JP2758523B2 - Silicon ingot transport trolley - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cart for taking out or mounting a single crystal silicon ingot, a polycrystal silicon ingot, or the like from a chamber, or transporting the same to another process.

[0002]

2. Description of the Related Art In order to produce a single crystal silicon ingot by a floating zone molten single crystal production method (hereinafter simply referred to as FZ method), for example, a thermal decomposition method of a volatile compound of silicon and chlorine, that is, chlorosilanes, The raw material polycrystalline silicon ingot obtained by the heat reduction method is placed in a protective gas atmosphere, partially melted by high-frequency induction heating, and the melting zone is usually moved from the lower part to the upper part to form a single crystal. A common method is to produce a crystalline silicon ingot.

A single crystal silicon ingot manufactured by the FZ method is taken out of a chamber,
At present, setting to the next process (for example, resistance measurement, grinding, etc.) and carrying and moving to a dedicated cooling place are done by multiple people or one person in a horizontal state, and by hand. is there.

[0004]

However, the above-mentioned silicon ingot and the like are extremely difficult to be stained by hand, and the silicon ingot is fragile, so that it is necessary to be extremely careful when carrying it. Further, when handling the silicon ingot, since the work of other workers is interrupted, it is necessary to look at the setup of other workers, there is a problem that the work efficiency is deteriorated. Large-diameter ones are produced, are heavy and long, and have the problem that there is a limit to manual carrying.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is possible to carry a silicon ingot safely and easily in a stable state, and to move the silicon ingot from a vertical state to a horizontal state. It is an object of the present invention to provide a carriage for transporting a silicon ingot that can be maintained in a vertical state from a horizontal state.

In order to solve the above-mentioned problems, a first aspect of the present invention comprises a bogie main body and a mounting table rotatably connected by a pivot pin on an upper side of the bogie main body. The upper side has a supporting portion for keeping the mounting table horizontal, and the mounting table has a plurality of Vs in the longitudinal direction.
A supporting body having a U-shaped receiving portion and a fixing means for fixing the silicon ingot in combination with the at least one receiving portion; and being mounted on a front end of the supporting body so as to be perpendicular to the longitudinal direction of the supporting body. Vertical holder,
Height adjustable support provided on top of the vertical holder
When the silicon ingot is placed vertically
The lower end of the silicon ingot by the support member.
It is characterized in that it is supported so that the height can be adjusted .

According to a second aspect of the present invention, there is provided a truck body,
Pivot pin pivots on the upper side of the car body
It consists of a mounting table connected to the
Has a support portion for keeping the mounting table horizontal,
The mounting table has a plurality of V-shaped receiving portions in the longitudinal direction and at least
Fix the silicon ingot in combination with one of the receiving parts
A supporting body having fixing means, and a silicon ingot.
The lower end of the silicon ingot is supported when
Having a height-adjustable support member to be held in front of the support body
A vertical holder provided at a right angle to one end,
When moving the cart, support it so that it is parallel to the
A leg is provided on the carriage body . When the carriage is tilted and the mounting table is vertical, if the supporting body that can extend and contract is provided on the carriage body so as to be parallel to the mounting table, the heavy silicon ingot is maintained vertically in a stable state. be able to.

Teflon is provided on the inclined portion of each receiving portion on the V-shape.
Provided with a supporting pad made of (polyquaternary DuPont trademark tetrafluoroethylene) synthetic resin material, such as, in the fixing device similar Teflon (polytetrafluoroethylene DuPont
It is preferable to provide a tightening pad made of a synthetic resin material such as a trademark of Nippon Kabushiki Kaisha because the silicon ingot can be transported without being damaged and without being soiled.

[0009]

When it is desired to maintain the silicon ingot in a vertical state, as shown in FIG. 1, the carriage body (12) is tilted to set the mounting table (14) in a vertical state. Then, the fixing means (4
8) is opened, and the lower end, which is one end of the silicon ingot (G), is connected to the support member (7) of the vertical holder (42).
2) and the height of the support member (72) is adjusted. Therefore, the single crystal silicon ingots (G) having different lengths can be freely set on the mounting table (14) in a stable state.

In order to transport the silicon ingot in the vertical state by the carriage (10), the piston (30) of the support leg (28) is retracted as shown in FIG. 2 and the rear wheel (12) of the carriage body (12) is retracted. 26), so that it touches the ground.
Accordingly, the silicon ingot (G) is inclined and becomes stable with respect to the bogie.
Move 0).

Next, in order to make the silicon ingot horizontal, the front hook (36) is disengaged, and the mounting table (1) is disengaged.
By holding the handle (68) of (4) downward and rotating the mounting table (14) downward, the mounting table (14) rotates about the pivot pin (32), and as shown in FIG. ) Is in a horizontal state, so that the single crystal silicon ingot (G) is in a stable and horizontal state.

By reversing the above, the silicon ingot can be changed from a horizontal state to a vertical state.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to an embodiment shown in the accompanying drawings. 1 to 3 show a trolley (10) according to the present invention. The trolley (10) is supported by a trolley body (12) and an upper part of the trolley body (12) so as to be rotatable. (G). This silicon ingot (G) includes a raw material polycrystalline silicon ingot and a single crystal silicon ingot that has been single-crystallized by the FZ method.

The bogie main body (12) is composed of a frame framed from a metal bar or a metal pipe, and includes an upper side frame (16), a lower side frame (18), a front side frame (20), and a rear side frame ( 22) are assembled so as to form a substantially trapezoidal shape.

A pair of front wheels (24) is provided at the lower front of the bogie main body (12), and a pair of rear wheels (26) such as casters are provided at the lower rear. Numeral (28) is a supporting leg for tilting the bogie body (12) to stably maintain the mounting table (14) in a vertical state.
8) and the rear side frame (22) are fixed so as to be parallel to the mounting table (14). The support leg (28) has a cylindrical shape, and the piston portion (30) is extendable and contractible.

The mounting table (14) is connected rotatably by a pivot pin (32) provided on the upper side frame (16). At the rear end of the upper frame (16), as shown in FIG. 3, a support portion (34) for maintaining the mounting table (14) in a horizontal state is formed. (36) is a front hook provided on the front side frame (20), and (38) is a rear hook provided on the rear side of the upper side frame (16) for fixing the mounting table (14) horizontally. . Both hooks (36, 38) are rotatably mounted together.

The mounting table (14) has a support body (40) assembled from a metal rod or a metal pipe for supporting a silicon ingot (G), and a supporter at one end side (front end) of the support body (40). A vertical holder (42) mounted at right angles to the longitudinal direction of the body (40).

In the longitudinal direction of the support main body (40), receiving portions (44) are provided at a plurality of positions at predetermined intervals (see FIGS. 4 and 5). The receiving portion (44) has a V so as to stably hold the silicon ingot (G).
The V-shaped surface is provided with a support pad (46). The support pad (46) is preferably made of a material which is resilient so as not to damage the silicon ingot (G), a heat-resistant material, or a material which does not contaminate the silicon ingot (G), such as a synthetic resin material. Is preferred,
In particular, Teflon (a trader of DuPont polytetrafluoroethylene)
And the like are preferable.

Any one of the support plates (44) includes:
Fixing means (48) for holding the silicon ingot (G) immovably on the support body (40) are hinges (5).
0) so that it can be opened and closed. This fixing means (48), as shown in detail in FIGS. 4 and 5,
A V-shaped fastening plate (52) is provided so as to face the shape of the V-shaped receiving portion (44), and the fastening plate (52) is moved forward and backward by rotation of the screw rod (54). Has become. Reference numeral (56) denotes a handle for operating the front-rear movement of the fastening plate (52), which is fixedly attached to one end of the screw rod (54). Reference numeral (58) denotes a hook for preventing the fixing means (48) from being opened when closed with respect to the receiving portion (44). A pin (60) engaging with the hook (58) is provided on the fixing means (48) side.

The fastening pad (52) of the fixing means (48) has a support pad (4) provided on the receiving portion (44).
The same tightening pad (62) as in 6) is provided.

Reference numeral (64) denotes a front pin formed on the support body (40), and a front hook (3) of the carriage body (12).
6). (66) is a rear pin similarly formed on the support main body (40), and is adapted to engage with a rear hook (38) of the bogie main body (12). (68) is a handle attached to the support body (40), and when the cart (10) is tilted or moved,
The handle (68) is operated by hand.

On the lower surface of the vertical holder (42), FIG.
Maintaining the mounting table (14) in a vertical state as shown in
An L-shaped support bracket (7) for supporting the front body (24) and the support leg (28) of the bogie body (12) together so as not to move.
0) is attached.

[0023] The upper surface of the vertical holder (42), the support member (72) for supporting the lower end portion of the silicon ingot (G) upon a silicon ingot (G) in a vertical state
The support member (72) is provided with a handle (7).
4) The height can be adjusted.

The configuration according to the present embodiment is as described above. Next, the method of use will be described. For example, a single crystal silicon ingot (G) manufactured by the FZ method is set in a vertical state in a chamber. Therefore, in order to take it out of the chamber in this state, first, as shown in FIG. 1, the carriage body (12) is tilted so that the mounting table (14) is in a vertical state. Then, as shown in FIG. 5, the fixing means (48) is released by removing the hook (58). In this state, the lower end, which is one end of the single crystal silicon ingot (G), is placed on the support member (72) of the vertical holder (42) from the inside of the chamber, and the support member (72).
Adjust height. Therefore, the single crystal silicon ingots (G) having different lengths can be freely and stably placed on the mounting table (1).
4) can be set.

Thereafter, the fixing means (48) is closed as shown in FIG. 4 and the handle (56) is rotated to thereby secure the single crystal silicon ingot (G) with the clamping plate (52).
To secure the single crystal silicon ingot (G) to the mounting table (14) so as not to move.

Thereafter, the single crystal silicon ingot (G)
When carrying the vehicle, the piston (30) of the support leg (28) is retracted as shown in FIG.
2) Lower the rear wheel (26) so that it touches the ground. Accordingly, the single crystal silicon ingot (G) is inclined and becomes stable with respect to the carriage, and the carriage (10) moves in this state.

When performing the next step, for example, cylindrical grinding, it is necessary to set the single crystal silicon ingot (G) in a horizontal state. In this case, the engagement of the front hook (36) is released. , The handle (6) of the mounting table (14)
8), the mounting table (14) is rotated about the pivot pin (32) by rotating the mounting table downward, and the mounting table (14) is in a horizontal state as shown in FIG. Thus, the single crystal silicon ingot (G) is in a stable and horizontal state. At this time, the support body (40) of the mounting table (14) is supported by the support portion (34) formed on the upper frame (16) of the carriage body (12), and the rear hook (38) is pinned ( By engaging with (66), the mounting table (14) is fixed in a horizontal state.

In the above description, the case where the single crystal silicon ingot (G) is changed from the vertical state to the horizontal state has been described.
When the single crystal silicon ingot (G) is manufactured by the method, it is necessary to vertically mount the raw material polycrystalline silicon ingot (G) and mount it in the chamber. In this case, as shown in FIG. When moving the mounting table (14) with the mounting table (14) inclined and setting it in the chamber, as shown in FIG. 1, the bogie body (12) is tilted to bring the raw material polycrystalline silicon ingot (G) into a vertical state. do it.

In this embodiment, the cart for carrying and moving the silicon ingot (G) used in the FZ method has been described. However, the present invention is not limited to this, and the single crystal rod pulling method (CZ method) Of course, it can also be used as a truck for moving and transporting the single crystal silicon ingot (G) manufactured by the above.

[0030]

As described above, according to the present invention, the mounting table for mounting and fixing the silicon ingot is rotatably connected to the bogie main body, and one end of the silicon ingot is attached to the front end of the mounting table. Since the vertical support that supports is mounted at a right angle, the silicon ingot can be converted from a vertical state to a horizontal state and from a horizontal state to a vertical state, and the silicon ingot can be safely and stably In addition, it is possible to easily carry and move.

[Brief description of the drawings]

FIG. 1 is a diagram showing a transportation cart according to the present invention, in which a silicon ingot is kept in a vertical state.

FIG. 2 is a view showing a state where a silicon ingot is placed and a transport cart is moved.

FIG. 3 is a view showing a state where the mounting table is horizontal and a silicon ingot is held in a horizontal state.

FIG. 4 is an enlarged sectional view taken along the line IV-IV in FIG. 1 of a fixing means for fixing the silicon ingot.

FIG. 5 is a view showing a state in which fixing means in FIG. 4 is opened.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Carriage cart 12 Cart body 14 Mounting table 28 Support leg 32 Pivot pin 34 Support part 40 Support body 42 Vertical holding body 44 Receiving part 46 Support pad 48 Fixing means 52 Tightening plate 62 Tightening pad 70 Support fitting 72 Support member

Continuation of the front page (56) References JP-A-3-218933 (JP, A) JP-A-3-25073 (JP, A) JP-A-50-150953 (JP, U) JP-A-1-72462 (JP , U) Real opening 63-87174 (JP, U) (58) Fields investigated (Int. Cl. ⁶ , DB name) B62B 3/10 B62B 3/06 C30B 29/06 C30B 35/00

Claims (5)

(57) [Claims] 1. A bogie main body, and a mounting table rotatably connected by a pivot pin at an upper side of the bogie main body, and a supporting table on which the mounting table is horizontally maintained at an upper side of the bogie main body. A supporting body having a plurality of V-shaped receiving portions in the longitudinal direction and fixing means for fixing the silicon ingot in combination with at least one of the receiving portions; and a supporting body provided at a front end of the supporting body. a vertical holder which is mounted so as to be perpendicular to the longitudinal direction of the support body, which can be height adjusted, which is provided in the upper surface of the vertical holder
Having a support member and a silicon ingot in a vertical state.
The lower end of the silicon ingot by the support member.
A cart for transporting a silicon ingot, characterized in that the cart is supported in a height-adjustable manner . 2. A trolley main body, and a mounting table rotatably connected by a pivot pin at an upper side of the trolley main body, wherein the upper side of the trolley main body holds the mounting table horizontally. A supporting body having a plurality of V-shaped receiving portions in the longitudinal direction and a fixing means for fixing the silicon ingot in combination with at least one of the receiving portions; and when the have a vertical holder which is provided so as to be perpendicular to the front end of the support body has a height adjustable support member for supporting the lower end of the silicon ingot, to move the carriage, leaning
Attach the supporting legs to the bogie main body so as to be parallel to the inclined mounting table.
Silicon ingot transport table characterized by being provided
car. 3. The truck for transporting a silicon ingot according to claim 1, wherein a supporting leg is provided on the truck body so as to be parallel to the inclined mounting table when the truck is moved. 4. A supporting pad made of a synthetic resin material is provided on an inclined portion of each of said V-shaped receiving portions, and a tightening pad made of a synthetic resin material is provided on said fixing means. 4. The cart for transporting a silicon ingot according to any one of items 3 to 3 . Wherein said support pad and the silicon ingot dolly according to claim 4, clamping pad is characterized polytetrafluoroethylene Tona Rukoto.