JPH03218933A - Device for discharging and conveying silicon single crystal - Google Patents

Abstract

PURPOSE:To prevent vibration of a silicon single crystal by pulling up the crystal from a crucible, then fixing a drop preventive metallic piece to a chamber and clamping the lower part of the crystal with a couple of drop preventive plates. CONSTITUTION:The seed part 6 of a silicon single crystal 5 is held by the seed chuck of a lift, the crystal 5 is pulled up from the crucible in a chamber 8, then a drop preventive metallic piece 10 is fixed to the lower end of the chamber 8, and a couple of the drop preventive plates 21 and 21' capable of being freely opened and closed are closed to clamp the lower part of the crystal 5. The chamber 8 is then rotated and moved above an intermediate stage, a silicon single crystal holder 25 placed on a lifter 32 is raised, and the plates 21 and 21' are opened to receive the crystal 5. The seed chuck is then removed, the lifter 32 is lowered to lower the crystal 5 below the chamber 8, the chamber 8 is rotated and moved above the crucible, then the hanger 33 of the holder 25 is attached by the hook of a hanging wire to lift the chamber, a rotating fulcrum pin 31 provided on the side face of the base 27 of the holder 25 is engaged with the plate 41 having a V groove 40 of a reversing rack 38 to turn down the chamber, and the crystal 5 is placed on the lift 43 of a truck 42.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for easily taking out and transporting a silicon single crystal pulled by a silicon single crystal pulling machine from the pulling machine.

[Conventional technology]

As shown in FIG. 8, a seed chuck 4 is attached to the tip of the wire 3 fed out from the pulling drum 2 of the pulling machine 1.
The silicon single crystal 5 is pulled from the crucible 7 into the chamber 8 by grasping the seed part 6 of the silicon single crystal 5.
After rotating the entire lifting mechanism 9 around the vertical support shaft IO and moving it above the intermediate stage 1l as shown by the dashed line,
It was lowered onto intermediate stage 11 by hand.

[Problem to be solved by the invention]

The silicon single crystal 5 pulled up by the pulling mechanism 9 as described above has been increasing in size year by year, and currently has a diameter of φ8″.
The weight of the silicon single crystal 5 is as much as 60 kg to 100 cmg. In addition, the diameter of the seed part 6 constituting the upper part of the silicon single crystal 5 is reduced to a diameter called a neck in order to pull a complete single crystal, and the diameter of the seed part 6 is φ2 to φ5.
It is getting thinner.

For this reason, when the entire pulling mechanism 9 is rotated from above the crucible 7 to above the intermediate stage 11 after pulling the silicon single crystal 5, the silicon single crystal 5 shakes and breaks at the seed part 6, resulting in the silicon single crystal 5 weighing 60 kg to 100 kg. There was a risk that Crystal 5 would fall. If it falls, it poses a danger to workers,
Risk of damage to pulling machine and expensive silicon single crystal 5
There is a risk of damaging the

In addition, when the silicon single crystal 5 is lowered to the intermediate stage II and the seed part 6 is broken to separate the silicon single crystal 5, it is necessary to support the silicon single crystal 5 by hand to prevent it from falling or falling. It is troublesome to handle heavy, slippery objects by hand, and can easily cause stiffness.

Furthermore, the silicon single crystal 5 lowered to the intermediate stage 11 must be carried down to the first floor floor surface 12 by a worker, but due to the increase in the size of the pulling machine 1, it is necessary to move the silicon single crystal 5 from the floor stage 12 to the intermediate stage l1. Since the height is as high as 2.5 m, the work of lowering the silicon single crystal 5 onto the bed 12 is extremely dangerous and requires a great deal of effort. There is a risk that the silicon single crystal 5 may be damaged and the worker may be injured.

Further, the operation of lowering the silicon single crystal 5 onto the intermediate stage 11 cannot be performed until the silicon single crystal, which has a large heat capacity (heavily weight) (temperature during pulling, 1400°C) has been sufficiently cooled. The suspension time of the upper machine 1 becomes long, and the operating rate is extremely low.

Therefore, the present invention can prevent the silicon single crystal from shaking when the pulling mechanism that pulled the silicon single crystal is rotated from above the crucible to above the intermediate stage, and also allows the operator to take out and transport the silicon single crystal. It is an object of the present invention to provide a device for extracting and transporting silicon single crystals that can carry out extraction and transportation without directly touching the silicon single crystals.

[Means to solve the problem]

In order to solve the above problems, the silicon single crystal extraction and transportation device of the present invention holds the lower part of the silicon single crystal pulled into the chamber of a pulling machine, supports the weight of the silicon single crystal, and opens and closes from side to side. Equipped with a pair of flexible fall-prevention plates, a fall-prevention fitting that can be detachably attached to the chamber of the pulling machine, and a pair of support stands that support the pulled silicon single crystal are provided on the base opposite each other. A holder for storing a silicon single crystal, which has a guide pin for preventing the silicon single crystal from tipping over and has a hanging bracket mounting structure at the upper end, and a pair of rotational fulcrum pins on opposite sides of the base, and a lower part of the intermediate stage. A lifting wire is attached to a lifter which can be moved up and down on which the silicon single crystal storage holder is placed, and a pair of connecting plates which are pin-coupled to the hanging fitting mounting structure at the upper end of the guide pins at the four corners of the holder which houses the silicon single crystal. Installation: A hanging fitting consisting of a clamp for holding a silicon single crystal in the middle of a hanging wire and a hook ring attached to the upper end, and a hanging fitting for rotating the holder, which is installed on the first floor floor and suspended by a crane. It consists of an inversion pedestal having a pair of V-grooved plates at its upper end that supports a fulcrum pin, and a cart with a lift that receives and transports the silicon single crystal from a holder that is in a horizontal state on the inversion pedestal. be.

[For production]

The silicon single crystal extraction and transportation device of the present invention configured as described above grips the seed part with the seed chuck of the pulling machine and pulls up the silicon single crystal from the crucible into the chamber, and then installs a fall prevention fitting in the chamber. , and close the pair of fall prevention plates that can be opened and closed to sandwich the bottom of the silicon single crystal and support the weight of the small silicon crystal. The chamber is then rotated and moved above the intermediate stage. Then, the silicon single crystal storage holder placed on the lifter is raised from below the silicon single crystal, the pair of fall prevention plates are opened, and the holder is further raised to receive the silicon single crystal. Next, the seed chuck of the pulling machine is removed from the seed portion of the silicon single crystal, and the lifter is lowered to lower the silicon single crystal housed in the holder to the lower part of the chamber. After rotating the chamber above the crucible, the pair of connecting plates of the hanging metal fittings are pin-coupled to the hanging metal fitting mounting structure at the upper end of the guide pins at the four corners of the holder.
The upper outer periphery of the silicon single crystal is held by a clamp in the middle of the suspension wire, and the hook ring at the upper end of the suspension wire is hooked onto the hook of the suspension wire of the overhead crane. Next, the holder containing the silicon single crystal was lifted by an overhead crane and lowered from the intermediate stage to the first floor.
Fit and place the rotation fulcrum pin on the side surface of the holder's base into the V-groove of the V-groove plate on the reversing stand. Then, the cart with a lift is run to the side of the reversing frame and stopped, and the holder is lowered horizontally using the rotation fulcrum pin using an overhead crane, and the silicon single crystal is placed on the lift of the cart. Remove the clamp in the middle of the hanging wire from
After removing the connection plate from the guide pin of the holder, the trolley is run to transport the silicon single crystal to the required position.

〔Example〕

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the silicon single crystal extraction and transportation apparatus of the present invention will be described with reference to the drawings. In FIGS. 1a and 1b, reference numeral 20 denotes a fall prevention fitting that is removably attached to the chamber 8 of the pulling machine. A pair of fall prevention plates 21; 21' that support the weight of
and the fall prevention plate 21. A frame 23 that supports 21' and has a space 22 through which a holder to be described later can pass.
and mounting fittings 24 provided at both ends of the frame 23. 2
4'.

In FIG. 2, 25 is a holder for storing the silicon single crystal 5, and the holder 25 has a C-shaped through hole 26 in the center.
A pair of planar arc-shaped support stands 28, 28' that support the silicon single crystal 5 are placed on a rectangular base 27 with a through hole 2.
A guide pin 30 for preventing tipping of silicon single crystals having a hanging metal fitting structure 29 at the upper end is provided upright at the four corners of the base 27, and a pair of rotating pins are provided on opposite sides of the base 27. A fulcrum pin 3l is provided. In this example, the hanging fitting mounting structure 29 at the upper end of the four silicon single crystal tipping prevention guide pins 30 is provided with slit grooves 29a perpendicular to the upper end face facing in the same direction, and the slit grooves 29a are Pin holes 29b are drilled orthogonally to each other.

In FIG. 3, a lifter 32 is provided below the intermediate stage 11 and is movable up and down on which the holder 25 for storing the silicon single crystal 5 is placed.

In FIG. 4, 33 is a hanging metal fitting, and the hanging metal fitting 33 is connected to a pair of hanging wires 34. Connecting plates 35 and 35' are pin-coupled to the hanging bracket mounting structures 29 at the upper ends of guide pins 80 at the four corners of the holder 25, respectively, at the lower ends of 34'.
Attach the hanging wire 34. A clamp 36 for holding the silicon single crystal 5 is provided in the middle of 34', and a hook ring 37 is attached to the upper end.

In FIG. 5, reference numeral 38 denotes an inversion pedestal provided on the first floor floor surface 39, and the inversion pedestal 38 has a pair of V-grooved plates 4l at the upper end that support the rotational fulcrum pin 3l of the holder 25. is provided.

42 is the holder 2 which is in a horizontal state on the reversing frame 38;
Lift 4 receives and transports silicon single crystal 5 from 5.
It is a trolley with 3 wheels.

FIG. 8 shows an embodiment of a silicon single crystal take-out and transportation device which is constructed from the fall prevention fitting 20, the storage holder 25, the lifter 32, the hanging fitting 33, the reversing frame 38, and the cart 42 with a lift 43. The seed chuck 4 attached to the tip of the wire 3 let out from the pulling drum 2 of the pulling machine 1 grips the seed part 6 of the silicon single crystal 5 and transfers the silicon from the lupus 7 into the chamber 8. After pulling up the single crystal 5, a fall prevention fitting 20 is attached to the lower end of the chamber 8 as shown in FIG. 6a, and its mounting fitting 24. A pair of fall prevention plates 21. which are attached at 24' and can be opened and closed. 21' is closed to sandwich the lower part of the silicon single crystal 5 and support the weight of the silicon single crystal 5.

Next, the chamber 8 is rotated and moved above the intermediate stage l1 as shown in FIG. Then, as shown in FIG. 6B, the silicon single crystal storage holder 25 placed on the lid 32 is lifted from below the silicon single crystal 5, and the pair of fall prevention plates 21 of the fall prevention fittings 20 are lifted. 21' and further raise the holder 25 to release the silicon single crystal 5.
receive. Next, silicon single crystal 5 shown in FIG.
Remove the seed chuck 4 of the pulling machine 1 from the seed part 6 of the
The lifter 32 is lowered to lower the silicon single crystal 5 housed in the holder 25 to the lower part of the chamber 8. After the chamber 8 is rotated above the crucible 7, a pair of connection plates 35 of the hanging fittings 33 are attached to the hanging fitting mounting structure 29 at the upper end of the guide pins 30 at the four corners of the holder 25, as shown in FIG. 35' are connected with a pin 44, and the upper outer periphery of the silicon single crystal 5 is hung with wires 34, 34'.
It is held by the clamp 36 in the middle of the hanging wire 34.
The hook ring 37 at the upper end of 34' is hooked onto the hook 46 of the hanging wire 45 of the overhead crane.

Next, the holder 25 containing the silicon single crystal 5 is lifted up by an overhead crane as shown in FIG. Rotation fulcrum pin 3 provided on the side of the base 27 of the holder 25 in the V-groove 40 of 4l.
Fit and place 1. Then, the cart 42 with the lift 43 is moved to a side position of the reversing frame 38 and stopped, and the holder 25 is lowered horizontally by the rotation fulcrum pin 31 using an overhead crane, and the silicon single crystal 5 is transferred to the lift 43 of the cart 42. A hanging wire 34 is placed on top of the silicon single crystal 5. 3
Remove the clamp 36 in the middle of 4', and remove the connecting plate 35 from the guide pin 30 of the holder 25. After removing 35', the cart 42 is run to transport the silicon LLI crystal 5 to a required position.

In the above embodiment, the pair of fall prevention plates 21 of the fall prevention fitting 20. 21' is of a type that opens and closes by sliding left and right, but it may be changed to a type that opens and closes by rotating left and right.

It is also possible to integrate the holder 25, lifter 32, and truck 42 so that the silicon single crystal 5 is received by the truck 42 at the intermediate stage l1 position where the chamber 8 of the pulling machine 1 has rotated. be.

In this case, the intermediate stage 11 becomes the transport floor.

Adding a rotation function and lowering the lifter 32 to the first floor surface [Effects of the invention] As can be seen from the above explanation, according to the device for taking out and transporting silicon single crystals of the present invention, the single crystal silicon can be lifted into the chamber of the pulling machine. When the silicon single crystal is rotated from above the crucible to above the intermediate stage, it is held by the fall prevention fittings to prevent the silicon single crystal from shaking, preventing the seed part from breaking and reliably preventing it from falling. be done. In addition, the silicon single crystal can be taken out and transported without the worker touching the silicon single crystal directly using a silicon single crystal storage holder, hanging bracket, reversing stand, cart with a lift, etc., which ensures worker safety. Damage to the single crystal is prevented, work efficiency is improved, the stopping time of the pulling machine is shortened, and the operating rate is increased.

[Brief explanation of drawings]

Figures 1a and b are side and bottom views showing fall prevention fittings in the silicon single crystal removal and transportation device of the present invention, Figure 2 is a perspective view of a holder for storing single crystals, and Figure 3 is a lifter. FIG. 4 is a perspective view showing the hanging fittings.
Figure 5 is a side view showing the reversing platform and cart with lift;
Figures a to C show the process of hoisting and holding a silicon single crystal and transporting it to the first floor using an overhead crane. Figure 7 shows the process of hoisting and holding a silicon single crystal and transporting it to the first floor using an overhead crane. FIG. 8 is a schematic vertical sectional view showing a silicon single crystal pulling machine. 1... Pulling machine 5... Silicon single crystal 8... Char://<- 11... Intermediate stage 20... Fall prevention fittings 21... Fall prevention plate 25... Silicon single crystal Crystal storage holder 27...Base 28. 28'...Support stand 29.
・・Hanging bracket mounting structure 3o・Guide pin 31・
...Rotation fulcrum pin 32...Lifter 33...
・Hanging fittings 34. 34'... Hanging wire 35... Connection plate 36... Clamp 37... Hook ring 38... Reversing frame 39...
・First floor floor surface 40...V groove 41...
Plate 42... Car 43... Lift application person Toshiba Ceramics Corporation Figure 1 (a
) ↑ Figure 1 (b) Figure 4 Figure 7

Claims (1)

[Claims] 1) A puller is provided with a pair of fall prevention plates that sandwich the lower part of the silicon single crystal pulled up into the chamber of the pulling machine, support the weight of the silicon single crystal, and can be opened and closed from side to side. A pair of fall-prevention fittings that can be detachably attached to the chamber of the upper machine and a support stand that supports the pulled silicon single crystal are provided on the base in opposition, and the silicon single crystal falls down with hanging fittings attached to the four corners of the base. A silicon single crystal storage holder comprising a prevention guide pin erected and a pair of rotation fulcrum pins on opposite sides of a base; and a silicon single crystal storage holder provided below an intermediate stage on which the silicon single crystal storage holder is placed. A lifting wire is attached to a lifter that can move up and down, and a pair of connection plates that are pin-coupled to the hanging bracket mounting structure at the upper end of the guide pins at the four corners of the holder that houses the silicon single crystal, and the silicon single crystal is held in the middle of the hanging wire. A hanging bracket comprising a clamp for holding the holder and a hook ring attached to the upper end, and a pair of V-grooved plates that are installed on the first floor floor and support the rotational fulcrum pin of the holder suspended by a crane. A device for taking out and transporting silicon single crystals, comprising: an inversion pedestal having an inversion pedestal; and a cart with a lift for receiving and transporting a silicon single crystal from a holder placed in a horizontal state on the inversion pedestal.