CN101824655B - Door-opening type stick-withdrawing vehicle of single crystal furnace - Google Patents
Door-opening type stick-withdrawing vehicle of single crystal furnace Download PDFInfo
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- CN101824655B CN101824655B CN2010101614125A CN201010161412A CN101824655B CN 101824655 B CN101824655 B CN 101824655B CN 2010101614125 A CN2010101614125 A CN 2010101614125A CN 201010161412 A CN201010161412 A CN 201010161412A CN 101824655 B CN101824655 B CN 101824655B
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- Prior art keywords
- clamping
- cylinder
- vehicle frame
- single crystal
- withdrawing
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- 239000013078 crystal Substances 0.000 title claims abstract description 28
- 239000003921 oil Substances 0.000 claims abstract description 31
- 239000002828 fuel tank Substances 0.000 claims description 11
- 230000000630 rising effect Effects 0.000 claims description 7
- 239000000725 suspension Substances 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 6
- 239000010727 cylinder oil Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 206010053615 Thermal burn Diseases 0.000 description 3
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
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Abstract
The invention provides a door-opening type stick-withdrawing vehicle of a single crystal furnace, relating to a stick-withdrawing vehicle of a single crystal furnace. The stick-withdrawing vehicle comprises a vehicle frame, wherein the bottom of the vehicle frame is provide with an orientation wheel and a universal wheel with a brake; the vehicle frame is provided with a lifting system and a horizontal telescopic clamping system; and the lifting system mainly comprises an oil pump component, an oil box, a hydraulic cylinder, a top rod, a lifting-up footboard, a lifting-down footboard, a lifting guide rod, a guide rod bracket and a guide rod limiting board. The horizontal telescopic clamping system is arranged above the top rod of the hydraulic cylinder, and mainly comprises a telescopic hand wheel, a telescopic screw rod, a guide cylinder, a telescopic arm, a clamping screw rod, a clamping hand wheel, a locking pin, a pressing arm, a clamping block, a shaft pin, a pallet, a chain and a suspending hook. The door-opening type stick-withdrawing vehicle can avoid the accident and overcome the quality problem of the product since workers are scalded when withdrawing the stick to lead a single crystal silicon stick to be fallen off, thereby being capable of safer and more accurately completing the process of stick withdrawing.
Description
Technical field:
The present invention relates to that a kind of opening door single crystal growing furnace is matching used gets excellent car.
Background technology:
To get bar mode with manual work be main to the rod motion of getting of single crystal growing furnace, and after silicon single crystal rod production finishes, its extreme temperatures; Adopt the manual type danger coefficient higher, the scald accident takes place easily and cause falling of silicon single crystal rod, influence quality product; And manual work to get the bar mode tolerance range lower, silicon single crystal rod is swung easily, causes the fracture of seed crystal; Can produce quality accident equally, go back none ideal method solution opening door single crystal growing furnace at present and get these problems in the rod motion.
Summary of the invention:
The present invention provides a kind of door-opening type stick-withdrawing vehicle of single crystal furnace, and it has avoided having guaranteed quality product because the scald accident that rod is caused is got in manual work, improves the operation particularity of getting rod greatly, enhances productivity.
The present invention realizes through following technical scheme: a kind of door-opening type stick-withdrawing vehicle of single crystal furnace; It has a vehicle frame; Bottom of frame is provided with cardan wheel with brake and directional wheel, and its major technique characteristic is that described vehicle frame is provided with jacking system and horizontal telescopic clamp clamping system: the vehicle frame upper end is connected with handrail; Jacking system comprises rising pedal, decline pedal, oil pump assembly, fuel tank, hydro-cylinder, push rod, lifting guide pillar, guide bar support, guide rod limiting plate, anchor ear and pull bar, and wherein fuel tank is on vehicle frame top, and the oil pump assembly is in the vehicle frame bottom; Hydro-cylinder is connected above directional wheel and with vehicle frame; Be with anchor ear on the hydro-cylinder, anchor ear is connected with frame through pull bar, and push rod is the some of hydro-cylinder; The oil pump assembly is connected with fuel tank through oil pipe; There is oil pump assembly oil inlet and outlet its front portion, and cylinder lower is provided with the hydro-cylinder oil inlet and outlet, and the guide rod limiting plate is connected with anchor ear; Horizontal telescopic clamp clamping system comprises flexible handwheel, flexible screw mandrel, guide cylinder, telescopic boom, clamping screw mandrel, clamps handwheel, locking pin, clamping arm, clamping block, pivot pin, suspension hook, chain, pallet; Wherein flexible screw mandrel one end is connected with flexible handwheel, and the other end is connected with telescopic boom, and telescopic boom is in guide cylinder; Guide cylinder is connected with the push rod upper end; The telescopic boom front end is provided with the clamping screw mandrel, and an end that clamps screw mandrel is provided with locking pin, and clamps two clamping arms of screw mandrel connection; Two clamping arm front ends are respectively equipped with two clamping blocks up and down; Clamping block is connected with clamping arm through pivot pin, pivot pin lower end connecting shackle, hang on the suspension hook two chain lower ends hang with pallet.
One end of described clamping screw mandrel is provided with the clamping handwheel.
The invention has the beneficial effects as follows: adopt machinery to get bar mode replacement manual work and get bar mode; Enhance productivity; Avoided the artificial scald accident that bar mode causes easily and the damage problem of silicon single crystal rod of getting; Improve manipulation accuracy, the seed shaft fracture of avoiding the silicon single crystal rod swing to be caused is enhanced productivity.
Description of drawings:
Fig. 1 is a front view of the present invention;
Fig. 2 is the left view of accompanying drawing 1;
Fig. 3 is the vertical view of said horizontal telescopic clamp clamping system.
Embodiment:
Among the figure: 1, decline pedal, 2, the rising pedal, 3, the oil pump assembly, 4, vehicle frame, 5, fuel tank, 6, handrail, 7, pull bar; 8, flexible handwheel, 9, flexible screw mandrel, 10, guide cylinder, 11, telescopic boom, 12, clamp screw mandrel, 14, clamping arm, 15, clamping block; 16, pivot pin, 17, suspension hook, 18, chain, 19, pallet, 20, push rod, 21, the tail rod support; 22, anchor ear, 23, hydro-cylinder, 24, the hydro-cylinder oil inlet and outlet, 25, directional wheel, 26, oil pump assembly oil inlet and outlet, 27, cardan wheel with brake; 28, locking pin, 29, clamp handwheel, 30 lifting guide pillars, 31, the guide rod limiting plate
With reference to accompanying drawing 1 and accompanying drawing 2, door-opening type stick-withdrawing vehicle of single crystal furnace, it has a vehicle frame 4; Vehicle frame 4 bottoms are provided with cardan wheel with brake 27 and directional wheel 25, and it is characterized in that described vehicle frame 4 is provided with jacking system and horizontal telescopic clamp clamping system: vehicle frame 4 upper ends are connected with handrail 6, and jacking system comprises rising pedal 2, decline pedal 1, oil pump assembly 3, fuel tank 5, hydro-cylinder 23, push rod 20, lifting guide pillar 30, guide bar support 21, guide rod limiting plate 31, anchor ear 22 and pull bar 7; Wherein fuel tank 5 is on vehicle frame 4 tops; Oil pump assembly 3 is connected with rising pedal 1 and decline pedal 2 in vehicle frame 4 bottoms, and hydro-cylinder 23 is connected above directional wheel 25 and with vehicle frame 4; Be with anchor ear 22 on the hydro-cylinder; Anchor ear is connected with vehicle frame through pull bar 7, and push rod 20 is the some of hydro-cylinder 23, and guide rod limiting plate 31 is connected with anchor ear 22; Oil pump assembly 3 is connected with fuel tank 5 through oil pipe, and there is oil pump assembly oil inlet and outlet 26 its front portion, and cylinder lower is provided with hydro-cylinder oil inlet and outlet 24.
With reference to accompanying drawing 1, accompanying drawing 2 and accompanying drawing 3, horizontal telescopic clamp clamping system comprises flexible handwheel 8, flexible screw mandrel 9, guide cylinder 10, telescopic boom 11, clamps screw mandrel 12, clamps handwheel 29, locking pin 28, clamping arm 14, clamping block 15, pivot pin 16, suspension hook 17, chain 18, pallet 19, and wherein flexible screw mandrel 9 one ends are connected with flexible handwheel 8; The other end is connected with telescopic boom 11; Telescopic boom is in guide cylinder 10, and guide cylinder 10 is connected with push rod 20 upper ends, and telescopic boom 11 front ends are provided with and clamp screw mandrel 12; Clamp screw mandrel 12 1 sides and be provided with clamping handwheel 8 and locking pin 28; And clamp 14, two clamping arm 14 front ends of screw mandrel 12 two clamping arms of connection and be respectively equipped with clamping block 15, clamping block 15 is connected with clamping arm 14 through pivot pin 16; Pivot pin 16 lower end connecting shackles 17, two chain 18 lower ends that hang on the suspension hook 17 hang with pallet 19.
Before getting rod, open fire door earlier, hold handrail 6 and will get excellent car and shift onto over against secondary fire door doorway; Check cardan wheel with brake 27, utilize described jacking system that flexible clamping part of level and pallet 19 are raised, promptly with foot-operated rising pedal 2; Oil pump assembly 3 is moved hydraulicefficiency oil in the fuel tank 5 through oil pump assembly oil inlet and outlet 26, through connecting oil pipe from hydro-cylinder oil inlet and outlet 24 entering hydro- cylinders 23,20 risings of oil pressure promotion push rod; And then drive horizontal telescopic clamp clamping system and pallet 19 and rise, rise to pallet 19 and surpass under the fire door bead and be positioned at the single crystal rod lower end, utilize described horizontal telescopic clamp clamping system that silicon single crystal rod is clamped, holds; Promptly rotate flexible handwheel 8, drive telescopic boom 11 through flexible screw mandrel 9 fine settings and move forward, put in the secondary stove with hand; Lay respectively at the silicon single crystal rod both sides to two clamping blocks 15, adjust chain 18 height this moment, make pallet 19 hold the single crystal rod lower end; Manually rotation clamps handwheel 29, and drive clamp arms and then clamping block 15 is clipped silicon single crystal rod through clamping screw mandrel 12, and the locking pin 28 of screwing; Cut off single crystal rod top seed crystal this moment, unclamps cardan wheel with brake 27 then, holds handrail 6 and will get excellent car and pull out backward.After treating that single crystal rod is come out of the stove, foot-operated decline pedal 1 through 3 actions of oil pump assembly, makes the oil in the hydro-cylinder return by former pipeline, and push rod 20 descends, and the single crystal rod of clamping also drops to low level, and can promote dolly single crystal rod is transported warehouse-in this moment, accomplishes and get rod motion.
Above-mentioned embodiment is merely and is illustrated more clearly in the present invention; And be not the qualification to the specific embodiment of the invention; Can also make multi-form variation or change on this basis, still be within protection scope of the present invention and belong to the variation that the present invention extends out or change.
Claims (2)
1. door-opening type stick-withdrawing vehicle of single crystal furnace, it has a vehicle frame, and bottom of frame is provided with cardan wheel with brake and directional wheel, it is characterized in that described vehicle frame is provided with jacking system and horizontal telescopic clamp clamping system: the vehicle frame upper end is connected with handrail; Jacking system comprises rising pedal, decline pedal, oil pump assembly, fuel tank, hydro-cylinder, push rod, lifting guide pillar, guide bar support, guide rod limiting plate, anchor ear and pull bar, and wherein fuel tank is on vehicle frame top, and the oil pump assembly is in the vehicle frame bottom; Hydro-cylinder is connected above directional wheel and with vehicle frame; Be with anchor ear on the hydro-cylinder, anchor ear is connected with frame through pull bar, and push rod is the some of hydro-cylinder; The oil pump assembly is connected with fuel tank through oil pipe; There is oil pump assembly oil inlet and outlet its front portion, and cylinder lower is provided with the hydro-cylinder oil inlet and outlet, and the guide rod limiting plate is connected with anchor ear; Horizontal telescopic clamp clamping system comprises flexible handwheel, flexible screw mandrel, guide cylinder, telescopic boom, clamping screw mandrel, clamps handwheel, locking pin, clamping arm, clamping block, pivot pin, suspension hook, chain, pallet; Wherein flexible screw mandrel one end is connected with flexible handwheel, and the other end is connected with telescopic boom, and telescopic boom is in guide cylinder; Guide cylinder is connected with the push rod upper end; The telescopic boom front end is provided with the clamping screw mandrel, and an end that clamps screw mandrel is provided with locking pin, and clamps two clamping arms of screw mandrel connection; Two clamping arm front ends are respectively equipped with two clamping blocks up and down; Clamping block is connected with clamping arm through pivot pin, pivot pin lower end connecting shackle, hang on the suspension hook two chain lower ends hang with pallet.
2. a kind of door-opening type stick-withdrawing vehicle of single crystal furnace as claimed in claim 1 is characterized in that an end of described clamping screw mandrel is provided with the clamping handwheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101614125A CN101824655B (en) | 2010-04-29 | 2010-04-29 | Door-opening type stick-withdrawing vehicle of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101614125A CN101824655B (en) | 2010-04-29 | 2010-04-29 | Door-opening type stick-withdrawing vehicle of single crystal furnace |
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| Publication Number | Publication Date |
|---|---|
| CN101824655A CN101824655A (en) | 2010-09-08 |
| CN101824655B true CN101824655B (en) | 2012-06-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010101614125A Active CN101824655B (en) | 2010-04-29 | 2010-04-29 | Door-opening type stick-withdrawing vehicle of single crystal furnace |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102586860B (en) * | 2011-11-28 | 2015-02-11 | 宁夏日晶新能源装备股份有限公司 | Single-crystal furnace crystal bar positioning device and single-crystal furnace using same |
| CN103215634A (en) * | 2012-01-19 | 2013-07-24 | 宁夏日晶新能源装备股份有限公司 | Mono-crystalline furnace multifunctional crystal bar taking machine |
| CN107299389A (en) * | 2017-08-23 | 2017-10-27 | 马四海 | A kind of CZ crystal for straight drawing monocrystal stove concubine takes bar device |
| CN108237518B (en) * | 2018-03-08 | 2023-06-06 | 安徽安凯汽车股份有限公司 | Electric multi-azimuth universal manipulator |
| CN112095156A (en) * | 2020-09-21 | 2020-12-18 | 江苏晶品新能源科技有限公司 | Clamping mechanism with stable clamping for processing monocrystalline silicon wafers |
| CN112981517B (en) * | 2021-03-21 | 2023-09-15 | 昆明汇泉高纯半导材料有限公司 | Single crystal furnace capable of automatically disassembling single crystal rod and disassembling method thereof |
| CN114232073B (en) * | 2021-12-18 | 2023-07-25 | 中山市汇创精密科技有限公司 | Crystal taking device applicable to long-size silicon crystal bar |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2758523B2 (en) * | 1991-11-11 | 1998-05-28 | 信越半導体株式会社 | Silicon ingot transport trolley |
| JP2758104B2 (en) * | 1992-03-30 | 1998-05-28 | 信越半導体株式会社 | Transport trolley |
| CN201695109U (en) * | 2010-04-29 | 2011-01-05 | 杭州富通半导体设备科技有限公司 | Opening door single-crystal furnace crystal bar take-out vehicle |
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- 2010-04-29 CN CN2010101614125A patent/CN101824655B/en active Active
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| CN101824655A (en) | 2010-09-08 |
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| C14 | Grant of patent or utility model | ||
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Owner name: FUTONG GROUP CO., LTD. Free format text: FORMER OWNER: HANGZHOU FUTONG SEMICONDUCTOR EQUIPMENT TECHNOLOGY CO., LTD. Effective date: 20130124 |
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Effective date of registration: 20130124 Address after: 311400, No. 1-8, Fortis Science Park, Golden Autumn Road, Zhejiang, Fuyang Patentee after: Futong Group Co., Ltd. Address before: 311400, No. 1-8, Fortis Science Park, Golden Autumn Road, Zhejiang, Fuyang Patentee before: Hangzhou Futong Semiconductor Equipment Technology Co., Ltd. |
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Effective date of registration: 20191225 Address after: 311400 Building 9, Futong Science Park, No. 1-8, Jinqiu Avenue, Fuchun street, Fuyang District, Hangzhou City, Zhejiang Province Co-patentee after: Hangzhou Futong Communication Technology Co., Ltd. Patentee after: Futong Group Co., Ltd. Co-patentee after: Tianjin Futong Xinmao Science and Technology Co., Ltd. Co-patentee after: HANGZHOU FUTONG ELECTRIC WIRE & CABLE CO., LTD. Address before: 311400, No. 1-8, Fortis Science Park, Golden Autumn Road, Zhejiang, Fuyang Patentee before: Futong Group Co., Ltd. |
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| TR01 | Transfer of patent right | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 311400 Building 9, Futong Science Park, 1-8 Jinqiu Avenue, Fuchun street, Fuyang District, Hangzhou City, Zhejiang Province Patentee after: Futong Group Co.,Ltd. Patentee after: HANGZHOU FUTONG COMMUNICATION TECHNOLOGY Co.,Ltd. Patentee after: Tianjin Futong Information Technology Co.,Ltd. Patentee after: HANGZHOU FUTONG ELECTRIC WIRE & CABLE Co.,Ltd. Address before: 311400 Building 9, Futong Science Park, 1-8 Jinqiu Avenue, Fuchun street, Fuyang District, Hangzhou City, Zhejiang Province Patentee before: Futong Group Co.,Ltd. Patentee before: HANGZHOU FUTONG COMMUNICATION TECHNOLOGY Co.,Ltd. Patentee before: TIANJIN FUTONG XINMAO SCIENCE & TECHNOLOGY Co.,Ltd. Patentee before: HANGZHOU FUTONG ELECTRIC WIRE & CABLE Co.,Ltd. |
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