comprising: an upper frame fixedly provided with the first fixing portion; and a cleaning groove disposed under the upper frame to recover the removed by the scraper Treatment fluid. In the cleaning unit of claim 1, the scraper is disposed to be inclined at an angle greater than 0 degrees and less than 90 degrees to an arbitrary line extending toward the longitudinal direction of the discharge head. The cleaning unit according to any one of claims 1 to 8, wherein the scraper comprises: The first and second guiding surfaces are disposed to face each other with respect to the processing liquid discharge surface of the discharge head; and the removal surface is provided between the first and second guiding surfaces for the first and second 2 The guide surface is slightly vertical and is composed of a flat surface. When the treatment liquid on the discharge surface of the treatment liquid is removed, it is brought into contact with the treatment liquid. The cleaning unit according to any one of claims 1 to 8, wherein the scraper is disposed such that one end of the treatment liquid remaining on the discharge surface of the treatment liquid is bent toward one side of the scraper, and One side of the scraper is tilted. The cleaning unit according to any one of claims 1 to 8, wherein the scraper comprises a bottom plate made of a compressed paper material. According to the cleaning unit of claim 11, the scraper further includes a coating layer made of a synthetic resin material applied to the outer surface of the bottom plate. For example, in the cleaning unit of claim 12, the synthetic resin material is polypropylene or polyethylene. A treatment liquid coating device comprising: a substrate supporting member for arranging an object; at least one ejection head, which can apply a treatment liquid to an object placed on the substrate supporting member; the first cleaning unit can be scraped The treatment liquid remaining on the discharge surface of the treatment liquid of the discharge head is removed; and the second cleaning unit wipes the treatment liquid remaining on the discharge surface of the treatment liquid; and the first cleaning unit includes a sheet shape. Can scrape the aforementioned a scraper for treating the liquid remaining on the liquid discharge surface; wherein the first cleaning unit further includes a fixing member that can be coupled to the scraper to fix the position of the scraper, wherein the fixing member includes a first fixing portion and is disposed a second fixing portion is provided to face the first fixing portion so as to be opposed to the first fixing portion, and the second fixing portion is coupled to the first fixing portion to fix the blade to the first fixing portion; at least one The coupling member is insertable into the second fixing portion and is in contact with one surface of the scraper, and has magnetic properties, and the scraper can be closely attached to the first fixing portion by a magnetic force formed between the first fixing portion and the first fixing portion. The first fixing portion includes a substance that can react with the magnetic force, and the second fixing portion is formed corresponding to the coupling member, and an insertion hole into which the coupling member can be inserted is formed. The processing liquid application device according to claim 14, wherein the doctor blade comprises a bottom plate made of a compressed paper material. The processing liquid coating device according to claim 15, wherein the doctor blade further comprises a coating layer made of a synthetic resin material applied to the outer surface of the bottom plate. A cleaning method of a processing liquid coating apparatus, comprising: inserting the bonding member into the fixing member in a state in which a blade having a sheet shape is disposed in a first fixing portion of a positioning member to be positioned 2, the fixing portion is formed with an insertion hole corresponding to the coupling member, and the magnetic portion of the coupling member having the magnetic property is insertable into the interior of the coupling post of the coupling member body which is larger than the support head of the insertion hole and can be inserted into the insertion hole To make the aforementioned second fixed a portion is in contact with one surface of the scraper, and the second fixing portion is coupled to the first fixing portion so as to be detachably coupled to the first fixing portion, and one surface of the magnetic portion is brought into contact with one surface of the scraping blade. a magnetic force formed between the magnetic portion and the first fixing portion fixes the scraper to the first fixing portion; a discharge head capable of discharging a processing liquid is disposed on an upper portion of the scraper; and the scraping blade is disposed on the discharge head The treatment liquid remaining on the discharge surface of the treatment liquid is scraped off while the treatment liquid discharge surface is vertically disposed. In the method of cleaning a treatment liquid application device according to claim 17, the doctor blade has a through hole formed therein, and at least one of the first fixing portion and the second fixing portion has a coupling hole formed therein, and the others are formed with The at least one guiding portion protrudes from the through hole and the coupling hole, and is inserted into the through hole and the coupling hole to adjust the blade and the first and second fixing portions The combined position of the room. The cleaning method of the treatment liquid application device according to claim 18, wherein the scraper is formed with a plurality of through holes, and a plurality of through holes are disposed apart from each other in the vertical direction, and the scraper can be cut and cleaned. After the liquid is discharged from the surface and the portion to be contaminated is removed and used, and the contaminated portion is cut, and the scraper is used, the through hole for inserting the guide portion is changed to maintain the processing liquid discharge surface and the scraper The proper separation distance between them. Treatment liquid coating according to any one of claims 17 to 19 In the cleaning method of the apparatus, the first end portion of the processing blade for scraping the processing liquid remaining on the discharge surface of the processing liquid is disposed perpendicular to the processing liquid discharge surface. The cleaning method of the treatment liquid coating device according to any one of the items of the present invention, wherein the scraper is used to scrape the first end portion of the treatment liquid remaining on the discharge surface of the treatment liquid toward the scraper One side is bent, and one side of the scraper is inclined. In the cleaning method of the treatment liquid application device according to claim 21, when the treatment liquid is removed, the discharge head is horizontally moved on the upper portion of the blade, and the bending direction of the first end portion is in the above-described treatment. When the liquid is removed, it is in a direction opposite to the direction in which the ejection head is moved.