CN114232073B - Crystal taking device applicable to long-size silicon crystal bar - Google Patents
Crystal taking device applicable to long-size silicon crystal bar Download PDFInfo
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- CN114232073B CN114232073B CN202111557150.9A CN202111557150A CN114232073B CN 114232073 B CN114232073 B CN 114232073B CN 202111557150 A CN202111557150 A CN 202111557150A CN 114232073 B CN114232073 B CN 114232073B
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- hanging
- bracket
- crystal
- support base
- long
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention belongs to the field of machinery, and particularly relates to a crystal taking device applicable to a long-size silicon crystal bar. The silicon crystal rod lifting device comprises a bracket, wherein a hanging opening through which a silicon crystal rod vertically passes is formed in the bracket; centering clamping components which are arranged on the bracket and positioned at two sides of the hanging port; the hanging support base is arranged on the bracket and positioned in the hanging opening and can be lifted relative to the bracket; and (5) hanging the lifting assembly. According to the scheme, the lifting structure for the connecting rope matched with the supporting pulley block is changed, the problem that the existing guide rail is adopted as a lifting mode is solved, the length of the connecting rope can be freely retracted, so that the single crystal rod with the longer length can be matched for fixed use, the single crystal rods with different lengths can be matched for use, the device is wider in use range, simpler in structure and lower in cost.
Description
[ field of technology ]
The invention belongs to the field of machinery, and particularly relates to a crystal taking device applicable to a long-size silicon crystal bar.
[ background Art ]
The single crystal furnace is necessary equipment in the process of converting polycrystalline silicon into single crystal silicon. The skilled artisan heats and pulls the polysilicon into a single crystal silicon rod by a single crystal furnace. And after the pulling of the monocrystalline silicon is finished, the monocrystalline rod is lowered from the auxiliary chamber of the monocrystalline furnace and falls into the crystal taking frame right below.
At present, a silicon crystal bar is positioned through a crystal taking frame arranged on a crystal taking trolley, and as the silicon crystal bar is relatively long and straight, the fixed crystal taking frame at least clamps or limits the upper end and the lower end of the silicon crystal bar, so that a guide rail is generally adopted to enable a bearing chassis to support and limit the lower end of the silicon crystal bar, and the length of the silicon crystal bar which can be fixed is limited by the length of the guide rail. Along with the length increase of the existing silicon crystal bar tapping, the length can exceed 10M, if the crystal taking trolley customizes the guide rail structure with the same length, the whole manufacturing cost is high, the silicon crystal bar tapping device is easy to damage, and the later maintenance cost is high.
[ invention ]
In order to solve the problem of tapping and bearing of long-size silicon crystal bars in the prior art, the invention provides a crystal taking device applicable to the long-size silicon crystal bars.
The invention is realized by the following technical scheme:
the crystal taking device applicable to the long-size silicon crystal bar comprises;
the support is provided with a hanging port through which the silicon crystal rod vertically passes;
the centering clamping assembly comprises clamping arms which are arranged on the bracket and positioned at two sides of the hanging port, and a driving piece for driving the two clamping arms to move towards the center of the hanging port;
the hanging support base is arranged on the bracket and positioned in the hanging opening and can be lifted relative to the bracket;
the hanging lifting assembly comprises a winding and unwinding rope driving piece arranged on the support, a supporting pulley block arranged on the support and a connecting rope penetrating through the supporting pulley block and connected with the hanging supporting base.
The crystal taking device for the long-size silicon crystal bar is applicable to the crystal taking device, the middle part of the hanging support base is provided with the yielding port penetrating through the upper end and the lower end of the hanging support base, and the hanging support base is also provided with the bottom supporting component extending to the yielding port.
The crystal taking device for the long-size silicon crystal bar can be suitable for the crystal taking device for the long-size silicon crystal bar, and 4 groups of bottom bearing assemblies are arranged on the hanging support base.
The crystal taking device for the long-size silicon crystal rod is applicable to the above, and the bottom bearing assembly comprises a supporting head part facing the axial direction in the yielding port, a rod body hinged to the hanging supporting base and connected with the supporting head part, and a limiting part arranged on the rod body.
The limit part is a protruding part which is arranged on the rod body and faces the central axis of the yielding port.
The crystal taking device for the long-size silicon crystal rod is applicable to the crystal taking device for the long-size silicon crystal rod, and the supporting head part and the limiting part are provided with rollers.
The crystal taking device for the long-size silicon crystal rod is applicable to the crystal taking device for the long-size silicon crystal rod, and the rod body is further provided with a spring connected with the hanging support base.
The crystal picking device for the long-size silicon crystal bar is applicable to the crystal picking device, the hanging lifting assembly comprises four groups of pulley blocks and connecting ropes, and connecting positions which are connected with the connecting ropes are arranged at the four corners of the hanging support base and are positioned at the para positions.
The crystal taking device for the long-size silicon crystal rod is applicable to the crystal taking device for the long-size silicon crystal rod, and the hanging support base is further provided with a weighing device.
Compared with the prior art, the invention has the following advantages:
1. the invention provides a crystal taking device suitable for a long-size silicon crystal bar, which is characterized in that after the pulling of single crystal silicon is finished, a single crystal bar which descends from a secondary chamber of a single crystal furnace passes through a hanging opening of a bracket, the bottom of the single crystal bar is supported by a hanging support base and descends along with the single crystal bar, and the upper end of the single crystal bar is clamped and fixed by a centering clamping assembly, so that the single crystal bar is fixed, and the subsequent transportation is convenient. The lifting structure of the connecting rope matched with the supporting pulley block is changed, the problem that the existing guide rail is adopted as a lifting mode is solved, the length of the connecting rope can be freely retracted, so that the single crystal rod with the longer length can be matched for fixed use, the single crystal rods with different lengths can be matched for use, the device is wider in application range, simpler in structure and lower in cost.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a view showing the state of use of the crystal pulling apparatus for a long-sized silicon ingot according to the present invention;
FIG. 2 is a schematic view of a crystal pulling apparatus for a long silicon ingot according to the present invention;
FIG. 3 is a schematic view of a crystal pulling apparatus (with a suspended support base lowered) applicable to a long silicon ingot;
FIG. 4 is a semi-sectional view of the bottom support assembly;
FIG. 5 is a schematic view of a bottom support assembly in contact with a silicon ingot;
FIG. 6 is a schematic view of the bottom support assembly after supporting a silicon ingot.
[ detailed description ] of the invention
In order to make the technical problems, technical schemes and beneficial effects solved by the invention more clear, the invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
The invention is realized by the following technical scheme:
as shown in fig. 1 to 6, the crystal pulling apparatus for a long-sized silicon ingot comprises; the silicon crystal ingot furnace comprises a bracket 1, wherein a hanging port 101 through which a silicon crystal ingot vertically passes is formed in the bracket 1; centering clamping components 2 which are arranged on the bracket 1 and are positioned at two sides of the hanging port 101; a hanging support base 3 which is arranged on the bracket 1 and is positioned in the hanging port 101 and can be lifted relative to the bracket 1; the hanging lifting assembly 4 comprises a winding and unwinding rope driving part 41 arranged on the bracket 1, a supporting pulley block 42 arranged on the bracket 1 and a connecting rope 43 penetrating through the supporting pulley block 42 and connected with the hanging supporting base 3. The invention provides a crystal taking device suitable for a long-size silicon crystal bar, which is characterized in that after the pulling of single crystal silicon is finished, a single crystal bar which descends from a secondary chamber of a single crystal furnace passes through a hanging opening of a bracket, the bottom of the single crystal bar is supported by a hanging support base and descends along with the single crystal bar, and the upper end of the single crystal bar is clamped and fixed by a centering clamping assembly, so that the single crystal bar is fixed, and the subsequent transportation is convenient. The lifting structure of the connecting rope matched with the supporting pulley block is changed, the problem that the existing guide rail is adopted as a lifting mode is solved, the length of the connecting rope can be freely retracted, so that the single crystal rod with the longer length can be matched for fixed use, the single crystal rods with different lengths can be matched for use, the device is wider in application range, simpler in structure and lower in cost.
In addition, the centering and clamping assembly 2 comprises clamping arms arranged on the bracket 1 and positioned on two sides of the hanging port 101, and a driving piece for driving the two clamping arms to move towards the center of the hanging port 101.
Further, the middle part of the hanging support base 3 is provided with a yielding port 301 penetrating through the upper end and the lower end of the hanging support base 3, and the hanging support base 3 is also provided with a bottom bearing assembly 5 extending to the yielding port 301. Because the bottom of the silicon crystal bar is generally an arc surface or a hemispherical surface, the scheme has better supporting effect by embedding the bottom of the silicon crystal bar through the abdication port 301 and then contacting the bottom of the silicon crystal bar through the bottom bearing assembly 5.
In particular, the hanging support base 3 is provided with 4 groups of the bottom bearing assemblies 5. In this embodiment, the yielding port 301 coincides with the center of the hanging port 101. The four groups of bottom bearing assemblies extend to the center of the yielding port 301, and are matched with the centering clamping assemblies at the upper ends, so that when the silicon crystal bars pass through the hanging port 101, the silicon crystal bars are aligned and guided, the axes of the silicon crystal bars are coincident with the yielding port 301 and the center of the hanging port 101, and the bottom bearing assemblies at the lower ends can be uniformly supported at the bottoms of the silicon crystal bars.
Still further, the bottom bracket assembly 5 comprises a support head 51 facing axially in the relief 301, a shaft 52 hinged to the suspended support base 3 and connected to the support head 51, and a stop 53 provided on the shaft 52. This scheme adopts movable type bottom bearing subassembly to can laminate with the surface of silicon crystal bar when guaranteeing to support silicon crystal bar bottom and compress tightly, play better supporting effect.
Specifically, as shown in fig. 5 and 6, the limiting portion 53 is a protruding portion provided on the shaft 52 and facing the central axis of the relief opening 301. In the process of descending the silicon crystal bar, the bottom of the silicon crystal bar is contacted with the supporting head 51, in the process of continuing descending, the supporting head 51 is forced to rotate downwards, the rod body 52 rotates downwards around the hinge, meanwhile, the limiting part 53 at the upper end of the rod body is driven to press the outer surface of the silicon crystal bar, when the limiting part 53 is contacted with the outer surface of the silicon crystal bar, the rotation of the rod body is limited, meanwhile, the supporting head 51 is limited, and therefore a plurality of groups of supporting heads can be fixedly supported at the bottom of the silicon crystal bar. The movable bottom bearing component is adopted in the scheme, and can be well attached to the bottom of the silicon crystal bar, so that the silicon crystal bar with various pipe diameters can be well supported.
The supporting head 51 and the limiting portion 53 are each provided with a roller. The surface of the silicon crystal bar can be protected by forming line contact between the roller and the surface of the silicon crystal bar, and the problems of scratching and the like are avoided.
More specifically, the shaft 52 is further provided with a spring 54 connected to the hanging support base 3. So that it can be automatically reset.
Similarly, the hanging lifting assembly 4 comprises four groups of pulley blocks 42 and connecting ropes 43, and connecting positions with the connecting ropes 43 are arranged on the hanging support base 3 at the four corners in alignment. It can guarantee that the in-process of going up and down is steady.
In addition, a weighing device is further arranged on the hanging support base 3. Thus, the weight can be directly measured while the silicon ingot is fixed.
The invention provides a crystal taking device suitable for a long-size silicon crystal bar, which is characterized in that after the pulling of single crystal silicon is finished, a single crystal bar which descends from a secondary chamber of a single crystal furnace passes through a hanging opening of a bracket, the bottom of the single crystal bar is supported by a hanging support base and descends along with the single crystal bar, and the upper end of the single crystal bar is clamped and fixed by a centering clamping assembly, so that the single crystal bar is fixed, and the subsequent transportation is convenient. The lifting structure of the connecting rope matched with the supporting pulley block is changed, the problem that the existing guide rail is adopted as a lifting mode is solved, the length of the connecting rope can be freely retracted, so that the single crystal rod with the longer length can be matched for fixed use, the single crystal rods with different lengths can be matched for use, the device is wider in application range, simpler in structure and lower in cost.
The foregoing description of one or more embodiments provided in connection with the specific disclosure is not intended to limit the practice of the invention to such description. The method, structure, and the like similar to or identical to those of the present invention, or a plurality of technical deductions or substitutions are made on the premise of the conception of the present invention, and are considered to be the protection scope of the present invention.
Claims (6)
1. The crystal taking device applicable to the long-size silicon crystal bar is characterized by comprising the following components;
the silicon crystal ingot furnace comprises a bracket (1), wherein a hanging opening (101) through which a silicon crystal rod vertically passes is formed in the bracket (1);
the centering clamping assembly (2) comprises clamping arms arranged on the bracket (1) and positioned at two sides of the hanging port (101) and a driving piece for driving the two clamping arms to move towards the center of the hanging port (101);
the hanging support base (3) is arranged on the bracket (1) and positioned in the hanging opening (101) and can be lifted relative to the bracket (1), and the hanging support base (3) is used for supporting the bottom of the single crystal rod and can be lowered relative to the bracket (1) along with the single crystal rod;
the hanging lifting assembly (4) comprises a winding and unwinding rope driving piece (41) arranged on the bracket (1), a supporting pulley block (42) arranged on the bracket (1) and a connecting rope (43) penetrating through the supporting pulley block (42) and connected with the hanging supporting base (3);
the middle part of the hanging support base (3) is provided with a yielding port (301) penetrating through the upper end and the lower end of the hanging support base, and the hanging support base (3) is also provided with a bottom bearing component (5) extending to the yielding port (301);
the bottom bearing assembly (5) comprises a supporting head (51) facing the axial direction in the yielding opening (301), a rod body (52) hinged to the hanging supporting base (3) and connected with the supporting head (51), and a limiting part (53) arranged on the rod body (52);
the limiting part (53) is a protruding part which is arranged on the rod body (52) and faces the central axis of the yielding port (301).
2. A crystal pulling apparatus for long silicon ingots according to claim 1, wherein 4 sets of the bottom bearing elements (5) are provided on the suspended support base (3).
3. The crystal pulling apparatus for long silicon ingots according to claim 1, wherein the supporting head (51) and the limiting part (53) are provided with rollers.
4. The crystal pulling apparatus for long silicon ingots according to claim 1, wherein the rod body (52) is further provided with a spring (54) connected with the hanging support base (3).
5. The crystal picking device applicable to the long-size silicon crystal bars according to claim 1, wherein the hanging lifting assembly (4) comprises four groups of pulley blocks (42) and connecting ropes (43), and connecting positions with the connecting ropes (43) are arranged on the hanging support base (3) at the four corners of the hanging support base.
6. The crystal picking device applicable to the long-size silicon crystal bars according to claim 1 is characterized in that a weighing device is further arranged on the hanging support base (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111557150.9A CN114232073B (en) | 2021-12-18 | 2021-12-18 | Crystal taking device applicable to long-size silicon crystal bar |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111557150.9A CN114232073B (en) | 2021-12-18 | 2021-12-18 | Crystal taking device applicable to long-size silicon crystal bar |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114232073A CN114232073A (en) | 2022-03-25 |
| CN114232073B true CN114232073B (en) | 2023-07-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111557150.9A Active CN114232073B (en) | 2021-12-18 | 2021-12-18 | Crystal taking device applicable to long-size silicon crystal bar |
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Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101824655B (en) * | 2010-04-29 | 2012-06-06 | 杭州富通半导体设备科技有限公司 | Door-opening type stick-withdrawing vehicle of single crystal furnace |
| CN203320184U (en) * | 2013-05-14 | 2013-12-04 | 嘉兴博科精密机械有限公司 | Crystal sampling vehicle |
| CN204690161U (en) * | 2015-05-30 | 2015-10-07 | 麦斯克电子材料有限公司 | A kind ofly get brilliant device for opening door czochralski crystal growing furnace |
| CN205556852U (en) * | 2016-02-26 | 2016-09-07 | 广州柏创机电设备有限公司 | Excellent transportation equipment is got voluntarily to single crystal silicon rod |
| CN205954146U (en) * | 2016-08-26 | 2017-02-15 | 宜昌南玻硅材料有限公司 | Silicon wafer stick hoisting device |
| CN206266743U (en) * | 2016-11-10 | 2017-06-20 | 温州永泰电器有限公司 | Czochralski crystal growing furnace is with taking brilliant car |
| CN206502892U (en) * | 2017-01-17 | 2017-09-19 | 陕西西京电子科技有限公司 | A kind of Czochralski method mono-crystal furnace connects brilliant frame with segmented |
| CN113549998A (en) * | 2020-04-23 | 2021-10-26 | 内蒙古中环协鑫光伏材料有限公司 | Crystal taking device and crystal taking process of straight pulling single crystal silicon rod |
| CN113061974B (en) * | 2021-03-23 | 2022-02-15 | 浙江晶阳机电股份有限公司 | Vacuum straight pulling furnace production mechanism and straightening and crystal taking method thereof |
| CN216838267U (en) * | 2021-12-18 | 2022-06-28 | 中山市汇创精密科技有限公司 | Crystal taking device for czochralski silicon crystal furnace |
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2021
- 2021-12-18 CN CN202111557150.9A patent/CN114232073B/en active Active
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| CN114232073A (en) | 2022-03-25 |
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