CN101946400B - Mems谐振器结构以及结合所述谐振器结构使用的方法 - Google Patents
Mems谐振器结构以及结合所述谐振器结构使用的方法 Download PDFInfo
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- CN101946400B CN101946400B CN200880127024.6A CN200880127024A CN101946400B CN 101946400 B CN101946400 B CN 101946400B CN 200880127024 A CN200880127024 A CN 200880127024A CN 101946400 B CN101946400 B CN 101946400B
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Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/007—For controlling stiffness, e.g. ribs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
- H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02338—Suspension means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0271—Resonators; ultrasonic resonators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0163—Spring holders
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02283—Vibrating means
- H03H2009/0233—Vibrating means comprising perforations
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
- H03H2009/02503—Breath-like, e.g. Lam? mode, wine-glass mode
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/002,936 | 2007-12-18 | ||
US12/002,936 US7777596B2 (en) | 2007-12-18 | 2007-12-18 | MEMS resonator structure and method |
PCT/US2008/084946 WO2009079188A1 (en) | 2007-12-18 | 2008-11-26 | Mems resonator structure and method for use in association with the resonator structure |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101946400A CN101946400A (zh) | 2011-01-12 |
CN101946400B true CN101946400B (zh) | 2014-10-01 |
Family
ID=40467328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200880127024.6A Active CN101946400B (zh) | 2007-12-18 | 2008-11-26 | Mems谐振器结构以及结合所述谐振器结构使用的方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7777596B2 (ja) |
EP (1) | EP2235821B1 (ja) |
JP (1) | JP5021816B2 (ja) |
CN (1) | CN101946400B (ja) |
TW (1) | TWI488432B (ja) |
WO (1) | WO2009079188A1 (ja) |
Families Citing this family (32)
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US7777596B2 (en) * | 2007-12-18 | 2010-08-17 | Robert Bosch Gmbh | MEMS resonator structure and method |
FR2933824B1 (fr) * | 2008-07-11 | 2010-08-13 | St Microelectronics Sa | Resonateur a ondes de volume |
US7888843B2 (en) | 2008-09-10 | 2011-02-15 | Georgia Tech Research Corporation | Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein |
US8040207B2 (en) * | 2009-01-15 | 2011-10-18 | Infineon Technologies Ag | MEMS resonator devices with a plurality of mass elements formed thereon |
US7939990B2 (en) * | 2009-01-30 | 2011-05-10 | Integrated Device Technology, Inc. | Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations |
FR2946478A1 (fr) * | 2009-06-08 | 2010-12-10 | St Microelectronics Sa | Resonateur a ondes de volume. |
FR2946479A1 (fr) * | 2009-06-09 | 2010-12-10 | Commissariat Energie Atomique | Resonateur electromecanique a ancrage resonant. |
US8381378B2 (en) * | 2009-06-19 | 2013-02-26 | Georgia Tech Research Corporation | Methods of forming micromechanical resonators having high density trench arrays therein that provide passive temperature compensation |
US8106724B1 (en) | 2009-07-23 | 2012-01-31 | Integrated Device Technologies, Inc. | Thin-film bulk acoustic resonators having perforated resonator body supports that enhance quality factor |
WO2011047170A1 (en) * | 2009-10-14 | 2011-04-21 | Gavin Ho | Micromechanical resonator with enlarged portion |
FR2954021B1 (fr) * | 2009-12-10 | 2012-08-03 | Commissariat Energie Atomique | Micro/nano-resonateur compense a detection capacitive amelioree et procede d'elaboration |
KR101188007B1 (ko) | 2010-06-21 | 2012-10-05 | 삼성전기주식회사 | 햅틱 피드백 액츄에이터, 햅틱 피드백 디바이스 및 전자장치 |
FR2964652B1 (fr) * | 2010-09-13 | 2015-05-15 | Commissariat Energie Atomique | Dispositif resonant, a detection piezoresistive et a resonateur relie de facon elastique au support du dispositif, et procede de fabrication de celui-ci |
FR2965349B1 (fr) * | 2010-09-23 | 2017-01-20 | Commissariat Energie Atomique | Bolometre a detection frequentielle |
EP2479891A1 (en) * | 2011-01-21 | 2012-07-25 | Imec | MEMS resonator with optimized support anchoring |
JP5588889B2 (ja) * | 2011-02-08 | 2014-09-10 | 太陽誘電株式会社 | 弾性波デバイスおよびフィルタ |
US8501515B1 (en) | 2011-02-25 | 2013-08-06 | Integrated Device Technology Inc. | Methods of forming micro-electromechanical resonators using passive compensation techniques |
EP2515436A1 (en) | 2011-04-18 | 2012-10-24 | Nxp B.V. | MEMS resonator and method of controlling the same |
US8610336B1 (en) | 2011-09-30 | 2013-12-17 | Integrated Device Technology Inc | Microelectromechanical resonators having resistive heating elements therein configured to provide frequency tuning through convective heating of resonator bodies |
DE102011057169A1 (de) * | 2011-12-29 | 2013-07-04 | Maxim Integrated Products, Inc. | Mikroelektromechanisches System |
TWI519066B (zh) * | 2012-06-28 | 2016-01-21 | 清華大學 | 微機電共振器及其訊號處理方法以及製造方法 |
US10419858B2 (en) * | 2014-03-03 | 2019-09-17 | Tdk Corporation | Condenser microphone with non-circular membrane |
KR20160140698A (ko) * | 2014-04-04 | 2016-12-07 | 멤스 스타트 엘엘씨 | 광전자 소자를 이동시키기 위한 액추에이터 |
CN104202011A (zh) * | 2014-08-29 | 2014-12-10 | 电子科技大学 | 基于绝缘材料振动块的mems谐振器 |
CN104218916B (zh) * | 2014-08-29 | 2017-05-31 | 电子科技大学 | 具有lc串联谐振电路的mems谐振器 |
JP7006172B2 (ja) * | 2017-11-21 | 2022-01-24 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光学デバイス、光学モジュール、及び電子機器 |
US10816569B2 (en) * | 2018-09-07 | 2020-10-27 | Analog Devices, Inc. | Z axis accelerometer using variable vertical gaps |
US11255873B2 (en) | 2018-09-12 | 2022-02-22 | Analog Devices, Inc. | Increased sensitivity z-axis accelerometer |
EP4162281A1 (en) | 2020-06-08 | 2023-04-12 | Analog Devices, Inc. | Stress-relief mems gyroscope |
CN116075728A (zh) | 2020-06-08 | 2023-05-05 | 美国亚德诺半导体公司 | 驱动和感测应力释放装置 |
US11698257B2 (en) | 2020-08-24 | 2023-07-11 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
CN112187225B (zh) * | 2020-10-09 | 2023-11-03 | 京东方科技集团股份有限公司 | 时钟校准方法及装置 |
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US6940370B2 (en) * | 2002-05-06 | 2005-09-06 | The Regents Of The University Of California | MEMS resonator and method of making same |
US7307496B2 (en) * | 2004-03-04 | 2007-12-11 | Xiangxiang Huang | Method and apparatus for frequency tuning of a micro-mechanical resonator |
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DE59905083D1 (de) * | 1998-05-08 | 2003-05-22 | Infineon Technologies Ag | Dünnfilm-piezoresonator |
US6445106B1 (en) * | 2000-02-18 | 2002-09-03 | Intel Corporation | Micro-electromechanical structure resonator, method of making, and method of using |
US6420202B1 (en) * | 2000-05-16 | 2002-07-16 | Agere Systems Guardian Corp. | Method for shaping thin film resonators to shape acoustic modes therein |
US6744174B2 (en) * | 2001-04-03 | 2004-06-01 | The Regents Of The University Of California | Frequency sensitivity analysis and optimum design for MEMS resonator |
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US6630871B2 (en) * | 2001-09-28 | 2003-10-07 | Intel Corporation | Center-mass-reduced microbridge structures for ultra-high frequency MEM resonator |
US6978673B2 (en) * | 2003-02-07 | 2005-12-27 | Honeywell International, Inc. | Methods and systems for simultaneously fabricating multi-frequency MEMS devices |
JP2004279384A (ja) | 2003-03-19 | 2004-10-07 | Sumitomo Precision Prod Co Ltd | 振動子の製造方法、振動子及びフォトマスク |
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FR2872501B1 (fr) * | 2004-07-01 | 2006-11-03 | Commissariat Energie Atomique | Microresonateur composite a forte deformation |
FR2876180B1 (fr) | 2004-10-06 | 2006-12-08 | Commissariat Energie Atomique | Resonateur a masses oscillantes. |
US7205867B2 (en) * | 2005-05-19 | 2007-04-17 | Robert Bosch Gmbh | Microelectromechanical resonator structure, and method of designing, operating and using same |
US7227432B2 (en) | 2005-06-30 | 2007-06-05 | Robert Bosch Gmbh | MEMS resonator array structure and method of operating and using same |
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US7777596B2 (en) * | 2007-12-18 | 2010-08-17 | Robert Bosch Gmbh | MEMS resonator structure and method |
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2007
- 2007-12-18 US US12/002,936 patent/US7777596B2/en active Active
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2008
- 2008-11-26 JP JP2010539585A patent/JP5021816B2/ja active Active
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US6940370B2 (en) * | 2002-05-06 | 2005-09-06 | The Regents Of The University Of California | MEMS resonator and method of making same |
US7307496B2 (en) * | 2004-03-04 | 2007-12-11 | Xiangxiang Huang | Method and apparatus for frequency tuning of a micro-mechanical resonator |
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WO2009079188A1 (en) | 2009-06-25 |
EP2235821A1 (en) | 2010-10-06 |
TW200943708A (en) | 2009-10-16 |
EP2235821B1 (en) | 2013-03-27 |
TWI488432B (zh) | 2015-06-11 |
US20110018655A1 (en) | 2011-01-27 |
WO2009079188A9 (en) | 2010-09-02 |
US20090153267A1 (en) | 2009-06-18 |
JP5021816B2 (ja) | 2012-09-12 |
CN101946400A (zh) | 2011-01-12 |
US8222974B2 (en) | 2012-07-17 |
JP2011507455A (ja) | 2011-03-03 |
US7777596B2 (en) | 2010-08-17 |
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