CN101866839B - 一种应用掩膜保护进行激光快速加热方法 - Google Patents
一种应用掩膜保护进行激光快速加热方法 Download PDFInfo
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- CN101866839B CN101866839B CN2010101798947A CN201010179894A CN101866839B CN 101866839 B CN101866839 B CN 101866839B CN 2010101798947 A CN2010101798947 A CN 2010101798947A CN 201010179894 A CN201010179894 A CN 201010179894A CN 101866839 B CN101866839 B CN 101866839B
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CN2010101798947A CN101866839B (zh) | 2010-05-24 | 2010-05-24 | 一种应用掩膜保护进行激光快速加热方法 |
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CN2010101798947A CN101866839B (zh) | 2010-05-24 | 2010-05-24 | 一种应用掩膜保护进行激光快速加热方法 |
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CN101866839A CN101866839A (zh) | 2010-10-20 |
CN101866839B true CN101866839B (zh) | 2012-05-16 |
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CN2010101798947A Expired - Fee Related CN101866839B (zh) | 2010-05-24 | 2010-05-24 | 一种应用掩膜保护进行激光快速加热方法 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102346127A (zh) * | 2011-09-08 | 2012-02-08 | 浙江向日葵光能科技股份有限公司 | 用于测量太阳能电池片氮化硅膜致密性的溶液及其使用方法 |
CN102945798B (zh) * | 2012-10-30 | 2015-07-29 | 清华大学 | 超薄氧化层的激光处理生长方法及装置 |
US11069724B2 (en) | 2018-01-12 | 2021-07-20 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Array substrate, manufacturing method thereof and display device using the same |
CN108288619A (zh) * | 2018-01-12 | 2018-07-17 | 武汉华星光电半导体显示技术有限公司 | 一种阵列基板及其制作方法、显示装置 |
Citations (2)
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CN1864247A (zh) * | 2003-10-03 | 2006-11-15 | 应用材料股份有限公司 | 用于动态表面退火工艺的吸收层 |
US20080233718A1 (en) * | 2007-03-21 | 2008-09-25 | Jia-Xing Lin | Method of Semiconductor Thin Film Crystallization and Semiconductor Device Fabrication |
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CN1864247A (zh) * | 2003-10-03 | 2006-11-15 | 应用材料股份有限公司 | 用于动态表面退火工艺的吸收层 |
US20080233718A1 (en) * | 2007-03-21 | 2008-09-25 | Jia-Xing Lin | Method of Semiconductor Thin Film Crystallization and Semiconductor Device Fabrication |
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Inventor after: Wang Qiang Inventor after: Hua Guoran Inventor after: Zhu Haifeng Inventor after: Shi Min Inventor after: Zhang Zhenjuan Inventor after: Huang Jing Inventor after: Song Changqing Inventor after: Zhang Hua Inventor before: Hua Guoran Inventor before: Wang Qiang Inventor before: Gong Xiaoyan Inventor before: Shi Min Inventor before: Zhang Hua Inventor before: Song Changqing Inventor before: Zhang Zhenjuan Inventor before: Cai Xiaopeng Inventor after: Wang Qiang Inventor after: Hua Guoran Inventor after: Zhu Haifeng Inventor after: Shi Min Inventor after: Zhang Zhenjuan Inventor after: Huang Jing Inventor after: Song Changqing Inventor after: Zhang Hua Inventor before: Hua Guoran Inventor before: Wang Qiang Inventor before: Gong Xiaoyan Inventor before: Shi Min Inventor before: Zhang Hua Inventor before: Song Changqing Inventor before: Zhang Zhenjuan Inventor before: Cai Xiaopeng |
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Free format text: CORRECT: INVENTOR; FROM: HUA GUORAN WANG QIANG GONG XIAOYAN SHI MIN ZHANG HUA SONG CHANGQING ZHANG ZHENJUAN CAI XIAOPENG TO: WANG QIANG HUA GUORAN ZHU HAIFENG SHI MIN ZHANG ZHENJUAN HUANG JING SONG CHANGQING ZHANG HUA |
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