CN112981517B - Single crystal furnace capable of automatically disassembling single crystal rod and disassembling method thereof - Google Patents
Single crystal furnace capable of automatically disassembling single crystal rod and disassembling method thereof Download PDFInfo
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- CN112981517B CN112981517B CN202110299269.4A CN202110299269A CN112981517B CN 112981517 B CN112981517 B CN 112981517B CN 202110299269 A CN202110299269 A CN 202110299269A CN 112981517 B CN112981517 B CN 112981517B
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/32—Seed holders, e.g. chucks
Abstract
The invention discloses a single crystal furnace capable of automatically disassembling a single crystal bar and a disassembling method thereof, which comprise a single crystal furnace base, wherein a single crystal furnace main body is arranged on the single crystal furnace base, the single crystal furnace main body is used for producing the single crystal bar, a rack is arranged on the left side of the single crystal furnace base, a single crystal bar disassembling mechanism is arranged on the front side end surface of the rack and is used for providing transverse movement required by disassembling the single crystal bar and rotation required by storing the single crystal bar, a single crystal bar clamping mechanism is arranged on the single crystal bar disassembling mechanism, and a single crystal bar storing mechanism is arranged on the rack and is positioned on the lower side of the single crystal bar clamping mechanism.
Description
Technical Field
The invention relates to the technical field of single crystal furnaces, in particular to a single crystal furnace capable of automatically disassembling a single crystal rod and a disassembling method thereof.
Background
The invention discloses equipment for growing dislocation-free single crystals by using a Czochralski method, which is characterized in that a single crystal furnace is equipment for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas (mainly nitrogen and helium) environment, the single crystal rod needs to be taken out after the single crystal furnace finishes the single crystal rod production, and at present, the single crystal rod is mostly detached and taken out to operate by manually operating a semiautomatic machine.
Disclosure of Invention
Technical problems: at present, most of the single crystal rod disassembling and taking-out work is performed by manually operating a semi-automatic machine, and operators are easy to scald during working due to the high internal temperature of the single crystal furnace.
In order to solve the problems, the single crystal furnace with the automatic single crystal rod disassembling is designed, the single crystal furnace comprises a single crystal furnace base, a single crystal furnace main body is arranged on the single crystal furnace base, a rack is arranged on the left side of the single crystal furnace base, a single crystal rod disassembling mechanism is arranged on the front end face of the rack and used for providing transverse movement required by disassembling the single crystal rod and rotation required by storing the single crystal rod, a single crystal rod clamping mechanism is arranged on the single crystal rod disassembling mechanism, a single crystal rod storing mechanism is arranged on the rack and is positioned on the lower side of the single crystal rod clamping mechanism, the single crystal rod storing mechanism is used for clamping the single crystal rod in the single crystal furnace main body and cutting off the seed crystal rod, the single crystal rod disassembling mechanism can drive the single crystal rod clamping mechanism to place the disassembled single crystal rod on the single crystal rod storing mechanism, the single crystal rod storing mechanism comprises a clamping cover arranged on the front side of the rack, a sliding plate is arranged in the sliding plate, a sliding plate is arranged on the sliding plate, and is connected with a piston rod in the sliding plate, and the sliding plate is provided with a piston rod.
Preferably, the single crystal furnace main body comprises a single crystal furnace inner cavity which is arranged in the single crystal furnace base and is provided with an upward opening, the single crystal furnace base is provided with a single crystal furnace sealing cover, the single crystal furnace sealing cover is internally provided with a downward opening single crystal furnace sealing cavity, the single crystal furnace sealing cavity is internally provided with a seed crystal shaft lifting mechanism, the seed crystal shaft lifting mechanism is provided with seed crystals, the lower side of each seed crystal is provided with a single crystal bar, the right side of the single crystal furnace base is provided with a screw nut lifting mechanism, the screw nut lifting mechanism is provided with a lifting nut, and the lifting nut is fixedly connected with the right side end face of the single crystal furnace sealing cover.
Preferably, the single crystal rod dismounting mechanism comprises a linear mechanism fixedly connected to the front end face of the frame, a transverse moving rod extending rightward is arranged in the linear mechanism, a push block I is fixedly connected to the lower end face of the transverse moving rod, a through hole penetrating up and down is formed in the transverse moving rod, a transverse moving block with a left opening is arranged in the front end face of the frame and is in sliding connection with the right side of the transverse moving rod, a first sliding hole with a upward opening is formed in the inner wall of the upper side of the blind hole, a bolt is connected to the first sliding hole in a sliding manner, a connecting rod I is fixedly connected to the bolt, a push rod located on the left side of the transverse moving block is connected between the upper end face of the first sliding hole and the lower end face of the connecting rod, a rotating shaft extending forward is connected to the front end face of the transverse moving block in a rotating manner, a rotating rod is fixedly connected to the rotating shaft, the rotating rod is fixedly connected with the left end face of the transverse moving rod, a gear located on the front side of the rotating shaft, a sliding hole is fixedly connected to the left side end face of the rotating rod, a sliding mechanism is fixedly connected to the rack, and the two side of the rack is fixedly connected to the upper end face of the rack, and the two rack is fixedly connected to the upper end face of the rack.
Preferably, the traverse block can only move left and right, and the traverse block can be separated from the frame.
Preferably, a third connecting rod is fixedly connected to the right end face of the sliding plate, a pushing plate is fixedly connected to the third right end face of the connecting rod, two front-back symmetrical limiting pins are fixedly connected to the right end face of the sliding plate, two clamping blocks which are symmetrical to the pushing plate in front-back are fixedly connected to the right inner wall of the clamping cavity, the clamping blocks are used for clamping and fixing the single crystal rod, a pin hole with an opening facing left is formed in the clamping blocks, the limiting pins can extend into the pin hole, a driven rod is fixedly connected to the right end face of the clamping block, a compression spring II is connected between the clamping blocks and the inner wall of the clamping cavity, a sliding rod which extends backwards to the outside of the end face of the clamping cover is fixedly connected to the right end face of the sliding rod, an automatic reset cylinder mechanism IV is fixedly connected to the rear inner wall of the clamping cover, a piston rod IV is arranged in the automatic reset cylinder mechanism IV, the piston rod IV can be in communication with the automatic reset mechanism IV, and the piston rod IV is in communication with the recovery mechanism between the piston rod IV and the automatic reset mechanism and the hose, and the recovery mechanism is connected with the recovery mechanism.
Preferably, the single crystal rod storage mechanism comprises a first automatic reset cylinder mechanism fixedly connected to the front end face of the frame, a first piston rod extending upwards is arranged in the first automatic reset cylinder mechanism, a mounting table is fixedly connected to the first piston rod, a storage table is arranged on the mounting table, a trapezoid block is fixedly connected to the upper end face of the storage table, the trapezoid block can be abutted to the driven rod, two bilaterally symmetrical fixing blocks are arranged on the upper end face of the storage table, a second automatic reset cylinder mechanism positioned on the left side of the push block is arranged on the front end face of the frame, an air pipe is connected between the second automatic reset cylinder mechanism and the first automatic reset cylinder mechanism in a communicating mode, a second piston rod extending rightwards is arranged in the second automatic reset cylinder mechanism, and the second piston rod can be abutted to the first push block.
Preferably, the storage table is detachable from the mounting table to facilitate transfer of the single crystal rod.
A method for disassembling a single crystal furnace with a single crystal rod automatically comprises the following steps:
initial state: the lifting nut, the single crystal furnace sealing cover, the single crystal rod and the seed crystal are positioned at the lower limit position, the piston rod I, the mounting table and the trapezoid block are positioned at the lower limit position, the piston rod II is positioned at the right limit position, the clamping cover is positioned at the vertical position, the sliding plate and the limiting pin are positioned at the right limit position under the action of the compression spring I, the limiting pin is positioned in the pin hole, the clamping block is positioned at one side far away from the push plate, the push block II and the piston rod IV are positioned at the rear limit position, the piston rod IV is not contacted with the push block II, the bolt is positioned in the through hole under the action of the tension spring, the rack is positioned at the left side of the gear, the rack and the gear are in a separation state, and the cutting knife and the piston rod III are positioned at the rear limit position;
when the processed single crystal bar needs to be disassembled, the screw nut lifting mechanism is started to drive the lifting nut and the single crystal furnace sealing cover to move upwards to the upper limit position, then the screw nut lifting mechanism stops working, the seed crystal shaft lifting mechanism enables the seed crystal and the single crystal bar to descend to the lower side of the single crystal furnace sealing cover, the single crystal bar is positioned on the upper side of the single crystal furnace base, and then the seed crystal shaft lifting mechanism stops working;
then the linear mechanism is started, the linear mechanism drives the traversing rod to move right, the traversing rod pushes the traversing block, the rotating rod and the clamping cover to move right to the single crystal rod, at the moment, the seed crystal part is positioned in the through groove, then the single crystal rod is contacted with the push plate, the connecting rod III, the sliding plate and the limiting pin move left relative to the clamping cover, the limiting pin is separated from the pin hole, the clamping block moves and clamps and fixes the single crystal rod under the action of the compression spring II, and meanwhile, the push block moves forwards to push the piston rod IV, so that air flow generated in the automatic reset cylinder mechanism IV is conveyed into the automatic reset cylinder mechanism III through a hose, the automatic reset cylinder mechanism III drives the piston rod III and the cutting knife to move forwards, and the cutting knife cuts off the seed crystal;
then the traversing rod moves leftwards, after the traversing rod moves leftwards for a certain distance, the gear is meshed with the rack, so that the gear drives the rotating shaft and the rotating rod to rotate downwards for ninety degrees, the clamping cavity is positioned at the upper side of the storage table, meanwhile, in the rotating process of the clamping cover, the upper end face of the clamping cover contacts with the push rod and pushes the push rod to move upwards, the push rod drives the plug pin to move upwards through the connecting rod, so that the plug pin is separated from the through hole, then the traversing rod continues to move the push block I leftwards to contact with the piston rod II and push the piston rod II to move leftwards, air flow is generated in the automatic reset cylinder mechanism II, the air flow is conveyed into the automatic reset cylinder mechanism I through the air pipe, the automatic reset cylinder mechanism I drives the piston rod I, the mounting table and the storage table to move upwards, the fixing block is contacted with the single crystal rod, and meanwhile, the trapezoid block is contacted with the driven rod, then the trapezoid block moves upwards to push the driven rod to move to the side far away from the push plate, when the clamping block moves to enable the pin hole to correspond to the limiting pin, the sliding plate moves rightwards to reset under the action of the first compression spring, the limiting pin extends into the pin hole, the clamping block is separated from the single crystal rod, the single crystal rod is released to enable the single crystal rod to be placed on the fixed block, then the cooling and waste heat recovery mechanism is started, cooling air flow is conveyed into the clamping cavity through the air conveying hose to enable the single crystal rod to be cooled, the cooling and waste heat recovery mechanism recovers hot air in the clamping cavity through the recovery hose, so that waste heat of the single crystal rod is recovered, and at the moment, the clamping cover is contacted with the storage table to enable the single crystal rod to be sealed in the clamping cavity, and the single crystal rod is prevented from being scalded and damaged in a non-contact manner;
when the single crystal rod is cooled and needs to be transported, the linear mechanism drives the traversing rod to move right, the piston rod II is separated from contact with the pushing block I, so that the piston rod II moves right to reset, the piston rod I, the fixing block and the storage table move downwards, after the traversing rod moves into the blind hole, the through hole corresponds to the bolt, the traversing rod pushes the traversing block to move right for a distance, so that the rack drives the gear to reversely reset through engagement connection, and the clamping cover is reversely reset by ninety degrees.
The beneficial effects of the invention are as follows: according to the invention, the single crystal rod disassembling mechanism drives the single crystal rod clamping mechanism to move to the opened single crystal furnace, the single crystal rod clamping mechanism clamps and fixes the single crystal rod in the single crystal furnace and cuts off seed crystals, then the single crystal rod disassembling mechanism drives the single crystal rod clamping mechanism to move to the single crystal rod storing mechanism and stores the single crystal rod on the single crystal rod storing mechanism, meanwhile, the single crystal rod clamping mechanism and the single crystal rod storing mechanism form a relative sealed space, the single crystal rod is positioned in the space for cooling, the single crystal rod clamping mechanism resets after cooling, an operator can directly transport the single crystal rod storing mechanism and the single crystal rod, so that the single crystal rod is not required to be clamped for the second time during transporting the single crystal rod, the procedures are reduced, and the damage probability of the single crystal rod in the disassembling and transporting process is reduced.
Drawings
For ease of illustration, the invention is described in detail by the following specific examples and figures.
FIG. 1 is a schematic diagram of the whole structure of a single crystal furnace with a single crystal rod automatically detached;
FIG. 2 is an enlarged schematic view of the structure at "A" of FIG. 1;
FIG. 3 is an enlarged schematic view of the structure at "B" of FIG. 1;
FIG. 4 is a schematic view of the structure in the "C-C" direction of FIG. 2;
FIG. 5 is a schematic view of the structure in the "D-D" direction of FIG. 2;
fig. 6 is a schematic structural diagram of the "E-E" direction of fig. 3.
Detailed Description
The present invention will be described in detail with reference to fig. 1 to 6, and for convenience of description, the following orientations will be defined: the vertical, horizontal, front-rear directions described below are identical to the vertical, horizontal, front-rear directions of the projection relationship of fig. 1 itself.
The invention relates to a single crystal furnace capable of automatically disassembling single crystal rods, which comprises a single crystal furnace base 11, wherein a single crystal furnace main body 101 is arranged on the single crystal furnace base 11, the single crystal furnace main body 101 is used for producing single crystal rods, a rack 16 is arranged on the left side of the single crystal furnace base 11, a single crystal rod disassembling mechanism 102 is arranged on the front end surface of the rack 16, the single crystal rod disassembling mechanism 102 is used for providing transverse movement required by disassembling the single crystal rods and rotation movement required by storing the single crystal rods, a single crystal rod clamping mechanism 103 is arranged on the single crystal rod disassembling mechanism 102, a single crystal rod storing mechanism 104 positioned on the lower side of the single crystal rod clamping mechanism 103 is arranged on the rack 16, the single crystal rod storing mechanism 104 is used for storing the single crystal rods, the single crystal rod clamping mechanism 103 is used for clamping the single crystal rods in the single crystal furnace main body 101 and cutting off seed crystals 39, thereby disassembling the single crystal rods, the single crystal rod disassembling mechanism 102 can drive the single crystal rod clamping mechanism 103 to place the disassembled single crystal rod on the single crystal rod storing mechanism 104, the single crystal rod storing mechanism 104 comprises a clamping cover 35 arranged at the front side of the rack 16, a clamping cavity 36 with a right opening is arranged in the clamping cover 35, a through slot 66 which is penetrated up and down and has a right opening is arranged on the inner wall of the upper side of the clamping cavity 36, an automatic reset cylinder mechanism three 54 positioned at the rear side of the through slot 66 is arranged on the upper end surface of the upper side of the clamping cavity 36, a piston rod three 68 extending forwards is arranged in the automatic reset cylinder mechanism three 54, a cutting knife 53 is fixedly connected on the piston rod three 68, the cutting knife 53 is used for cutting off the seed crystal 39, a sliding hole two 62 with a right opening is arranged on the inner wall of the left side of the clamping cavity 36, a sliding plate 61 is connected in the sliding hole two 62, a first compression spring 60 is connected between the sliding plate 61 and the inner wall of the left side of the second sliding hole 62.
The single crystal furnace body 101 comprises a single crystal furnace inner cavity 12 which is arranged in a single crystal furnace base 11 and is provided with an upward opening, a single crystal furnace sealing cover 14 is arranged on the single crystal furnace base 11, a single crystal furnace sealing cavity 15 with a downward opening is arranged in the single crystal furnace sealing cover 14, a seed crystal shaft lifting mechanism 38 is arranged in the single crystal furnace sealing cavity 15, a seed crystal 39 is arranged on the seed crystal shaft lifting mechanism 38, a single crystal bar 13 is arranged on the lower side of the seed crystal 39, a screw nut lifting mechanism 41 is arranged on the right side of the single crystal furnace base 11, and a lifting nut 40 is arranged on the screw nut lifting mechanism 41 and fixedly connected with the right side end face of the single crystal furnace sealing cover 14.
The single crystal rod dismounting mechanism 102 comprises a linear mechanism 28 fixedly connected to the front end face of the frame 16, a transverse rod 29 extending rightward is arranged in the linear mechanism 28, a push rod 47 fixedly connected to the lower end face of the transverse rod 29, a through hole 44 penetrating up and down is formed in the transverse rod 29, a transverse rod 33 located on the right side of the transverse rod 29 is slidingly connected to the front end face of the frame 16, a blind hole 50 with an opening facing left is formed in the transverse rod 33, a sliding hole I46 with an opening facing up is formed in the upper inner wall of the blind hole 50, a plug pin 45 is connected to the inner wall of the upper side of the blind hole 46 in a sliding manner, a first connecting rod 49 is fixedly connected to the plug pin 45, a push rod 47 is fixedly connected to the lower end face of the first connecting rod 49 and is located on the left side of the transverse rod 33, a rotating shaft 65 extending forward is connected to the front end face of the transverse rod 33, a rotating shaft 63 is fixedly connected to the rotating shaft 65, a rotating rod 63 is fixedly connected to the upper end face of the rotating shaft 63, a rack 33 is fixedly connected to the front end face of the frame 34, and the upper end face of the rotating shaft is fixedly connected to the left end face of the rotating rod 64, and the rotating rod is fixedly connected to the front end face of the rack 34, and the front end face of the rotating rod is fixedly connected to the rotating shaft 64, and the rotating rod is fixedly connected to the rotating shaft 64.
Advantageously, the traversing block 33 can only move left and right, and the traversing block 33 can be disengaged from the frame 16.
The heat recovery device is characterized in that a connecting rod III 58 is fixedly connected to the right end surface of the sliding plate 61, a push plate 59 is fixedly connected to the right end surface of the connecting rod III 58, two limiting pins 57 which are symmetrical front and back are fixedly connected to the right end surface of the sliding plate 61, two clamping blocks 37 which are symmetrical front and back are connected to the right inner wall of the clamping cavity 36 in a sliding manner, the clamping blocks 37 are used for clamping and fixing the single crystal rod 13, a pin hole 56 with an opening facing left is formed in the clamping blocks 37, the limiting pins 57 can extend into the pin hole 56, a driven rod 55 is fixedly connected to the right end surface of the clamping blocks 37, a compression spring II 70 is connected between the clamping blocks 37 and the inner wall of the clamping cavity 36, a sliding rod 71 which extends backwards to the outside of the end surface of the clamping cover 35 is fixedly connected to the right end surface of the clamping blocks 37, a pushing block II 74 is fixedly connected to the right end surface of the clamping blocks 36, an automatic reset mechanism 72 is fixedly connected to the rear inner wall of the clamping cover 35, a reset mechanism 72 is arranged in the four-cylinder mechanism is fixedly connected to the rear side of the clamping cover 35, and the reset mechanism 72 is connected to the four-cylinder mechanism 72, and the reset mechanism is communicated with the four-reset mechanism 72 and the four-cylinder mechanism is communicated with the four-side air cylinder piston rod 32, and the piston rod 30 is communicated with the four-recovering mechanism 73.
The single crystal rod storage mechanism 104 comprises an automatic reset cylinder mechanism I18 fixedly connected to the front end face of the frame 16, a piston rod I19 extending upwards is arranged in the automatic reset cylinder mechanism I18, an installation table 20 is fixedly connected to the piston rod I19, a storage table 17 is arranged on the installation table 20, a trapezoid block 21 is fixedly connected to the upper end face of the storage table 17, the trapezoid block 21 can be abutted to the driven rod 55, two bilaterally symmetrical fixing blocks 23 are arranged on the upper end face of the storage table 17, an automatic reset cylinder mechanism II 25 positioned on the left side of the push block I27 is arranged on the front end face of the frame 16, an air pipe 24 is connected between the automatic reset cylinder mechanism II 25 and the automatic reset cylinder mechanism I18 in a communicating mode, a piston rod II 26 extending rightwards is arranged in the automatic reset cylinder mechanism II 25, and the piston rod II 26 can be abutted to the push block I27.
Advantageously, the storage table 17 is removable from the mounting table 20, thereby facilitating the transport of the single crystal rods 13.
The following describes in detail a method for automatically disassembling a single crystal ingot in a single crystal furnace according to the present invention with reference to fig. 1 to 6:
initial state: the lifting nut 40, the single crystal furnace sealing cover 14, the single crystal rod 13 and the seed crystal 39 are positioned at the lower limit position, the piston rod I19, the mounting table 20 and the trapezoid block 21 are positioned at the lower limit position, the piston rod II 26 is positioned at the right limit position, the clamping cover 35 is positioned at the vertical position, the sliding plate 61 and the limiting pin 57 are positioned at the right limit position under the action of the compression spring I60, the limiting pin 57 is positioned in the pin hole 56, the clamping block 37 is positioned at one side far away from the push plate 59, the push block II 74 and the piston rod IV 73 are positioned at the rear limit position, the piston rod IV 73 is not contacted with the push block II 74, the bolt 45 is positioned in the through hole 44 under the action of the stretching spring 48, the rack 52 is positioned at the left side of the gear 64, the rack 52 is in a separated state from the gear 64, and the cutter 53 and the piston rod III 68 are positioned at the rear limit position;
when the machined single crystal rod 13 needs to be disassembled, the screw nut lifting mechanism 41 is started to drive the lifting nut 40 and the single crystal furnace sealing cover 14 to move upwards to the upper limit position, then the screw nut lifting mechanism 41 stops working, the seed crystal shaft lifting mechanism 38 enables the seed crystal 39 and the single crystal rod 13 to descend to the lower side of the single crystal furnace sealing cover 14, the single crystal rod 13 is positioned on the upper side of the single crystal furnace base 11, and then the seed crystal shaft lifting mechanism 38 stops working;
then the linear mechanism 28 is started, the linear mechanism 28 drives the transverse moving rod 29 to move right, the transverse moving rod 29 pushes the transverse moving block 33, the rotating rod 63 and the clamping cover 35 to move right to the single crystal rod 13, at the moment, the seed crystal 39 is partially positioned in the through groove 66, then the single crystal rod 13 contacts with the push plate 59 and enables the push plate 59, the connecting rod III 58, the sliding plate 61 and the limiting pin 57 to move left relative to the clamping cover 35, the limiting pin 57 is separated from the pin hole 56, the clamping block 37 moves and clamps and fixes the single crystal rod 13 under the action of the compression spring II 70, meanwhile, the pushing block II 74 moves forwards to push the piston rod IV 73, so that air flow generated in the automatic reset cylinder mechanism IV 72 is conveyed into the automatic reset cylinder mechanism III 54 through the hose 69, and the automatic reset cylinder mechanism III 54 drives the piston rod III 68 and the cutting knife 53 to move forwards, and the cutting knife 53 cuts off the seed crystal 39;
then the traversing rod 29 moves leftwards, after the traversing rod 29 moves leftwards for a certain distance, the gear 64 is meshed with the rack 52, so that the gear 64 drives the rotating shaft 65 and the rotating rod 63 to rotate ninety degrees downwards, at the moment, the clamping cavity 36 is positioned on the upper side of the storage table 17, meanwhile, in the rotating process of the clamping cover 35, the upper end face of the clamping cover 35 contacts with the push rod 47 and pushes the push rod 47 to move upwards, the push rod 47 drives the plug 45 to move upwards through the first connecting rod 49 so that the plug 45 is separated from the through hole 44, then the traversing rod 29 continues to move leftwards to push the first pushing block 27 to contact with the second piston rod 26 and push the second piston rod 26 to move leftwards, air flow is generated in the second automatic resetting air cylinder mechanism 25, the air flow is conveyed into the first automatic resetting air cylinder mechanism 18 through the air pipe 24, the first automatic resetting air cylinder mechanism 18 drives the first piston rod 19, the mounting table 20 and the storage table 17 to move upwards, so that the fixed block 23 contacts with the single crystal rod 13, simultaneously, the trapezoid block 21 is contacted with the driven rod 55, then the trapezoid block 21 moves upwards to push the driven rod 55 to move to the side far away from the push plate 59, when the clamping block 37 moves to enable the pin hole 56 to correspond to the limiting pin 57, the sliding plate 61 moves rightwards to reset under the action of the first compression spring 60, the limiting pin 57 extends into the pin hole 56, meanwhile, the clamping block 37 is separated from the single crystal rod 13, the single crystal rod 13 is released to enable the single crystal rod 13 to be placed on the fixed block 23, then the cooling and waste heat recovery mechanism 30 is started, the cooling and waste heat recovery mechanism 30 conveys cooling air flow into the clamping cavity 36 through the air conveying hose 31 to cool the single crystal rod 13, the cooling and waste heat recovery mechanism 30 recovers hot air in the clamping cavity 36 through the recovery hose 32, so that waste heat of the single crystal rod 13 is recovered, at the moment, the clamping cover 35 is contacted with the storage table 17 to enable the single crystal rod 13 to be sealed in the clamping cavity 36, no contact of personnel is avoided, damage to the monocrystalline rod 13;
when the single crystal rod 13 is cooled and needs to be transported, the linear mechanism 28 drives the traversing rod 29 to move rightwards, the piston rod II 26 is separated from the pushing block I27, so that the piston rod II 26 moves rightwards to reset, the piston rod I19, the fixed block 23 and the storage table 17 move downwards to reset, after the traversing rod 29 moves into the blind hole 50, the through hole 44 corresponds to the bolt 45, the traversing rod 29 pushes the traversing block 33 to move rightwards for a certain distance, the rack 52 drives the gear 64 to reversely reset through meshed connection, so that the clamping cover 35 is reversely reset by ninety degrees, at the moment, under the action of the tension spring 48, the bolt 45 moves downwards into the through hole 44, then the linear mechanism 28 stops working, and a worker removes the storage table 17 from the mounting table 20, so that the storage table 17 and the single crystal rod 13 on the storage table 17 can be transported.
The beneficial effects of the invention are as follows: according to the invention, the single crystal rod disassembling mechanism drives the single crystal rod clamping mechanism to move to the opened single crystal furnace, the single crystal rod clamping mechanism clamps and fixes the single crystal rod in the single crystal furnace and cuts off seed crystals, then the single crystal rod disassembling mechanism drives the single crystal rod clamping mechanism to move to the single crystal rod storing mechanism and stores the single crystal rod on the single crystal rod storing mechanism, meanwhile, the single crystal rod clamping mechanism and the single crystal rod storing mechanism form a relative sealed space, the single crystal rod is positioned in the space for cooling, the single crystal rod clamping mechanism resets after cooling, an operator can directly transport the single crystal rod storing mechanism and the single crystal rod, so that the single crystal rod is not required to be clamped for the second time during transporting the single crystal rod, the procedures are reduced, and the damage probability of the single crystal rod in the disassembling and transporting process is reduced.
In the above manner, a person skilled in the art can make various changes depending on the operation mode within the scope of the present invention.
Claims (3)
1. The utility model provides a single crystal growing furnace of automatic dismantlement of single crystal stick, includes single crystal growing furnace base, its characterized in that: the single crystal furnace base is provided with a single crystal furnace main body, the single crystal furnace main body is used for producing single crystal bars, the left side of the single crystal furnace base is provided with a frame, the front end face of the frame is provided with a single crystal bar disassembling mechanism, the single crystal bar disassembling mechanism is used for providing transverse movement required by disassembling the single crystal bars and rotation movement required by storing the single crystal bars, the single crystal bar disassembling mechanism is provided with a single crystal bar clamping mechanism, the frame is provided with a single crystal bar storing mechanism positioned at the lower side of the single crystal bar clamping mechanism, the single crystal bar storing mechanism is used for storing the single crystal bars, the single crystal bar clamping mechanism is used for clamping the single crystal bars in the single crystal furnace main body and cutting off seed crystals, so that the single crystal bars are disassembled, the single crystal bar disassembling mechanism can drive the single crystal bar clamping mechanism to place the disassembled single crystal bars on the single crystal bar storing mechanism, the single crystal rod storage mechanism comprises a clamping cover arranged on the front side of the rack, a clamping cavity with a right opening is arranged in the clamping cover, a through groove which penetrates up and down and has a right opening is arranged on the inner wall of the upper side of the clamping cavity, an automatic reset cylinder mechanism III positioned on the rear side of the through groove is arranged on the end face of the upper side of the clamping cavity, a piston rod III extending forwards is arranged in the automatic reset cylinder mechanism III, a cutting knife is fixedly connected onto the piston rod III and is used for cutting off seed crystals, a slide hole II with a right opening is arranged on the inner wall of the left side of the clamping cavity, a slide plate is connected in the slide hole II in a sliding manner, and a compression spring I is connected between the slide plate and the inner wall of the left side of the slide hole II; the single crystal furnace main body comprises a single crystal furnace inner cavity which is arranged in the single crystal furnace base and is provided with an upward opening, a single crystal furnace sealing cover is arranged on the single crystal furnace base, a single crystal furnace sealing cavity with a downward opening is arranged in the single crystal furnace sealing cover, a seed crystal shaft lifting mechanism is arranged in the single crystal furnace sealing cavity, a seed crystal is arranged on the seed crystal shaft lifting mechanism, a single crystal bar is arranged on the lower side of the seed crystal, a screw nut lifting mechanism is arranged on the right side of the single crystal furnace base, a lifting nut is arranged on the screw nut lifting mechanism, and the lifting nut is fixedly connected with the right side end face of the single crystal furnace sealing cover; the single crystal rod dismounting mechanism comprises a linear mechanism fixedly connected to the front end face of the frame, a right extending transverse rod is arranged in the linear mechanism, a first push block is fixedly connected to the lower end face of the transverse rod, a through hole which penetrates up and down is formed in the transverse rod, a transverse block which is positioned on the right side of the transverse rod is connected to the front end face of the frame in a sliding manner, a blind hole with an opening facing left is formed in the transverse block, a sliding hole I with an opening facing up is formed in the upper inner wall of the blind hole, a bolt is connected in the sliding hole I in a sliding manner, a connecting rod I is fixedly connected to the bolt, a push rod which is positioned on the left side of the transverse block is connected to the upper end face of the transverse rod, a rotating shaft which extends forward is connected to the front end face of the transverse rod in a rotating manner, a rotating rod is fixedly connected to the rotating shaft, the rotating rod is fixedly connected with the left end face of the clamping cover, a gear which is positioned on the front side of the rotating shaft is fixedly connected to the rotating shaft, a sliding hole I is formed in the upper end face of the blind hole, a sliding hole I with an opening facing upwards is formed in the upper end face of the sliding hole, a sliding hole I is connected to the upper end face of the connecting rod is fixedly arranged on the front end face of the frame, a connecting rod I is fixedly connected to the left end face of the left side of the transverse rod, a sliding rod is fixedly connected to the left end face of the left side of the transverse rod, a lifting rod is fixedly connected to the left side of the transverse rod, a lifting rod is fixedly arranged on the left side of the transverse rod, and the lifting rod is fixedly arranged on the front end face of the lifting rod, and the lifting rod is fixedly connected to the lifting rod, and the lifting rod is fixedly to the front side and the lifting rod; the transverse moving block can only move left and right, and can be separated from the frame; the right end face of the sliding plate is fixedly connected with a connecting rod III, the right end face of the connecting rod III is fixedly connected with a push plate, the right end face of the sliding plate is fixedly connected with two limit pins which are symmetrical front and back, the right inner wall of the clamping cavity is slidingly connected with two clamping blocks which are symmetrical front and back relative to the push plate, the clamping blocks are used for clamping and fixing the single crystal rod, pin holes with left openings are arranged in the clamping blocks, the limit pins can extend into the pin holes, the right end face of the clamping block is fixedly connected with a driven rod, a compression spring II is connected between the clamping blocks and the inner wall of the clamping cavity, the clamping block at the rear side is fixedly connected with a sliding rod which extends backwards to the outside of the end face of the clamping cover, the end face at the right side of the sliding rod is fixedly connected with a pushing block II, the inner wall at the rear side of the clamping cover is fixedly connected with an automatic reset cylinder mechanism IV, a piston rod IV which extends backwards is arranged in the automatic reset cylinder mechanism IV and can be abutted to the pushing block II, a hose is communicated and connected between the automatic reset cylinder mechanism IV and the automatic reset cylinder mechanism III, a gas transmission hose is communicated and connected between the clamping cavity and the cooling and waste heat recovery mechanism, and a recovery hose is communicated and connected between the clamping cavity and the cooling and waste heat recovery mechanism; the single crystal rod storage mechanism comprises a first automatic reset cylinder mechanism fixedly connected to the front end face of the frame, a first piston rod extending upwards is arranged in the first automatic reset cylinder mechanism, a mounting table is fixedly connected to the first piston rod, a storage table is arranged on the mounting table, a trapezoid block is fixedly connected to the upper end face of the storage table, the trapezoid block can be abutted to the driven rod, two bilaterally symmetrical fixing blocks are arranged on the upper end face of the storage table, a second automatic reset cylinder mechanism positioned on the left side of the push block is arranged on the front end face of the frame, an air pipe is connected between the second automatic reset cylinder mechanism and the first automatic reset cylinder mechanism in a communicating mode, a second piston rod extending rightwards is arranged in the second automatic reset cylinder mechanism, and the second piston rod can be abutted to the first push block.
2. The single crystal furnace for automatically disassembling a single crystal rod according to claim 1, wherein: the storage table can be detached from the mounting table, so that the single crystal rod can be conveniently transported.
3. The method for disassembling the single crystal furnace for automatically disassembling the single crystal rod according to claim 2, wherein the method comprises the following steps:
initial state: the lifting nut, the single crystal furnace sealing cover, the single crystal rod and the seed crystal are positioned at the lower limit position, the piston rod I, the mounting table and the trapezoid block are positioned at the lower limit position, the piston rod II is positioned at the right limit position, the clamping cover is positioned at the vertical position, the sliding plate and the limiting pin are positioned at the right limit position under the action of the compression spring I, the limiting pin is positioned in the pin hole, the clamping block is positioned at one side far away from the push plate, the push block II and the piston rod IV are positioned at the rear limit position, the piston rod IV is not contacted with the push block II, the bolt is positioned in the through hole under the action of the tension spring, the rack is positioned at the left side of the gear, the rack and the gear are in a separation state, and the cutting knife and the piston rod III are positioned at the rear limit position;
when the processed single crystal bar needs to be disassembled, the screw nut lifting mechanism is started to drive the lifting nut and the single crystal furnace sealing cover to move upwards to the upper limit position, then the screw nut lifting mechanism stops working, the seed crystal shaft lifting mechanism enables the seed crystal and the single crystal bar to descend to the lower side of the single crystal furnace sealing cover, the single crystal bar is positioned on the upper side of the single crystal furnace base, and then the seed crystal shaft lifting mechanism stops working;
then the linear mechanism is started, the linear mechanism drives the traversing rod to move right, the traversing rod pushes the traversing block, the rotating rod and the clamping cover to move right to the single crystal rod, at the moment, the seed crystal part is positioned in the through groove, then the single crystal rod is contacted with the push plate, the connecting rod III, the sliding plate and the limiting pin move left relative to the clamping cover, the limiting pin is separated from the pin hole, the clamping block moves and clamps and fixes the single crystal rod under the action of the compression spring II, and meanwhile, the push block moves forwards to push the piston rod IV, so that air flow generated in the automatic reset cylinder mechanism IV is conveyed into the automatic reset cylinder mechanism III through a hose, the automatic reset cylinder mechanism III drives the piston rod III and the cutting knife to move forwards, and the cutting knife cuts off the seed crystal;
then the traversing rod moves leftwards, after the traversing rod moves leftwards for a certain distance, the gear is meshed with the rack, so that the gear drives the rotating shaft and the rotating rod to rotate downwards for ninety degrees, the clamping cavity is positioned at the upper side of the storage table, meanwhile, in the rotating process of the clamping cover, the upper end face of the clamping cover contacts with the push rod and pushes the push rod to move upwards, the push rod drives the plug pin to move upwards through the connecting rod, so that the plug pin is separated from the through hole, then the traversing rod continues to move the push block I leftwards to contact with the piston rod II and push the piston rod II to move leftwards, air flow is generated in the automatic reset cylinder mechanism II, the air flow is conveyed into the automatic reset cylinder mechanism I through the air pipe, the automatic reset cylinder mechanism I drives the piston rod I, the mounting table and the storage table to move upwards, the fixing block is contacted with the single crystal rod, and meanwhile, the trapezoid block is contacted with the driven rod, then the trapezoid block moves upwards to push the driven rod to move to the side far away from the push plate, when the clamping block moves to enable the pin hole to correspond to the limiting pin, the sliding plate moves rightwards to reset under the action of the first compression spring, the limiting pin extends into the pin hole, the clamping block is separated from the single crystal rod, the single crystal rod is released to enable the single crystal rod to be placed on the fixed block, then the cooling and waste heat recovery mechanism is started, cooling air flow is conveyed into the clamping cavity through the air conveying hose to enable the single crystal rod to be cooled, the cooling and waste heat recovery mechanism recovers hot air in the clamping cavity through the recovery hose, so that waste heat of the single crystal rod is recovered, and at the moment, the clamping cover is contacted with the storage table to enable the single crystal rod to be sealed in the clamping cavity, and the single crystal rod is prevented from being scalded and damaged in a non-contact manner;
when the single crystal rod is cooled and needs to be transported, the linear mechanism drives the traversing rod to move right, the piston rod II is separated from contact with the pushing block I, so that the piston rod II moves right to reset, the piston rod I, the fixing block and the storage table move downwards, after the traversing rod moves into the blind hole, the through hole corresponds to the bolt, the traversing rod pushes the traversing block to move right for a distance, so that the rack drives the gear to reversely reset through engagement connection, and the clamping cover is reversely reset by ninety degrees.
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| CN112981517A (en) | 2021-06-18 |
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Effective date of registration: 20230820 Address after: No. 2, QiTeng Road, Qilin Industrial Park, Anning City, Kunming, Yunnan 650000 Applicant after: KUNMING HUIQUAN HIGH-PURITY SEMICONDUCTOR MATERIALS CO.,LTD. Address before: 214500 room 805, unit 1, building 11, zhonghonghuayuan community, Chaoyang Road, Jingjiang City, Taizhou City, Jiangsu Province Applicant before: Chen Wen |
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