CN101797544A - Automatic spraying device and automatic spraying process for solar energy quartz crucible - Google Patents
Automatic spraying device and automatic spraying process for solar energy quartz crucible Download PDFInfo
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- CN101797544A CN101797544A CN 201010130998 CN201010130998A CN101797544A CN 101797544 A CN101797544 A CN 101797544A CN 201010130998 CN201010130998 CN 201010130998 CN 201010130998 A CN201010130998 A CN 201010130998A CN 101797544 A CN101797544 A CN 101797544A
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Abstract
The invention relates to an automatic spraying device and an automatic spraying process for a solar energy quartz crucible. The device comprises a robot main body, a robot controller, a heating cage and a spraying workbench, wherein an automatic spray gun and an infrared thermometer are arranged on a mechanical arm of the robot main body; the heating cage opposite to the automatic spray gun is arranged on one side of the robot main body; the spraying workbench is arranged on the other side of the robot main body; the spraying workbench is connected with the automatic spray gun through a gas pipe and an infusion tube; the robot main body is connected with the robot controller through a cable; and the infrared thermometer is connected with the robot controller through a secondary meter. The automatic spraying device and the automatic spraying process for the solar energy quartz crucible have the advantages that: spraying route and time of the automatic spraying device are programmed in advance, the spraying operation is carried out according to the program and instructions, the infrared thermometer automatic measures and controls the temperature, the spraying can be performed in a closed space, a great number of exhaust fans are not required to clear residual silicon nitride dust and the residual micro power is cycled instantly; and a robot can spray two or more crucibles simultaneously.
Description
Technical field
The present invention relates to a kind of automatic spraying equipment, relate in particular to a kind of automatic spray apparatus and automatic spraying process thereof that is used for the solar energy polycrystalline silicon crucible for casting ingots.
Background technology
Polycrystalline silicon ingot casting adopts crucible as container, the technology of crucible spraying at present is: in the spraying room, by two workmans crucible is positioned over preheating on the heating cage earlier, when reaching uniform temperature, one of them workman opens air valve and the peristaltic pump on the spraying operating desk, with manual spray gun crucible is sprayed.
When operation spraying, operative employee's changeable in mood, taking a passive attitude of employee work, employee's spray time can't strict be controlled, and dynamics assurance is bad, all can influence the quality of spraying; Manually spraying temperature is measured, can not be avoided carelessness or lazy phenomenon to occur, thereby cause temperature not tight control, very big to the spraying operating influence; The hand spray operation must be carried out in an airtight space, a large amount of exhaust equipments must be installed in the spraying room get rid of silicon nitride powder, thereby cut down the injury of dust to people lung, but have certain waste for silicon nitride powder; The hand spray operation is subjected to the influence of each side factor, and spray time can't strict be controlled, and the time of finishing whole spraying operation is long; The hand spray operation generally needs two people to assist simultaneously to finish, and efficient is poor, mobility is poor, the cost of labor height; The spraying operating personnel must operate in the spraying room, and floating silicon nitride dust has certain injury to people's lung and eyes.
As seen, manually carry out the crucible spraying, its production efficiency is lower, and labour intensity is big, and coating quality is undesirable, also can cause certain injury to human body.
Therefore,, design a kind of production efficiency height, the secure spraying equipment of coating quality, become the technical problem that active demand solves in order to solve influence that hand spray brings.
Summary of the invention
The objective of the invention is to overcome the deficiency that prior art exists, a kind of automatic spray apparatus and automatic spraying process thereof that is used for the solar energy polycrystalline silicon crucible for casting ingots is provided, be intended to improve coating quality, enhance productivity, the operation of realization automatic spraying, reduce the labour intensity of technology greatly, reduce injury human body.
Purpose of the present invention is achieved through the following technical solutions:
The automatic spray apparatus of solar energy quartz crucible, characteristics are: comprise robot body, robot controller, heating cage and spraying operating desk, automatic spray gun and infrared thermometer are installed on the mechanical arm of described robot body, one side of described robot body is arranged the heating cage, described heating cage is relative with automatic spray gun, the opposite side of described robot body is arranged the spraying operating desk, described spraying operating desk links to each other with automatic spray gun with woven hose by tracheae, in addition, described robot body links to each other with robot controller by cable, and infrared thermometer links to each other with robot controller by secondary meter.
Further, the automatic spray apparatus of above-mentioned solar energy quartz crucible, described robot controller comprises IRC5 robot switch board and teaching machine, and teaching machine links to each other with IRC5 robot switch board by cable.
Further, the automatic spray apparatus of above-mentioned solar energy quartz crucible, described heating cage comprises heating cage base, the height regulating shaft, rotating shaft, the angular adjustment screw mandrel, the crucible turntable, heating plate, protective cover and temperature control and regulation equipment, height regulating shaft and rotating shaft are quill shaft, screw rod in the height regulating shaft inserts in the square hole at heating cage base center, and be weldingly connected, rotating shaft is connected on the height regulating shaft by connecting axle, in the end of rotating shaft thrust bearing is housed, the crucible turntable is installed on the thrust bearing, one end of angular adjustment screw mandrel links to each other with rotating shaft by the flexible anchor clamps of screw mandrel, the other end of angular adjustment screw mandrel links to each other with the crucible turntable, one end of axle is supported on the crucible turntable by bearing block, the other end of axle links to each other with protective cover, be fixed with heating plate on the protective cover, in addition, temperature control and regulation equipment is fixed on the heating cage base.
Again further, the automatic spray apparatus of above-mentioned solar energy quartz crucible, described spraying operating desk comprises the air filtration valve, peristaltic pump, air motor, agitator and spraying go-cart, described agitator and peristaltic pump are fixed in the spraying go-cart, described air motor is installed in the spraying go-cart by support, be connected with shaft on the output shaft of air motor, shaft stretches in the agitator, one termination of described air filtration valve is gone into source of the gas, the other end of air filtration valve links to each other with gas access on the automatic spray gun by tracheae, and the woven hose of drawing in the described agitator links to each other with the liquid inlet of automatic spray gun by peristaltic pump.
Again further, the automatic spray apparatus of above-mentioned solar energy quartz crucible, it is characterized in that: on the pipeline between described air filtration valve and the automatic spray gun anticorrosion magnetic valve is installed, anticorrosion magnetic valve also is installed on the pipeline between described peristaltic pump and the automatic spray gun.
The automatic spraying process of solar energy quartz crucible of the present invention may further comprise the steps:
1. crucible is fixed on the heating cage, five faces of crucible and heating plate are fitted;
2. start the adjustment control appliance of heating cage, crucible is heated to 45～65 ℃;
3. the infrared thermometer on the robot body mechanical arm detects the temperature of crucible, when reaching spraying temperature, infrared thermometer sends information and gives secondary meter, secondary meter sends signal to robot controller after receiving the information of infrared thermometer, robot controller sends signal instruction to robot body, the spraying operating desk is carried compressed air and silicon nitride fluid to automatic spray gun, automatic spray gun on the robot body begins automatic spraying, and the distance of automatic spray gun and coating surface remains on 15～25cm;
4. each crucible need carry out 10 sprayings, each spray time 4～6 minutes, total spray time 40～60 minutes.
Substantive distinguishing features and obvious improvement that technical solution of the present invention is outstanding are mainly reflected in:
1) improved coating quality greatly, spraying path and the time is programmed by the engineer in advance, sprays operation according to program and instruction, is not subjected to taking a passive attitude of manual working and influences spraying effect;
2) in the robot infrared thermometer is housed, when reaching certain alarm temperature, robot receives signal, sprays associative operation once more, and spraying temperature is easy to control, and efficient is stronger;
3) Control During Paint Spraying by Robot can be worked in an airtight space, does not need the silicon nitride dust of draining remaining with a large amount of exhaust blowers, for remaining micro mist, also can in time utilize, and avoids waste, and the utilization rate of silicon nitride raw material is remarkable; Robot finishes whole spraying and operates the used time and can strict control, and finishes the time immobilization of whole operation;
4) use Control During Paint Spraying by Robot, operating personnel only need outside the spraying room robot is instructed control, thereby have avoided the injury to the people of floating silicon nitride dust; Robot only needs to operate according to the good instruction of programming, and efficient height, mobility strong are saved labour cost, have guaranteed the stability and the high-quality of crucible;
5) can realize that not only single station sprays automatically, can realize that also double or multistation spray operation automatically, and realize that based on this streamline sprays operation automatically, significantly improves production efficiency.
Description of drawings
Below in conjunction with accompanying drawing technical solution of the present invention is described further:
Fig. 1: the structural representation of apparatus of the present invention;
Fig. 2: the structural representation of robot body of the present invention;
Fig. 3: the structural representation of robot controller of the present invention;
Fig. 4: the present invention heats the structural representation of cage;
Fig. 5: the present invention sprays the structural representation of operating desk.
The implication of each Reference numeral sees the following form among the figure:
| Reference numeral | Implication | Reference numeral | Implication | Reference numeral | Implication |
| ??1 | Robot body | ??2 | Robot controller | ??3 | The heating cage |
| ??4 | The spraying operating desk | ??5 | Automatic spray gun | ??6 | Infrared thermometer |
| ??7 | Infrared secondary meter | ??8 | Robot base | ??9 | Rotating shaft |
| ??10 | Servomotor | ??11 | The stainless steel connecting plate | ??12 | Flange |
| ??13 | Anchor clamps | ??14 | The pipeline support fixture | ??15 | IRC5 robot switch board |
| ??16 | Teaching machine | ??17 | Cable | ??18 | Heating cage base |
| ??19 | The height regulating shaft | ??20 | Rotating shaft | ??21 | The angular adjustment screw mandrel |
| Reference numeral | Implication | Reference numeral | Implication | Reference numeral | Implication |
| ??22 | The crucible turntable | ??23 | Heating plate | ??24 | Protective cover |
| ??25 | The adjustment control appliance | ??26 | The screw mandrel anchor clamps that stretch | ??27 | Axle |
| ??28 | Bearing block | ??29 | Thrust bearing | ??30 | The air filtration valve |
| ??31 | Peristaltic pump | ??32 | Air motor | ??33 | Agitator |
| Reference numeral | Implication | Reference numeral | Implication | Reference numeral | Implication |
| ??34 | The spraying go-cart | ??35 | Shaft | ??36 | Support |
| ??37 | Anticorrosion magnetic valve |
The specific embodiment
As shown in Figure 1, the automatic spray apparatus of solar energy quartz crucible, comprise robot body 1, robot controller 2, heating cage 3 and spraying operating desk 4, robot body 1 is the console mode installation form, automatic spray gun 5 and infrared thermometer 6 are installed on the mechanical arm of robot body 1, one side of robot body 1 is arranged heating cage 3, heating cage 3 is relative with automatic spray gun 5, the opposite side of robot body 1 is arranged spraying operating desk 4, spraying operating desk 4 links to each other with automatic spray gun 5 with woven hose by tracheae, in addition, robot body 1 links to each other with robot controller 2 by cable, and infrared thermometer 6 links to each other with the I/O point of robot controller 2 inside by secondary meter 7.
Robot body 1 as shown in Figure 2, comprise robot base 8, rotating shaft 9, servomotor 10 and automatic spray gun 5, automatic spray gun 5 links to each other with flange 12 on the robot body mechanical arm by stainless steel connecting plate 11, infrared thermometer 6 is installed on the robot body mechanical arm by anchor clamps 13, when reaching uniform temperature, secondary meter sends alarm signal to robot, and robot feeds back and spreads out of operational order.In addition, pipeline support fixture 14 is installed on robot body also, is used for fixing tracheae and woven hose.The robot base central shaft can rotate by two-way 180 degree, can realize the double operation; Robot rotating shaft moving radius reaches 1.45 meters.
Robot controller 2 as shown in Figure 3, comprise IRC5 robot switch board 15 and teaching machine 16, teaching machine 16 links to each other with IRC5 robot switch board 15 by cable 17, hardware facilities such as multiprocessing system, pci bus, Pentium CPU are installed in the IRC5 robot switch board 15, and software facility such as robot manipulation system, RAPID Programming with Pascal Language, DOS file saving format.
Heating cage 3 as shown in Figure 4, comprise heating cage base 18, height regulating shaft 19, rotating shaft 20, angular adjustment screw mandrel 21, crucible turntable 22, heating plate 23, protective cover 24 and temperature control and regulation equipment 25, heating cage base 18 is by square tube, channel-section steel and a square iron plate are welded, on square iron plate, have a square hole, so that be connected with the screw rod in the height regulating shaft 19, height regulating shaft 19 and rotating shaft 20 are quill shaft, screw rod in the height regulating shaft 19 inserts in the square hole at heating cage base 18 centers, and be weldingly connected, rotating shaft 20 is connected on the height regulating shaft 19 by connecting axle, thrust bearing 29 is housed in the end of rotating shaft 20, crucible turntable 22 is installed on the thrust bearing 29, can be made heating cage 3 realize spinfunction; One end of angular adjustment screw mandrel 21 links to each other with rotating shaft 20 by the flexible anchor clamps 26 of screw mandrel, the other end of angular adjustment screw mandrel 21 links to each other with crucible turntable 22, one end of axle 27 is supported on the crucible turntable 22 by bearing block 28, the other end and the protective cover 24 of axle 27 are weldingly connected, and play supporting protection cover 24.Be fixed with heating plate 23 on the protective cover 24, on the heating plate 23 with the fixing one deck rubber blanket of glue, in case crucible and heating plate 23 frictions.In addition, temperature control and regulation equipment 25 is fixed on the heating cage base 18.
Spraying operating desk 4 as shown in Figure 5, comprise air filtration valve 30, peristaltic pump 31, air motor 32, agitator 33 and spraying go-cart 34, agitator 33 and peristaltic pump 31 are fixed in the spraying go-cart 34, and peristaltic pump 31 adopts stepper motor as power, and switch and potentiometer are housed on the front panel; Air motor 32 is installed in the spraying go-cart 34 by support 36, be connected with shaft 35 on the output shaft of air motor 32, shaft 35 stretches in the agitator 33, one termination of air filtration valve 30 is gone into source of the gas, the other end of air filtration valve 30 links to each other with gas access on the automatic spray gun 5 by tracheae, and the woven hose of drawing in the agitator 33 links to each other with the liquid inlet of automatic spray gun 5 by peristaltic pump 31.On the pipeline between air filtration valve 30 and the automatic spray gun 5 anticorrosion magnetic valve is installed, on the pipeline between described peristaltic pump 31 and the automatic spray gun 5 anticorrosion magnetic valve is installed also.
The automatic spraying process of solar energy quartz crucible the steps include: 1. crucible to be fixed on the heating cage, and five faces of crucible and heating plate are fitted; 2. start the adjustment control appliance of heating cage, crucible is heated to 45～65 ℃; 3. the infrared thermometer on the robot body mechanical arm detects the temperature of crucible, when reaching spraying temperature, infrared thermometer sends information and gives secondary meter, secondary meter sends signal to robot controller after receiving the information of infrared thermometer, robot controller sends signal instruction to robot body, the spraying operating desk is carried compressed air and silicon nitride fluid to automatic spray gun, automatic spray gun on the robot body begins automatic spraying, and the distance of automatic spray gun and coating surface remains on 15～25cm; 4. each crucible need carry out 10 sprayings, each spray time 4～6 minutes, total spray time 40～60 minutes.
The concrete spraying course of work is: at first, after will heating cage base 18 and fix on the ground with bolt, the height, angular adjustment that will heat cage according to demand are to suitable position; Rotating shaft 20 and crucible turntable 22 are locked, in case loosening when the loading and unloading crucible; Should be after the crucible installation with the locking of the hasp around the protective cover 24; Press the start button of temperature control and regulation equipment 25, temperature is set in about 80 degree (also can according to temperature required setting).
Secondly, the spraying go-cart 34 of fixing spraying operating desk inserts air inlet with source of the gas with tracheae, and peristaltic pump 31 is connected the AC220V power supplys, woven hose is clipped in peristaltic pump 31 inside again, and that connects air motor 32 again goes into gas and escape pipe; Regulate the pressure of air filtration valve 30, the gas access of drawing respectively on the automatic spray gun 5 on 3 tracheaes and the robot body 1 from the fast knot interface of air filtration valve 30 links to each other; The woven hose of drawing in the agitator 33 links to each other through the liquid inlet of the automatic spray gun 5 on 1 on peristaltic pump 31 and anticorrosion magnetic valve 37 and the robot body.Anticorrosion magnetic valve 37 on tracheae and the woven hose all links to each other with I/O point in the robot controller 2 in addition.
Crucible is put into the heating cage heat, be one and a half hours heat time heating time, when temperature reaches about 55 ℃, satisfies the temperature of crucible spraying, prepares the silicon nitride slurries simultaneously, gets silicon nitride powder; Graduated cylinder is put in the hot water barrel again and heats, temperature is raised to 30 ℃～35 ℃; The preparation slurries are poured the pure water that heats in the container that sprays in the go-cart into, adjust puddle support, according to one spoonful of spoon of component raw material is poured in the container, and slowly stirred, after all silicon nitride powders all are added into container, suitable increase mixing speed forms an eddy current center until slurries; The flexible pipe of peristaltic pump is put in the slurries that prepared, tail end at automatic spray gun connects top hose and opens pump valve, open spraying on the operating desk 4 air valve and the shift knob of peristaltic pump 31, try spray, aside examination is sprayed on the paper, see whether the slurries that gush out are oval, if not, then need to regulate replacing spray tip (pressure of spray gun is 30psi).Infrared thermometer 6 on the robot body 1 carries signal to give robot controller 2 by infrared secondary meter 7, after robot controller 2 is received signal, immediately robot body 1 and anticorrosion magnetic valve 37 are sent operational order, anticorrosion magnetic valve 37 is opened and robot body 1 just carries out spraying operation according to the good program of pre-edit after receiving signal.Once spraying is finished five faces of crucible and is approximately needed 4 minutes, and after the crucible spraying finished, robot controller 2 sent signal and quits work by robot body 1 and anticorrosion magnetic valve 37.Robot sprays crucible need be repeatedly 10 times, and subsequent step is with step is similar before.
Obviously, adopt above-mentioned robot automatic spray apparatus,,, and can spray two or multistation so the automatic spraying of robot not only can spray single station because the rotating shaft 9 of robot can both sides Rotate 180 degree, but and pipeline system spraying.
In sum, the spraying path and the time of robot of the present invention automatic spray apparatus are programmed by the engineer in advance, spray operation according to program and instruction; Infrared thermometer is housed on the robot body, can the automatic measuring and controlling temperature, when reaching certain alarm temperature, robot will begin to spray associative operation automatically, and efficient is stronger; During Control During Paint Spraying by Robot, can in an airtight space, work, not need the silicon nitride dust of draining remaining,, also can in time utilize, avoid waste for remaining micro mist with a large amount of exhaust blowers; Robot finishes whole spraying and operates the used time and can strict control, and finishes the time immobilization of whole operation; A people controls program instruction, and robot is operated according to instruction, the efficient height, and mobility is strong, saves labour cost.And robot can carry out the spraying of two or more crucibles simultaneously, and less manpower has improved production efficiency, is convenient to pile line operation; The people instructs control to robot outside the spraying room in addition, thereby has avoided the injury to the people of floating silicon nitride dust.This apparatus structure novelty, simple to operate, eliminated the influence that original hand spray brings, improve the quality that sprays, saved utilization ratio of raw materials, reduced working strength of workers, significantly improved production efficiency, produce very considerable economic, be worth wide popularization and application in the field of business.
What need understand is: the above only is a preferred implementation of the present invention; for those skilled in the art; under the prerequisite that does not break away from the principle of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (6)
1. the automatic spray apparatus of solar energy quartz crucible, it is characterized in that: comprise robot body (1), robot controller (2), heating cage (3) and spraying operating desk (4), automatic spray gun (5) and infrared thermometer (6) are installed on the mechanical arm of described robot body (1), one side of described robot body (1) is arranged heating cage (3), described heating cage (3) is relative with automatic spray gun (5), the opposite side of described robot body (1) is arranged spraying operating desk (4), described spraying operating desk (4) links to each other with automatic spray gun (5) with woven hose by tracheae, in addition, described robot body (1) links to each other with robot controller (2) by cable, and infrared thermometer (6) links to each other with robot controller (2) by secondary meter (7).
2. the automatic spray apparatus of solar energy quartz crucible according to claim 1, it is characterized in that: described robot controller (2) comprises IRC5 robot switch board (15) and teaching machine (16), and teaching machine (16) links to each other with IRC5 robot switch board (15) by cable (17).
3. the automatic spray apparatus of solar energy quartz crucible according to claim 1, it is characterized in that: described heating cage (3) comprises heating cage base (18), height regulating shaft (19), rotating shaft (20), angular adjustment screw mandrel (21), crucible turntable (22), heating plate (23), protective cover (24) and temperature control and regulation equipment (25), height regulating shaft (19) and rotating shaft (20) are quill shaft, screw rod in the height regulating shaft (19) inserts in the square hole at heating cage base (18) center, and be weldingly connected, rotating shaft (20) is connected on the height regulating shaft (19) by connecting axle, thrust bearing (29) is housed in the end of rotating shaft (20), thrust bearing (29) is gone up crucible turntable (22) is installed, one end of angular adjustment screw mandrel (21) links to each other with rotating shaft (20) by the flexible anchor clamps (26) of screw mandrel, the other end of angular adjustment screw mandrel (21) links to each other with crucible turntable (22), one end of axle (27) is supported on the crucible turntable (22) by bearing block (28), the other end of axle (27) links to each other with protective cover (24), be fixed with heating plate (23) on the protective cover (24), in addition, temperature control and regulation equipment (25) are fixed on the heating cage base (18).
4. the automatic spray apparatus of solar energy quartz crucible according to claim 1, it is characterized in that: described spraying operating desk (4) comprises air filtration valve (30), peristaltic pump (31), air motor (32), agitator (33) and spraying go-cart (34), described agitator (33) and peristaltic pump (31) are fixed in the spraying go-cart (34), described air motor (32) is installed in the spraying go-cart (34) by support (36), be connected with shaft (35) on the output shaft of air motor (32), shaft (35) stretches in the agitator (33), one termination of described air filtration valve (30) is gone into source of the gas, the other end of air filtration valve (30) links to each other with gas access on the automatic spray gun (5) by tracheae, and the woven hose of drawing in the described agitator (33) links to each other with the liquid inlet of automatic spray gun (5) by peristaltic pump (31).
5. the automatic spray apparatus of solar energy quartz crucible according to claim 4, it is characterized in that: on the pipeline between described air filtration valve (30) and the automatic spray gun (5) anticorrosion magnetic valve is installed, on the pipeline between described peristaltic pump (31) and the automatic spray gun (5) anticorrosion magnetic valve is installed also.
6. the automatic spraying process of solar energy quartz crucible is characterized in that may further comprise the steps:
1. crucible is fixed on the heating cage, five faces of crucible and heating plate are fitted;
2. start the adjustment control appliance of heating cage, crucible is heated to 45～65 ℃;
3. the infrared thermometer on the robot body mechanical arm detects the temperature of crucible, when reaching spraying temperature, infrared thermometer sends information and gives secondary meter, secondary meter sends signal to robot controller after receiving the information of infrared thermometer, robot controller sends signal instruction to robot body, the spraying operating desk is carried compressed air and silicon nitride fluid to automatic spray gun, automatic spray gun on the robot body begins automatic spraying, and the distance of automatic spray gun and coating surface remains on 15～25cm;
4. each crucible need carry out 10 sprayings, each spray time 4～6 minutes, total spray time 40～60 minutes.
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| CN2010101309989A CN101797544B (en) | 2010-03-19 | 2010-03-19 | Automatic spraying device and automatic spraying process for solar energy quartz crucible |
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| CN2010101309989A CN101797544B (en) | 2010-03-19 | 2010-03-19 | Automatic spraying device and automatic spraying process for solar energy quartz crucible |
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| CN101797544B CN101797544B (en) | 2012-05-30 |
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| CN101912837A (en) * | 2010-09-09 | 2010-12-15 | 英利能源（中国）有限公司 | Spraying method of crucible used for ingot casting of photovoltaic cell |
| CN102198441A (en) * | 2011-05-17 | 2011-09-28 | 刘华成 | Rotating table for spraying and baking crucible |
| CN102560640A (en) * | 2012-03-07 | 2012-07-11 | 英利能源（中国）有限公司 | Polycrystal ingot casting furnace and method for producing single crystal-like silicon ingot by utilizing same |
| CN102649110A (en) * | 2011-02-24 | 2012-08-29 | 苏州工业园区优立涂装机械工程有限公司 | Heating plate for spray coating of solar crucible and heating device comprising heating plate |
| CN102649111A (en) * | 2011-02-24 | 2012-08-29 | 苏州工业园区优立涂装机械工程有限公司 | Solar energy crucible spraying and rotating device as well as spraying system |
| CN102717387A (en) * | 2012-06-05 | 2012-10-10 | 中国电子科技集团公司第四十八研究所 | Robot paw for spraying crucible automatically |
| CN102719889A (en) * | 2012-06-27 | 2012-10-10 | 英利能源（中国）有限公司 | Polysilicon ingot casting process |
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